JP6700699B2 - 屈折率分布計測方法、屈折率分布計測装置、及び光学素子の製造方法 - Google Patents
屈折率分布計測方法、屈折率分布計測装置、及び光学素子の製造方法 Download PDFInfo
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- JP6700699B2 JP6700699B2 JP2015190070A JP2015190070A JP6700699B2 JP 6700699 B2 JP6700699 B2 JP 6700699B2 JP 2015190070 A JP2015190070 A JP 2015190070A JP 2015190070 A JP2015190070 A JP 2015190070A JP 6700699 B2 JP6700699 B2 JP 6700699B2
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- refractive index
- lens
- index distribution
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0228—Testing optical properties by measuring refractive power
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
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- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020150171931A KR20160069476A (ko) | 2014-12-08 | 2015-12-04 | 굴절률 분포 계측방법, 굴절률 분포 계측장치, 및 광학소자의 제조방법 |
US14/959,878 US9709490B2 (en) | 2014-12-08 | 2015-12-04 | Refractive index distribution measuring method, refractive index distribution measuring apparatus, and optical element manufacturing method |
CN201510893831.0A CN105675261A (zh) | 2014-12-08 | 2015-12-08 | 折射率分布测量方法和测量装置以及光学元件制造方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2014248475 | 2014-12-08 | ||
JP2014248475 | 2014-12-08 |
Publications (2)
Publication Number | Publication Date |
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JP2016109670A JP2016109670A (ja) | 2016-06-20 |
JP6700699B2 true JP6700699B2 (ja) | 2020-05-27 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2015190070A Active JP6700699B2 (ja) | 2014-12-08 | 2015-09-28 | 屈折率分布計測方法、屈折率分布計測装置、及び光学素子の製造方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP6700699B2 (zh) |
KR (1) | KR20160069476A (zh) |
CN (1) | CN105675261A (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109444077B (zh) * | 2018-11-30 | 2020-04-07 | 中山大学 | 一种基于相位标定的折射率场定量测量系统与方法 |
CN109855541B (zh) * | 2019-01-21 | 2020-08-04 | 山西大学 | 基于光学频率梳的空气折射率自校准系统和方法 |
DE112021007663T5 (de) * | 2021-07-20 | 2024-02-29 | Hitachi High-Tech Corporation | Ferninfrarotspektroskopievorrichtung und probenadapter |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5151752A (en) * | 1988-06-16 | 1992-09-29 | Asahi Kogaku Kogyo K.K. | Method of measuring refractive indices of lens and sample liquid |
JP3699810B2 (ja) * | 1997-07-29 | 2005-09-28 | 株式会社リコー | 屈折率分布の測定方法及び装置 |
JP2002188979A (ja) * | 2000-12-22 | 2002-07-05 | Nikon Corp | 屈折率分布の測定方法及び屈折率分布の測定装置、並びに光学系の製造方法及び光学系 |
JP4929529B2 (ja) * | 2001-03-27 | 2012-05-09 | 株式会社ニコン | 光学系の製造方法、および該製造方法で製造された光学系を備えた露光装置 |
JP4319554B2 (ja) * | 2004-01-14 | 2009-08-26 | 株式会社リコー | 屈折率分布の測定方法および測定装置 |
CN101464209A (zh) * | 2007-12-19 | 2009-06-24 | 鸿富锦精密工业(深圳)有限公司 | 镜片折射率变化量的测量方法及其装置 |
JP5008650B2 (ja) * | 2008-12-25 | 2012-08-22 | キヤノン株式会社 | 屈折率分布計測方法及び屈折率分布計測装置 |
US8269981B1 (en) * | 2009-03-30 | 2012-09-18 | Carl Zeiss Smt Gmbh | Method and an apparatus for measuring a deviation of an optical test surface from a target shape |
JP2011080875A (ja) * | 2009-10-07 | 2011-04-21 | Tokyo Institute Of Technology | 屈折率分布の測定装置及び測定方法 |
JP4895409B2 (ja) * | 2010-05-25 | 2012-03-14 | キヤノン株式会社 | 屈折率分布計測方法および屈折率分布計測装置 |
JP5868142B2 (ja) * | 2011-11-24 | 2016-02-24 | キヤノン株式会社 | 屈折率分布測定方法および屈折率分布測定装置 |
JP5575161B2 (ja) * | 2012-02-10 | 2014-08-20 | キヤノン株式会社 | 屈折率分布計測方法および屈折率分布計測装置 |
JP2014016253A (ja) * | 2012-07-09 | 2014-01-30 | Canon Inc | 屈折率分布計測方法、光学素子の製造方法、および、屈折率分布計測装置 |
JP2014196966A (ja) * | 2013-03-29 | 2014-10-16 | コニカミノルタ株式会社 | 屈折率分布測定用基準素子ならびに屈折率分布測定装置および該方法 |
JP2015099133A (ja) * | 2013-11-20 | 2015-05-28 | キヤノン株式会社 | 厚みの計測方法および計測装置 |
-
2015
- 2015-09-28 JP JP2015190070A patent/JP6700699B2/ja active Active
- 2015-12-04 KR KR1020150171931A patent/KR20160069476A/ko not_active Application Discontinuation
- 2015-12-08 CN CN201510893831.0A patent/CN105675261A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
JP2016109670A (ja) | 2016-06-20 |
KR20160069476A (ko) | 2016-06-16 |
CN105675261A (zh) | 2016-06-15 |
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