JP6606191B2 - 半導体加工用粘着シート - Google Patents

半導体加工用粘着シート Download PDF

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Publication number
JP6606191B2
JP6606191B2 JP2017554096A JP2017554096A JP6606191B2 JP 6606191 B2 JP6606191 B2 JP 6606191B2 JP 2017554096 A JP2017554096 A JP 2017554096A JP 2017554096 A JP2017554096 A JP 2017554096A JP 6606191 B2 JP6606191 B2 JP 6606191B2
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Japan
Prior art keywords
copolymer
ethylene
styrene
resin
semiconductor processing
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JP2017554096A
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English (en)
Japanese (ja)
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JPWO2017170437A1 (ja
Inventor
暁 河田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
THE FURUKAW ELECTRIC CO., LTD.
Original Assignee
THE FURUKAW ELECTRIC CO., LTD.
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Application filed by THE FURUKAW ELECTRIC CO., LTD. filed Critical THE FURUKAW ELECTRIC CO., LTD.
Publication of JPWO2017170437A1 publication Critical patent/JPWO2017170437A1/ja
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    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/20—Adhesives in the form of films or foils characterised by their carriers
    • C09J7/22—Plastics; Metallised plastics
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/20—Adhesives in the form of films or foils characterised by their carriers
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/20—Adhesives in the form of films or foils characterised by their carriers
    • C09J7/22—Plastics; Metallised plastics
    • C09J7/24—Plastics; Metallised plastics based on macromolecular compounds obtained by reactions involving only carbon-to-carbon unsaturated bonds
    • C09J7/241—Polyolefin, e.g.rubber
    • C09J7/243—Ethylene or propylene polymers
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
    • C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Adhesive Tapes (AREA)
  • Dicing (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Laminated Bodies (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
JP2017554096A 2016-03-31 2017-03-27 半導体加工用粘着シート Active JP6606191B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2016073264 2016-03-31
JP2016073264 2016-03-31
PCT/JP2017/012456 WO2017170437A1 (ja) 2016-03-31 2017-03-27 半導体加工用粘着シート

Publications (2)

Publication Number Publication Date
JPWO2017170437A1 JPWO2017170437A1 (ja) 2019-02-07
JP6606191B2 true JP6606191B2 (ja) 2019-11-13

Family

ID=59965578

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017554096A Active JP6606191B2 (ja) 2016-03-31 2017-03-27 半導体加工用粘着シート

Country Status (7)

Country Link
JP (1) JP6606191B2 (ko)
KR (1) KR102350744B1 (ko)
CN (1) CN107995997B (ko)
MY (1) MY186142A (ko)
SG (1) SG11201800287UA (ko)
TW (1) TWI654234B (ko)
WO (1) WO2017170437A1 (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7112205B2 (ja) * 2018-02-13 2022-08-03 株式会社ディスコ 分割装置
CN109536068B (zh) * 2018-11-16 2021-08-17 宁波激智科技股份有限公司 一种高粘保护膜及其制备方法
CN109880551A (zh) * 2019-03-05 2019-06-14 广东聚益新材有限公司 无醛阻燃粘结剂及其制备方法和应用、板状材料
WO2020196224A1 (ja) * 2019-03-26 2020-10-01 リンテック株式会社 剥離シート
CN111995812B (zh) * 2020-08-19 2022-06-14 中裕软管科技股份有限公司 一种燃气管道修复用的高气密性材料及其制备方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5140910B2 (ja) * 2005-08-30 2013-02-13 住友ベークライト株式会社 フィルム基材および半導体ウエハ加工用粘着テープ
JP2007100064A (ja) 2005-09-07 2007-04-19 Furukawa Electric Co Ltd:The ダイシング用粘着テープ
JP5143352B2 (ja) * 2005-11-14 2013-02-13 電気化学工業株式会社 フィルム基材及び粘着テープ
JP5448430B2 (ja) 2007-12-18 2014-03-19 古河電気工業株式会社 ウエハ貼着用貼着シートおよびウエハの加工方法
JPWO2011004825A1 (ja) * 2009-07-08 2012-12-20 古河電気工業株式会社 ウエハ貼着用粘着シートおよびそれを用いたウエハの加工方法
JP2011216704A (ja) * 2010-03-31 2011-10-27 Furukawa Electric Co Ltd:The 半導体ウェハ加工用粘着テープ
JP2013098443A (ja) * 2011-11-02 2013-05-20 Furukawa Electric Co Ltd:The 半導体用接着シート
JP5993255B2 (ja) 2012-09-11 2016-09-14 三菱樹脂株式会社 アクリル系樹脂フィルム及びダイシング用粘着シート
JP6107230B2 (ja) * 2013-02-28 2017-04-05 住友ベークライト株式会社 ダイシングフィルム
JP6264126B2 (ja) * 2014-03-20 2018-01-24 日立化成株式会社 ウエハ加工用テープ
JP6330468B2 (ja) 2014-05-13 2018-05-30 住友ベークライト株式会社 ダイシングフィルム用基材フィルムおよびダイシングフィルム
KR101858384B1 (ko) * 2014-07-01 2018-05-15 아사히 가세이 가부시키가이샤 폴리올레핀계 수지 조성물, 필름, 의료용 백 및 튜브

Also Published As

Publication number Publication date
SG11201800287UA (en) 2018-02-27
CN107995997B (zh) 2023-11-14
TW201800463A (zh) 2018-01-01
MY186142A (en) 2021-06-25
TWI654234B (zh) 2019-03-21
KR20180127300A (ko) 2018-11-28
WO2017170437A1 (ja) 2017-10-05
CN107995997A (zh) 2018-05-04
JPWO2017170437A1 (ja) 2019-02-07
KR102350744B1 (ko) 2022-01-14

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