CN105074419B - 用于组成分析系统的雷射剥蚀单元和火炬系统 - Google Patents

用于组成分析系统的雷射剥蚀单元和火炬系统 Download PDF

Info

Publication number
CN105074419B
CN105074419B CN201480008569.0A CN201480008569A CN105074419B CN 105074419 B CN105074419 B CN 105074419B CN 201480008569 A CN201480008569 A CN 201480008569A CN 105074419 B CN105074419 B CN 105074419B
Authority
CN
China
Prior art keywords
sample
target
capture
entrance
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201480008569.0A
Other languages
English (en)
Chinese (zh)
Other versions
CN105074419A (zh
Inventor
贝利·L·沙普
大卫·N·道格拉斯
艾咪·J·玛那
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elemental Scientific Lasers LLC
Original Assignee
Irecto Science Industry Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Irecto Science Industry Co ltd filed Critical Irecto Science Industry Co ltd
Publication of CN105074419A publication Critical patent/CN105074419A/zh
Application granted granted Critical
Publication of CN105074419B publication Critical patent/CN105074419B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/04Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0459Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for solid samples
    • H01J49/0463Desorption by laser or particle beam, followed by ionisation as a separate step
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/38Diluting, dispersing or mixing samples
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/02Devices for withdrawing samples
    • G01N1/04Devices for withdrawing samples in the solid state, e.g. by cutting
    • G01N2001/045Laser ablation; Microwave vaporisation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00Sampling; Preparing specimens for investigation
    • G01N1/28Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/38Diluting, dispersing or mixing samples
    • G01N2001/383Diluting, dispersing or mixing samples collecting and diluting in a flow of liquid
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • H01J49/105Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
CN201480008569.0A 2013-02-14 2014-02-12 用于组成分析系统的雷射剥蚀单元和火炬系统 Active CN105074419B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361764976P 2013-02-14 2013-02-14
US61/764,976 2013-02-14
PCT/US2014/016085 WO2014127034A1 (en) 2013-02-14 2014-02-12 Laser ablation cell and torch system for a compositional analysis system

Publications (2)

Publication Number Publication Date
CN105074419A CN105074419A (zh) 2015-11-18
CN105074419B true CN105074419B (zh) 2019-02-01

Family

ID=51354519

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201480008569.0A Active CN105074419B (zh) 2013-02-14 2014-02-12 用于组成分析系统的雷射剥蚀单元和火炬系统

Country Status (6)

Country Link
EP (1) EP2956756B1 (enExample)
JP (3) JP6463279B2 (enExample)
KR (1) KR20150114963A (enExample)
CN (1) CN105074419B (enExample)
TW (4) TW201447259A (enExample)
WO (1) WO2014127034A1 (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3240014A1 (en) 2016-04-29 2017-11-01 ETH Zurich Laser ablation cell
WO2018026910A1 (en) 2016-08-02 2018-02-08 Fluidigm Canada Inc. Sample imaging apparatus and method
CA3032861A1 (en) * 2016-08-02 2018-02-08 Fluidigm Canada Inc. Laser ablation system
AT519146B1 (de) 2016-10-05 2020-03-15 Univ Wien Tech Vorrichtung zur Analyse eines Feststoff-Probenmaterials
KR20190133056A (ko) * 2017-04-20 2019-11-29 엘레멘탈 사이언티픽 레이저스 엘엘씨 초고속 신호 워시아웃을 위한 조정가능한 샘플 플로어
US11183378B2 (en) * 2018-06-05 2021-11-23 Elemental Scientific Lasers, Llc Apparatus and method to bypass a sample chamber in laser assisted spectroscopy
CN113678227B (zh) 2018-06-18 2024-11-12 富鲁达加拿大公司 高分辨率成像设备和方法
EP3850329A4 (en) 2018-09-10 2022-06-22 Fluidigm Canada Inc. APPARATUS AND METHOD FOR AUTO-FOCUSING SAMPLE IMAGING
CN109444248B (zh) * 2018-11-20 2020-10-30 中国地质大学(武汉) 一种基于激光的溶液剥蚀进样分析方法
GB2582751B (en) * 2019-03-29 2021-07-07 Thermo Fisher Scient Ecublens Sarl Improved spark stand for optical emission spectrometry
JP6652212B2 (ja) * 2019-04-15 2020-02-19 株式会社島津製作所 サンプルプレート移動機構及びそれを備えたレーザ脱離イオン化質量分析装置
WO2020257258A1 (en) 2019-06-18 2020-12-24 Fluidigm Corporation Improved mass cytometry
JP7349632B2 (ja) * 2019-06-28 2023-09-25 株式会社エス・テイ・ジャパン レーザーアブレーション用のセルおよび分析装置
KR102229252B1 (ko) * 2019-08-19 2021-03-18 한국과학기술연구원 에어로졸 발생 장치
WO2024224612A1 (ja) * 2023-04-28 2024-10-31 株式会社 イアス レーザーアブレーションicp分析方法及び分析装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060024199A1 (en) * 2004-07-29 2006-02-02 National Institute Of Advanced Industrial Science Inductively-coupled plasma torch

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1574812A (en) * 1976-05-06 1980-09-10 Barringer Research Ltd Spectrochemical analysis
JPS6070960A (ja) * 1983-09-26 1985-04-22 Nec Corp フイ−ドスル−
JPH0622719B2 (ja) * 1985-05-13 1994-03-30 小野田セメント株式会社 複ト−チ型プラズマ溶射方法及びその装置
JPS62281755A (ja) * 1986-05-29 1987-12-07 Anelva Corp 動力導入機
JP2643031B2 (ja) * 1991-04-10 1997-08-20 動力炉・核燃料開発事業団 固体発光分光分析装置
EP0560537A1 (en) * 1992-03-10 1993-09-15 Mds Health Group Limited Apparatus and method for liquid sample introduction
US5850089A (en) * 1992-03-13 1998-12-15 American Research Corporation Of Virginia Modulated-structure of PZT/PT ferroelectric thin films for non-volatile random access memories
JP2804873B2 (ja) * 1992-12-17 1998-09-30 三菱電機株式会社 微粒子分析装置および微粒子分析方法
FR2700852B1 (fr) * 1993-01-27 1995-03-03 Commissariat Energie Atomique Cellule d'ablation d'un échantillon au laser.
US5537206A (en) * 1993-11-02 1996-07-16 Nkk Corporation Method for analyzing steel and apparatus therefor
US5504327A (en) * 1993-11-04 1996-04-02 Hv Ops, Inc. (H-Nu) Electrospray ionization source and method for mass spectrometric analysis
FR2714464B1 (fr) * 1993-12-23 1996-02-09 Cogema Procédé de contrôle de la contamination surfacique d'un solide et dispositif de mise en Óoeuvre.
JPH085555A (ja) * 1994-06-17 1996-01-12 Hitachi Ltd 元素分析用プラズマトーチ及びこれを用いた元素分析方法
JP4095646B2 (ja) * 1995-12-27 2008-06-04 日本電信電話株式会社 元素分析装置
JPH1151904A (ja) * 1997-08-05 1999-02-26 Jeol Ltd Icp−msのレーザーアブレーション方法及び装置
JP2001272349A (ja) * 2000-03-24 2001-10-05 Shimadzu Corp Icp発光分光分析用プラズマトーチ
WO2003005780A1 (en) * 2001-07-03 2003-01-16 Varian Australia Pty Ltd Plasma torch
JP3800621B2 (ja) * 2002-01-18 2006-07-26 株式会社島津製作所 Icp分析装置
JP4232951B2 (ja) * 2002-11-07 2009-03-04 独立行政法人産業技術総合研究所 誘導結合プラズマトーチ
US7460225B2 (en) * 2004-03-05 2008-12-02 Vassili Karanassios Miniaturized source devices for optical and mass spectrometry
US7649170B2 (en) * 2006-10-03 2010-01-19 Academia Sinica Dual-polarity mass spectrometer
KR100801708B1 (ko) * 2006-12-22 2008-02-11 삼성전자주식회사 웨이퍼 오염물질 분석장비 및 방법
US8174691B1 (en) * 2007-03-15 2012-05-08 Arkansas State University—Jonesboro Detection of a component of interest with an ultraviolet laser and method of using the same
JP4982891B2 (ja) * 2007-04-12 2012-07-25 独立行政法人産業技術総合研究所 反応性プラズマ中におけるラジカル及びダスト濃度測定方法
US8207472B2 (en) * 2008-06-18 2012-06-26 Electro Scientific Industries, Inc. Debris capture and removal for laser micromachining
US20100207038A1 (en) * 2009-02-13 2010-08-19 Loughborough University Apparatus and method for laser irradiation
US20110089320A1 (en) * 2009-10-19 2011-04-21 Wiederin Daniel R Direct injection nebulizer
KR20130035256A (ko) * 2010-06-03 2013-04-08 울박, 인크 스퍼터 성막 장치
JP5482599B2 (ja) * 2010-09-17 2014-05-07 トヨタ自動車株式会社 レーザーアブレーション質量分析装置
JP2013024806A (ja) * 2011-07-25 2013-02-04 Toyota Motor Corp レーザーアブレーション質量分析装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060024199A1 (en) * 2004-07-29 2006-02-02 National Institute Of Advanced Industrial Science Inductively-coupled plasma torch

Also Published As

Publication number Publication date
JP2016513254A (ja) 2016-05-12
JP2019082483A (ja) 2019-05-30
WO2014127034A1 (en) 2014-08-21
KR20150114963A (ko) 2015-10-13
TWI614488B (zh) 2018-02-11
EP2956756B1 (en) 2024-09-04
JP6776323B2 (ja) 2020-10-28
TWI667462B (zh) 2019-08-01
TW201840962A (zh) 2018-11-16
JP6463279B2 (ja) 2019-01-30
JP2021039107A (ja) 2021-03-11
EP2956756A1 (en) 2015-12-23
TW201827806A (zh) 2018-08-01
EP2956756A4 (en) 2016-10-12
TWI668422B (zh) 2019-08-11
TW201447259A (zh) 2014-12-16
CN105074419A (zh) 2015-11-18
TW201447261A (zh) 2014-12-16

Similar Documents

Publication Publication Date Title
CN105074419B (zh) 用于组成分析系统的雷射剥蚀单元和火炬系统
US10285255B2 (en) Laser ablation cell and injector system for a compositional analysis system
CN105122041A (zh) 用于减少热效应的激光取样方法
US11630050B2 (en) Sample analysis for mass cytometry
US8178851B2 (en) In situ holder assembly
JP2023507585A (ja) イメージングマスサイトメトリー用プラズマおよびサンプリングジオメトリー
GB2512309A (en) Apparatus and method for liquid sample introduction
GB2512308A (en) Apparatus and method for liquid sample introduction
EP2847573B1 (en) Radiation-heated in-situ tem-specimen holder assembly

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20190311

Address after: Nebraska

Patentee after: Elemental Science Laser Company

Address before: No. 13900, Northwest Science Park Avenue, Portland, 97229, Oregon, USA

Patentee before: Electro Scient Ind Inc.