WO2009078123A1 - 電子材料用洗浄剤及び洗浄方法 - Google Patents

電子材料用洗浄剤及び洗浄方法 Download PDF

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Publication number
WO2009078123A1
WO2009078123A1 PCT/JP2008/003342 JP2008003342W WO2009078123A1 WO 2009078123 A1 WO2009078123 A1 WO 2009078123A1 JP 2008003342 W JP2008003342 W JP 2008003342W WO 2009078123 A1 WO2009078123 A1 WO 2009078123A1
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WO
WIPO (PCT)
Prior art keywords
carbon atoms
cleaning agent
cleaning
hydrocarbon group
electronic material
Prior art date
Application number
PCT/JP2008/003342
Other languages
English (en)
French (fr)
Inventor
Yoshitaka Katsukawa
Kazumitsu Suzuki
Shohei Sato
Original Assignee
Sanyo Chemical Industries, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Chemical Industries, Ltd. filed Critical Sanyo Chemical Industries, Ltd.
Priority to KR1020107014846A priority Critical patent/KR101525275B1/ko
Priority to CN200880119796.5A priority patent/CN101888906B/zh
Publication of WO2009078123A1 publication Critical patent/WO2009078123A1/ja

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/02—Anionic compounds
    • C11D1/04—Carboxylic acids or salts thereof
    • C11D1/06—Ether- or thioether carboxylic acids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/02—Anionic compounds
    • C11D1/12—Sulfonic acids or sulfuric acid esters; Salts thereof
    • C11D1/14—Sulfonic acids or sulfuric acid esters; Salts thereof derived from aliphatic hydrocarbons or mono-alcohols
    • C11D1/143—Sulfonic acid esters
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/02—Anionic compounds
    • C11D1/12—Sulfonic acids or sulfuric acid esters; Salts thereof
    • C11D1/14—Sulfonic acids or sulfuric acid esters; Salts thereof derived from aliphatic hydrocarbons or mono-alcohols
    • C11D1/146—Sulfuric acid esters
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/02—Anionic compounds
    • C11D1/34—Derivatives of acids of phosphorus
    • C11D1/342—Phosphonates; Phosphinates or phosphonites
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/02—Anionic compounds
    • C11D1/34—Derivatives of acids of phosphorus
    • C11D1/345—Phosphates or phosphites
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/43—Solvents
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/10—Objects to be cleaned
    • C11D2111/14—Hard surfaces
    • C11D2111/22—Electronic devices, e.g. PCBs or semiconductors
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/40—Specific cleaning or washing processes
    • C11D2111/46—Specific cleaning or washing processes applying energy, e.g. irradiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Detergent Compositions (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

　アニオン成分が一般式(１)で示されるアニオン性界面活性剤(Ａ)と、炭素数６～１８のアルケン及び一般式(２)で示される有機溶剤からなる群から選ばれる１種以上の有機溶剤(Ｂ)とを含有してなり、前記(Ｂ)のＳＰ値が６～１３である電子材料用洗浄剤。 　Ｒ１[-(ＯＡ１)ａ-Ｑ- ]ｂ　　(１) [式中、Ｒ１は炭素数１～１０の炭化水素基、Ａ１は炭素数２～４のアルキレン基、Ｑ-は-ＣＯＯ-、-ＯＣＨ２ＣＯＯ-、-ＳＯ３-、-ＯＳＯ３-又は-ＯＰＯ２(ＯＲ２)-、Ｒ２は水素又は炭素数１～１０の炭化水素基、ａは平均値であって０～２０、ｂは１～６の整数、Ｑ-が-ＣＯＯ-又は-ＳＯ３-の場合ａは０である。] 　 Ｒ３[-(ＯＡ２)ｃ-ＯＨ]ｄ　　(２) [式中、Ｒ３は炭素数１～１２の炭化水素基、Ａ２は炭素数２～４のアルキレン基、ｃは平均値であって０～２０、ｄは１～６の整数である。]
PCT/JP2008/003342 2007-12-17 2008-11-17 電子材料用洗浄剤及び洗浄方法 WO2009078123A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020107014846A KR101525275B1 (ko) 2007-12-17 2008-11-17 전자 재료용 세정제 및 세정 방법
CN200880119796.5A CN101888906B (zh) 2007-12-17 2008-11-17 电子材料用清洗剂和清洗方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007324597 2007-12-17
JP2007-324597 2007-12-17
JP2008-022135 2008-01-31
JP2008022135 2008-01-31

Publications (1)

Publication Number Publication Date
WO2009078123A1 true WO2009078123A1 (ja) 2009-06-25

Family

ID=40795247

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/003342 WO2009078123A1 (ja) 2007-12-17 2008-11-17 電子材料用洗浄剤及び洗浄方法

Country Status (5)

Country Link
JP (1) JP5155121B2 (ja)
KR (1) KR101525275B1 (ja)
CN (1) CN101888906B (ja)
TW (1) TWI398515B (ja)
WO (1) WO2009078123A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011046807A (ja) * 2009-08-26 2011-03-10 Lion Corp ハードディスク基板用洗浄剤組成物、およびハードディスク基板の洗浄方法
WO2011031092A3 (ko) * 2009-09-11 2011-08-04 동우 화인켐 주식회사 평판표시장치 제조용 기판의 세정액 조성물
CN102575201A (zh) * 2009-09-11 2012-07-11 东友Fine-Chem股份有限公司 用于制造平面显示器的基板的清洗液组合物
JP2012177055A (ja) * 2011-02-28 2012-09-13 Sanyo Chem Ind Ltd 電子材料用洗浄剤
JP2013500601A (ja) * 2009-07-29 2013-01-07 ドンウ ファイン−ケム カンパニー．，リミティド． 洗浄液組成物及びこれを用いたパネルの洗浄方法

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5515588B2 (ja) * 2009-10-05 2014-06-11 栗田工業株式会社 ウエハ用洗浄水及びウエハの洗浄方法
JP5585076B2 (ja) * 2009-12-24 2014-09-10 栗田工業株式会社 洗浄方法
JP5401359B2 (ja) * 2010-02-16 2014-01-29 花王株式会社 硬質表面用アルカリ洗浄剤組成物
KR20140053003A (ko) * 2011-05-24 2014-05-07 아사히 가라스 가부시키가이샤 세정제 및 유리 기판의 세정 방법
TW201323102A (zh) * 2011-12-15 2013-06-16 Dongwoo Fine Chem Co Ltd 清洗製造有機el裝置的氣相沉積掩模的方法及清洗液
KR101997950B1 (ko) 2012-02-17 2019-07-08 미쯔비시 케미컬 주식회사 반도체 디바이스용 세정액 및 반도체 디바이스용 기판의 세정 방법
CN102911821B (zh) * 2012-10-25 2015-01-28 东莞市伟思化学科技有限公司 一种水基光学透镜清洗剂组合物
JP6234673B2 (ja) * 2012-12-05 2017-11-22 花王株式会社 ガラス基板の洗浄方法
US9537026B2 (en) * 2013-06-24 2017-01-03 Mitsubishi Electric Corporation Method for manufacturing solar-power-generator substrate and apparatus for manufacturing solar-power-generator substrate
JP6208575B2 (ja) * 2013-12-24 2017-10-04 花王株式会社 洗浄剤組成物
JP2016037606A (ja) * 2014-08-08 2016-03-22 三洋化成工業株式会社 電子材料用洗浄剤組成物及び電子材料の製造方法
CN107532115A (zh) 2015-06-24 2018-01-02 花王株式会社 玻璃制硬盘基板用清洗剂组合物
JP6771484B2 (ja) * 2015-11-30 2020-10-21 花王株式会社 磁気ディスク基板用研磨液組成物
WO2017139419A1 (en) * 2016-02-11 2017-08-17 Qiagen Waltham, Inc. Polyphenolic additives in sequencing-by-synthesis
CN105714585B (zh) * 2016-04-12 2017-10-31 张家港市德宝化工有限公司 一种用于合成纤维的还原清洗剂、其制备方法及应用
WO2018067763A1 (en) * 2016-10-06 2018-04-12 Fujifilm Electronic Materials U.S.A., Inc. Cleaning formulations for removing residues on semiconductor substrates
CN106753865A (zh) * 2016-11-29 2017-05-31 洛阳新巨能高热技术有限公司 电子材料清洗剂
CN106800982A (zh) * 2016-11-29 2017-06-06 洛阳新巨能高热技术有限公司 一种电子材料用清洗剂
CN106847691B (zh) * 2016-12-11 2020-05-22 安徽兆利光电科技有限公司 一种整流二极管清洗方法
CN110447090A (zh) * 2017-03-22 2019-11-12 三菱化学株式会社 半导体器件用基板的清洗液、半导体器件用基板的清洗方法、半导体器件用基板的制造方法和半导体器件用基板
KR101955597B1 (ko) * 2017-05-17 2019-05-31 세메스 주식회사 세정액 제조 장치 및 방법
JP7138432B2 (ja) * 2017-12-26 2022-09-16 花王株式会社 シリコンウェーハ製造方法
KR102029442B1 (ko) * 2018-01-04 2019-10-08 삼성전기주식회사 드라이필름 레지스트 제거용 박리조성물 및 이를 이용한 드라이필름 레지스트의 박리방법
JP2021042326A (ja) * 2019-09-12 2021-03-18 日華化学株式会社 電解洗浄剤及び金属の洗浄方法

Citations (1)

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Publication number Priority date Publication date Assignee Title
JPH05179289A (ja) * 1991-12-30 1993-07-20 Lion Corp 電子部品用洗浄剤組成物

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JPH05335294A (ja) * 1992-05-29 1993-12-17 Mitsubishi Gas Chem Co Inc 半導体基板洗浄液
KR100617855B1 (ko) * 2004-04-30 2006-08-28 산요가세이고교 가부시키가이샤 알칼리 세정제
WO2006025373A1 (ja) * 2004-08-31 2006-03-09 Sanyo Chemical Industries, Ltd. 界面活性剤

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05179289A (ja) * 1991-12-30 1993-07-20 Lion Corp 電子部品用洗浄剤組成物

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013500601A (ja) * 2009-07-29 2013-01-07 ドンウ ファイン−ケム カンパニー．，リミティド． 洗浄液組成物及びこれを用いたパネルの洗浄方法
JP2011046807A (ja) * 2009-08-26 2011-03-10 Lion Corp ハードディスク基板用洗浄剤組成物、およびハードディスク基板の洗浄方法
WO2011031092A3 (ko) * 2009-09-11 2011-08-04 동우 화인켐 주식회사 평판표시장치 제조용 기판의 세정액 조성물
CN102575201A (zh) * 2009-09-11 2012-07-11 东友Fine-Chem股份有限公司 用于制造平面显示器的基板的清洗液组合物
CN102575201B (zh) * 2009-09-11 2014-07-09 东友Fine-Chem股份有限公司 用于制造平面显示器的基板的清洗液组合物
JP2012177055A (ja) * 2011-02-28 2012-09-13 Sanyo Chem Ind Ltd 電子材料用洗浄剤

Also Published As

Publication number Publication date
KR101525275B1 (ko) 2015-06-02
CN101888906A (zh) 2010-11-17
JP5155121B2 (ja) 2013-02-27
TW200927914A (en) 2009-07-01
TWI398515B (zh) 2013-06-11
KR20100107003A (ko) 2010-10-04
JP2009206481A (ja) 2009-09-10
CN101888906B (zh) 2012-12-19

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