JP6605871B2 - 基板浮上搬送装置 - Google Patents

基板浮上搬送装置 Download PDF

Info

Publication number
JP6605871B2
JP6605871B2 JP2015153105A JP2015153105A JP6605871B2 JP 6605871 B2 JP6605871 B2 JP 6605871B2 JP 2015153105 A JP2015153105 A JP 2015153105A JP 2015153105 A JP2015153105 A JP 2015153105A JP 6605871 B2 JP6605871 B2 JP 6605871B2
Authority
JP
Japan
Prior art keywords
substrate
levitation
auxiliary
state
floating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2015153105A
Other languages
English (en)
Japanese (ja)
Other versions
JP2017034104A (ja
Inventor
健史 濱川
大輔 奥田
俊裕 森
貫志 岡本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toray Engineering Co Ltd
Original Assignee
Toray Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toray Engineering Co Ltd filed Critical Toray Engineering Co Ltd
Priority to JP2015153105A priority Critical patent/JP6605871B2/ja
Priority to TW105119622A priority patent/TWI675788B/zh
Priority to KR1020160087888A priority patent/KR102605684B1/ko
Priority to CN201610579895.8A priority patent/CN106684014B/zh
Publication of JP2017034104A publication Critical patent/JP2017034104A/ja
Application granted granted Critical
Publication of JP6605871B2 publication Critical patent/JP6605871B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2812/00—Indexing codes relating to the kind or type of conveyors
    • B65G2812/16—Pneumatic conveyors
JP2015153105A 2015-08-03 2015-08-03 基板浮上搬送装置 Active JP6605871B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2015153105A JP6605871B2 (ja) 2015-08-03 2015-08-03 基板浮上搬送装置
TW105119622A TWI675788B (zh) 2015-08-03 2016-06-22 基板懸浮搬送裝置
KR1020160087888A KR102605684B1 (ko) 2015-08-03 2016-07-12 기판 부상 반송 장치
CN201610579895.8A CN106684014B (zh) 2015-08-03 2016-07-21 基板浮起输送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015153105A JP6605871B2 (ja) 2015-08-03 2015-08-03 基板浮上搬送装置

Publications (2)

Publication Number Publication Date
JP2017034104A JP2017034104A (ja) 2017-02-09
JP6605871B2 true JP6605871B2 (ja) 2019-11-13

Family

ID=57987307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015153105A Active JP6605871B2 (ja) 2015-08-03 2015-08-03 基板浮上搬送装置

Country Status (4)

Country Link
JP (1) JP6605871B2 (zh)
KR (1) KR102605684B1 (zh)
CN (1) CN106684014B (zh)
TW (1) TWI675788B (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108045983A (zh) * 2017-12-15 2018-05-18 天津市展特装饰工程有限公司 板材传送装置
DE102018125682B4 (de) * 2018-10-16 2023-01-19 Asm Assembly Systems Gmbh & Co. Kg Ejektorvorrichtung sowie Verfahren zum Unterstützen eines Ablösens eines auf einer Haltefolie angeordneten elektrischen Bauteils
JP2021150351A (ja) * 2020-03-17 2021-09-27 東レエンジニアリング株式会社 基板浮上搬送装置
KR102223467B1 (ko) * 2020-06-10 2021-03-05 세메스 주식회사 부상식 기판 이송 장치

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06163667A (ja) * 1992-11-18 1994-06-10 Ebara Corp 積載物の搬送用台車装置
JP4373175B2 (ja) * 2003-10-17 2009-11-25 オリンパス株式会社 基板搬送装置
TWI316503B (en) * 2005-01-26 2009-11-01 Sfa Engineering Corp Substrate transferring apparatus
JP2008260591A (ja) * 2007-04-10 2008-10-30 Nippon Sekkei Kogyo:Kk 薄板状材料搬送装置及び方法
JP2011114169A (ja) * 2009-11-27 2011-06-09 Sekisui Chem Co Ltd 表面処理装置及び搬送装置
JP2013115125A (ja) 2011-11-25 2013-06-10 Toray Eng Co Ltd 塗布装置
JP6032348B2 (ja) * 2013-02-26 2016-11-24 株式会社Ihi 搬送装置

Also Published As

Publication number Publication date
KR102605684B1 (ko) 2023-11-24
JP2017034104A (ja) 2017-02-09
KR20170016276A (ko) 2017-02-13
TWI675788B (zh) 2019-11-01
CN106684014A (zh) 2017-05-17
CN106684014B (zh) 2022-01-04
TW201708087A (zh) 2017-03-01

Similar Documents

Publication Publication Date Title
JP6605871B2 (ja) 基板浮上搬送装置
JP4896236B2 (ja) 基板搬送装置及び基板搬送方法
JP2011213435A (ja) 搬送装置及び塗布システム
KR20130045175A (ko) 부상 반송 장치
JP5028919B2 (ja) 基板搬送装置及び基板搬送方法
JP2013086241A (ja) チャック装置およびチャック方法
JP6033593B2 (ja) 基板搬送装置
KR20160115693A (ko) 가열 건조 장치
JP2004244186A (ja) 薄板の搬送用支持装置
JP2010143733A (ja) 基板ハンドリングシステム及び基板ハンドリング方法
WO2017163887A1 (ja) 基板浮上搬送装置
CN108525941B (zh) 涂覆装置以及涂覆方法
JP5888891B2 (ja) 基板搬送装置
JP4982292B2 (ja) 塗布装置及び塗布方法
JP6595276B2 (ja) 基板処理装置および基板処理方法
JP5165718B2 (ja) 基板処理装置
KR101212814B1 (ko) 개선된 코팅 영역의 기판 부상 장치 및 부상 방법, 및 이를 구비한 코팅 장치
JP6804155B2 (ja) 基板浮上搬送装置
JP2011246213A (ja) 基板搬送装置
KR101793021B1 (ko) 기판 반송 장치
JP2009011892A (ja) 塗布装置
JP5308647B2 (ja) 浮上搬送塗布装置
JP2017148761A (ja) 塗布装置
JP2018152441A (ja) 基板搬送装置、基板搬送方法および塗布装置
JP2021150351A (ja) 基板浮上搬送装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20180711

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20190328

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20190409

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190514

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20191002

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20191017

R150 Certificate of patent or registration of utility model

Ref document number: 6605871

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250