JP6775494B2 - 単体の帯域幅制限装置を使用するレーザー組立体および検査システム - Google Patents
単体の帯域幅制限装置を使用するレーザー組立体および検査システム Download PDFInfo
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
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- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/16—Solid materials
- H01S3/163—Solid materials characterised by a crystal matrix
- H01S3/1671—Solid materials characterised by a crystal matrix vanadate, niobate, tantalate
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- G01J1/00—Photometry, e.g. photographic exposure meter
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Description
Claims (10)
- レーザー組立体であって、
基本波長の帯域幅内の基本波長を有する光パルスを含む基本光を生成するように構成された基本波レーザーと、
狭められた周波数帯域幅の外部に配置された周波数を有するそれぞれの基本光パルスの第1の部分の方向を変え、前記狭められた周波数帯域幅の内部に配置されたそれぞれの基本光パルスからの第2の部分を通すように構成された光学的帯域幅フィルタリングデバイスと、
帯域幅制限装置であって、
それぞれのレーザー光パルスの前記第1の部分を、第1のサブパルスおよび第2のサブパルスを含む1対の対応するサブパルスに分割するように構成されたパルス分割要素、
それぞれの対の対応するサブパルスの前記第1のサブパルスを、正のチャープを有する第1の引き伸ばされたサブパルスに変換し、それぞれの対の対応するサブパルスの前記第2のサブパルスを、負のチャープを有する第2の引き伸ばされたサブパルスに変換するように構成された少なくとも1つの単体デバイスであって、前記第1のサブパルスと前記第2のサブパルスは、前記単体デバイスの対向面へ逆方向に伝送される、単体デバイス、および
それぞれの第1の引き伸ばされたサブパルスをその対応する前記第2の引き伸ばされたサブパルスと混合して、前記混合が、基本周波数の2倍に等しい周波数を有する和周波数パルスを含む和周波数光を生成するように構成された第1の周波数混合モジュール
を含む帯域幅制限装置と、
前記和周波数光および前記和周波数光の高調波のうちの1つを、前記基本光の前記第2の部分および前記第2の部分の高調波のうちの1つと混合して、紫外線(UV)レーザー出力光を生成するように構成された第2の周波数混合モジュールと
を備えることを特徴とするレーザー組立体。 - 請求項1に記載のレーザー組立体であって、前記少なくとも1つの単体デバイスが、チャープされたボリュームブラッグ格子およびチャープされたファイバブラッグ格子のうち少なくとも1つを備えることを特徴とするレーザー組立体。
- 請求項1に記載のレーザー組立体であって、前記パルス分割要素が、前記2つのサブパルスがほぼ等しいエネルギーを有するようにそれぞれのパルスを分割するように構成されていることを特徴とするレーザー組立体。
- 請求項3に記載のレーザー組立体であって、前記第1の引き伸ばされたサブパルスおよび前記第2の引き伸ばされたサブパルスの周波数が、時間とともに、大きさはほぼ等しいが符号が逆に変化するように、前記少なくとも1つの単体デバイスがさらに構成されていることを特徴とするレーザー組立体。
- 請求項3に記載のレーザー組立体であって、
前記少なくとも1つの単体デバイスが、チャープされたボリュームブラッグ格子およびチャープされたファイバブラッグ格子のうちの1つを含む単一の単体デバイスを備え、
前記帯域幅制限装置が、前記パルス分割要素と前記単一の単体デバイスの間、ならびに前記単一の単体デバイスと前記第1の周波数混合モジュールの間に動作可能に配設された複数の光学要素をさらに備え、前記複数の光学要素が、前記第1のサブパルスおよび前記第2のサブパルスを前記単一の単体デバイスの対向面へ導き、前記単一の単体デバイスの前記対向面からの前記第1の引き伸ばされたサブパルスおよび前記第2の引き伸ばされたサブパルスを前記第1の周波数混合モジュールへと導くように構成されていることを特徴とするレーザー組立体。 - 請求項5に記載のレーザー組立体であって、前記基本波レーザーが、前記基本光の前記光パルスが1ピコ秒よりも長くなるように構成されていることを特徴とするレーザー組立体。
- 請求項6に記載のレーザー組立体であって、前記基本波レーザーが、ファイバレーザー、Nd:YAGレーザー、またはNdをドープしたバナジウム酸塩レーザーを含むことを特徴とするレーザー組立体。
- 請求項6に記載のレーザー組立体であって、それぞれの前記和周波数パルスが約213nmの波長を含むように前記レーザー組立体が構成されていることを特徴とするレーザー組立体。
- 請求項6に記載のレーザー組立体であって、
前記第1の引き伸ばされたサブパルスと前記第2の引き伸ばされたサブパルスが前記周波数混合モジュールに入るとき実質的に直交の偏光を有して、同一線上の経路に沿って前記周波数混合モジュールへ導かれるように、前記パルス分割要素および前記複数の光学要素が構成されており、
前記周波数混合モジュールが、前記第1の引き伸ばされたサブパルスおよび前記第2の引き伸ばされたサブパルスに対してタイプIIの周波数混合を行うように構成されていることを特徴とするレーザー組立体。 - 請求項6に記載のレーザー組立体であって、
前記第1の引き伸ばされたサブパルスと前記第2の引き伸ばされたサブパルスが前記周波数混合モジュールに入るとき実質的に平行の偏光を有して、4°未満の角度だけ分離された、対応する平行でない方向において、前記周波数混合モジュールへ導かれるように、前記パルス分割要素および前記複数の光学要素が構成されており、
前記周波数混合モジュールが、前記第1の引き伸ばされたサブパルスおよび前記第2の引き伸ばされたサブパルスに対してタイプIの周波数混合を行うように構成されていることを特徴とするレーザー組立体。
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US201462055605P | 2014-09-25 | 2014-09-25 | |
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US62/136,403 | 2015-03-20 | ||
US14/859,122 US9419407B2 (en) | 2014-09-25 | 2015-09-18 | Laser assembly and inspection system using monolithic bandwidth narrowing apparatus |
US14/859,122 | 2015-09-18 | ||
PCT/US2015/051538 WO2016049074A1 (en) | 2014-09-25 | 2015-09-22 | Laser assembly and inspection system using monolithic bandwidth narrowing apparatus |
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WO2016049074A1 (en) | 2016-03-31 |
CN106688151A (zh) | 2017-05-17 |
US9419407B2 (en) | 2016-08-16 |
US20160094011A1 (en) | 2016-03-31 |
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KR102351675B1 (ko) | 2022-01-13 |
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