JP6677095B2 - Sn−Zn−O系酸化物焼結体とその製造方法 - Google Patents
Sn−Zn−O系酸化物焼結体とその製造方法 Download PDFInfo
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- JP6677095B2 JP6677095B2 JP2016122320A JP2016122320A JP6677095B2 JP 6677095 B2 JP6677095 B2 JP 6677095B2 JP 2016122320 A JP2016122320 A JP 2016122320A JP 2016122320 A JP2016122320 A JP 2016122320A JP 6677095 B2 JP6677095 B2 JP 6677095B2
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Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201680067703.3A CN108349816B (zh) | 2015-11-20 | 2016-09-20 | Sn-Zn-O系氧化物烧结体及其制造方法 |
| KR1020187014174A KR20180085726A (ko) | 2015-11-20 | 2016-09-20 | Sn-Zn-O 계 산화물 소결체와 그 제조 방법 |
| PCT/JP2016/077670 WO2017086016A1 (ja) | 2015-11-20 | 2016-09-20 | Sn-Zn-O系酸化物焼結体とその製造方法 |
| US15/777,587 US20210206697A1 (en) | 2015-11-20 | 2016-09-20 | Sn-Zn-O-BASED OXIDE SINTERED BODY AND METHOD FOR PRODUCING THE SAME |
| TW105131183A TWI700261B (zh) | 2015-11-20 | 2016-09-29 | Sn-Zn-O系氧化物燒結體及其製造方法 |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015227722 | 2015-11-20 | ||
| JP2015227722 | 2015-11-20 | ||
| JP2016025680 | 2016-02-15 | ||
| JP2016025680 | 2016-02-15 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017145185A JP2017145185A (ja) | 2017-08-24 |
| JP2017145185A5 JP2017145185A5 (enExample) | 2018-10-04 |
| JP6677095B2 true JP6677095B2 (ja) | 2020-04-08 |
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| JP2016122320A Expired - Fee Related JP6677095B2 (ja) | 2015-11-20 | 2016-06-21 | Sn−Zn−O系酸化物焼結体とその製造方法 |
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| US (1) | US20210206697A1 (enExample) |
| JP (1) | JP6677095B2 (enExample) |
| KR (1) | KR20180085726A (enExample) |
| CN (1) | CN108349816B (enExample) |
| TW (1) | TWI700261B (enExample) |
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| JP6431940B2 (ja) * | 2017-02-22 | 2018-11-28 | 株式会社神戸製鋼所 | 誘電体層、光記録媒体、スパッタリングターゲット及び酸化物 |
| JP2018199861A (ja) * | 2017-05-25 | 2018-12-20 | 日立金属株式会社 | 酸化物ターゲット材およびその製造方法 |
| JP2019052373A (ja) * | 2017-09-14 | 2019-04-04 | 三菱マテリアル株式会社 | スパッタリングターゲット |
| JP2019073747A (ja) * | 2017-10-12 | 2019-05-16 | 住友金属鉱山株式会社 | 非晶質の透明酸化物膜、Sn−Zn−O系酸化物焼結体、非晶質の透明酸化物膜の製造方法、及びSn−Zn−O系酸化物焼結体の製造方法 |
| JP2019131866A (ja) * | 2018-01-31 | 2019-08-08 | 住友金属鉱山株式会社 | 酸化物スパッタ膜、酸化物スパッタ膜の製造方法、酸化物焼結体及び透明樹脂基板 |
| JP2019163494A (ja) * | 2018-03-19 | 2019-09-26 | 住友金属鉱山株式会社 | 透明酸化物膜、透明酸化物膜の製造方法、酸化物焼結体及び透明樹脂基板 |
| JP2019163493A (ja) * | 2018-03-19 | 2019-09-26 | 住友金属鉱山株式会社 | 透明酸化物積層膜、透明酸化物積層膜の製造方法、及び透明樹脂基板 |
| JP2019183244A (ja) * | 2018-04-16 | 2019-10-24 | 住友金属鉱山株式会社 | 透明酸化物積層膜、透明酸化物積層膜の製造方法、スパッタリングターゲット及び透明樹脂基板 |
| JP2019189473A (ja) * | 2018-04-19 | 2019-10-31 | 住友金属鉱山株式会社 | Sn−Zn−O系酸化物焼結体とその製造方法 |
| JP2021021122A (ja) * | 2019-07-30 | 2021-02-18 | 住友金属鉱山株式会社 | 蒸着用タブレットと酸化物透明導電膜および酸化錫系焼結体の製造方法 |
| US12415760B2 (en) * | 2022-03-18 | 2025-09-16 | Meidensha Corporation | Zinc oxide element |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4552950B2 (ja) * | 2006-03-15 | 2010-09-29 | 住友金属鉱山株式会社 | ターゲット用酸化物焼結体、その製造方法、それを用いた透明導電膜の製造方法、及び得られる透明導電膜 |
| JP5024226B2 (ja) | 2008-08-06 | 2012-09-12 | 日立金属株式会社 | 酸化物焼結体およびその製造方法、スパッタリングターゲット、半導体薄膜 |
| KR101671543B1 (ko) * | 2008-11-20 | 2016-11-01 | 이데미쓰 고산 가부시키가이샤 | ZnO-SnO₂-In₂O₃계 산화물 소결체 및 비정질 투명 도전막 |
| JP2012066968A (ja) * | 2010-09-24 | 2012-04-05 | Kobelco Kaken:Kk | 酸化物焼結体およびスパッタリングターゲット |
| JP2012180247A (ja) * | 2011-03-02 | 2012-09-20 | Kobelco Kaken:Kk | 酸化物焼結体およびスパッタリングターゲット |
| JP2012180248A (ja) * | 2011-03-02 | 2012-09-20 | Kobelco Kaken:Kk | 酸化物焼結体およびスパッタリングターゲット |
| JP5686067B2 (ja) * | 2011-08-05 | 2015-03-18 | 住友金属鉱山株式会社 | Zn−Sn−O系酸化物焼結体とその製造方法 |
| JP6341198B2 (ja) * | 2013-04-12 | 2018-06-13 | 日立金属株式会社 | 酸化物半導体ターゲット、酸化物半導体膜及びその製造方法、並びに薄膜トランジスタ |
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2016
- 2016-06-21 JP JP2016122320A patent/JP6677095B2/ja not_active Expired - Fee Related
- 2016-09-20 US US15/777,587 patent/US20210206697A1/en not_active Abandoned
- 2016-09-20 CN CN201680067703.3A patent/CN108349816B/zh not_active Expired - Fee Related
- 2016-09-20 KR KR1020187014174A patent/KR20180085726A/ko not_active Withdrawn
- 2016-09-29 TW TW105131183A patent/TWI700261B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| CN108349816B (zh) | 2021-11-26 |
| TWI700261B (zh) | 2020-08-01 |
| TW201728554A (zh) | 2017-08-16 |
| JP2017145185A (ja) | 2017-08-24 |
| CN108349816A (zh) | 2018-07-31 |
| KR20180085726A (ko) | 2018-07-27 |
| US20210206697A1 (en) | 2021-07-08 |
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