JP6700699B2 - 屈折率分布計測方法、屈折率分布計測装置、及び光学素子の製造方法 - Google Patents

屈折率分布計測方法、屈折率分布計測装置、及び光学素子の製造方法 Download PDF

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JP6700699B2
JP6700699B2 JP2015190070A JP2015190070A JP6700699B2 JP 6700699 B2 JP6700699 B2 JP 6700699B2 JP 2015190070 A JP2015190070 A JP 2015190070A JP 2015190070 A JP2015190070 A JP 2015190070A JP 6700699 B2 JP6700699 B2 JP 6700699B2
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refractive index
lens
index distribution
under test
unit
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JP2016109670A (ja
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杉本　智洋
智洋 杉本
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Canon Inc
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Canon Inc
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Priority to US14/959,878 priority Critical patent/US9709490B2/en
Priority to KR1020150171931A priority patent/KR20160069476A/ko
Priority to CN201510893831.0A priority patent/CN105675261A/zh
Publication of JP2016109670A publication Critical patent/JP2016109670A/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0228—Testing optical properties by measuring refractive power

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
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  • Geometry (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2015190070A 2014-12-08 2015-09-28 屈折率分布計測方法、屈折率分布計測装置、及び光学素子の製造方法 Active JP6700699B2 (ja)

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Application Number Priority Date Filing Date Title
US14/959,878 US9709490B2 (en) 2014-12-08 2015-12-04 Refractive index distribution measuring method, refractive index distribution measuring apparatus, and optical element manufacturing method
KR1020150171931A KR20160069476A (ko) 2014-12-08 2015-12-04 굴절률 분포 계측방법, 굴절률 분포 계측장치, 및 광학소자의 제조방법
CN201510893831.0A CN105675261A (zh) 2014-12-08 2015-12-08 折射率分布测量方法和测量装置以及光学元件制造方法

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JP2014248475 2014-12-08
JP2014248475 2014-12-08

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JP2016109670A JP2016109670A (ja) 2016-06-20
JP6700699B2 true JP6700699B2 (ja) 2020-05-27

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JP (1) JP6700699B2 (ko)
KR (1) KR20160069476A (ko)
CN (1) CN105675261A (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109444077B (zh) * 2018-11-30 2020-04-07 中山大学 一种基于相位标定的折射率场定量测量系统与方法
CN109855541B (zh) * 2019-01-21 2020-08-04 山西大学 基于光学频率梳的空气折射率自校准系统和方法
WO2023002585A1 (ja) * 2021-07-20 2023-01-26 株式会社日立ハイテク 遠赤外分光装置、及び試料アダプター

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5151752A (en) * 1988-06-16 1992-09-29 Asahi Kogaku Kogyo K.K. Method of measuring refractive indices of lens and sample liquid
JP3699810B2 (ja) * 1997-07-29 2005-09-28 株式会社リコー 屈折率分布の測定方法及び装置
JP2002188979A (ja) * 2000-12-22 2002-07-05 Nikon Corp 屈折率分布の測定方法及び屈折率分布の測定装置、並びに光学系の製造方法及び光学系
JP4929529B2 (ja) * 2001-03-27 2012-05-09 株式会社ニコン 光学系の製造方法、および該製造方法で製造された光学系を備えた露光装置
JP4319554B2 (ja) * 2004-01-14 2009-08-26 株式会社リコー 屈折率分布の測定方法および測定装置
CN101464209A (zh) * 2007-12-19 2009-06-24 鸿富锦精密工业（深圳）有限公司 镜片折射率变化量的测量方法及其装置
JP5008650B2 (ja) * 2008-12-25 2012-08-22 キヤノン株式会社 屈折率分布計測方法及び屈折率分布計測装置
US8269981B1 (en) * 2009-03-30 2012-09-18 Carl Zeiss Smt Gmbh Method and an apparatus for measuring a deviation of an optical test surface from a target shape
JP2011080875A (ja) * 2009-10-07 2011-04-21 Tokyo Institute Of Technology 屈折率分布の測定装置及び測定方法
JP4895409B2 (ja) * 2010-05-25 2012-03-14 キヤノン株式会社 屈折率分布計測方法および屈折率分布計測装置
JP5868142B2 (ja) * 2011-11-24 2016-02-24 キヤノン株式会社 屈折率分布測定方法および屈折率分布測定装置
JP5575161B2 (ja) * 2012-02-10 2014-08-20 キヤノン株式会社 屈折率分布計測方法および屈折率分布計測装置
JP2014016253A (ja) * 2012-07-09 2014-01-30 Canon Inc 屈折率分布計測方法、光学素子の製造方法、および、屈折率分布計測装置
JP2014196966A (ja) * 2013-03-29 2014-10-16 コニカミノルタ株式会社 屈折率分布測定用基準素子ならびに屈折率分布測定装置および該方法
JP2015099133A (ja) * 2013-11-20 2015-05-28 キヤノン株式会社 厚みの計測方法および計測装置

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KR20160069476A (ko) 2016-06-16
JP2016109670A (ja) 2016-06-20
CN105675261A (zh) 2016-06-15

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