JP6719911B2 - 液体吐出ヘッドの製造方法 - Google Patents

液体吐出ヘッドの製造方法 Download PDF

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Publication number
JP6719911B2
JP6719911B2 JP2016007739A JP2016007739A JP6719911B2 JP 6719911 B2 JP6719911 B2 JP 6719911B2 JP 2016007739 A JP2016007739 A JP 2016007739A JP 2016007739 A JP2016007739 A JP 2016007739A JP 6719911 B2 JP6719911 B2 JP 6719911B2
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JP
Japan
Prior art keywords
forming member
liquid
opening
flow path
liquid supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2016007739A
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English (en)
Japanese (ja)
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JP2017128006A5 (enExample
JP2017128006A (ja
Inventor
松本　圭司
圭司 松本
純 山室
純 山室
浅井　和宏
和宏 浅井
弘司 笹木
弘司 笹木
邦仁 魚橋
邦仁 魚橋
誠一郎 柳沼
誠一郎 柳沼
遼太郎 村上
遼太郎 村上
正久 渡部
正久 渡部
智彦 中野
智彦 中野
啓治 枝松
啓治 枝松
春香 中田
春香 中田
謙児 藤井
謙児 藤井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2016007739A priority Critical patent/JP6719911B2/ja
Priority to US15/391,417 priority patent/US10343406B2/en
Priority to CN201710027199.0A priority patent/CN106976316B/zh
Publication of JP2017128006A publication Critical patent/JP2017128006A/ja
Publication of JP2017128006A5 publication Critical patent/JP2017128006A5/ja
Application granted granted Critical
Publication of JP6719911B2 publication Critical patent/JP6719911B2/ja
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/029—Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49083—Heater type
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
JP2016007739A 2016-01-19 2016-01-19 液体吐出ヘッドの製造方法 Active JP6719911B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016007739A JP6719911B2 (ja) 2016-01-19 2016-01-19 液体吐出ヘッドの製造方法
US15/391,417 US10343406B2 (en) 2016-01-19 2016-12-27 Liquid ejection head manufacturing method
CN201710027199.0A CN106976316B (zh) 2016-01-19 2017-01-16 液体喷射头制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016007739A JP6719911B2 (ja) 2016-01-19 2016-01-19 液体吐出ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2017128006A JP2017128006A (ja) 2017-07-27
JP2017128006A5 JP2017128006A5 (enExample) 2019-02-28
JP6719911B2 true JP6719911B2 (ja) 2020-07-08

Family

ID=59315237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016007739A Active JP6719911B2 (ja) 2016-01-19 2016-01-19 液体吐出ヘッドの製造方法

Country Status (3)

Country Link
US (1) US10343406B2 (enExample)
JP (1) JP6719911B2 (enExample)
CN (1) CN106976316B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7076966B2 (ja) 2017-08-09 2022-05-30 キヤノン株式会社 基板および半導体デバイスの製造方法
JP6961453B2 (ja) * 2017-10-13 2021-11-05 キヤノン株式会社 貫通基板の加工方法および液体吐出ヘッドの製造方法
JP7149879B2 (ja) * 2019-03-13 2022-10-07 東芝テック株式会社 液体吐出ヘッド、液体吐出ヘッドの製造方法及び液体吐出装置
US20220048763A1 (en) * 2019-04-29 2022-02-17 Hewlett-Packard Development Company, L.P. Manufacturing a corrosion tolerant micro-electromechanical fluid ejection device
EP3962793A4 (en) 2019-04-29 2023-01-04 Hewlett-Packard Development Company, L.P. CORROSION TOLERANT MICROELECTRO-MECHANICAL FLUID EJECTION DEVICE

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57208251A (en) 1981-06-19 1982-12-21 Canon Inc Ink jet head
US4394670A (en) 1981-01-09 1983-07-19 Canon Kabushiki Kaisha Ink jet head and method for fabrication thereof
DE69320397T2 (de) * 1992-04-13 1999-03-11 Mitsubishi Rayon Co., Ltd., Tokio/Tokyo Photopolymerisierbare Zusammensetzung
JP3570447B2 (ja) * 1994-12-21 2004-09-29 セイコーエプソン株式会社 積層型インクジェット式記録ヘッド、及びその製造方法、及び記録装置
JP2001018400A (ja) * 1999-07-02 2001-01-23 Canon Inc 液体吐出ヘッドの製造方法、前記液体吐出ヘッド及び前記液体吐出ヘッドを用いた液体吐出記録装置
JP2001088309A (ja) 1999-09-24 2001-04-03 Brother Ind Ltd インクジェットヘッドの製造方法
JP4761498B2 (ja) 2004-06-28 2011-08-31 キヤノン株式会社 感光性樹脂組成物、ならびにこれを用いた段差パターンの製造方法及びインクジェットヘッドの製造方法
KR100641358B1 (ko) * 2004-09-23 2006-11-01 삼성전자주식회사 광경화성 수지 조성물을 사용한 잉크젯 프린트 헤드의제조방법
JP2006347072A (ja) 2005-06-17 2006-12-28 Canon Inc 液体吐出ヘッドの製造方法、液体吐出ヘッド、および液体吐出記録装置
JP2009051081A (ja) * 2007-08-27 2009-03-12 Ricoh Co Ltd 液滴吐出ヘッド、一体型液滴吐出ヘッドユニット及び画像形成装置
JP5464901B2 (ja) 2008-06-06 2014-04-09 キヤノン株式会社 インクジェット記録ヘッドおよびその製造方法
JP5312202B2 (ja) * 2008-06-20 2013-10-09 キヤノン株式会社 液体吐出ヘッド及びその製造方法
KR101522552B1 (ko) * 2008-11-03 2015-05-26 삼성전자주식회사 잉크젯 프린트헤드 및 그 제조방법
JP6270363B2 (ja) * 2012-09-11 2018-01-31 キヤノン株式会社 液体吐出ヘッドの製造方法
JP6327836B2 (ja) 2013-11-13 2018-05-23 キヤノン株式会社 液体吐出ヘッドの製造方法
JP2015212057A (ja) * 2014-05-07 2015-11-26 キヤノン株式会社 インクジェット記録ヘッド

Also Published As

Publication number Publication date
US10343406B2 (en) 2019-07-09
US20170203569A1 (en) 2017-07-20
CN106976316B (zh) 2019-11-22
JP2017128006A (ja) 2017-07-27
CN106976316A (zh) 2017-07-25

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