JP6555903B2 - 位置検出装置およびこれを用いた装置 - Google Patents

位置検出装置およびこれを用いた装置 Download PDF

Info

Publication number
JP6555903B2
JP6555903B2 JP2015041075A JP2015041075A JP6555903B2 JP 6555903 B2 JP6555903 B2 JP 6555903B2 JP 2015041075 A JP2015041075 A JP 2015041075A JP 2015041075 A JP2015041075 A JP 2015041075A JP 6555903 B2 JP6555903 B2 JP 6555903B2
Authority
JP
Japan
Prior art keywords
signal
scale
position signal
absolute position
movable member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2015041075A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016161431A5 (enExample
JP2016161431A (ja
Inventor
石川　大介
大介 石川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2015041075A priority Critical patent/JP6555903B2/ja
Priority to US15/056,740 priority patent/US10113888B2/en
Priority to CN201610122228.7A priority patent/CN105937917A/zh
Publication of JP2016161431A publication Critical patent/JP2016161431A/ja
Publication of JP2016161431A5 publication Critical patent/JP2016161431A5/ja
Application granted granted Critical
Publication of JP6555903B2 publication Critical patent/JP6555903B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Transmission And Conversion Of Sensor Element Output (AREA)
JP2015041075A 2015-03-03 2015-03-03 位置検出装置およびこれを用いた装置 Active JP6555903B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015041075A JP6555903B2 (ja) 2015-03-03 2015-03-03 位置検出装置およびこれを用いた装置
US15/056,740 US10113888B2 (en) 2015-03-03 2016-02-29 Position detection apparatus, apparatus including the same and position detection method
CN201610122228.7A CN105937917A (zh) 2015-03-03 2016-03-03 位置检测设备、包括位置检测设备的设备和位置检测方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015041075A JP6555903B2 (ja) 2015-03-03 2015-03-03 位置検出装置およびこれを用いた装置

Publications (3)

Publication Number Publication Date
JP2016161431A JP2016161431A (ja) 2016-09-05
JP2016161431A5 JP2016161431A5 (enExample) 2018-04-12
JP6555903B2 true JP6555903B2 (ja) 2019-08-07

Family

ID=56844961

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015041075A Active JP6555903B2 (ja) 2015-03-03 2015-03-03 位置検出装置およびこれを用いた装置

Country Status (1)

Country Link
JP (1) JP6555903B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6917858B2 (ja) * 2017-10-16 2021-08-11 旭化成エレクトロニクス株式会社 角度検出装置、角度検出方法、およびプログラム
JP7118809B2 (ja) * 2018-08-27 2022-08-16 キヤノン株式会社 位置検出装置およびこれを備えた装置、位置検出方法およびコンピュータプログラム
JP6781226B2 (ja) * 2018-09-25 2020-11-04 ファナック株式会社 エンコーダ及び制御システム

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0754260B2 (ja) * 1991-03-07 1995-06-07 株式会社ミツトヨ アブソリュートエンコーダ
JP3137552B2 (ja) * 1995-02-27 2001-02-26 株式会社ミツトヨ アブソリュートエンコーダ
JP5286584B2 (ja) * 2007-06-19 2013-09-11 株式会社ミツトヨ 絶対位置測長型エンコーダ
JP2009036637A (ja) * 2007-08-01 2009-02-19 Sony Corp 変位測定装置

Also Published As

Publication number Publication date
JP2016161431A (ja) 2016-09-05

Similar Documents

Publication Publication Date Title
JP6147038B2 (ja) 位置検出装置、レンズ装置、撮像システム、および、工作装置
JP6316087B2 (ja) エンコーダ
US8546747B2 (en) Rotary encoder and optical apparatus
JP5877212B2 (ja) エンコーダ、エンコーダを用いた装置およびエンコーダ演算プログラム
US9279703B2 (en) Encoder and apparatus with the same
US10540559B2 (en) Position detection apparatus, lens apparatus, image pickup system, machine tool apparatus, position detection method, and non-transitory computer-readable storage medium which are capable of detecting abnormality
US8682154B2 (en) Position detecting unit, lens unit and camera furnished with same, lens unit manufacturing method, and position detecting method
JP6555903B2 (ja) 位置検出装置およびこれを用いた装置
JP6150462B2 (ja) 位置検出エンコーダおよびこれを用いた装置
JP6494330B2 (ja) 位置検出装置およびこれを用いた装置
JP2015121405A (ja) アブソリュートエンコーダおよび装置
JP5764189B2 (ja) 精密角度位置決め装置
US10113888B2 (en) Position detection apparatus, apparatus including the same and position detection method
JP2013234852A (ja) 位置検出エンコーダおよびこれを用いた装置
US10393550B2 (en) Encoder and apparatus having the same
JP6544945B2 (ja) 位置検出装置、これを用いた装置及び位置検出方法
JP6544946B2 (ja) 位置検出装置、これを用いた装置及び位置検出方法
JP7344283B2 (ja) モーションエンコーダ
JP6272129B2 (ja) 光学式エンコーダおよびこれを備えた装置
JP7005247B2 (ja) 回転角度検出装置及び電子機器
JP6541392B2 (ja) フォーカス制御装置、光学機器およびフォーカス制御プログラム
JPH0298619A (ja) ３次元測長装置

Legal Events

Date Code Title Description
A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180228

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20180228

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20181227

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20190205

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190403

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20190611

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20190709

R151 Written notification of patent or utility model registration

Ref document number: 6555903

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151