JP6740065B2 - 基板洗浄装置、基板処理装置、基板洗浄方法および基板処理方法 - Google Patents

基板洗浄装置、基板処理装置、基板洗浄方法および基板処理方法 Download PDF

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Publication number
JP6740065B2
JP6740065B2 JP2016178817A JP2016178817A JP6740065B2 JP 6740065 B2 JP6740065 B2 JP 6740065B2 JP 2016178817 A JP2016178817 A JP 2016178817A JP 2016178817 A JP2016178817 A JP 2016178817A JP 6740065 B2 JP6740065 B2 JP 6740065B2
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Japan
Prior art keywords
substrate
cleaning
polishing
unit
region
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Active
Application number
JP2016178817A
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English (en)
Japanese (ja)
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JP2018046108A5 (enExample
JP2018046108A (ja
Inventor
弘美 村地
弘美 村地
隆一 吉田
隆一 吉田
耕二 西山
耕二 西山
徹 門間
徹 門間
力 寒河江
力 寒河江
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Screen Holdings Co Ltd
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Screen Holdings Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Screen Holdings Co Ltd filed Critical Screen Holdings Co Ltd
Priority to JP2016178817A priority Critical patent/JP6740065B2/ja
Priority to CN201710790418.0A priority patent/CN107818928B/zh
Priority to US15/697,727 priority patent/US20180071883A1/en
Priority to TW106130752A priority patent/TWI653101B/zh
Priority to KR1020170116556A priority patent/KR102008061B1/ko
Publication of JP2018046108A publication Critical patent/JP2018046108A/ja
Publication of JP2018046108A5 publication Critical patent/JP2018046108A5/ja
Priority to US16/840,520 priority patent/US11203094B2/en
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Publication of JP6740065B2 publication Critical patent/JP6740065B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0411—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
    • H10P72/0412—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0428—Apparatus for mechanical treatment or grinding or cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
    • B08B1/12—Brushes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/20—Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B08B11/02—Devices for holding articles during cleaning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • B08B3/022—Cleaning travelling work
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/04—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by a combination of operations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00—Other grinding machines or devices
    • B24B27/033—Other grinding machines or devices for grinding a surface for cleaning purposes, e.g. for descaling or for grinding off flaws in the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers
    • B24B37/30—Work carriers for single side lapping of plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/06—Dust extraction equipment on grinding or polishing machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00—Cleaning of wafers, substrates or parts of devices
    • H10P70/20—Cleaning during device manufacture
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00—Cleaning of wafers, substrates or parts of devices
    • H10P70/60—Cleaning only by mechanical processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2016178817A 2016-09-13 2016-09-13 基板洗浄装置、基板処理装置、基板洗浄方法および基板処理方法 Active JP6740065B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2016178817A JP6740065B2 (ja) 2016-09-13 2016-09-13 基板洗浄装置、基板処理装置、基板洗浄方法および基板処理方法
CN201710790418.0A CN107818928B (zh) 2016-09-13 2017-09-05 基板清洗装置、基板处理装置、基板清洗方法及基板处理方法
US15/697,727 US20180071883A1 (en) 2016-09-13 2017-09-07 Substrate cleaning device, substrate processing apparatus, substrate cleaning method and substrate processing method
TW106130752A TWI653101B (zh) 2016-09-13 2017-09-08 基板洗淨裝置、基板處理裝置、基板洗淨方法及基板處理方法
KR1020170116556A KR102008061B1 (ko) 2016-09-13 2017-09-12 기판 세정 장치, 기판 처리 장치, 기판 세정 방법 및 기판 처리 방법
US16/840,520 US11203094B2 (en) 2016-09-13 2020-04-06 Substrate cleaning device, substrate processing apparatus, substrate cleaning method and substrate processing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016178817A JP6740065B2 (ja) 2016-09-13 2016-09-13 基板洗浄装置、基板処理装置、基板洗浄方法および基板処理方法

Publications (3)

Publication Number Publication Date
JP2018046108A JP2018046108A (ja) 2018-03-22
JP2018046108A5 JP2018046108A5 (enExample) 2019-11-14
JP6740065B2 true JP6740065B2 (ja) 2020-08-12

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Country Status (5)

Country Link
US (2) US20180071883A1 (enExample)
JP (1) JP6740065B2 (enExample)
KR (1) KR102008061B1 (enExample)
CN (1) CN107818928B (enExample)
TW (1) TWI653101B (enExample)

Cited By (4)

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KR20240039204A (ko) 2021-09-24 2024-03-26 가부시키가이샤 스크린 홀딩스 연마 방법 및 기판 처리 장치
KR20240039205A (ko) 2021-09-24 2024-03-26 가부시키가이샤 스크린 홀딩스 기판 처리 장치
KR20240039203A (ko) 2021-09-24 2024-03-26 가부시키가이샤 스크린 홀딩스 연마 장치, 기판 처리 장치 및 연마 방법
KR20240096850A (ko) 2021-11-17 2024-06-26 가부시키가이샤 스크린 홀딩스 기판 처리 장치

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CN108705421A (zh) * 2018-08-21 2018-10-26 德清明宇电子科技有限公司 一种e型磁芯打磨装置
JP7365827B2 (ja) * 2019-03-13 2023-10-20 東京エレクトロン株式会社 接合システム、および接合方法
JP7442314B2 (ja) * 2019-12-24 2024-03-04 東京エレクトロン株式会社 基板処理装置、および基板処理方法
CN112223084A (zh) * 2020-10-13 2021-01-15 陈明福 一种汽车生产用零部件抛光设备
CN112298923B (zh) * 2020-11-10 2021-10-29 常德东旺建材科技有限责任公司 一种环保砖生产用的砖料输送装置
US12198944B2 (en) 2020-11-11 2025-01-14 Applied Materials, Inc. Substrate handling in a modular polishing system with single substrate cleaning chambers
JP7653785B2 (ja) * 2020-12-28 2025-03-31 株式会社Ｓｃｒｅｅｎホールディングス 基板洗浄装置および基板洗浄方法
CN112958752B (zh) * 2021-01-29 2022-04-08 景德镇航胜航空机械有限公司 一种铝镁合金精密压铸件表面处理工艺
US12134833B2 (en) * 2021-03-17 2024-11-05 Ebara Corporation Plating apparatus and cleaning method of contact member of plating apparatus
JP7650590B2 (ja) * 2021-03-29 2025-03-25 株式会社ディスコ 研磨装置
CN113042425B (zh) * 2021-04-30 2022-04-29 深圳源明杰科技股份有限公司 一种智能卡表面清洗机
JP7714422B2 (ja) * 2021-09-22 2025-07-29 株式会社Ｓｃｒｅｅｎホールディングス 基板洗浄装置および基板洗浄方法
JP7778616B2 (ja) * 2022-03-18 2025-12-02 株式会社Ｓｃｒｅｅｎホールディングス 基板処理方法および基板処理装置
JP7875774B2 (ja) 2022-09-21 2026-06-18 株式会社Ｓｃｒｅｅｎホールディングス 基板洗浄装置および基板洗浄方法
EP4407664A1 (en) 2022-12-23 2024-07-31 SCREEN Holdings Co., Ltd. Substrate processing device and substrate processing method
JP7843692B2 (ja) * 2022-12-23 2026-04-10 株式会社Ｓｃｒｅｅｎホールディングス 基板洗浄装置および基板洗浄方法
JP7836272B2 (ja) 2023-01-27 2026-03-26 株式会社Ｓｃｒｅｅｎホールディングス 研磨具のコンディショニング方法、基板処理方法および基板処理装置
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Publication number Priority date Publication date Assignee Title
KR20240039204A (ko) 2021-09-24 2024-03-26 가부시키가이샤 스크린 홀딩스 연마 방법 및 기판 처리 장치
KR20240039205A (ko) 2021-09-24 2024-03-26 가부시키가이샤 스크린 홀딩스 기판 처리 장치
KR20240039203A (ko) 2021-09-24 2024-03-26 가부시키가이샤 스크린 홀딩스 연마 장치, 기판 처리 장치 및 연마 방법
KR20240096850A (ko) 2021-11-17 2024-06-26 가부시키가이샤 스크린 홀딩스 기판 처리 장치

Also Published As

Publication number Publication date
US20200230778A1 (en) 2020-07-23
KR102008061B1 (ko) 2019-08-06
JP2018046108A (ja) 2018-03-22
US20180071883A1 (en) 2018-03-15
US11203094B2 (en) 2021-12-21
CN107818928B (zh) 2023-12-15
TW201811451A (zh) 2018-04-01
KR20180029923A (ko) 2018-03-21
TWI653101B (zh) 2019-03-11
CN107818928A (zh) 2018-03-20

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