JP6709313B1 - 半導体装置および半導体装置の製造方法 - Google Patents
半導体装置および半導体装置の製造方法 Download PDFInfo
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- JP6709313B1 JP6709313B1 JP2019103206A JP2019103206A JP6709313B1 JP 6709313 B1 JP6709313 B1 JP 6709313B1 JP 2019103206 A JP2019103206 A JP 2019103206A JP 2019103206 A JP2019103206 A JP 2019103206A JP 6709313 B1 JP6709313 B1 JP 6709313B1
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Abstract
Description
本発明の第2の態様によると、半導体装置の製造方法は、第1リード端子および第2リード端子が第1樹脂により保持されたリード端子封止体を形成することと、前記リード端子封止体の前記第1リード端子に第1の半導体素子の第1電極を接続することと、前記リード端子封止体の前記第2リード端子に第2の半導体素子の第2電極を接続することと、前記第1の半導体素子、前記第2の半導体素子、および前記リード端子封止体の、前記第1の半導体素子と前記第2の半導体素子側の面を第2樹脂により封止することと、さらに、前記第1樹脂により保持された接続導体を形成することを含み、前記接続導体は前記第1の半導体素子の第3電極と前記第2の半導体素子の第4電極とを接続する。
図1〜図10を参照して、本発明の半導体装置の第1の実施形態を説明する。
図1は、本発明の半導体装置の第1の実施形態の回路図の一例を示す図である。
半導体装置100は、インバータ回路130と制御部140を有する。
インバータ回路130は、スイッチング素子である6つのMOS FET(Metal Oxide Semiconductor Field Effect Transistor)110a〜110c、120a〜120cを有する。各MOS FET110a〜110cは上アーム回路として動作し、各MOS FET120a〜120cは下アーム回路として動作する。MOS FET110aと120a、MOS FET110bと120b、MOS FET110cと120cは、それぞれ、直列に接続されており、それぞれ、上下アーム直列回路150を構成する。各上下アーム直列回路150は、モータジェネレータ400の電機子巻線の各相巻線に対応してU相、V相、W相の3相の交流電力を出力する。
なお、以下の説明において、MOS FET110a〜110cを代表してMOS FET110、MOS FET120a〜120cを代表してMOS FET120と呼称することがある。
半導体装置100は、6つのMOS FET110、120(図2(B)、図3参照)と、6つのソースリード端子320(図4参照)と、ドレイン接続用リード端子313(図3、図4参照)と、複数のI/Oリード端子360(図4参照)と、樹脂511(図2(B)、図3参照)と、2つの制御用半導体素子240a、240b(図2(B)、図9参照)と、複数の接続導体350(図2(B)、図7参照)と、3つの引き回し導体330(図2(B)、図7参照)と、ドレイン接続導体312(図2(A)、図3参照)と、3つのドレイン導体340(図2(A)参照)と、封止樹脂521(図2(A)、図2(B)、図3参照)を有する。
6つのMOS FET110、120は、封止樹脂521によって、1つにパッケージ化されており、従って、本実施形態の半導体装置100は、6in1構造を有する。
なお、制御用半導体素子240a、240bは、図1の制御部140に相当し、6つのMOS FET110、120を駆動制御する。MOS FET110および120は、制御用半導体素子240a、240bにより出力される駆動信号を受けて動作し、不図示のバッテリから供給された直流電力を三相交流電力に変換する。
すなわち、複数のMOS FET110、120および制御用半導体素子240a、240bは、電力変換部を構成する。
各ドレイン導体340は、ソースリード端子320に一体に形成された引き回し導体330(図2(B)、図7参照)に電気的に接続される。
先ず、図5〜図6を参照して、リード端子封止体510の製造方法を説明する。
図5は、図2に示された半導体装置の製造方法の一例を示し、図5(A)は上面図、図5(B)は、図5(A)のVB−VB線断面図であり、図6は、図5に続く半導体装置の製造方法を示し、図6(A)は上面図、図6(B)は、図6(A)のVIB−VIB線断面図である。
封止樹脂521により封止する製造方法は、リードフレーム薄肉部300Sを加工して、引き回し導体330、接続導体350およびI/Oリード端子360を形成し、MOS FET110、120および制御用半導体素子240を、引き回し導体330、接続導体350およびI/Oリード端子360に接合する工程を含んでいる。
これにより、MOS FET120a〜120cのドレイン電極Dが、それぞれ、MOS FET110a〜110cのソース電極Sに接続される。
これにより、MOS FET110a〜110cの各ドレイン電極Dが電気的に接続される。
(1)半導体装置100は、ソース電極S(第1電極)を有する少なくとも1つのMOS FET110(第1の半導体素子)と、電極242(第2電極)を有する制御用半導体素子240(第2の半導体素子)と、MOS FET110のソース電極Sに接続されたソースリード端子320(第1リード端子)と、制御用半導体素子240の電極242に接続されたI/Oリード端子360の実装部361(第2リード端子)と、ソースリード端子320およびI/Oリード端子360の実装部361を封止する樹脂511(第1樹脂)と、MOS FET110および制御用半導体素子240を封止する封止樹脂521(第2樹脂)と、を備える。この半導体装置100の製造方法は、ソースリード端子320およびI/Oリード端子360を樹脂511により封止してリード端子封止体510を形成することと、リード端子封止体510のソースリード端子320にMOS FET110のソース電極Sを接続することと、リード端子封止体510のI/Oリード端子360に制御用半導体素子240の電極242を接続することと、前記第1の半導体素子、前記第2の半導体素子、および前記リード端子封止体の、MOS FET110と制御用半導体素子240の面を封止樹脂521により封止することとを含む。ソースリード端子320およびI/Oリード端子360の実装部361は、樹脂511により封止され、保持されている。このため、ソースリード端子320およびI/Oリード端子360の実装部361と、MOS FET110および制御用半導体素子240との接合を容易に行うことができる。また、半導体素子を接続する接続部材を損傷する虞もない。さらに、MOS FET110および制御用半導体素子240を封止樹脂521により封止する工程も容易である。よって、半導体装置100の生産性を高めることができる。
図11〜図20を参照して本発明の第2の実施形態を説明する。
図11は、本発明の半導体装置の第2の実施形態を示し、図11(A)は上面図、図11(B)は、図11(A)のXIB−XIB線断面図であり、図12は、図11(A)に示された半導体装置のXII−XII線断面図であり、図13は、図11に示された半導体装置の下面図である。
第2の実施形態による半導体装置100Aは、第1の実施形態における引き回し導体330a〜330c、接続導体350およびI/Oリード端子360の接続部362等の回路導体を、リードフレーム300から形成するのではなく、めっきにより形成したものである。
以下の説明では、第1の実施形態と相違する構成を主として説明することとし、第1の実施形態と同様な構成は、対応する構成に同様な符号を付し、適宜、説明を省略する。
なお、第2の実施形態では、制御用半導体素子240は、電極241と電極242の他に、第3の電極243を有するものとして例示されている。第2の実施形態における制御用半導体素子240を、第1の実施形態と同様、電極241と電極242の2つの電極を有するものとしても差し支えない。
6つのソースリード端子320(図14参照)は、ソースリード端子320a〜320f(図13参照)を有する。ソースリード端子320a〜320fと、ドレイン接続用リード端子313と、複数のI/Oリード端子実装部361a(図11参照)は、樹脂511により封止され、リード端子封止体510Aを構成する。
ここで、第2の実施形態では、6つのソースリード端子320および複数のI/Oリード端子実装部361aはリードフレーム300から形成され、接続導体372、導体371a〜371gおよびI/Oリード端子接続部362aはめっきにより形成されている。すなわち、導体371a〜371gは、それぞれ、ソースリード端子320a〜320fおよびドレイン接続用リード端子313にめっきすることにより形成されている。また、複数のI/Oリード端子接続部362aは、I/Oリード端子実装部361aに、めっきすることにより形成されている。なお、以下の説明において、導体371a〜371gを代表して導体371と呼称することがある。
先ず、図14〜図15を参照して、リード端子封止体510Aの製造方法を説明する。
図14は、図11に示された半導体装置の製造方法の一例を示し、図14(A)は上面図、図14(B)は、図14(A)のXIVB−XIVB線断面図であり、図15は、図14に続く半導体装置の製造方法を示し、図15(A)は上面図、図15(B)は、図15(A)のXVB−XVB線断面図である。
そして、ソースリード端子320a〜320fおよびドレイン接続用リード端子313の上下両面、I/Oリード端子実装部361aの下面、接続導体372の一端および他端、およびI/Oリード端子接続部362aの一端に接合層531を形成する。
これにより、MOS FET120a〜120cのドレイン電極Dが、それぞれ、MOS FET110a〜110cのソース電極Sに接続される。
従って、第2の実施形態においては、実施形態1の効果(3)と同様な効果を奏する。
なお、第2の実施形態では、接続導体372はめっきにより形成されるので、その厚さをリードフレームにより形成された接続導体よりさらに薄く、かつ微細にすることができる。よって、第2の実施形態では、接続導体372の高精細化をより高めることができる。
同様の工程を、実施形態2に対しても適用することが可能である。
110、110a〜110c MOS FET(第一の半導体素子)
120、120a〜120c MOS FET
240、240a、240b 制御用半導体素子(第二の半導体素子)
241 電極(第4電極)
242、243 電極(第2電極)
300 リードフレーム
300S リードフレーム薄肉部
300T リードフレーム薄片
300U 導体形成面
312 ドレイン接続導体
313 ドレイン接続用リード端子
320、320a〜320f) ソースリード端子(第1リード端子)
330、330a〜330c) 引き回し導体
340、340a〜340c ドレイン導体
350 接続導体
360 I/Oリード端子
361 実装部
361a I/Oリード端子実装部
362 接続部
362a I/Oリード端子接続部
372 接続導体
371、371a〜371g 導体
400 モータジェネレータ
510、510A リード端子封止体
511 樹脂(第1樹脂)
521 封止樹脂(第2樹脂)
531 接合層
D ドレイン電極(第5電極)
S ソース電極(第1電極)
G ゲート電極(第3電極)
Claims (18)
- 第1電極を有する少なくとも1つの第1の半導体素子と、
第2電極を有する第2の半導体素子と、
前記第1の半導体素子の前記第1電極に接続された第1リード端子と、
前記第2の半導体素子の前記第2電極に接続された第2リード端子と、
前記第1リード端子および前記第2リード端子を保持する第1樹脂と、
前記第1の半導体素子および前記第2の半導体素子を封止する第2樹脂と、を備え、
さらに、前記第1樹脂により保持された接続導体を有し、
前記第1の半導体素子は第3電極を有し、
前記第2の半導体素子は第4電極を有し、
前記第1の半導体素子の前記第3電極および前記第2の半導体素子の第4電極は、それぞれ、前記接続導体に接続されている半導体装置。 - 請求項1に記載の半導体装置において、
前記第1リード端子、前記第2リード端子および前記接続導体は、リードフレームにより形成されており、
前記接続導体の厚さは、前記第1リード端子の厚さより薄い半導体装置。 - 請求項1に記載の半導体装置において、
前記第1リード端子および前記第2リード端子は、リードフレームにより形成されており、
前記接続導体はめっきにより形成されている半導体装置。 - 請求項1に記載された半導体装置において、
前記第1リード端子は高電位部に接続され、
前記第2リード端子は低電位部に接続され、
前記第1リード端子に接続される前記第1の半導体素子の前記第1電極と、前記第2リード端子に接合される前記第2の半導体素子の前記第2電極との間に、前記第1の半導体素子の前記第3電極と前記第2の半導体素子の前記第4電極とが配置されている半導体装置。 - 請求項1に記載された半導体装置において、
前記第1リード端子、前記第2リード端子および前記接続導体は、銅または銅合金を含む半導体装置。 - 請求項1に記載の半導体装置において、
前記第1リード端子および前記第2リード端子は、前記第1樹脂の、前記第1の半導体素子および前記第2の半導体素子が配置される側の反対側に、少なくとも一部が前記第1樹脂から露出している下面を有する半導体装置。 - 請求項4に記載の半導体装置において、
前記第2リード端子の、前記第2の半導体素子の前記第2電極に接合された接続部の厚さは、前記第1樹脂から露出する実装部の厚さより薄い半導体装置。 - 請求項1に記載の半導体装置において、
前記第1の半導体素子の前記第1電極と前記第1リード端子との間、前記第2の半導体素子の前記第2電極と前記第2リード端子との間、前記第1リード端子の、前記第1の半導体素子の前記第1電極が配置される側とは反対側の面、および前記第2リード端子の、前記第2の半導体素子の前記第2電極が配置される側とは反対側の面には同一材料からなる接合用めっき層が、それぞれ設けられている半導体装置。 - 請求項1に記載の半導体装置において、
前記第1の半導体素子の前記第1電極と前記第1リード端子との間、前記第2の半導体素子の前記第2電極と前記第2リード端子との間には第1の接合用めっき層が設けられ、前記第1リード端子の、前記第1の半導体素子の前記第1電極が配置される側とは反対側の面、および前記第2リード端子の、前記第2の半導体素子の前記第2電極が配置される側とは反対側の面には、前記第1の接合用めっき層とは異なる金属による、第2の接合用めっき層が設けられている半導体装置。 - 請求項1に記載の半導体装置において、
導電体をさらに備え、
前記第1の半導体素子は、前記第1電極および前記第3電極が配置される側とは反対側に第5電極を有し、
前記導電体は前記第5電極に接続される半導体装置。 - 請求項10に記載の半導体装置において、
前記導電体は、前記第1の半導体素子が配置される側の反対側に前記第2樹脂から露出する上面を有する半導体装置。 - 請求項10または請求項11に記載の半導体装置において、
前記少なくとも1つの第1の半導体素子は少なくとも1つの対になる半導体素子を含み、
前記導電体は、前記対になる半導体素子のうちの一方が有する前記第5電極と、前記対になる半導体素子のうちの他方が有する前記第1電極とを接続する半導体装置。 - 請求項12に記載の半導体装置において、
複数の対になる半導体素子が含まれる半導体装置。 - 請求項13に記載の半導体装置において、
前記第2の半導体素子は、前記複数の対になる半導体素子を駆動制御する制御用半導体素子であり、
前記複数の対になる半導体素子および前記制御用半導体素子により構成される電力変換部を備える半導体装置。 - 第1リード端子および第2リード端子が第1樹脂により保持されたリード端子封止体を形成することと、
前記リード端子封止体の前記第1リード端子に第1の半導体素子の第1電極を接続することと、
前記リード端子封止体の前記第2リード端子に第2の半導体素子の第2電極を接続することと、
前記第1の半導体素子、前記第2の半導体素子、および前記リード端子封止体の、前記第1の半導体素子と前記第2の半導体素子側の面を第2樹脂により封止することと、
さらに、前記第1樹脂により保持された接続導体を形成することを含み、
前記接続導体は前記第1の半導体素子の第3電極と前記第2の半導体素子の第4電極とを接続する半導体装置の製造方法。 - 請求項15に記載の半導体装置の製造方法において、
さらに、前記第1リード端子、前記第2リード端子および前記接続導体をリードフレームから形成することを含む半導体装置の製造方法。 - 請求項15に記載の半導体装置の製造方法において、さらに、
前記第1リード端子および前記第2リード端子をリードフレームから形成することと、
前記接続導体をめっきにより形成することとを含む半導体装置の製造方法。 - 請求項15から請求項17までのいずれか一項に記載の半導体装置の製造方法において、
前記リード端子封止体の前記第1リード端子に前記第1の半導体素子の前記第1電極を接合する前、および前記リード端子封止体の前記第2リード端子に前記第2の半導体素子の前記第2電極を接合する前に、前記第1リード端子および前記第2リード端子の上下両面に、接合用めっき層を同一の工程で形成することをさらに含み、
前記第1リード端子の前記上下両面のうちの上面は、前記第1の半導体素子の前記第1電極が接合される面であって、前記第1リード端子の前記上下両面のうちの下面の反対側の面であり、
前記第2リード端子の前記上下両面のうちの上面は、前記第2の半導体素子の前記第2電極が接合される面であって、前記第2リード端子の前記上下両面のうちの下面の反対側の面である半導体装置の製造方法。
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