JP6463279B2 - 組成分析システムのためのレーザアブレーションセル及びトーチシステム - Google Patents
組成分析システムのためのレーザアブレーションセル及びトーチシステム Download PDFInfo
- Publication number
- JP6463279B2 JP6463279B2 JP2015558111A JP2015558111A JP6463279B2 JP 6463279 B2 JP6463279 B2 JP 6463279B2 JP 2015558111 A JP2015558111 A JP 2015558111A JP 2015558111 A JP2015558111 A JP 2015558111A JP 6463279 B2 JP6463279 B2 JP 6463279B2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- tube
- transfer
- plasma
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- H01J49/0459—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for solid samples
- H01J49/0463—Desorption by laser or particle beam, followed by ionisation as a separate step
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/38—Diluting, dispersing or mixing samples
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/04—Devices for withdrawing samples in the solid state, e.g. by cutting
- G01N2001/045—Laser ablation; Microwave vaporisation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/38—Diluting, dispersing or mixing samples
- G01N2001/383—Diluting, dispersing or mixing samples collecting and diluting in a flow of liquid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
Landscapes
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Pathology (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361764976P | 2013-02-14 | 2013-02-14 | |
| US61/764,976 | 2013-02-14 | ||
| PCT/US2014/016085 WO2014127034A1 (en) | 2013-02-14 | 2014-02-12 | Laser ablation cell and torch system for a compositional analysis system |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018246559A Division JP6776323B2 (ja) | 2013-02-14 | 2018-12-28 | 組成分析システムのためのレーザアブレーションセル及びトーチシステム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016513254A JP2016513254A (ja) | 2016-05-12 |
| JP2016513254A5 JP2016513254A5 (enExample) | 2017-03-16 |
| JP6463279B2 true JP6463279B2 (ja) | 2019-01-30 |
Family
ID=51354519
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015558111A Active JP6463279B2 (ja) | 2013-02-14 | 2014-02-12 | 組成分析システムのためのレーザアブレーションセル及びトーチシステム |
| JP2018246559A Active JP6776323B2 (ja) | 2013-02-14 | 2018-12-28 | 組成分析システムのためのレーザアブレーションセル及びトーチシステム |
| JP2020169532A Pending JP2021039107A (ja) | 2013-02-14 | 2020-10-07 | 組成分析システムのためのレーザアブレーションセル及びトーチシステム |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018246559A Active JP6776323B2 (ja) | 2013-02-14 | 2018-12-28 | 組成分析システムのためのレーザアブレーションセル及びトーチシステム |
| JP2020169532A Pending JP2021039107A (ja) | 2013-02-14 | 2020-10-07 | 組成分析システムのためのレーザアブレーションセル及びトーチシステム |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US20140227776A1 (enExample) |
| EP (1) | EP2956756B1 (enExample) |
| JP (3) | JP6463279B2 (enExample) |
| KR (1) | KR20150114963A (enExample) |
| CN (1) | CN105074419B (enExample) |
| TW (4) | TWI668422B (enExample) |
| WO (1) | WO2014127034A1 (enExample) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102244494B1 (ko) * | 2013-02-09 | 2021-04-27 | 엘레멘탈 사이언티픽 레이저스 엘엘씨 | 챔버 내 유체 핸들링 시스템 및 이를 사용하여 유체를 핸들링하는 방법들 |
| KR20150134373A (ko) | 2013-03-22 | 2015-12-01 | 에테하 취리히 | 레이저 어블레이션 셀 |
| RU2637795C2 (ru) * | 2013-04-17 | 2017-12-07 | Флуидигм Кэнада Инк. | Анализ образцов для масс-цитометрии |
| WO2016126988A1 (en) * | 2015-02-04 | 2016-08-11 | Fluidigm Canada Inc. | Laser enabled imaging mass cytometry |
| US10429276B2 (en) | 2015-04-30 | 2019-10-01 | Elemental Scientific Lasers, Llc | Motorized tracking of sample cell within specimen chamber and methods of using the same |
| JP6788015B2 (ja) | 2016-01-11 | 2020-11-18 | エレメンタル サイエンティフィック レーザーズ エルエルシー | サンプル処理中における同時パターンスキャン配置 |
| US10834807B1 (en) * | 2016-04-01 | 2020-11-10 | Elemental Scientific, Inc. | ICP torch assembly with retractable injector |
| EP3240014A1 (en) | 2016-04-29 | 2017-11-01 | ETH Zurich | Laser ablation cell |
| EP3494591A1 (en) | 2016-08-02 | 2019-06-12 | Fluidigm Canada Inc. | Laser ablation system |
| WO2018026910A1 (en) | 2016-08-02 | 2018-02-08 | Fluidigm Canada Inc. | Sample imaging apparatus and method |
| AT519146B1 (de) | 2016-10-05 | 2020-03-15 | Univ Wien Tech | Vorrichtung zur Analyse eines Feststoff-Probenmaterials |
| CN106872256B (zh) * | 2017-02-24 | 2017-11-17 | 中国地质大学(武汉) | 无定形激光剥蚀池 |
| AU2018254564A1 (en) * | 2017-04-20 | 2019-11-07 | Elemental Scientific Lasers, Llc | Adjustable sample floor for ultrafast signal washout |
| KR102814025B1 (ko) * | 2018-06-05 | 2025-05-27 | 엘레멘탈 사이언티픽 레이저스 엘엘씨 | 레이저 보조 분광에서 샘플 챔버를 바이패스하는 장치 및 방법 |
| CA3104126A1 (en) | 2018-06-18 | 2019-12-26 | Fluidigm Canada Inc. | High resolution imaging apparatus and method |
| JP6740299B2 (ja) * | 2018-08-24 | 2020-08-12 | ファナック株式会社 | 加工条件調整装置及び機械学習装置 |
| CN118837275A (zh) | 2018-09-10 | 2024-10-25 | 富鲁达加拿大公司 | 自动聚焦样本成像的设备、方法、系统和计算机程序产品 |
| CN109444248B (zh) * | 2018-11-20 | 2020-10-30 | 中国地质大学(武汉) | 一种基于激光的溶液剥蚀进样分析方法 |
| GB2582751B (en) * | 2019-03-29 | 2021-07-07 | Thermo Fisher Scient Ecublens Sarl | Improved spark stand for optical emission spectrometry |
| JP6652212B2 (ja) * | 2019-04-15 | 2020-02-19 | 株式会社島津製作所 | サンプルプレート移動機構及びそれを備えたレーザ脱離イオン化質量分析装置 |
| JP7624413B2 (ja) | 2019-06-18 | 2025-01-30 | フリューダイム カナダ インコーポレイテッド | 改良マスサイトメトリー |
| JP7349632B2 (ja) * | 2019-06-28 | 2023-09-25 | 株式会社エス・テイ・ジャパン | レーザーアブレーション用のセルおよび分析装置 |
| WO2021034919A1 (en) * | 2019-08-19 | 2021-02-25 | Elemental Scientific, Inc. | Humidification of laser ablated sample for analysis |
| KR102229252B1 (ko) * | 2019-08-19 | 2021-03-18 | 한국과학기술연구원 | 에어로졸 발생 장치 |
| WO2021039996A1 (ja) * | 2019-08-29 | 2021-03-04 | 京セラ株式会社 | ガス給排アダプタ及びガス検出装置 |
| US20220232691A1 (en) * | 2021-01-19 | 2022-07-21 | Perkinelmer Health Sciences Canada, Inc. | Inductively coupled plasma torches and methods and systems including same |
| KR20240004586A (ko) * | 2021-04-26 | 2024-01-11 | 엘리멘탈 사이언티픽, 인코포레이티드 | 보호된 주입기를 갖는 유도 결합 플라스마 토치 구조물 |
| WO2023177736A1 (en) * | 2022-03-15 | 2023-09-21 | Elemental Scientific, Inc. | Atmospheric purge system and method for laser ablation sample processing |
| JP2024067065A (ja) * | 2022-11-04 | 2024-05-17 | 国立研究開発法人産業技術総合研究所 | レーザーアブレーション用の試料チャンバー |
| WO2024224612A1 (ja) * | 2023-04-28 | 2024-10-31 | 株式会社 イアス | レーザーアブレーションicp分析方法及び分析装置 |
| WO2026022960A1 (ja) * | 2024-07-24 | 2026-01-29 | ロ-ツェイアス株式会社 | 試料吸引エジェクター |
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| GB1574812A (en) | 1976-05-06 | 1980-09-10 | Barringer Research Ltd | Spectrochemical analysis |
| JPS6070960A (ja) * | 1983-09-26 | 1985-04-22 | Nec Corp | フイ−ドスル− |
| US4575609A (en) | 1984-03-06 | 1986-03-11 | The United States Of America As Represented By The United States Department Of Energy | Concentric micro-nebulizer for direct sample insertion |
| JPH0622719B2 (ja) * | 1985-05-13 | 1994-03-30 | 小野田セメント株式会社 | 複ト−チ型プラズマ溶射方法及びその装置 |
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| JP2643031B2 (ja) * | 1991-04-10 | 1997-08-20 | 動力炉・核燃料開発事業団 | 固体発光分光分析装置 |
| EP0560537A1 (en) * | 1992-03-10 | 1993-09-15 | Mds Health Group Limited | Apparatus and method for liquid sample introduction |
| US5850089A (en) * | 1992-03-13 | 1998-12-15 | American Research Corporation Of Virginia | Modulated-structure of PZT/PT ferroelectric thin films for non-volatile random access memories |
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| FR2700852B1 (fr) * | 1993-01-27 | 1995-03-03 | Commissariat Energie Atomique | Cellule d'ablation d'un échantillon au laser. |
| US5537206A (en) * | 1993-11-02 | 1996-07-16 | Nkk Corporation | Method for analyzing steel and apparatus therefor |
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| JP4095646B2 (ja) * | 1995-12-27 | 2008-06-04 | 日本電信電話株式会社 | 元素分析装置 |
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| US5884846A (en) | 1996-09-19 | 1999-03-23 | Tan; Hsiaoming Sherman | Pneumatic concentric nebulizer with adjustable and capillaries |
| JPH1151904A (ja) * | 1997-08-05 | 1999-02-26 | Jeol Ltd | Icp−msのレーザーアブレーション方法及び装置 |
| US5908566A (en) * | 1997-09-17 | 1999-06-01 | The United States Of America As Represented By The Secretary Of The Navy | Modified plasma torch design for introducing sample air into inductively coupled plasma |
| US6166379A (en) * | 1997-12-30 | 2000-12-26 | George Washington University | Direct injection high efficiency nebulizer for analytical spectrometry |
| US6120857A (en) * | 1998-05-18 | 2000-09-19 | The Regents Of The University Of California | Low work function surface layers produced by laser ablation using short-wavelength photons |
| US20020163735A1 (en) * | 2000-01-11 | 2002-11-07 | Gunther Detlef | Radially homogeneous high energy density UV sample ablating laser radiation in "pure" solid to gas sample preparation , for analysis by ICP-MS and ICP-OES |
| JP2001272349A (ja) * | 2000-03-24 | 2001-10-05 | Shimadzu Corp | Icp発光分光分析用プラズマトーチ |
| US6989529B2 (en) * | 2001-07-03 | 2006-01-24 | Varian Australia Pty Ltd. | Plasma torch |
| JP3800621B2 (ja) * | 2002-01-18 | 2006-07-26 | 株式会社島津製作所 | Icp分析装置 |
| JP4232951B2 (ja) * | 2002-11-07 | 2009-03-04 | 独立行政法人産業技術総合研究所 | 誘導結合プラズマトーチ |
| JP4064315B2 (ja) * | 2003-08-20 | 2008-03-19 | 信越化学工業株式会社 | 誘導結合プラズマトーチ及び元素分析装置 |
| US7145137B2 (en) | 2003-12-23 | 2006-12-05 | The George Washington University | Demountable direct injection high efficiency nebulizer for inductively coupled plasma mass spectrometry |
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| JP2006038729A (ja) * | 2004-07-29 | 2006-02-09 | National Institute Of Advanced Industrial & Technology | 誘導結合プラズマトーチ |
| US7649170B2 (en) * | 2006-10-03 | 2010-01-19 | Academia Sinica | Dual-polarity mass spectrometer |
| KR100801708B1 (ko) * | 2006-12-22 | 2008-02-11 | 삼성전자주식회사 | 웨이퍼 오염물질 분석장비 및 방법 |
| US8174691B1 (en) * | 2007-03-15 | 2012-05-08 | Arkansas State University—Jonesboro | Detection of a component of interest with an ultraviolet laser and method of using the same |
| JP4982891B2 (ja) * | 2007-04-12 | 2012-07-25 | 独立行政法人産業技術総合研究所 | 反応性プラズマ中におけるラジカル及びダスト濃度測定方法 |
| US7977599B2 (en) * | 2007-10-19 | 2011-07-12 | Honeywell International Inc. | Erosion resistant torch |
| US8207494B2 (en) * | 2008-05-01 | 2012-06-26 | Indiana University Research And Technology Corporation | Laser ablation flowing atmospheric-pressure afterglow for ambient mass spectrometry |
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| US20100207038A1 (en) * | 2009-02-13 | 2010-08-19 | Loughborough University | Apparatus and method for laser irradiation |
| US20110089320A1 (en) * | 2009-10-19 | 2011-04-21 | Wiederin Daniel R | Direct injection nebulizer |
| CA2796815C (en) * | 2010-05-05 | 2019-06-25 | Perkinelmer Health Sciences, Inc. | Inductive devices and low flow plasmas using them |
| WO2011152482A1 (ja) * | 2010-06-03 | 2011-12-08 | 株式会社アルバック | スパッタ成膜装置 |
| JP5482599B2 (ja) * | 2010-09-17 | 2014-05-07 | トヨタ自動車株式会社 | レーザーアブレーション質量分析装置 |
| JP2013024806A (ja) * | 2011-07-25 | 2013-02-04 | Toyota Motor Corp | レーザーアブレーション質量分析装置 |
-
2014
- 2014-02-12 CN CN201480008569.0A patent/CN105074419B/zh active Active
- 2014-02-12 EP EP14751410.3A patent/EP2956756B1/en active Active
- 2014-02-12 TW TW107125366A patent/TWI668422B/zh active
- 2014-02-12 WO PCT/US2014/016085 patent/WO2014127034A1/en not_active Ceased
- 2014-02-12 KR KR1020157022052A patent/KR20150114963A/ko not_active Ceased
- 2014-02-12 TW TW103104712A patent/TWI614488B/zh active
- 2014-02-12 JP JP2015558111A patent/JP6463279B2/ja active Active
- 2014-02-12 TW TW107110312A patent/TWI667462B/zh active
- 2014-02-12 TW TW103104709A patent/TW201447259A/zh unknown
- 2014-02-14 US US14/180,849 patent/US20140227776A1/en not_active Abandoned
- 2014-02-14 US US14/180,855 patent/US10285255B2/en active Active
-
2018
- 2018-12-28 JP JP2018246559A patent/JP6776323B2/ja active Active
-
2020
- 2020-10-07 JP JP2020169532A patent/JP2021039107A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JP2021039107A (ja) | 2021-03-11 |
| EP2956756A1 (en) | 2015-12-23 |
| US20140224775A1 (en) | 2014-08-14 |
| JP2016513254A (ja) | 2016-05-12 |
| TW201447261A (zh) | 2014-12-16 |
| TW201447259A (zh) | 2014-12-16 |
| US10285255B2 (en) | 2019-05-07 |
| EP2956756B1 (en) | 2024-09-04 |
| TWI667462B (zh) | 2019-08-01 |
| CN105074419A (zh) | 2015-11-18 |
| TWI614488B (zh) | 2018-02-11 |
| WO2014127034A1 (en) | 2014-08-21 |
| EP2956756A4 (en) | 2016-10-12 |
| US20140227776A1 (en) | 2014-08-14 |
| TWI668422B (zh) | 2019-08-11 |
| CN105074419B (zh) | 2019-02-01 |
| JP2019082483A (ja) | 2019-05-30 |
| JP6776323B2 (ja) | 2020-10-28 |
| TW201827806A (zh) | 2018-08-01 |
| TW201840962A (zh) | 2018-11-16 |
| KR20150114963A (ko) | 2015-10-13 |
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