JP5930853B2 - インクジェット記録ヘッドの製造方法、インクジェット記録ヘッドおよびインクジェット記録装置 - Google Patents
インクジェット記録ヘッドの製造方法、インクジェット記録ヘッドおよびインクジェット記録装置 Download PDFInfo
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- JP5930853B2 JP5930853B2 JP2012127921A JP2012127921A JP5930853B2 JP 5930853 B2 JP5930853 B2 JP 5930853B2 JP 2012127921 A JP2012127921 A JP 2012127921A JP 2012127921 A JP2012127921 A JP 2012127921A JP 5930853 B2 JP5930853 B2 JP 5930853B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 239000000463 material Substances 0.000 claims description 64
- 239000000758 substrate Substances 0.000 claims description 39
- 238000000034 method Methods 0.000 claims description 24
- 238000007599 discharging Methods 0.000 claims 2
- 239000000976 ink Substances 0.000 description 71
- 230000015572 biosynthetic process Effects 0.000 description 19
- 238000010586 diagram Methods 0.000 description 15
- 230000000694 effects Effects 0.000 description 11
- 238000006243 chemical reaction Methods 0.000 description 8
- 239000002585 base Substances 0.000 description 5
- 238000000059 patterning Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 2
- 229920002614 Polyether block amide Polymers 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/1433—Structure of nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
- B41J2/1639—Manufacturing processes molding sacrificial molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
Description
図1は、本実施形態のインクジェッド記録ヘッドを示す概略図である。本実施形態では、図1に示すインクジェット記録ヘッドの製造方法を説明する。
第1の実施形態では、円形状の密着向上層を、スリット形成用のパターンの両端に接する位置に配置するものであった。しかしながら本発明はこのような形状の密着向上層に限定するものではない。
図17から図20は、その他の実施形態のインクジェット記録ヘッドを示す概略図である。それぞれ(a)は、本実施形態の基板を示す平面図であり、(b)は、本実施形態の基板を示す断面図である。
2 電気熱変換素子
3 密着向上層
4 型材
6 インク吐出口
7 インク供給口
20 基板ウエハ
Claims (5)
- インク滴を吐出するためのエネルギーを発生する複数の素子が配列され、該複数の素子の配列方向に沿って延在するインク供給口を有する基板と、インクを吐出する複数のインク吐出口を備えた吐出口プレートと、を備え、前記吐出口プレートが前記基板の上に接合されることで、該基板と前記吐出口プレートとの間に、複数の前記インク吐出口と前記インク供給口とを連通するインク流路が形成され、前記吐出口プレートの、前記インク供給口と対向する位置に、スリットを有した突起部を有するインクジェット記録ヘッドの製造方法であって、
基板上の前記インク供給口が形成される領域に第1の部材を形成する工程と、
前記スリットを形成するための型材を前記基板上の前記第1の部材の間に形成する工程と、
前記型材の上に前記吐出口プレートとなる第2の部材を形成する工程と、
前記インク供給口を形成する工程と、
前記型材を除去することで、前記スリットを有した突起部を形成する工程と、
を備え、
前記型材は、前記複数の素子の配列方向に沿って設けられ、前記第1の部材は、前記型材の端部に対応する位置に設けられることを特徴とするインクジェット記録ヘッドの製造方法。 - 前記型材は、前記第1の部材と接する位置に設けられることを特徴とする請求項1に記載のインクジェット記録ヘッドの製造方法。
- 前記第1の部材は、前記型材の一部に設けられることを特徴とする請求項1に記載のインクジェット記録ヘッドの製造方法。
- 前記複数の素子が配列される配列方向と交差する方向に関して、前記第1の部材は前記型材の両側に設けられていることを特徴とする請求項1から3のいずれか1項に記載のインクジェット記録ヘッドの製造方法。
- 前記第1の部材は前記型材の周囲に設けられていることを特徴とする請求項1から4のいずれか1項に記載のインクジェット記録ヘッドの製造方法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012127921A JP5930853B2 (ja) | 2012-06-05 | 2012-06-05 | インクジェット記録ヘッドの製造方法、インクジェット記録ヘッドおよびインクジェット記録装置 |
US13/904,239 US8959735B2 (en) | 2012-06-05 | 2013-05-29 | Manufacturing method of liquid ejection head, liquid ejection head, and inkjet printing apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012127921A JP5930853B2 (ja) | 2012-06-05 | 2012-06-05 | インクジェット記録ヘッドの製造方法、インクジェット記録ヘッドおよびインクジェット記録装置 |
Publications (3)
Publication Number | Publication Date |
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JP2013252623A JP2013252623A (ja) | 2013-12-19 |
JP2013252623A5 JP2013252623A5 (ja) | 2015-03-19 |
JP5930853B2 true JP5930853B2 (ja) | 2016-06-08 |
Family
ID=49669731
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2012127921A Expired - Fee Related JP5930853B2 (ja) | 2012-06-05 | 2012-06-05 | インクジェット記録ヘッドの製造方法、インクジェット記録ヘッドおよびインクジェット記録装置 |
Country Status (2)
Country | Link |
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US (1) | US8959735B2 (ja) |
JP (1) | JP5930853B2 (ja) |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6540335B2 (en) | 1997-12-05 | 2003-04-01 | Canon Kabushiki Kaisha | Ink jet print head and ink jet printing device mounting this head |
JP4018272B2 (ja) | 1998-11-27 | 2007-12-05 | キヤノン株式会社 | インクジェットプリントヘッド及び該ヘッドを搭載するインクジェットプリンティングデバイス |
JP5171002B2 (ja) * | 2006-09-25 | 2013-03-27 | キヤノン株式会社 | インクジェット記録ヘッドの製造方法 |
JP5213423B2 (ja) | 2007-12-06 | 2013-06-19 | キヤノン株式会社 | 液体吐出ヘッド及びその製造寸法管理方法 |
JP5592104B2 (ja) * | 2009-02-17 | 2014-09-17 | 富士フイルム株式会社 | 圧電体膜並びにそれを備えた圧電素子及び液体吐出装置 |
JP4857354B2 (ja) * | 2009-03-13 | 2012-01-18 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
JP2010228272A (ja) * | 2009-03-26 | 2010-10-14 | Seiko Epson Corp | 液体噴射ヘッドの製造方法、液体噴射ヘッド及び液体噴射装置 |
US8621751B2 (en) * | 2010-09-08 | 2014-01-07 | Microjet Technology Co., Ltd | Inkjet head manufacturing method |
-
2012
- 2012-06-05 JP JP2012127921A patent/JP5930853B2/ja not_active Expired - Fee Related
-
2013
- 2013-05-29 US US13/904,239 patent/US8959735B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2013252623A (ja) | 2013-12-19 |
US20130321529A1 (en) | 2013-12-05 |
US8959735B2 (en) | 2015-02-24 |
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