JP6599001B2 - 半導体装置および半導体装置の製造方法 - Google Patents
半導体装置および半導体装置の製造方法 Download PDFInfo
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- JP6599001B2 JP6599001B2 JP2018522350A JP2018522350A JP6599001B2 JP 6599001 B2 JP6599001 B2 JP 6599001B2 JP 2018522350 A JP2018522350 A JP 2018522350A JP 2018522350 A JP2018522350 A JP 2018522350A JP 6599001 B2 JP6599001 B2 JP 6599001B2
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Description
<構成>
まず、本発明の実施の形態1による半導体装置の構成について説明する。本実施の形態1では、半導体材料としてSiCを用いたプレーナゲート型SiC−SJ−MOSFETを一例として説明する。
次に、半導体装置1の製造方法について説明する。図2〜10は、半導体装置1の製造工程の一例を示す断面図である。
図14は、本発明の実施の形態2による半導体装置16の構成の一例を示す断面図であり、半導体材料としてSiCを用いたプレーナゲート型SiC−SJ−MOSFETの断面を示している。
図15は、本発明の実施の形態3による半導体装置17の構成の一例を示す断面図であり、半導体材料としてSiCを用いたプレーナゲート型SiC−SJ−MOSFETの断面を示している。
図16は、本発明の実施の形態4による半導体装置の構成の一例を示す平面図であり、半導体材料としてSiCを用いてプレーナゲート型SiC−SJ−MOSFETの断面を示している。
図19および図20は、それぞれ本発明の実施の形態5による半導体装置の構成の一例を示す平面図および断面図であり、半導体材料としてSiCを用いたプレーナゲート型SiC−SJ−MOSFETの例を示している。
図21は、本発明の実施の形態6による半導体装置18の構成の一例を示す断面図であり、半導体材料としてSiCを用いたプレーナゲート型SiC−SJ−MOSFETの断面を示している。
図22は、本発明の実施の形態7による半導体装置19の構成の一例を示す断面図であり、半導体材料としてSiCを用いたプレーナゲート型SiC−SJ−MOSFETの断面を示している。
Claims (12)
- 動作領域であるセル領域(CL)と、平面視において前記セル領域(CL)を囲む終端領域(ET)とを有する半導体装置であって、
基板(1)と、
前記基板(1)上において厚さ方向に延在し、かつ前記厚さ方向に対して垂直方向に前記セル領域(CL)から前記終端領域(ET)に渡って交互に形成された第1導電型のドリフト領域(3)および第2導電型のピラー領域(4)と、
前記終端領域(ET)において、複数の前記ピラー領域(4)にまたがって形成され、前記ドリフト領域(3)および前記ピラー領域(4)の表面から前記厚さ方向に形成された第2導電型のリサーフ層(10)と、
前記リサーフ層(10)の表面内に形成された、前記リサーフ層(10)よりも不純物濃度が高い第2導電型の高濃度領域(11)と、
を備え、
前記高濃度領域(11)の前記厚さ方向の下方には、前記ピラー領域(4)が形成されていないことを特徴とする、半導体装置。 - 前記高濃度領域(11)は、前記リサーフ層(10)が形成されている全ての前記ピラー領域(4)間に形成されていることを特徴とする、請求項1に記載の半導体装置。
- 前記高濃度領域(11)の前記垂直方向の幅は、前記終端領域(ET)の前記セル領域(CL)とは反対側に向かうに従って小さくなることを特徴とする、請求項1または2に記載の半導体装置。
- 前記高濃度領域(11)は、平面視において前記リサーフ層(10)を介して隣り合う前記ピラー領域(4)の間で前記ピラー領域(4)の間隔方向に複数形成されることを特徴とする、請求項1から3のいずれか1項に記載の半導体装置。
- 前記高濃度領域(11)の厚さは、前記リサーフ層(10)の厚さよりも小さいことを特徴とする、請求項1から4のいずれか1項に記載の半導体装置。
- 前記高濃度領域(11)の不純物濃度は、前記リサーフ層(10)の不純物濃度よりも10倍以上高いことを特徴とする、請求項1から5のいずれか1項に記載の半導体装置。
- 前記高濃度領域(11)は、平面視において前記リサーフ層(10)を介して隣り合う前記ピラー領域(4)の間で、前記ピラー領域(4)の長手方向に対して複数形成されることを特徴とする、請求項1から6のいずれか1項に記載の半導体装置。
- 動作領域であるセル領域(CL)と、平面視において前記セル領域(CL)を囲む終端領域(ET)とを有する半導体装置であって、
基板(1)と、
前記基板(1)上において厚さ方向に延在し、かつ前記厚さ方向に対して垂直方向に前記セル領域(CL)から前記終端領域(ET)に渡って交互に形成された第1導電型のドリフト領域(3)および第2導電型のピラー領域(4)と、
前記終端領域(ET)において、前記ドリフト領域(3)および前記ピラー領域(4)の表面から前記厚さ方向に、前記セル領域(CL)を囲むようにリング状に、離間して複数形成された第2導電型の耐圧保持構造(20)と、
前記耐圧保持構造(20)の表面内に形成された、前記ドリフト領域(3)よりも不純物濃度が高い第2導電型の高濃度領域(11)と、
を備え、
前記高濃度領域(11)の前記厚さ方向の下方には、前記ピラー領域(4)が形成されていないことを特徴とする、半導体装置。 - 前記ピラー領域(4)は、前記表面から前記基板(1)に達するように形成されていることを特徴とする、請求項1から8のいずれか1項に記載の半導体装置。
- 動作領域であるセル領域(CL)と、平面視において前記セル領域(CL)を囲む終端領域とを有する半導体装置の製造方法であって、
(a)基板(1)を準備する工程と、
(b)前記基板(1)上において厚さ方向に延在し、かつ前記厚さ方向に対して垂直方向に前記セル領域(CL)から前記終端領域(ET)に渡って交互に第1導電型のドリフト領域(3)および第2導電型のピラー領域(4)を形成する工程と、
(c)前記終端領域(ET)において、複数の前記ピラー領域(4)にまたがって、前記ドリフト領域(3)および前記ピラー領域(4)の表面から前記厚さ方向に第2導電型のリサーフ層(10)を形成する工程と、
(d)前記リサーフ層(10)の表面内において、前記リサーフ層(10)よりも不純物濃度が高く、かつ前記厚さ方向の下方には前記ピラー領域(4)が形成されないように前記第2導電型の高濃度領域(11)を形成する工程と、
を備える、半導体装置の製造方法。 - 前記工程(d)は、前記セル領域(CL)において、前記ピラー領域(4)の表面から前記厚さ方向に前記第2導電型のウェル領域(5)を形成し、
前記高濃度領域(11)は、前記ウェル領域(5)とともに形成されることを特徴とする、請求項10に記載の半導体装置の製造方法。 - 前記工程(d)は、前記セル領域(CL)において、前記ピラー領域(4)の表面から前記厚さ方向に前記第2導電型のウェルコンタクト領域(6)を形成し、
前記高濃度領域(11)は、前記ウェルコンタクト領域(6)とともに形成されることを特徴とする、請求項10に記載の半導体装置の製造方法。
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