JP6902569B2 - 半導体発光素子および半導体発光素子の製造方法 - Google Patents
半導体発光素子および半導体発光素子の製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims description 242
- 238000004519 manufacturing process Methods 0.000 title claims description 22
- 239000010410 layer Substances 0.000 claims description 351
- 239000000758 substrate Substances 0.000 claims description 97
- 239000011247 coating layer Substances 0.000 claims description 72
- 239000011347 resin Substances 0.000 claims description 67
- 229920005989 resin Polymers 0.000 claims description 67
- 239000000463 material Substances 0.000 claims description 44
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 21
- 229910002601 GaN Inorganic materials 0.000 claims description 18
- 238000005530 etching Methods 0.000 claims description 17
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 16
- 238000001312 dry etching Methods 0.000 claims description 10
- 239000012535 impurity Substances 0.000 claims description 9
- 238000005520 cutting process Methods 0.000 claims description 7
- 239000003989 dielectric material Substances 0.000 claims description 7
- 238000000926 separation method Methods 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000011241 protective layer Substances 0.000 description 29
- 230000001965 increasing effect Effects 0.000 description 18
- 239000010936 titanium Substances 0.000 description 12
- 238000000137 annealing Methods 0.000 description 10
- 239000010931 gold Substances 0.000 description 10
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 230000004888 barrier function Effects 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 4
- 238000000605 extraction Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910017855 NH 4 F Inorganic materials 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 1
- AUCDRFABNLOFRE-UHFFFAOYSA-N alumane;indium Chemical compound [AlH3].[In] AUCDRFABNLOFRE-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- NWAIGJYBQQYSPW-UHFFFAOYSA-N azanylidyneindigane Chemical compound [In]#N NWAIGJYBQQYSPW-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- JVPLOXQKFGYFMN-UHFFFAOYSA-N gold tin Chemical compound [Sn].[Au] JVPLOXQKFGYFMN-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
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- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
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- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
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- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
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Description
Claims (10)
- 基板上に設けられるn型不純物濃度が5×10 17 cm −3 以下であるAlGaN系半導体材料のベース層と、
前記ベース層上に設けられるn型窒化アルミニウムガリウム(AlGaN)系半導体材料のn型半導体層と、
前記n型半導体層上に設けられるAlGaN系半導体材料の活性層と、
前記活性層上に設けられるp型半導体層と、
前記n型半導体層、前記活性層および前記p型半導体層を被覆する誘電体材料の被覆層と、を備え、
前記活性層および前記p型半導体層のそれぞれは、前記基板に対して第1角度で傾斜して前記被覆層で被覆される傾斜面を有し、
前記n型半導体層および前記ベース層は、前記基板に対して前記第1角度よりも大きい第2角度で傾斜して前記被覆層で被覆される傾斜面を有することを特徴とする半導体発光素子。 - 前記被覆層は、前記ベース層の外周において前記ベース層と厚み方向に重ならないことを特徴とする請求項1に記載の半導体発光素子。
- 基板上に設けられるn型窒化アルミニウムガリウム(AlGaN)系半導体材料のn型半導体層と、
前記n型半導体層上に設けられるAlGaN系半導体材料の活性層と、
前記活性層上に設けられるp型半導体層と、
前記n型半導体層、前記活性層および前記p型半導体層を被覆する誘電体材料の被覆層と、を備え、
前記活性層および前記p型半導体層のそれぞれは、前記基板に対して第1角度で傾斜して前記被覆層で被覆される傾斜面を有し、
前記n型半導体層は、前記基板に対して前記第1角度よりも大きい第2角度で傾斜して前記被覆層で被覆される傾斜面を有し、
前記活性層の前記被覆層で被覆される表面の全体が前記基板に対して前記第1角度で傾斜することを特徴とする半導体発光素子。 - 前記第1角度は、40度以上55度未満であり、前記第2角度は、55度以上70度未満であることを特徴とする請求項1から3のいずれか一項に記載の半導体発光素子。
- 前記n型半導体層の前記第2角度で傾斜する部分の厚さは、前記活性層および前記p型半導体層のそれぞれの前記第1角度で傾斜する部分の厚さの合計よりも大きいことを特徴とする請求項1から4のいずれか一項に記載の半導体発光素子。
- 基板上にn型不純物濃度が5×10 17 cm −3 以下であるAlGaN系半導体材料のベース層、n型窒化アルミニウムガリウム(AlGaN)系半導体材料のn型半導体層、AlGaN系半導体材料の活性層およびp型半導体層を順に形成する工程と、
前記p型半導体層上の一部に前記基板に対して傾斜した第1側面を有する第1樹脂レジストを形成する工程と、
前記第1樹脂レジストの上から前記p型半導体層および前記活性層をドライエッチングし、前記第1樹脂レジストと重ならない領域にある前記n型半導体層を露出させ、前記p型半導体層および前記活性層のそれぞれに前記基板に対して第1角度となる傾斜面を形成する工程と、
前記p型半導体層、前記活性層および前記露出させた前記n型半導体層の上に、前記基板に対して傾斜した第2側面を有し、前記第2側面の角度が前記第1側面の角度よりも大きい第2樹脂レジストを形成する工程と、
前記第2樹脂レジストの上から前記n型半導体層および前記ベース層をドライエッチングし、前記第2樹脂レジストと重ならない領域にある前記n型半導体層を除去し、前記第2樹脂レジストと重ならない領域にある前記ベース層を露出させ、前記n型半導体層および前記ベース層に前記基板に対して前記第1角度よりも大きい第2角度となる傾斜面を形成する工程と、
前記露出させた前記ベース層の上面において前記ベース層の前記傾斜面の外周を囲うように定められる分離領域を避けて、前記p型半導体層、前記活性層、前記n型半導体層および前記ベース層のそれぞれの前記傾斜面を被覆する誘電体材料の被覆層を形成する工程と、を備えることを特徴とする半導体発光素子の製造方法。 - 前記分離領域において前記基板および前記ベース層を切断して個片化する工程をさらに備えることを特徴とする請求項6に記載の半導体発光素子の製造方法。
- 基板上にn型窒化アルミニウムガリウム(AlGaN)系半導体材料のn型半導体層、AlGaN系半導体材料の活性層およびp型半導体層を順に形成する工程と、
前記p型半導体層上の一部に前記基板に対して傾斜した第1側面を有する第1樹脂レジストを形成する工程と、
前記第1樹脂レジストの上から前記p型半導体層および前記活性層をドライエッチングし、前記第1樹脂レジストと重ならない領域にある前記n型半導体層を露出させ、前記p型半導体層および前記活性層のそれぞれに前記基板に対して第1角度となる傾斜面を形成する工程と、
前記p型半導体層、前記活性層および前記露出させた前記n型半導体層の上に、前記基板に対して傾斜した第2側面を有し、前記第2側面の角度が前記第1側面の角度よりも大きい第2樹脂レジストを形成する工程と、
前記第2樹脂レジストの上から前記n型半導体層をドライエッチングし、前記第2樹脂レジストと重ならない領域にある前記n型半導体層を除去し、前記n型半導体層に前記基板に対して前記第1角度よりも大きい第2角度となる傾斜面を形成する工程と、
前記p型半導体層、前記活性層および前記n型半導体層のそれぞれの前記傾斜面を被覆する誘電体材料の被覆層を形成する工程と、を備え、
前記活性層の前記被覆層で被覆される表面の全体が前記基板に対して前記第1角度で傾斜することを特徴とする半導体発光素子の製造方法。 - 前記露出させた前記n型半導体層上にn側コンタクト電極を形成する工程と、
前記傾斜面が形成された前記p型半導体層上にp側コンタクト電極を形成する工程と、をさらに備え、
前記被覆層は、前記n側コンタクト電極および前記p側コンタクト電極をさらに被覆するように形成されることを特徴とする請求項6から8のいずれか一項に記載の半導体発光素子の製造方法。 - 前記第2樹脂レジストの上からドライエッチングする工程のエッチング深さは、前記第1樹脂レジストの上からドライエッチングする工程のエッチング深さよりも大きいことを特徴とする請求項6から9のいずれか一項に記載の半導体発光素子の製造方法。
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US16/846,706 US11227976B2 (en) | 2019-04-17 | 2020-04-13 | Semiconductor light emitting element and method of manufacturing semiconductor light emitting element |
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