JP6553541B2 - 深紫外発光素子 - Google Patents
深紫外発光素子 Download PDFInfo
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- JP6553541B2 JP6553541B2 JP2016095537A JP2016095537A JP6553541B2 JP 6553541 B2 JP6553541 B2 JP 6553541B2 JP 2016095537 A JP2016095537 A JP 2016095537A JP 2016095537 A JP2016095537 A JP 2016095537A JP 6553541 B2 JP6553541 B2 JP 6553541B2
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- H—ELECTRICITY
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- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/24—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate of the light emitting region, e.g. non-planar junction
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- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
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- H01L33/0004—Devices characterised by their operation
- H01L33/0008—Devices characterised by their operation having p-n or hi-lo junctions
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- H01L33/0004—Devices characterised by their operation
- H01L33/002—Devices characterised by their operation having heterojunctions or graded gap
- H01L33/0025—Devices characterised by their operation having heterojunctions or graded gap comprising only AIIIBV compounds
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- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
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- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/14—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
- H01L33/145—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure with a current-blocking structure
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- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
- H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
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- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
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- H—ELECTRICITY
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- H01L33/00—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/52—Encapsulations
Description
図6は、比較例に係る深紫外発光素子のシミュレーション結果を示す図であり、側面32の傾斜角θaが70度の場合の光線追跡の結果を示す。図示されるように、側面32に向かう光線の多くが保護層30の外面30aから外に漏れ出しており、側面32に反射された後にn型クラッド層18に向かう光線の割合が極めて小さいことが分かる。このように、側面32の傾斜角θaが大きい場合には、側面32に向かう深紫外光を基板12の光取出面12bから取り出すことができない。
Claims (5)
- 光取出面と、
前記光取出面上に設けられるn型半導体層と、
前記n型半導体層上に設けられるn側電極と、
前記n型半導体層上の前記n側電極が設けられる領域とは異なる領域に設けられ、バンドギャップが3.4eV以上の活性層と、
前記活性層上に設けられるp型半導体層と、
前記活性層の側面を被覆し、前記活性層が発する深紫外光に対して透明な保護層と、を備え、
前記活性層が発する深紫外光は、前記光取出面から外部へ出力され、
前記活性層の側面は、前記n型半導体層と前記活性層の界面に対して傾斜し、その傾斜角が15度以上50度以下であり、
前記n型半導体層の側面は、前記n型半導体層と前記n側電極の界面から前記光取出面までの範囲において、前記n型半導体層と前記活性層の界面に対して垂直であることを特徴とする深紫外発光素子。 - 前記光取出面を有するサファイア基板を備え、
前記n型半導体層、前記活性層および前記p型半導体層はAlGaN系の半導体層であることを特徴とする請求項1に記載の深紫外発光素子。 - 前記保護層は、酸化シリコン(SiO 2 )、酸窒化シリコン(SiON)、窒化シリコン(SiN)、酸化アルミニウム(Al 2 O 3 )、または、窒化アルミニウム(AlN)を含むことを特徴とする請求項1または2に記載の深紫外発光素子。
- 前記活性層の側面の傾斜角は、20度以上40度以下であることを特徴とする請求項1から4のいずれか一項に記載の深紫外発光素子。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016095537A JP6553541B2 (ja) | 2016-05-11 | 2016-05-11 | 深紫外発光素子 |
CN201780023379.XA CN109314157B (zh) | 2016-05-11 | 2017-04-05 | 深紫外发光元件 |
KR1020187031728A KR102075286B1 (ko) | 2016-05-11 | 2017-04-05 | 심자외 발광 소자 |
PCT/JP2017/014238 WO2017195507A1 (ja) | 2016-05-11 | 2017-04-05 | 深紫外発光素子 |
TW106112670A TWI730079B (zh) | 2016-05-11 | 2017-04-14 | 深紫外線發光元件 |
US16/173,768 US11355670B2 (en) | 2016-05-11 | 2018-10-29 | Deep ultraviolet light emitting device |
Applications Claiming Priority (1)
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JP2016095537A JP6553541B2 (ja) | 2016-05-11 | 2016-05-11 | 深紫外発光素子 |
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JP2017204568A JP2017204568A (ja) | 2017-11-16 |
JP6553541B2 true JP6553541B2 (ja) | 2019-07-31 |
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US (1) | US11355670B2 (ja) |
JP (1) | JP6553541B2 (ja) |
KR (1) | KR102075286B1 (ja) |
CN (1) | CN109314157B (ja) |
TW (1) | TWI730079B (ja) |
WO (1) | WO2017195507A1 (ja) |
Families Citing this family (4)
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CN109103313A (zh) * | 2018-07-30 | 2018-12-28 | 华中科技大学鄂州工业技术研究院 | 一种深紫外led芯片的外延结构及其制备方法 |
JP6902569B2 (ja) | 2019-04-17 | 2021-07-14 | 日機装株式会社 | 半導体発光素子および半導体発光素子の製造方法 |
CN110491980B (zh) * | 2019-07-31 | 2021-08-24 | 厦门三安光电有限公司 | 一种紫外led芯片及其制备方法 |
GB2586861B (en) * | 2019-09-06 | 2022-01-19 | Plessey Semiconductors Ltd | Light Emitting Diode and method of forming a Light Emitting Diode |
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JPS5594530A (en) | 1979-01-12 | 1980-07-18 | Tokyo Shibaura Electric Co | Device for protecting multiple hysteresis motors |
JP4123830B2 (ja) * | 2002-05-28 | 2008-07-23 | 松下電工株式会社 | Ledチップ |
JP4889191B2 (ja) | 2003-06-20 | 2012-03-07 | モメンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社 | 導電性液状シリコーン組成物 |
US20060043433A1 (en) * | 2003-07-18 | 2006-03-02 | Sanyo Electric Co,. Ltd. | Light-emitting diode |
JP4868709B2 (ja) * | 2004-03-09 | 2012-02-01 | 三洋電機株式会社 | 発光素子 |
KR20060077801A (ko) * | 2004-12-31 | 2006-07-05 | 엘지전자 주식회사 | 고출력 발광 다이오드 및 그의 제조 방법 |
CN100440552C (zh) * | 2005-02-08 | 2008-12-03 | 晶元光电股份有限公司 | 发光二极管制作方法 |
JP5139005B2 (ja) * | 2007-08-22 | 2013-02-06 | 株式会社東芝 | 半導体発光素子及び半導体発光装置 |
CN101378100B (zh) * | 2007-08-29 | 2011-08-24 | 台达电子工业股份有限公司 | 发光二极管装置及其制造方法 |
JP2010141241A (ja) * | 2008-12-15 | 2010-06-24 | Seiko Epson Corp | 発光装置の製造方法および発光装置 |
JP5139519B2 (ja) * | 2009-09-01 | 2013-02-06 | 株式会社東芝 | 半導体発光素子及び半導体発光装置 |
JP5327154B2 (ja) * | 2009-12-25 | 2013-10-30 | 住友電気工業株式会社 | Iii族窒化物半導体レーザ素子、及びiii族窒化物半導体レーザ素子を作製する方法 |
JP5594530B2 (ja) | 2010-10-21 | 2014-09-24 | 創光科学株式会社 | 窒化物半導体紫外線発光素子 |
KR20120129449A (ko) * | 2011-05-20 | 2012-11-28 | 엘지이노텍 주식회사 | 자외선 발광 소자 |
US9318529B2 (en) * | 2012-09-07 | 2016-04-19 | Seoul Viosys Co., Ltd. | Wafer level light-emitting diode array |
JP5514283B2 (ja) * | 2012-11-07 | 2014-06-04 | 株式会社東芝 | 半導体発光素子及び半導体発光装置 |
US20160005919A1 (en) * | 2013-02-05 | 2016-01-07 | Tokuyama Corporation | Nitride semiconductor light emitting device |
CN104241455A (zh) * | 2013-06-11 | 2014-12-24 | 展晶科技(深圳)有限公司 | Led芯片及其制造方法 |
KR101513803B1 (ko) * | 2013-10-02 | 2015-04-20 | 광전자 주식회사 | 투명 기판 위에 직접 성장된 고 효율 AlGaInP 발광다이오드 및 그 제조방법 |
JP2015216352A (ja) * | 2014-04-24 | 2015-12-03 | 国立研究開発法人理化学研究所 | 紫外発光ダイオードおよびそれを備える電気機器 |
CN103928451A (zh) * | 2014-04-25 | 2014-07-16 | 南京琦光光电科技有限公司 | 一种基于紫光芯片的低光衰、高显指白光led光源模组 |
CN104465928A (zh) * | 2014-12-10 | 2015-03-25 | 聚灿光电科技(苏州)有限公司 | 具有镂空结构的led外延结构及其制作方法 |
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2016
- 2016-05-11 JP JP2016095537A patent/JP6553541B2/ja active Active
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2017
- 2017-04-05 WO PCT/JP2017/014238 patent/WO2017195507A1/ja active Application Filing
- 2017-04-05 KR KR1020187031728A patent/KR102075286B1/ko active IP Right Grant
- 2017-04-05 CN CN201780023379.XA patent/CN109314157B/zh active Active
- 2017-04-14 TW TW106112670A patent/TWI730079B/zh active
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2018
- 2018-10-29 US US16/173,768 patent/US11355670B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
WO2017195507A1 (ja) | 2017-11-16 |
US20190067520A1 (en) | 2019-02-28 |
KR20180127472A (ko) | 2018-11-28 |
US11355670B2 (en) | 2022-06-07 |
KR102075286B1 (ko) | 2020-02-07 |
TW201806184A (zh) | 2018-02-16 |
CN109314157A (zh) | 2019-02-05 |
CN109314157B (zh) | 2021-05-11 |
TWI730079B (zh) | 2021-06-11 |
JP2017204568A (ja) | 2017-11-16 |
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