JP6724393B2 - 圧電駆動装置、モーター、ロボット及びポンプ - Google Patents

圧電駆動装置、モーター、ロボット及びポンプ Download PDF

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Publication number
JP6724393B2
JP6724393B2 JP2016015772A JP2016015772A JP6724393B2 JP 6724393 B2 JP6724393 B2 JP 6724393B2 JP 2016015772 A JP2016015772 A JP 2016015772A JP 2016015772 A JP2016015772 A JP 2016015772A JP 6724393 B2 JP6724393 B2 JP 6724393B2
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JP
Japan
Prior art keywords
layer
piezoelectric
electrode layer
drive device
wiring layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2016015772A
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English (en)
Japanese (ja)
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JP2017135940A (ja
JP2017135940A5 (enExample
Inventor
古林　智一
智一 古林
山田　大介
大介 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2016015772A priority Critical patent/JP6724393B2/ja
Priority to CN201710059759.0A priority patent/CN107068850B/zh
Priority to US15/417,415 priority patent/US10580960B2/en
Publication of JP2017135940A publication Critical patent/JP2017135940A/ja
Publication of JP2017135940A5 publication Critical patent/JP2017135940A5/ja
Application granted granted Critical
Publication of JP6724393B2 publication Critical patent/JP6724393B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
    • F04B17/003—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by piezoelectric means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/09—Pumps having electric drive
    • F04B43/095—Piezoelectric drive
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S901/00—Robots
    • Y10S901/19—Drive system for arm

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2016015772A 2016-01-29 2016-01-29 圧電駆動装置、モーター、ロボット及びポンプ Expired - Fee Related JP6724393B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016015772A JP6724393B2 (ja) 2016-01-29 2016-01-29 圧電駆動装置、モーター、ロボット及びポンプ
CN201710059759.0A CN107068850B (zh) 2016-01-29 2017-01-24 压电驱动装置、马达、机器人以及泵
US15/417,415 US10580960B2 (en) 2016-01-29 2017-01-27 Piezoelectric driving device, motor, robot, and pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016015772A JP6724393B2 (ja) 2016-01-29 2016-01-29 圧電駆動装置、モーター、ロボット及びポンプ

Publications (3)

Publication Number Publication Date
JP2017135940A JP2017135940A (ja) 2017-08-03
JP2017135940A5 JP2017135940A5 (enExample) 2019-02-28
JP6724393B2 true JP6724393B2 (ja) 2020-07-15

Family

ID=59387701

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Application Number Title Priority Date Filing Date
JP2016015772A Expired - Fee Related JP6724393B2 (ja) 2016-01-29 2016-01-29 圧電駆動装置、モーター、ロボット及びポンプ

Country Status (3)

Country Link
US (1) US10580960B2 (enExample)
JP (1) JP6724393B2 (enExample)
CN (1) CN107068850B (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116813338B (zh) * 2023-07-06 2024-11-22 柯斯特电子科技(深圳)有限公司 一种压电陶瓷材料及其制备方法与用途

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030048041A1 (en) * 2001-09-07 2003-03-13 Hiroyuki Kita Piezoelectric thin-film element and a manufacturing method thereof
JP2004320979A (ja) 2003-04-03 2004-11-11 Seiko Epson Corp 稼働装置および電気機器
JP2007173691A (ja) * 2005-12-26 2007-07-05 Seiko Epson Corp 圧電素子の製造方法及びアクチュエータ装置並びに液体噴射ヘッド
KR101153690B1 (ko) * 2006-02-20 2012-06-18 삼성전기주식회사 잉크젯 헤드의 압전 액츄에이터 및 그 형성 방법
JP2008227123A (ja) * 2007-03-13 2008-09-25 Seiko Epson Corp 圧電振動体の製造方法および製造装置
JP5278654B2 (ja) 2008-01-24 2013-09-04 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置
EP2617076B1 (en) * 2010-09-15 2014-12-10 Ricoh Company, Limited Electromechanical transducing device and manufacturing method thereof
KR101228958B1 (ko) * 2011-07-06 2013-02-01 유재인 압전소자를 이용한 발전장치
JP5811728B2 (ja) * 2011-09-16 2015-11-11 株式会社リコー 電気−機械変換素子、液滴吐出ヘッド、液滴吐出装置及び画像形成装置
JP2013197522A (ja) * 2012-03-22 2013-09-30 Ricoh Co Ltd 圧電体薄膜素子とその製造方法、該圧電体薄膜素子を用いた液滴吐出ヘッドおよびインクジェット記録装置
JP5984523B2 (ja) * 2012-06-15 2016-09-06 キヤノン株式会社 振動波駆動装置
JP6205701B2 (ja) * 2012-10-22 2017-10-04 セイコーエプソン株式会社 流体注入装置
JP2014198461A (ja) * 2013-03-15 2014-10-23 株式会社リコー アクチュエータ素子、液滴吐出ヘッド、液滴吐出装置及び画像形成装置
JP6252057B2 (ja) * 2013-09-13 2017-12-27 株式会社リコー 圧電体アクチュエータ、液滴吐出ヘッド、液体カートリッジ、インクジェット記録装置、及び圧電体アクチュエータの製造方法
JP6268999B2 (ja) * 2013-12-06 2018-01-31 セイコーエプソン株式会社 圧電モーター、ロボットハンド、ロボット、指アシスト装置、電子部品搬送装置、電子部品検査装置、送液ポンプ、印刷装置、電子時計、投影装置
JP6398454B2 (ja) * 2014-08-13 2018-10-03 セイコーエプソン株式会社 圧電駆動装置、ロボット、及び、それらの駆動方法
WO2016158056A1 (ja) * 2015-03-31 2016-10-06 株式会社村田製作所 共振装置

Also Published As

Publication number Publication date
JP2017135940A (ja) 2017-08-03
CN107068850A (zh) 2017-08-18
CN107068850B (zh) 2021-11-02
US10580960B2 (en) 2020-03-03
US20170222124A1 (en) 2017-08-03

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