JP6552488B2 - オルガノシロキサン、硬化性シリコーン組成物、および半導体装置 - Google Patents
オルガノシロキサン、硬化性シリコーン組成物、および半導体装置 Download PDFInfo
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- JP6552488B2 JP6552488B2 JP2016525685A JP2016525685A JP6552488B2 JP 6552488 B2 JP6552488 B2 JP 6552488B2 JP 2016525685 A JP2016525685 A JP 2016525685A JP 2016525685 A JP2016525685 A JP 2016525685A JP 6552488 B2 JP6552488 B2 JP 6552488B2
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- curable silicone
- silicone composition
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- organosiloxane
- Prior art date
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- 239000000203 mixture Substances 0.000 title claims description 82
- 229920001296 polysiloxane Polymers 0.000 title claims description 75
- 125000005375 organosiloxane group Chemical group 0.000 title claims description 37
- 239000004065 semiconductor Substances 0.000 title claims description 23
- 125000003342 alkenyl group Chemical group 0.000 claims description 27
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 25
- 125000004432 carbon atom Chemical group C* 0.000 claims description 20
- 239000002318 adhesion promoter Substances 0.000 claims description 19
- 238000006459 hydrosilylation reaction Methods 0.000 claims description 17
- 239000003054 catalyst Substances 0.000 claims description 12
- 125000000217 alkyl group Chemical group 0.000 claims description 11
- 229920006136 organohydrogenpolysiloxane Polymers 0.000 claims description 9
- 125000001931 aliphatic group Chemical group 0.000 claims description 6
- 125000002947 alkylene group Chemical group 0.000 claims description 4
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 claims description 2
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 claims description 2
- 125000001183 hydrocarbyl group Chemical group 0.000 claims 1
- 239000002683 reaction inhibitor Substances 0.000 claims 1
- -1 glycidoxy groups Chemical group 0.000 description 64
- 239000000047 product Substances 0.000 description 23
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 20
- 229910052710 silicon Inorganic materials 0.000 description 19
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 18
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 17
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 15
- 238000010438 heat treatment Methods 0.000 description 13
- 238000006243 chemical reaction Methods 0.000 description 12
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 12
- 239000010703 silicon Substances 0.000 description 11
- 229910052684 Cerium Inorganic materials 0.000 description 10
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 10
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 10
- 125000003545 alkoxy group Chemical group 0.000 description 9
- GWXLDORMOJMVQZ-UHFFFAOYSA-N cerium Chemical compound [Ce] GWXLDORMOJMVQZ-UHFFFAOYSA-N 0.000 description 9
- 150000001875 compounds Chemical class 0.000 description 9
- 229920001577 copolymer Polymers 0.000 description 9
- 229920005989 resin Polymers 0.000 description 9
- 239000011347 resin Substances 0.000 description 9
- 239000007788 liquid Substances 0.000 description 8
- 150000003961 organosilicon compounds Chemical class 0.000 description 8
- 125000005372 silanol group Chemical group 0.000 description 8
- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 229910004283 SiO 4 Inorganic materials 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 7
- 239000000843 powder Substances 0.000 description 7
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- 125000003118 aryl group Chemical group 0.000 description 6
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 6
- 150000002430 hydrocarbons Chemical group 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 229910052697 platinum Inorganic materials 0.000 description 6
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 6
- 229910052709 silver Inorganic materials 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 0 *[Si](*)(C**N(C(N(CC1OC1)C(N1CC2OC2)=O)=O)C1=O)O Chemical compound *[Si](*)(C**N(C(N(CC1OC1)C(N1CC2OC2)=O)=O)C1=O)O 0.000 description 5
- 229910052693 Europium Inorganic materials 0.000 description 5
- 239000004954 Polyphthalamide Substances 0.000 description 5
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 125000003710 aryl alkyl group Chemical group 0.000 description 5
- QRUDEWIWKLJBPS-UHFFFAOYSA-N benzotriazole Chemical compound C1=CC=C2N[N][N]C2=C1 QRUDEWIWKLJBPS-UHFFFAOYSA-N 0.000 description 5
- 239000012964 benzotriazole Substances 0.000 description 5
- 125000003700 epoxy group Chemical group 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- 239000003960 organic solvent Substances 0.000 description 5
- 229920006375 polyphtalamide Polymers 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- QWENRTYMTSOGBR-UHFFFAOYSA-N 1H-1,2,3-Triazole Chemical compound C=1C=NNN=1 QWENRTYMTSOGBR-UHFFFAOYSA-N 0.000 description 4
- 125000000094 2-phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 4
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 4
- NSPMIYGKQJPBQR-UHFFFAOYSA-N 4H-1,2,4-triazole Chemical compound C=1N=CNN=1 NSPMIYGKQJPBQR-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 238000005481 NMR spectroscopy Methods 0.000 description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 4
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 description 4
- 239000000920 calcium hydroxide Substances 0.000 description 4
- 229910001861 calcium hydroxide Inorganic materials 0.000 description 4
- 239000004205 dimethyl polysiloxane Substances 0.000 description 4
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 4
- 229920005645 diorganopolysiloxane polymer Polymers 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 4
- 229920001843 polymethylhydrosiloxane Polymers 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 125000003944 tolyl group Chemical group 0.000 description 4
- 125000005023 xylyl group Chemical group 0.000 description 4
- 239000011787 zinc oxide Substances 0.000 description 4
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 3
- CMGDVUCDZOBDNL-UHFFFAOYSA-N 4-methyl-2h-benzotriazole Chemical compound CC1=CC=CC2=NNN=C12 CMGDVUCDZOBDNL-UHFFFAOYSA-N 0.000 description 3
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical group [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 229910052801 chlorine Inorganic materials 0.000 description 3
- 125000001309 chloro group Chemical group Cl* 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 125000004122 cyclic group Chemical group 0.000 description 3
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 3
- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 3
- 125000003438 dodecyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 3
- 125000001153 fluoro group Chemical group F* 0.000 description 3
- 239000012634 fragment Substances 0.000 description 3
- 125000005843 halogen group Chemical group 0.000 description 3
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 3
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 3
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 3
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- 125000001624 naphthyl group Chemical group 0.000 description 3
- 125000001971 neopentyl group Chemical group [H]C([*])([H])C(C([H])([H])[H])(C([H])([H])[H])C([H])([H])[H] 0.000 description 3
- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- 230000035515 penetration Effects 0.000 description 3
- 125000004344 phenylpropyl group Chemical group 0.000 description 3
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 3
- 125000002948 undecyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 3
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 2
- KLSJWNVTNUYHDU-UHFFFAOYSA-N Amitrole Chemical compound NC1=NC=NN1 KLSJWNVTNUYHDU-UHFFFAOYSA-N 0.000 description 2
- 150000000703 Cerium Chemical class 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 description 2
- 239000007983 Tris buffer Substances 0.000 description 2
- VYGUBTIWNBFFMQ-UHFFFAOYSA-N [N+](#[C-])N1C(=O)NC=2NC(=O)NC2C1=O Chemical group [N+](#[C-])N1C(=O)NC=2NC(=O)NC2C1=O VYGUBTIWNBFFMQ-UHFFFAOYSA-N 0.000 description 2
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 2
- 229910052783 alkali metal Inorganic materials 0.000 description 2
- 125000005370 alkoxysilyl group Chemical group 0.000 description 2
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 125000004369 butenyl group Chemical group C(=CCC)* 0.000 description 2
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 2
- 239000007809 chemical reaction catalyst Substances 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- IJOOHPMOJXWVHK-UHFFFAOYSA-N chlorotrimethylsilane Chemical compound C[Si](C)(C)Cl IJOOHPMOJXWVHK-UHFFFAOYSA-N 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 125000003493 decenyl group Chemical group [H]C([*])=C([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 125000005388 dimethylhydrogensiloxy group Chemical group 0.000 description 2
- 238000004821 distillation Methods 0.000 description 2
- 125000005066 dodecenyl group Chemical group C(=CCCCCCCCCCC)* 0.000 description 2
- BITPLIXHRASDQB-UHFFFAOYSA-N ethenyl-[ethenyl(dimethyl)silyl]oxy-dimethylsilane Chemical compound C=C[Si](C)(C)O[Si](C)(C)C=C BITPLIXHRASDQB-UHFFFAOYSA-N 0.000 description 2
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000002223 garnet Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 2
- 125000006038 hexenyl group Chemical group 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- ZFSLODLOARCGLH-UHFFFAOYSA-N isocyanuric acid Chemical compound OC1=NC(O)=NC(O)=N1 ZFSLODLOARCGLH-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 125000005187 nonenyl group Chemical group C(=CCCCCCCC)* 0.000 description 2
- 125000004365 octenyl group Chemical group C(=CCCCCCC)* 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 125000002255 pentenyl group Chemical group C(=CCCC)* 0.000 description 2
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- IALUUOKJPBOFJL-UHFFFAOYSA-N potassium oxidosilane Chemical compound [K+].[SiH3][O-] IALUUOKJPBOFJL-UHFFFAOYSA-N 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 238000010992 reflux Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 159000000000 sodium salts Chemical class 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- XTQHKBHJIVJGKJ-UHFFFAOYSA-N sulfur monoxide Chemical compound S=O XTQHKBHJIVJGKJ-UHFFFAOYSA-N 0.000 description 2
- ITMCEJHCFYSIIV-UHFFFAOYSA-N triflic acid Chemical compound OS(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-N 0.000 description 2
- ZNOCGWVLWPVKAO-UHFFFAOYSA-N trimethoxy(phenyl)silane Chemical compound CO[Si](OC)(OC)C1=CC=CC=C1 ZNOCGWVLWPVKAO-UHFFFAOYSA-N 0.000 description 2
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 2
- 125000005065 undecenyl group Chemical group C(=CCCCCCCCCC)* 0.000 description 2
- 239000008096 xylene Substances 0.000 description 2
- 229910052727 yttrium Inorganic materials 0.000 description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 2
- 125000006273 (C1-C3) alkyl group Chemical group 0.000 description 1
- KWEKXPWNFQBJAY-UHFFFAOYSA-N (dimethyl-$l^{3}-silanyl)oxy-dimethylsilicon Chemical compound C[Si](C)O[Si](C)C KWEKXPWNFQBJAY-UHFFFAOYSA-N 0.000 description 1
- HMVBQEAJQVQOTI-SOFGYWHQSA-N (e)-3,5-dimethylhex-3-en-1-yne Chemical compound CC(C)\C=C(/C)C#C HMVBQEAJQVQOTI-SOFGYWHQSA-N 0.000 description 1
- GRGVQLWQXHFRHO-AATRIKPKSA-N (e)-3-methylpent-3-en-1-yne Chemical compound C\C=C(/C)C#C GRGVQLWQXHFRHO-AATRIKPKSA-N 0.000 description 1
- MDTUWBLTRPRXBX-UHFFFAOYSA-N 1,2,4-triazol-3-one Chemical compound O=C1N=CN=N1 MDTUWBLTRPRXBX-UHFFFAOYSA-N 0.000 description 1
- FMCUPJKTGNBGEC-UHFFFAOYSA-N 1,2,4-triazol-4-amine Chemical compound NN1C=NN=C1 FMCUPJKTGNBGEC-UHFFFAOYSA-N 0.000 description 1
- ZEWJFUNFEABPGL-UHFFFAOYSA-N 1,2,4-triazole-3-carboxamide Chemical compound NC(=O)C=1N=CNN=1 ZEWJFUNFEABPGL-UHFFFAOYSA-N 0.000 description 1
- NWUYHJFMYQTDRP-UHFFFAOYSA-N 1,2-bis(ethenyl)benzene;1-ethenyl-2-ethylbenzene;styrene Chemical compound C=CC1=CC=CC=C1.CCC1=CC=CC=C1C=C.C=CC1=CC=CC=C1C=C NWUYHJFMYQTDRP-UHFFFAOYSA-N 0.000 description 1
- LZTSCEYDCZBRCJ-UHFFFAOYSA-N 1,2-dihydro-1,2,4-triazol-3-one Chemical compound OC=1N=CNN=1 LZTSCEYDCZBRCJ-UHFFFAOYSA-N 0.000 description 1
- ASOKPJOREAFHNY-UHFFFAOYSA-N 1-Hydroxybenzotriazole Chemical compound C1=CC=C2N(O)N=NC2=C1 ASOKPJOREAFHNY-UHFFFAOYSA-N 0.000 description 1
- AJARSKDYXXACJR-UHFFFAOYSA-N 1-[(dibutylamino)methyl]benzotriazole-4-carboxylic acid Chemical compound C1=CC=C2N(CN(CCCC)CCCC)N=NC2=C1C(O)=O AJARSKDYXXACJR-UHFFFAOYSA-N 0.000 description 1
- LQPDFQFGNCXQSL-UHFFFAOYSA-N 1-[(dioctylamino)methyl]benzotriazole-4-carboxylic acid Chemical compound C1=CC=C2N(CN(CCCCCCCC)CCCCCCCC)N=NC2=C1C(O)=O LQPDFQFGNCXQSL-UHFFFAOYSA-N 0.000 description 1
- KGEPBYXGRXRFGU-UHFFFAOYSA-N 1-[[bis(2-ethylhexyl)amino]methyl]benzotriazole-4-carboxylic acid Chemical compound C1=CC=C2N(CN(CC(CC)CCCC)CC(CC)CCCC)N=NC2=C1C(O)=O KGEPBYXGRXRFGU-UHFFFAOYSA-N 0.000 description 1
- RWNUSVWFHDHRCJ-UHFFFAOYSA-N 1-butoxypropan-2-ol Chemical compound CCCCOCC(C)O RWNUSVWFHDHRCJ-UHFFFAOYSA-N 0.000 description 1
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 1
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- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
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Description
で表される基であり、mは0〜50の整数、nは1〜50の整数である。}
で表される。
(A)一分子中に少なくとも2個のアルケニル基を有するオルガノポリシロキサン 100質量部、
(B)一分子中に少なくとも2個のケイ素原子結合水素原子を有するオルガノハイドロジェンポリシロキサン{(A)成分と(C)成分に含まれるアルケニル基の合計1モルに対して、0.1〜10.0モルのケイ素原子結合水素原子を提供する量}、
(C)上記のオルガノシロキサンからなる接着促進剤 0.01〜50質量部、および
(D)ヒドロシリル化反応用触媒(本組成物の硬化を促進するに十分な量)
から少なくともなるものである。
本発明の硬化性シリコーン組成物は、上記のオルガノシロキサンを接着促進剤として含有することを特徴とする。このような硬化性シリコーン組成物の硬化機構は限定されず、ヒドロシリル化反応、縮合反応、ラジカル反応が例示され、好ましくは、ヒドロシリル化反応である。このヒドロシリル化反応硬化性シリコーン組成物としては、
(A)一分子中に少なくとも2個のアルケニル基を有するオルガノポリシロキサン 100質量部、
(B)一分子中に少なくとも2個のケイ素原子結合水素原子を有するオルガノハイドロジェンポリシロキサン{(A)成分と(C)成分に含まれるアルケニル基の合計1モルに対して、0.1〜10モルのケイ素原子結合水素原子を提供する量}、
(C)上記のオルガノシロキサンからなる接着促進剤 0.01〜50質量部、および
(D)ヒドロシリル化反応用触媒
から少なくともなるものが好ましい。
ViMe2SiO(Me2SiO)xSiMe2Vi
ViPhMeSiO(Me2SiO)xSiMePhVi
ViPh2SiO(Me2SiO)xSiPh2Vi
ViMe2SiO(Me2SiO)x(Ph2SiO)x'SiMe2Vi
ViPhMeSiO(Me2SiO)x(Ph2SiO)x'SiPhMeVi
ViPh2SiO(Me2SiO)x(Ph2SiO)x'SiPh2Vi
ViMe2SiO(MePhSiO)zSiMe2Vi
MePhViSiO(MePhSiO)xSiMePhVi
Ph2ViSiO(MePhSiO)xSiPh2Vi
ViMe2SiO(Ph2SiO)x(PhMeSiO)x'SiMe2Vi
ViPhMeSiO(Ph2SiO)x(PhMeSiO)x'SiPhMeVi
ViPh2SiO(Ph2SiO)x(PhMeSiO)x'SiPh2Vi
HMe2SiO(Ph2SiO)ySiMe2H
HMePhSiO(Ph2SiO)ySiMePhH
HMeNaphSiO(Ph2SiO)ySiMeNaphH
HMePhSiO(Ph2SiO)y(MePhSiO)y'SiMePhH
HMePhSiO(Ph2SiO)y(Me2SiO)y'SiMePhH
(HMe2SiO1/2)c(PhSiO3/2)d
(HMePhSiO1/2)c(PhSiO3/2)d
(HMePhSiO1/2)c(NaphSiO3/2)d
(HMe2SiO1/2)c(NaphSiO3/2)d
(HMePhSiO1/2)c(HMe2SiO1/2)d(PhSiO3/2)e
(HMe2SiO1/2)c(Ph2SiO2/2)d(PhSiO3/2)e
(HMePhSiO1/2)c(Ph2SiO2/2)d(PhSiO3/2)e
(HMe2SiO1/2)c(Ph2SiO2/2)d(NaphSiO3/2)e
(HMePhSiO1/2)c(Ph2SiO2/2)d(NaphSiO3/2)e
(HMePhSiO1/2)c(HMe2SiO1/2)d(NaphSiO3/2)e
(HMePhSiO1/2)c(HMe2SiO1/2)d(Ph2SiO2/2)e(NaphSiO3/2)f
(HMePhSiO1/2)c(HMe2SiO1/2)d(Ph2SiO2/2)e(PhSiO3/2)f
本発明の半導体装置は、上記の硬化性シリコーン組成物の硬化物により半導体素子を封止してなることを特徴とする。このような本発明の半導体装置としては、発光ダイオード(LED)、フォトカプラー、CCDが例示される。また、半導体素子としては、発光ダイオード(LED)チップ、固体撮像素子が例示される。
反応容器に、フェニルトリメトキシシラン 400g(2.02mol)および1,3−ジビニル−1,3−ジフェニルジメチルジシロキサン 93.5g(0.30mol)を投入し、予め混合した後、トリフルオロメタンスルホン酸 1.74g(11.6mmol)を投入し、撹拌下、水 110g(6.1mol)を投入し、2時間加熱還流を行った。その後、85℃になるまで加熱常圧留去を行った。次いで、トルエン 89gおよび水酸化カリウム 1.18g(21.1mmol)を投入し、反応温度が120℃になるまで加熱常圧留去を行い、この温度で6時間反応させた。その後、室温まで冷却し、酢酸 0.68g(11.4mmol)を投入し、中和した。生成した塩を濾別した後、得られた透明な溶液から低沸点物を加熱減圧除去して、平均単位式:
(MePhViSiO1/2)0.23(PhSiO3/2)0.77
で表されるオルガノポリシロキサンレジン 347g(収率:98%)を調製した。
反応容器に、平均式:
で表されるオルガノシロキサンであることがわかった。
反応容器に、式:
で表されるオルガノシロキサンであることがわかった。
反応容器に、式:
で表されるオルガノシロキサンであることがわかった。
下記の成分を用いて、表1に示した硬化性シリコーン組成物を調製した。なお、表1中、(D)成分の含有量は、質量単位における、硬化性シリコーン組成物に対する白金金属の含有量(ppm)で示した。また、表1中、SiH/Viは、(A)成分および(C)成分に含まれるアルケニル基の合計1モルに対する、(B)成分中のケイ素原子結合水素原子のモル数を示した。
(A−1)成分: 平均単位式:
(Me2ViSiO1/2)0.2(PhSiO3/2)0.8
で表されるオルガノポリシロキサン
(A−2)成分: 参考例1で調製した、平均単位式
(MePhViSiO1/2)0.23(PhSiO3/2)0.77
で表されるオルガノポリシロキサン
(A−3)成分: 粘度3,000mPa・sの分子鎖両末端ジメチルビニルシロキシ基封鎖メチルフェニルポリシロキサン
(B−1)成分: 式:
HMe2SiOPh2SiOSiMe2H
で表されるオルガノトリシロキサン
(C−1)成分: 実施例1で調製したオルガノシロキサンからなる接着促進剤
(C−2)成分: 実施例2で調製したオルガノシロキサンからなる接着促進剤
(C−3)成分: 実施例3で調製したオルガノシロキサンからなる接着促進剤
(C−4)成分: 25℃における粘度が30mPa・sである分子鎖両末端シラノール基封鎖メチルビニルシロキサンオリゴマーと3−グリシドキシプロピルトリメトキシシランの縮合反応物からなる接着促進剤
(D−1)成分: 白金−1,3−ジビニル−1,1,3,3−テトラメチルジシロキサン錯体の1,3,5,7−テトラメチル−1,3,5,7−テトラビニルシクロテトラシロキサンの溶液(白金として0.1質量%含有する溶液)
直径5mmの穴を開けた、厚さ2mmのフッ素樹脂製のスペーサーを接着用テストパネル(アルミニウム板、PPA樹脂板、銀板)上に設置し、上記スペーサーの穴の中に硬化性シリコーン組成物を流し込んだ後、150℃の熱風循環式オーブン中で1時間放置することで、直径5mm×高さ2mmの円柱状の硬化物を作製した。この硬化物を、ダイシェア強度測定装置を用い50mm/分の速度で剥離し、そのときの荷重(MPa)を測定した。
底部が塞がった円筒状のポリフタルアミド(PPA)樹脂製枠材5(内径2.0mm、深さ1.0mm)の内底部の中心部に向かって、リードフレーム2、3が側壁から延出しており、リードフレーム2の中央部上にLEDチップ1が載置されており、LEDチップ1とリードフレーム3はボンディングワイヤ4により電気的に接続している未封止の発光ダイオード内に、脱泡した硬化性シリコーン組成物をディスペンサーにより注入した。その後、加熱オーブン中、100℃で30分、続いて150℃で1時間加熱して、硬化性シリコーン組成物を硬化させることにより、図1に示す発光ダイオードを作製した。
上記の方法で作製した16個の発光ダイオードを、市販の赤インクに浸漬し、50℃で24時間放置した。放置後、顕微鏡で赤インクの発光ダイオード内への浸み込みを観察し、次のように評価した。
◎: インクの浸み込みが確認された発光ダイオードが2個以下である。
△: インクの浸み込みが確認された発光ダイオードが3個〜8個である。
×: インクの浸み込みが確認された発光ダイオードが9個以上である。
上記の方法で作製した16個の発光ダイオードを、−40℃で30分間、次いで125℃で30分間の温度サイクルを1サイクルとするヒートサイクル試験を1000サイクル行い、その後、通電してLEDの点灯を調査し、次のように評価した。
◎: 点灯した発光ダイオードが14個以上である。
○: 点灯した発光ダイオードが8個〜13個である。
△: 点灯した発光ダイオードが7個以下である。
次の成分を用いて、表2に示した硬化性シリコーン組成物を調製した。なお、表2中、(D)成分の含有量は、質量単位における、硬化性シリコーン組成物に対する白金金属の含有量(ppm)で示した。また、表2中、SiH/Viは、(A)成分および(C)成分に含まれるアルケニル基の合計1モルに対する、(B)成分中のケイ素原子結合水素原子のモル数を示した。
(A−4)成分: 粘度300mPa・sであり、平均式:
Me2ViSiO(Me2SiO)150SiMe2Vi
で表される分子鎖両末端ジメチルビニルシロキシ基封鎖ジメチルポリシロキサン(ビニル基の含有量=0.48質量%)
(A−5)成分: 粘度10,000mPa・sであり、平均式:
Me2ViSiO(Me2SiO)500SiMe2Vi
で表される分子鎖両末端ジメチルビニルシロキシ基封鎖ジメチルポリシロキサン(ビニル基の含有量=0.15質量%)
(A−6)成分: 25℃において白色固体状で、トルエン可溶性である、平均単位式:
(Me2ViSiO1/2)0.15(Me3SiO1/2)0.47(SiO4/2)0.38(HO1/2)0.0001
で表される一分子中に2個以上のビニル基を有するオルガノポリシロキサンレジン(ビニル基の含有量=5.4質量%)
(A−7)成分: 25℃において白色固体状で、トルエン可溶性である、平均単位式:
(Me2ViSiO1/2)0.15(Me3SiO1/2)0.38(SiO4/2)0.47(HO1/2)0.01
で表される一分子中に2個以上のビニル基を有するオルガノポリシロキサン(ビニル基の含有量=4.2質量%)
(A−8)成分: 25℃において白色固体状で、トルエン可溶性の平均単位式:
(PhSiO3/2)0.75(Me2ViSiO1/2)0.25
で表される一分子中に2個以上のビニル基を有するオルガノポリシロキサン(ビニル基の含有量=5.6質量%)
(B−2)成分: 平均式:
Me3SiO(MeHSiO)55SiMe3
で表される、粘度20mPa・sの分子鎖両末端トリメチルシロキシ基封鎖ポリメチルハイドロジェンシロキサン(ケイ素原子結合水素原子含有量=1.6質量%)
(B−3)成分: 平均単位式:
(PhSiO3/2)0.4(HMe2SiO1/2)0.6
で表される、粘度25mPa・sの一分子中に2個以上のケイ素原子結合水素原子を有する分岐鎖状オルガノポリシロキサン(ケイ素原子結合水素原子の含有量=0.65質量%)
(D−2)成分: 白金の1,3−ジビニルテトラメチルジシロキサン錯体の1,3−ジビニルテトラメチルジシロキサン溶液(白金金属の含有量=約5000ppm)
(E−1)成分: 1−エチニルシクロヘキサン−1−オール
硬化性シリコーン組成物を150℃で1時間、5MPaの圧力でプレス成形することによりシート状の硬化物を作製した。このシート状の硬化物の硬さをJIS K 6253に規定されるタイプAデュロメータにより測定した。その結果を表2に示した。
底部が塞がった円筒状のポリフタルアミド(PPA)樹脂製枠材5(内径2.0mm、深さ1.0mm)の内底部の中心部に向かって、リードフレーム2、3が側壁から延出しており、リードフレーム2の中央部上にLEDチップ1が載置されており、LEDチップ1とリードフレーム3はボンディングワイヤ4により電気的に接続している未封止の発光ダイオード内に、脱泡した硬化性シリコーン組成物をディスペンサーにより注入した。その後、加熱オーブン中、100℃で30分、続いて150℃で1時間加熱して、硬化性シリコーン組成物を硬化させることにより、図1に示す表面実装型の発光ダイオードを作製した。
上記の方法で作製した20個の発光ダイオードについて、リードフレーム2、3、およびボンディングワイヤ4と硬化物6間での剥離状態を光学顕微鏡で観察し、剥離が見られた発光ダイオードの個数の割合を表2に示した。
上記の方法で作製した20個の発光ダイオードを、85℃、85%の恒温恒湿室に168時間入れた後、280℃のオーブン内に30秒間置き、その後、室温(25℃)下に戻して、リードフレーム2、3、およびボンディングワイヤ4と硬化物6間での剥離状態を光学顕微鏡で観察し、剥離が見られた発光ダイオードの個数の割合を表2に示した。
2 リードフレーム
3 リードフレーム
4 ボンディングワイヤ
5 枠材
6 硬化性シリコーン組成物の硬化物
Claims (9)
- R4がエチレン基またはプロピレン基である、請求項1に記載のオルガノシロキサン。
- 請求項1または2に記載のオルガノシロキサンからなる接着促進剤。
- 請求項1または2に記載のオルガノシロキサンを接着促進剤として含有する硬化性シリコーン組成物。
- ヒドロシリル化反応で硬化する、請求項4に記載の硬化性シリコーン組成物。
- ヒドロシリル化反応で硬化する硬化性シリコーン組成物が、
(A)一分子中に少なくとも2個のアルケニル基を有するオルガノポリシロキサン 100質量部、
(B)一分子中に少なくとも2個のケイ素原子結合水素原子を有するオルガノハイドロジェンポリシロキサン{(A)成分と(C)成分に含まれるアルケニル基の合計1モルに対して、0.1〜10モルとなる量のケイ素原子結合水素原子を提供する量}、
(C)請求項1または2に記載のオルガノシロキサンからなる接着促進剤 0.1〜10質量部、および
(D)ヒドロシリル化反応用触媒(本組成物の硬化を促進するに十分な量)
から少なくともなる、請求項5に記載の硬化性シリコーン組成物。 - さらに、(E)ヒドロシリル化反応抑制剤{(A)成分〜(D)成分の合計100質量部に対して0.0001〜5質量部}を含有する、請求項6に記載の硬化性シリコーン組成物。
- 半導体素子が、請求項4乃至7のいずれか1項に記載の硬化性シリコーン組成物の硬化物により封止されていることを特徴とする半導体装置。
- 半導体素子が発光素子である、請求項8に記載の半導体装置。
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