JP6605655B2 - 洗浄溶液を製造するための装置及び方法 - Google Patents
洗浄溶液を製造するための装置及び方法 Download PDFInfo
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- JP6605655B2 JP6605655B2 JP2018090436A JP2018090436A JP6605655B2 JP 6605655 B2 JP6605655 B2 JP 6605655B2 JP 2018090436 A JP2018090436 A JP 2018090436A JP 2018090436 A JP2018090436 A JP 2018090436A JP 6605655 B2 JP6605655 B2 JP 6605655B2
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- 238000004140 cleaning Methods 0.000 title claims description 62
- 238000004519 manufacturing process Methods 0.000 title claims description 25
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 80
- 238000000034 method Methods 0.000 claims description 73
- 239000007788 liquid Substances 0.000 claims description 72
- 239000004094 surface-active agent Substances 0.000 claims description 71
- 239000000758 substrate Substances 0.000 claims description 65
- 239000002245 particle Substances 0.000 claims description 21
- 238000010438 heat treatment Methods 0.000 claims description 12
- 238000001816 cooling Methods 0.000 claims description 8
- 238000005406 washing Methods 0.000 claims description 5
- 239000000243 solution Substances 0.000 description 43
- 238000011084 recovery Methods 0.000 description 28
- 239000000126 substance Substances 0.000 description 5
- 239000000356 contaminant Substances 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000032258 transport Effects 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000010129 solution processing Methods 0.000 description 1
- 238000004148 unit process Methods 0.000 description 1
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133305—Flexible substrates, e.g. plastics, organic film
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D11/00—Special methods for preparing compositions containing mixtures of detergents
- C11D11/0094—Process for making liquid detergent compositions, e.g. slurries, pastes or gels
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D17/00—Detergent materials or soaps characterised by their shape or physical properties
- C11D17/04—Detergent materials or soaps characterised by their shape or physical properties combined with or containing other objects
- C11D17/041—Compositions releasably affixed on a substrate or incorporated into a dispensing means
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D17/00—Detergent materials or soaps characterised by their shape or physical properties
- C11D17/06—Powder; Flakes; Free-flowing mixtures; Sheets
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/43—Solvents
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
- C11D2111/10—Objects to be cleaned
- C11D2111/14—Hard surfaces
- C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
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- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Wood Science & Technology (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Nonlinear Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Description
Claims (11)
- 基板を洗浄する洗浄溶液を製造するための方法であって、
界面活性剤及び純水を第1の温度で混合することと、
前記界面活性剤及び前記純水を前記第1の温度で混合した後で、前記界面活性剤及び前記純水を前記第1の温度よりも低い第2の温度に冷却しながら前記界面活性剤及び前記純水を混合することと、
を包含し、
前記第1の温度が25℃よりも高く且つ30℃よりも低く、また前記第2の温度が室温よりも低く、
前記洗浄溶液中で形成される粒子径は、30μmを下回らない、
方法。 - 前記第1の温度が25℃よりも高く且つ27℃よりも低く、前記第2の温度が17℃よりも高く且つ19℃よりも低い、請求項1に記載の方法。
- 前記第1の温度が、25分よりも長く且つ35分よりも短い時間にわたって維持される、請求項2に記載の方法。
- 洗浄溶液を製造するための装置であって、
内部に液体混合スペースを有するハウジングと、
前記ハウジングに界面活性剤を供給するように構成された第1の供給部材と、
前記ハウジングに純水を供給するように構成された第2の供給部材と、
前記ハウジングに供給された前記界面活性剤及び前記純水を混合するように構成された混合ユニットと、
前記ハウジングに供給された前記界面活性剤及び前記純水の温度を調節するように構成された温度調節部材と、
前記第1の供給部材、前記第2の供給部材、前記混合ユニット、及び前記温度調節部材を制御するように構成されたコントローラと、
を備え、前記コントローラが、前記液体混合スペースに供給された前記界面活性剤及び前記純水を第1の温度で混合する第1の動作と、前記第1の動作で前記液体混合スペースに供給された前記界面活性剤及び前記純水を前記第1の温度よりも低い第2の温度に冷却する第2の動作を行うべく、前記第1の供給部材、前記第2の供給部材、前記混合ユニット、及び前記温度調節部材を制御し、
前記第1の温度が25℃よりも高く且つ30℃よりも低く、また前記第2の温度が室温よりも低く、
前記洗浄溶液中で形成される粒子径は、30μmを下回らない、
装置。 - 前記第1の温度が25℃よりも高く且つ27℃よりも低く、前記第2の温度が17℃よりも高く且つ19℃よりも低い、請求項4に記載の装置。
- 前記コントローラが、前記第1の温度が25分よりも長く且つ35分よりも短い時間にわたって維持されるように前記温度調節部材を制御する、請求項4に記載の装置。
- 前記第1の動作が、
前記液体混合スペースに前記純水を供給する、純水供給動作と、
前記純水供給動作の後で、前記液体混合スペースに供給された前記純水を前記第1の温度に加熱する、純水加熱動作と、
前記純水加熱動作の後で、前記液体混合スペースに前記界面活性剤を供給する、界面活性剤供給動作と、
前記界面活性剤供給動作の後で、前記液体混合スペースに供給された前記界面活性剤及び前記純水を前記第1の温度に維持しながら前記界面活性剤及び前記純水を混合する、混合動作と、
を含む、請求項4〜請求項6のいずれか一項に記載の装置。 - 前記混合ユニットが、
前記液体混合スペースに供給された液体が流れ、前記液体混合スペースに両方の端が接続される、循環ラインと、
前記液体が前記循環ラインにおいて循環するようにパワーを提供するように構成されたポンプと、
を備える、請求項7に記載の装置。 - 基板を洗浄する洗浄溶液を製造するための方法であって、
界面活性剤及び純水を第1の温度で混合する第1の動作、及び
前記第1の動作で混合された前記界面活性剤及び前記純水を第2の温度に冷却しながら前記界面活性剤及び前記純水を混合する第2の動作、
を含み、
前記第1の温度が25℃よりも高く且つ30℃よりも低く、また前記第2の温度が室温よりも低く、
前記洗浄溶液中で形成される粒子径は、30μmを下回らない、
方法。 - 前記第1の温度が25℃よりも高く且つ27℃よりも低く、前記第2の温度が17℃よりも高く且つ19℃よりも低い、請求項9に記載の方法。
- 前記第1の温度が、25分よりも長く且つ35分よりも短い時間にわたって維持される、請求項10に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020170060916A KR101955597B1 (ko) | 2017-05-17 | 2017-05-17 | 세정액 제조 장치 및 방법 |
KR10-2017-0060916 | 2017-05-17 |
Publications (2)
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JP2018195815A JP2018195815A (ja) | 2018-12-06 |
JP6605655B2 true JP6605655B2 (ja) | 2019-11-13 |
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JP2018090436A Active JP6605655B2 (ja) | 2017-05-17 | 2018-05-09 | 洗浄溶液を製造するための装置及び方法 |
Country Status (4)
Country | Link |
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US (1) | US20180335661A1 (ja) |
JP (1) | JP6605655B2 (ja) |
KR (1) | KR101955597B1 (ja) |
CN (1) | CN108962785B (ja) |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08231991A (ja) * | 1994-12-27 | 1996-09-10 | Hitachi Ltd | 洗浄用組成物、洗浄方法および洗浄液の製造方法 |
GB2335661A (en) * | 1998-03-26 | 1999-09-29 | Reckitt & Colman Inc | Hard surface cleaners comprising amphoteric surfactant |
KR20000067410A (ko) * | 1999-04-28 | 2000-11-15 | 윤종용 | 오존수로 이루어지는 반도체소자 제조용 세정액 및 그 세정액 제조장치 |
JP4459354B2 (ja) * | 1999-12-21 | 2010-04-28 | ライオン株式会社 | 界面活性剤を含有する粒状物の製造方法 |
CN101010421B (zh) * | 2004-08-31 | 2011-08-03 | 三洋化成工业株式会社 | 表面活性剂 |
KR100639615B1 (ko) * | 2004-11-02 | 2006-10-30 | 주식회사 하이닉스반도체 | 세정액 및 그를 이용한 반도체소자의 세정 방법 |
EP2428557A1 (en) * | 2005-12-30 | 2012-03-14 | LAM Research Corporation | Cleaning solution |
JP2008182221A (ja) * | 2006-12-28 | 2008-08-07 | Sanyo Chem Ind Ltd | 半導体基板用洗浄剤 |
WO2009078123A1 (ja) * | 2007-12-17 | 2009-06-25 | Sanyo Chemical Industries, Ltd. | 電子材料用洗浄剤及び洗浄方法 |
JP2009194049A (ja) * | 2008-02-13 | 2009-08-27 | Sanyo Chem Ind Ltd | 銅配線半導体用洗浄剤 |
KR101049441B1 (ko) * | 2008-02-28 | 2011-07-15 | 세메스 주식회사 | 기판 처리 장치 및 기판 처리 방법 |
US8105997B2 (en) * | 2008-11-07 | 2012-01-31 | Lam Research Corporation | Composition and application of a two-phase contaminant removal medium |
KR101116653B1 (ko) * | 2010-01-08 | 2012-03-07 | 세메스 주식회사 | 세정액 공급 장치 |
KR102098599B1 (ko) * | 2011-08-04 | 2020-04-09 | 세메스 주식회사 | 약액공급유닛 |
JP5792094B2 (ja) * | 2012-02-24 | 2015-10-07 | 東京エレクトロン株式会社 | 液処理装置、液処理方法および液処理方法を実行するためのコンピュータプログラムが記録された記録媒体 |
JP6422673B2 (ja) * | 2014-05-30 | 2018-11-14 | 株式会社Screenホールディングス | 基板処理装置 |
US10553421B2 (en) * | 2015-05-15 | 2020-02-04 | Tokyo Electron Limited | Substrate processing apparatus, substrate processing method and storage medium |
-
2017
- 2017-05-17 KR KR1020170060916A patent/KR101955597B1/ko active IP Right Grant
-
2018
- 2018-05-09 JP JP2018090436A patent/JP6605655B2/ja active Active
- 2018-05-16 US US15/980,807 patent/US20180335661A1/en not_active Abandoned
- 2018-05-17 CN CN201810472674.XA patent/CN108962785B/zh active Active
Also Published As
Publication number | Publication date |
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JP2018195815A (ja) | 2018-12-06 |
KR20180126643A (ko) | 2018-11-28 |
US20180335661A1 (en) | 2018-11-22 |
CN108962785B (zh) | 2022-07-05 |
KR101955597B1 (ko) | 2019-05-31 |
CN108962785A (zh) | 2018-12-07 |
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