JP6641442B1 - 光検出素子及び光検出装置 - Google Patents
光検出素子及び光検出装置 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 claims abstract description 108
- 238000001514 detection method Methods 0.000 claims abstract description 65
- 230000031700 light absorption Effects 0.000 claims abstract description 62
- 239000000758 substrate Substances 0.000 claims abstract description 51
- 230000035945 sensitivity Effects 0.000 claims description 15
- 238000012545 processing Methods 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 abstract description 3
- 239000010410 layer Substances 0.000 description 287
- 239000000969 carrier Substances 0.000 description 11
- 230000002040 relaxant effect Effects 0.000 description 8
- 230000004043 responsiveness Effects 0.000 description 7
- 230000005684 electric field Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 230000004048 modification Effects 0.000 description 6
- 230000014509 gene expression Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 238000012546 transfer Methods 0.000 description 5
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000779 smoke Substances 0.000 description 2
- 238000002366 time-of-flight method Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
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Abstract
Description
Claims (28)
- 半導体基板と、前記半導体基板上に形成された第1導電型の光吸収層と、前記光吸収層上に形成された第1導電型のキャップ層と、前記キャップ層内に形成され、前記キャップ層とpn接合をなす第2導電型の第1半導体領域と、を備える光検出素子と、
前記pn接合にパルス電圧信号を印加し、前記光検出素子から出力された検出信号を取得する信号処理部と、を備え、
前記第1半導体領域の周囲に形成される空乏層は、前記pn接合に逆方向バイアスが印加されていない場合に、前記光吸収層に達しておらず、前記pn接合に20Vの逆方向バイアスが印加された場合に、前記キャップ層側から前記光吸収層の厚さの50%の位置を超え、
前記パルス電圧信号は、前記光吸収層に前記空乏層が達しない第1電圧、及び前記光吸収層に前記空乏層が達する第2電圧が交互に繰り返される電圧信号である、光検出装置。 - 前記空乏層は、前記pn接合に20Vの逆方向バイアスが印加された場合に、前記キャップ層側から前記光吸収層の厚さの80%の位置を超える、請求項1に記載の光検出装置。
- 前記光検出素子は、前記光吸収層と前記キャップ層との間に形成された第1導電型の緩和層を更に備える、請求項1又は2に記載の光検出装置。
- 前記光吸収層と前記キャップ層とは、互いに接触している、請求項1又は2に記載の光検出装置。
- 前記第1半導体領域は、前記キャップ層内に複数形成されており、前記半導体基板の厚さ方向から見た場合に1次元又は2次元に配列されている、請求項1〜4のいずれか一項に記載の光検出装置。
- 前記第1半導体領域は、前記キャップ層内に複数形成されており、前記半導体基板の厚さ方向から見た場合に1次元に配列されており、
前記半導体基板の厚さ方向及び前記第1半導体領域の配列方向の両方向に垂直な幅方向において、前記キャップ層の幅は、前記半導体基板の幅よりも小さい、請求項1〜5のいずれか一項に記載の光検出装置。 - 前記幅方向において、前記光吸収層の幅は、前記半導体基板の幅よりも小さい、請求項6に記載の光検出装置。
- 前記第1導電型はn型であり、前記第2導電型はp型である、請求項1〜7のいずれか一項に記載の光検出装置。
- 前記第2電圧は、前記キャップ層側から前記光吸収層の厚さの100%の位置に前記空乏層が達する電圧である、請求項1〜8のいずれか一項に記載の光検出装置。
- 前記第2電圧は、20V以下の電圧である、請求項1〜9のいずれか一項に記載の光検出装置。
- 前記第2電圧は、10V以下の電圧である、請求項1〜10のいずれか一項に記載の光検出装置。
- 前記第2電圧は、5V以下の電圧である、請求項1〜11のいずれか一項に記載の光検出装置。
- 前記光検出素子が感度を有するパルス光を出力する光源を更に備える、請求項1〜12のいずれか一項に記載の光検出装置。
- 前記光源は、10KHz以上の周波数で前記パルス光を出力する、請求項13に記載の光検出装置。
- 前記光検出素子は、前記半導体基板の厚さ方向から見た場合に前記第1半導体領域を囲むように前記キャップ層に形成された第2導電型の第2半導体領域を更に備える、請求項1〜14のいずれか一項に記載の光検出装置。
- 前記第2半導体領域は、前記半導体基板の厚さ方向から見た場合に前記第1半導体領域を囲むように前記キャップ層に形成された溝の内面に沿って形成されている、請求項15に記載の光検出装置。
- 前記溝の前記内面は、絶縁膜によって覆われている、請求項16に記載の光検出装置。
- 前記溝は、前記光吸収層と前記キャップ層との間に形成された第1導電型の緩和層に至っている、請求項16又は17に記載の光検出装置。
- 前記溝は、前記光吸収層に至っている、請求項16〜18のいずれか一項に記載の光検出装置。
- 前記第1半導体領域は、前記キャップ層内に複数形成されており、
前記光検出素子は、前記半導体基板の厚さ方向から見た場合に隣り合う前記第1半導体領域の間に位置するように前記キャップ層に形成された第2導電型の第2半導体領域を更に備える、請求項1〜14のいずれか一項に記載の光検出装置。 - 前記第2半導体領域は、前記半導体基板の厚さ方向から見た場合に隣り合う前記第1半導体領域の間に位置するように前記キャップ層に形成された溝の内面に沿って形成されている、請求項20に記載の光検出装置。
- 前記溝の前記内面は、絶縁膜によって覆われている、請求項21に記載の光検出装置。
- 前記溝は、前記光吸収層と前記キャップ層との間に形成された第1導電型の緩和層に至っている、請求項21又は22に記載の光検出装置。
- 前記溝は、前記光吸収層に至っている、請求項21〜23のいずれか一項に記載の光検出装置。
- 前記光検出素子は、前記幅方向において互いに対向する前記キャップ層の側面に沿って形成された第2導電型の第3半導体領域を更に備える、請求項6又は7に記載の光検出装置。
- 前記光検出素子は、前記光吸収層における前記半導体基板とは反対側の表面のうち前記キャップ層が形成されていない表面に沿って形成された第2導電型の第3半導体領域を更に備える、請求項6又は7に記載の光検出装置。
- 前記光検出素子は、前記キャップ層内に形成された第1層を更に備え、
前記第1層の組成は、前記キャップ層の組成と異なる、請求項1〜26のいずれか一項に記載の光検出装置。 - 前記光検出素子は、前記光吸収層と前記キャップ層との間に形成された第2層を更に備え、
前記第2層のキャリア濃度は、前記光吸収層及び前記キャップ層のキャリア濃度よりも大きい、請求項1〜27のいずれか一項に記載の光検出装置。
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