JP2017034104A - 基板浮上搬送装置 - Google Patents
基板浮上搬送装置 Download PDFInfo
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- JP2017034104A JP2017034104A JP2015153105A JP2015153105A JP2017034104A JP 2017034104 A JP2017034104 A JP 2017034104A JP 2015153105 A JP2015153105 A JP 2015153105A JP 2015153105 A JP2015153105 A JP 2015153105A JP 2017034104 A JP2017034104 A JP 2017034104A
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- 239000000758 substrate Substances 0.000 title claims abstract description 325
- 238000005339 levitation Methods 0.000 title claims abstract description 179
- 230000007246 mechanism Effects 0.000 claims description 32
- 238000001179 sorption measurement Methods 0.000 claims description 7
- 230000032258 transport Effects 0.000 description 53
- 239000011248 coating agent Substances 0.000 description 32
- 238000000576 coating method Methods 0.000 description 32
- 238000001035 drying Methods 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 238000007599 discharging Methods 0.000 description 3
- 230000003028 elevating effect Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2812/00—Indexing codes relating to the kind or type of conveyors
- B65G2812/16—Pneumatic conveyors
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Coating Apparatus (AREA)
Abstract
Description
2 塗布装置
3 基板搬送ユニット
4 補助浮上支持部
10 浮上ステージ部
12 平板部
12a 基板浮上面
30 基板保持部
33 吸着面
37 吸着ブロック
40 補助ブロック
Claims (6)
- 搬送方向に延び、基板浮上面上に基板を浮上させる浮上ステージ部と、
前記基板浮上面上に浮上した基板を保持する基板保持部と、
を備え、前記基板浮上面上に浮上した状態の基板を保持した状態で前記基板保持部が前記搬送方向に沿って移動することにより、基板が基板浮上面上に浮上した状態で搬送される基板浮上搬送装置において、
前記浮上ステージ部と前記基板保持部との間には、基準サイズの基板よりも搬送方向と直交する川幅方向寸法が大きい幅広基板を搬送する場合に、前記基板浮上面から川幅方向にはみ出す前記幅広基板のはみ出し領域を浮上させる補助浮上支持部を備えることを特徴とする基板浮上搬送装置。 - 前記補助浮上支持部は、その浮上機構が前記浮上ステージ部と同じ浮上機構を有していることを特徴とする請求項1に記載の基板浮上搬送装置。
- 前記補助浮上支持部は、前記浮上ステージ部に着脱自在に設けられており、前記幅広基板が搬送される場合に前記浮上ステージ部に取り付けられ、前記幅広基板は前記浮上ステージ部及び前記補助浮上支持部の浮上機構により浮上されることを特徴とする請求項1又は2に記載の基板浮上搬送装置。
- 前記基板保持部は、前記浮上ステージ部に対して川幅方向に位置調節可能に形成されており、前記補助浮上支持部が取り外されている場合には、前記浮上ステージ部に近接する位置に配置され、前記浮上ステージ部に前記補助浮上支持部が取り付けられた場合には、前記浮上ステージ部から離れた位置に配置されることを特徴とする請求項3に記載の基板浮上搬送装置。
- 前記補助浮上支持部は、前記基板保持部に設けられており、前記補助浮上支持部に設けられた吸着部により基準サイズの基板を吸着して保持し、前記基板保持部の吸着部により幅広基板が吸着されて保持されることを特徴とする請求項1又は2に記載の基板浮上搬送装置。
- 前記基板保持部の吸着部は、前記補助浮上支持部の吸着部よりも高さ位置が高く設定されており、前記基板保持部の吸着部により幅広基板が保持された状態では、前記補助浮上支持部の浮上機構により、前記浮上ステージ部における浮上状態と同じ浮上状態に維持されることを特徴とする請求項5に記載の基板浮上搬送装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015153105A JP6605871B2 (ja) | 2015-08-03 | 2015-08-03 | 基板浮上搬送装置 |
TW105119622A TWI675788B (zh) | 2015-08-03 | 2016-06-22 | 基板懸浮搬送裝置 |
KR1020160087888A KR102605684B1 (ko) | 2015-08-03 | 2016-07-12 | 기판 부상 반송 장치 |
CN201610579895.8A CN106684014B (zh) | 2015-08-03 | 2016-07-21 | 基板浮起输送装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015153105A JP6605871B2 (ja) | 2015-08-03 | 2015-08-03 | 基板浮上搬送装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017034104A true JP2017034104A (ja) | 2017-02-09 |
JP6605871B2 JP6605871B2 (ja) | 2019-11-13 |
Family
ID=57987307
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015153105A Expired - Fee Related JP6605871B2 (ja) | 2015-08-03 | 2015-08-03 | 基板浮上搬送装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6605871B2 (ja) |
KR (1) | KR102605684B1 (ja) |
CN (1) | CN106684014B (ja) |
TW (1) | TWI675788B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108045983A (zh) * | 2017-12-15 | 2018-05-18 | 天津市展特装饰工程有限公司 | 板材传送装置 |
CN117619596A (zh) * | 2022-08-24 | 2024-03-01 | 株式会社斯库林集团 | 涂布装置 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102018125682B4 (de) * | 2018-10-16 | 2023-01-19 | Asm Assembly Systems Gmbh & Co. Kg | Ejektorvorrichtung sowie Verfahren zum Unterstützen eines Ablösens eines auf einer Haltefolie angeordneten elektrischen Bauteils |
JP2021150351A (ja) * | 2020-03-17 | 2021-09-27 | 東レエンジニアリング株式会社 | 基板浮上搬送装置 |
KR102223467B1 (ko) * | 2020-06-10 | 2021-03-05 | 세메스 주식회사 | 부상식 기판 이송 장치 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06163667A (ja) * | 1992-11-18 | 1994-06-10 | Ebara Corp | 積載物の搬送用台車装置 |
JP2006206324A (ja) * | 2005-01-26 | 2006-08-10 | Sfa Engineering Corp | 基板搬送装置 |
JP2011114169A (ja) * | 2009-11-27 | 2011-06-09 | Sekisui Chem Co Ltd | 表面処理装置及び搬送装置 |
WO2014132339A1 (ja) * | 2013-02-26 | 2014-09-04 | 株式会社Ihi | 搬送装置 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4373175B2 (ja) * | 2003-10-17 | 2009-11-25 | オリンパス株式会社 | 基板搬送装置 |
JP2008260591A (ja) * | 2007-04-10 | 2008-10-30 | Nippon Sekkei Kogyo:Kk | 薄板状材料搬送装置及び方法 |
JP2013115125A (ja) | 2011-11-25 | 2013-06-10 | Toray Eng Co Ltd | 塗布装置 |
-
2015
- 2015-08-03 JP JP2015153105A patent/JP6605871B2/ja not_active Expired - Fee Related
-
2016
- 2016-06-22 TW TW105119622A patent/TWI675788B/zh not_active IP Right Cessation
- 2016-07-12 KR KR1020160087888A patent/KR102605684B1/ko active IP Right Grant
- 2016-07-21 CN CN201610579895.8A patent/CN106684014B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06163667A (ja) * | 1992-11-18 | 1994-06-10 | Ebara Corp | 積載物の搬送用台車装置 |
JP2006206324A (ja) * | 2005-01-26 | 2006-08-10 | Sfa Engineering Corp | 基板搬送装置 |
JP2011114169A (ja) * | 2009-11-27 | 2011-06-09 | Sekisui Chem Co Ltd | 表面処理装置及び搬送装置 |
WO2014132339A1 (ja) * | 2013-02-26 | 2014-09-04 | 株式会社Ihi | 搬送装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108045983A (zh) * | 2017-12-15 | 2018-05-18 | 天津市展特装饰工程有限公司 | 板材传送装置 |
CN117619596A (zh) * | 2022-08-24 | 2024-03-01 | 株式会社斯库林集团 | 涂布装置 |
Also Published As
Publication number | Publication date |
---|---|
CN106684014B (zh) | 2022-01-04 |
KR102605684B1 (ko) | 2023-11-24 |
KR20170016276A (ko) | 2017-02-13 |
TW201708087A (zh) | 2017-03-01 |
CN106684014A (zh) | 2017-05-17 |
JP6605871B2 (ja) | 2019-11-13 |
TWI675788B (zh) | 2019-11-01 |
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