JP6684225B2 - Oled用の被支持透明電極 - Google Patents

Oled用の被支持透明電極 Download PDF

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Publication number
JP6684225B2
JP6684225B2 JP2016563841A JP2016563841A JP6684225B2 JP 6684225 B2 JP6684225 B2 JP 6684225B2 JP 2016563841 A JP2016563841 A JP 2016563841A JP 2016563841 A JP2016563841 A JP 2016563841A JP 6684225 B2 JP6684225 B2 JP 6684225B2
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Japan
Prior art keywords
layer
refractive index
oled
enamel
ald
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Expired - Fee Related
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JP2016563841A
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English (en)
Japanese (ja)
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JP2017514279A5 (zh
JP2017514279A (ja
Inventor
ヨンソン リー
ヨンソン リー
チンウ ハン
チンウ ハン
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Saint Gobain Glass France SAS
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Saint Gobain Glass France SAS
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Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • H10K50/81Anodes
    • H10K50/814Anodes combined with auxiliary electrodes, e.g. ITO layer combined with metal lines
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/60Forming conductive regions or layers, e.g. electrodes
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/02Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
    • C03C17/04Surface treatment of glass, not in the form of fibres or filaments, by coating with glass by fritting glass powder
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/086Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/403Oxides of aluminium, magnesium or beryllium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/85Arrangements for extracting light from the devices
    • H10K50/854Arrangements for extracting light from the devices comprising scattering means
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K77/00Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
    • H10K77/10Substrates, e.g. flexible substrates
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00Constructional details relating to the organic devices covered by this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00Constructional details relating to the organic devices covered by this subclass
    • H10K2102/10Transparent electrodes, e.g. using graphene
    • H10K2102/101Transparent electrodes, e.g. using graphene comprising transparent conductive oxides [TCO]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00Constructional details relating to the organic devices covered by this subclass
    • H10K2102/10Transparent electrodes, e.g. using graphene
    • H10K2102/101Transparent electrodes, e.g. using graphene comprising transparent conductive oxides [TCO]
    • H10K2102/102Transparent electrodes, e.g. using graphene comprising transparent conductive oxides [TCO] comprising tin oxides, e.g. fluorine-doped SnO2
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K2102/00Constructional details relating to the organic devices covered by this subclass
    • H10K2102/301Details of OLEDs
    • H10K2102/351Thickness
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/549Organic PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Electroluminescent Light Sources (AREA)
  • Non-Insulated Conductors (AREA)
JP2016563841A 2014-04-22 2015-04-20 Oled用の被支持透明電極 Expired - Fee Related JP6684225B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1453584A FR3020179B1 (fr) 2014-04-22 2014-04-22 Electrode supportee transparente pour oled
FR1453584 2014-04-22
PCT/FR2015/051069 WO2015162367A1 (fr) 2014-04-22 2015-04-20 Electrode supportee transparente pour oled

Publications (3)

Publication Number Publication Date
JP2017514279A JP2017514279A (ja) 2017-06-01
JP2017514279A5 JP2017514279A5 (zh) 2018-05-17
JP6684225B2 true JP6684225B2 (ja) 2020-04-22

Family

ID=50976932

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016563841A Expired - Fee Related JP6684225B2 (ja) 2014-04-22 2015-04-20 Oled用の被支持透明電極

Country Status (10)

Country Link
US (1) US10319934B2 (zh)
EP (1) EP3134929B1 (zh)
JP (1) JP6684225B2 (zh)
KR (1) KR20160145596A (zh)
CN (1) CN106463641B (zh)
ES (1) ES2702210T3 (zh)
FR (1) FR3020179B1 (zh)
RU (1) RU2685086C2 (zh)
TW (1) TWI663761B (zh)
WO (1) WO2015162367A1 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3082172A1 (en) 2015-04-16 2016-10-19 Saint-Gobain Glass France Layered structure for an oled and a method for producing such a structure
CN112876078A (zh) * 2021-04-14 2021-06-01 亚细亚建筑材料股份有限公司 一种高透感面釉
US11527732B1 (en) * 2022-05-31 2022-12-13 Applied Materials, Inc. OLED anode structures including amorphous transparent conducting oxides and OLED processing method comprising the same

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FR1360522A (fr) 1962-06-15 1964-05-08 Automotive Prod Co Ltd Système de freinage fonctionnant par une pression de liquide pour véhicules
JP2000231985A (ja) * 1999-02-12 2000-08-22 Denso Corp 有機el素子
JP2002343562A (ja) * 2001-05-11 2002-11-29 Pioneer Electronic Corp 発光ディスプレイ装置及びその製造方法
US20060154550A1 (en) 2002-10-16 2006-07-13 Nellissen Antonius J M Method for manufacturing a light emitting display
WO2005053053A1 (en) 2003-11-26 2005-06-09 Koninklijke Philips Electronics N.V. Light-emitting device comprising an etch-protective layer
US7508130B2 (en) * 2005-11-18 2009-03-24 Eastman Kodak Company OLED device having improved light output
EP1916725A1 (en) 2006-10-27 2008-04-30 Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO Organic light emitting diode device with multilayer seal
CN101766052B (zh) * 2007-07-27 2012-07-18 旭硝子株式会社 透光性基板、其制造方法、有机led元件及其制造方法
JPWO2009116531A1 (ja) * 2008-03-18 2011-07-21 旭硝子株式会社 電子デバイス用基板、有機led素子用積層体及びその製造方法、有機led素子及びその製造方法
DE102009024411A1 (de) * 2009-03-24 2010-09-30 Osram Opto Semiconductors Gmbh Dünnschichtverkapselung für ein optoelektronisches Bauelement, Verfahren zu dessen Herstellung und optoelektronisches Bauelement
DE102009022900A1 (de) * 2009-04-30 2010-11-18 Osram Opto Semiconductors Gmbh Optoelektronisches Bauelement und Verfahren zu dessen Herstellung
EP2489643B1 (en) * 2009-10-15 2019-01-09 AGC Inc. Organic led element utilizing a glass for diffusion layer
IN2012DN03220A (zh) * 2009-10-15 2015-10-23 Asahi Glass Co Ltd
RU2408957C1 (ru) * 2009-11-25 2011-01-10 Российская Федерация, от имени которой выступает государственный заказчик - Министерство промышленности и торговли Российской Федерации (Минпромторг России) Органический светоизлучающий диод
FR2955575B1 (fr) * 2010-01-22 2012-02-24 Saint Gobain Substrat verrier revetu d'une couche haut indice sous un revetement electrode et dispositif electroluminescent organique comportant un tel substrat.
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FR2963705B1 (fr) * 2010-08-06 2012-08-17 Saint Gobain Support a couche diffusante pour dispositif a diode electroluminescente organique, dispositif electroluminescent organique comportant un tel support
JP5938757B2 (ja) * 2011-11-25 2016-06-22 三星電子株式会社Samsung Electronics Co.,Ltd. 発光素子基板とその製造方法、面発光素子、照明器具およびバックライト
JP5998124B2 (ja) * 2011-03-31 2016-09-28 旭硝子株式会社 有機led素子、透光性基板、および透光性基板の製造方法
JPWO2012147685A1 (ja) * 2011-04-28 2014-07-28 旭硝子株式会社 有機el素子、透光性基板および有機led素子の製造方法
JPWO2013054820A1 (ja) * 2011-10-14 2015-03-30 旭硝子株式会社 有機led素子の散乱層用ガラス、有機led素子用の積層基板及びその製造方法、並びに有機led素子及びその製造方法
EP2773164B1 (en) * 2011-10-28 2019-10-02 AGC Inc. Laminated substrate for organic led element, and organic led element
FR2986909B1 (fr) * 2012-02-10 2014-11-21 Saint Gobain Electrode supportee transparente pour oled
KR20130111156A (ko) * 2012-03-30 2013-10-10 주식회사 엘지화학 유기전자소자용 기판
KR101715112B1 (ko) * 2012-06-14 2017-03-10 쌩-고벵 글래스 프랑스 Oled 소자용 적층체, 그 제조방법 및 이를 구비한 oled 소자
FR2993707B1 (fr) * 2012-07-17 2015-03-13 Saint Gobain Electrode supportee transparente pour oled
ES2548048T3 (es) * 2012-09-28 2015-10-13 Saint-Gobain Glass France Método de para producir un sustrato OLED difusor transparente
US10084144B2 (en) 2013-02-25 2018-09-25 Saint-Gobain Glass France Substrate for device having an organic light-emitting diode

Also Published As

Publication number Publication date
WO2015162367A1 (fr) 2015-10-29
EP3134929B1 (fr) 2018-09-19
FR3020179A1 (fr) 2015-10-23
EP3134929A1 (fr) 2017-03-01
TW201605095A (zh) 2016-02-01
US20170040565A1 (en) 2017-02-09
ES2702210T3 (es) 2019-02-27
KR20160145596A (ko) 2016-12-20
RU2016145417A3 (zh) 2018-11-19
US10319934B2 (en) 2019-06-11
TWI663761B (zh) 2019-06-21
RU2685086C2 (ru) 2019-04-16
CN106463641A (zh) 2017-02-22
FR3020179B1 (fr) 2017-10-06
RU2016145417A (ru) 2018-05-23
CN106463641B (zh) 2018-09-28
JP2017514279A (ja) 2017-06-01

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