JP6687504B2 - スイッチング素子の製造方法 - Google Patents
スイッチング素子の製造方法 Download PDFInfo
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- JP6687504B2 JP6687504B2 JP2016245762A JP2016245762A JP6687504B2 JP 6687504 B2 JP6687504 B2 JP 6687504B2 JP 2016245762 A JP2016245762 A JP 2016245762A JP 2016245762 A JP2016245762 A JP 2016245762A JP 6687504 B2 JP6687504 B2 JP 6687504B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 37
- 239000004065 semiconductor Substances 0.000 claims description 86
- 239000000758 substrate Substances 0.000 claims description 60
- 210000000746 body region Anatomy 0.000 claims description 59
- 230000001681 protective effect Effects 0.000 claims description 24
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000010410 layer Substances 0.000 description 50
- 239000012535 impurity Substances 0.000 description 18
- 239000013078 crystal Substances 0.000 description 16
- 230000007547 defect Effects 0.000 description 16
- 239000000463 material Substances 0.000 description 16
- 238000000034 method Methods 0.000 description 9
- 239000011229 interlayer Substances 0.000 description 7
- 230000007423 decrease Effects 0.000 description 6
- 238000002844 melting Methods 0.000 description 6
- 230000008018 melting Effects 0.000 description 6
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 6
- 229910010271 silicon carbide Inorganic materials 0.000 description 6
- 238000005530 etching Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000005012 migration Effects 0.000 description 2
- 238000013508 migration Methods 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 230000007480 spreading Effects 0.000 description 2
- 238000003892 spreading Methods 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 239000007943 implant Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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Description
12 :半導体基板
22 :トレンチ
24 :ゲート絶縁層
26 :ゲート電極
28 :層間絶縁膜
30 :ソース領域
32 :ボディ領域
34 :ドリフト領域
35 :ドレイン領域
36 :底面p型領域
38 :側面p型領域
70 :上部電極
72 :下部電極
80 :保護膜
Claims (4)
- スイッチング素子の製造方法であって、
n型のドレイン領域と、p型のボディ領域と、トレンチを有する半導体基板であって、前記ボディ領域が前記ドレイン領域上に配置されているとともに前記半導体基板の表面に露出しており、前記トレンチが前記表面から前記ボディ領域を貫通して前記ドレイン領域に達している前記半導体基板を準備する工程と、
前記半導体基板を加熱して前記ボディ領域の一部を前記トレンチ内に流入させることによって、前記ボディ領域よりも下側で前記トレンチの側面に沿って延びるとともに前記ボディ領域に接続されている側面p型領域を形成する工程、
を有し、
製造される前記スイッチング素子が、
前記トレンチの内面を覆うゲート絶縁層と、
前記半導体基板内に設けられており、前記トレンチの底面で前記ゲート絶縁層に接し、前記側面p型領域に接続されている底面p型領域と、
前記半導体基板内に設けられており、前記トレンチの前記側面で前記ゲート絶縁層に接し、前記ボディ領域によって前記ドレイン領域から分離されているn型のソース領域と、
前記トレンチ内に配置されており、前記ゲート絶縁層によって前記半導体基板から絶縁されており、前記ゲート絶縁層を介して前記ソース領域、前記ボディ領域及び前記ドレイン領域に対向しているゲート電極、
を有する製造方法。 - 前記側面p型領域を形成するよりも前に、前記表面の一部を保護膜で覆う工程をさらに有し、
前記側面p型領域を形成する工程では、前記保護膜が存在する状態で前記半導体基板を加熱する請求項1の製造方法。 - 前記トレンチに隣接する位置で前記表面に露出するように前記ソース領域を形成する工程をさらに有し、
前記保護膜を形成する前記工程では、前記ソース領域の表面を前記保護膜で覆う、
請求項2の製造方法。 - 前記側面p型領域を形成するよりも前に、前記底面p型領域を形成する工程をさらに有する請求項1〜3のいずれか一項の製造方法。
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JP2016245762A JP6687504B2 (ja) | 2016-12-19 | 2016-12-19 | スイッチング素子の製造方法 |
US15/805,727 US10243035B2 (en) | 2016-12-19 | 2017-11-07 | Method of manufacturing switching element |
CN201711348768.8A CN108231593B (zh) | 2016-12-19 | 2017-12-15 | 开关元件的制造方法 |
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JP6687504B2 true JP6687504B2 (ja) | 2020-04-22 |
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JP6560142B2 (ja) * | 2016-02-26 | 2019-08-14 | トヨタ自動車株式会社 | スイッチング素子 |
JP6560141B2 (ja) * | 2016-02-26 | 2019-08-14 | トヨタ自動車株式会社 | スイッチング素子 |
SE541290C2 (en) * | 2017-09-15 | 2019-06-11 | Ascatron Ab | A method for manufacturing a grid |
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JP4453671B2 (ja) | 2006-03-08 | 2010-04-21 | トヨタ自動車株式会社 | 絶縁ゲート型半導体装置およびその製造方法 |
JP5707681B2 (ja) * | 2009-03-04 | 2015-04-30 | 富士電機株式会社 | 半導体装置およびその製造方法 |
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WO2013031212A1 (ja) * | 2011-08-29 | 2013-03-07 | 次世代パワーデバイス技術研究組合 | 双方向素子、双方向素子回路および電力変換装置 |
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JP6283468B2 (ja) * | 2013-03-01 | 2018-02-21 | 株式会社豊田中央研究所 | 逆導通igbt |
JP6169966B2 (ja) * | 2013-12-26 | 2017-07-26 | トヨタ自動車株式会社 | 半導体装置及び半導体装置の製造方法 |
JP6294208B2 (ja) * | 2014-10-17 | 2018-03-14 | トヨタ自動車株式会社 | トレンチゲート電極を有する絶縁ゲート型スイッチング素子の製造方法 |
JP2016082096A (ja) * | 2014-10-17 | 2016-05-16 | トヨタ自動車株式会社 | 絶縁ゲート型スイッチング素子と、その製造方法 |
JP6784921B2 (ja) * | 2017-02-17 | 2020-11-18 | 株式会社デンソー | スイッチング素子とその製造方法 |
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