JP6437590B2 - ウエハスタックの組立 - Google Patents
ウエハスタックの組立 Download PDFInfo
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Description
本開示は、たとえば光電子モジュールの作製に使用されるウエハスタックの製造および組立に関する。
カメラおよび集積カメラの光学系のような光学装置は、よく電子機器に、特に携帯電話およびパソコンのような電子機器に組込まれる。そのような光学装置用の能動光学部品、受動光学部品および電子部品をウエハスケールで製造することは、より魅力的になっている。1つの理由は、そのような光学装置のコストを継続的に削減する傾向があるからである。
UV硬化性材料および熱硬化性材料を用いて、ウエハを互いに接合することによって、ウエハスタックを形成する技術は、記載されている。1つまたは複数の実現例の詳細は、添付図面および以下の説明に記載されている。
)から取出す前に、ウエハ表面上の選択位置に設けられたUV硬化性接着材料を予硬化することは、その後、たとえば硬化のためにウエハスタックを第2位置(たとえば、オーブン)に搬送するときに発生するウエハ間の整列がずれる可能性を低減することができる。いくつかの実現例において、開示された技術は、接合アライナを用いてウエハスタックを形成する技術よりも、より速くより正確かつより安価で、ウエハスタックを形成することができる。
他の局面、特徴および利点は、明細書および図面ならびに特許請求の範囲から明らかになる。
図1は、図2に示されるウエハスタック10を形成するためのウエハを示す概略断面図である。堆積されたウエハは、その後、個別のマイクロ光学構造に分割することができる。たとえば、図2の縦方向の破線により示されたように、ウエハスタック10は、形成さ
れた後、図3に一例として示された複数のモジュール12にダイシングされることができる。以下では、例示されたモジュール12をさらに詳述する。しかしながら、本開示に記載されたウエハスタックを形成する技術は、他の種類のモジュール用のウエハスタックを形成するために使用することもできる。
たとえば長方形のグリッド状に配置または設置される。ウエハは、開口または穴を有することができる。場合によって、ウエハは、その横方向領域の主要部に材料を含まなくてもよい。実装によって、ウエハは、たとえば半導体材料、高分子材料、金属およびポリマーまたはポリマーおよびガラス材料とを含む複合材料から作ることができる。ウエハは、熱硬化性ポリマーまたは紫外線(UV)硬化性ポリマーなどの硬化性材料を含んでもよい。いくつかの実現例において、ウエハの直径を5cm〜40cm、たとえば10cm〜31cmにすることができる。ウエハは、たとえば2,4,6,8または12インチ(1インチは、約2.54cmである)の直径を有する円筒形であってもよい。ウエハの厚さは、たとえば0.2mm〜10mmであってもよく、場合によって0.4mm〜6mmであってもよい。
良好な接着を与えるように選択されるべきであり、好ましくは、検出部材Dにより検出可能な光に対して実質的に非透明であるべきである。
の操作は、たとえばマスクアライナ内で行うことができる。スペーサウエハSWの開口122内にUV硬化性接着剤材料124の分注を容易にするために、マスクアライナにおいて光学ウエハOWを保持する真空チャックが、開口122の位置に対応する位置に穴を含むことができる。局部UV硬化に続いて、ウエハスタック10は、マスクアライナからオーブンに搬送され(ブロック212)、熱硬化性接着材料102,104を同時に硬化させるように、加熱される。オーブンから取出された後、ウエハスタック10は、別個のモジュール12に分割(たとえば、ダイスカット)されることができる。
なるサブスタック上に配置される。図15に示すように、サブスタックを形成するために、スペーサウエハSWは、光学ウエハOW上に配置される。熱硬化性接着剤104は、接触界面に設けられる。前述の例で説明したように、スペーサウエハSWは、その周縁の近傍に開口(たとえば、貫通孔)122を含む。次に、スペーサウエハSWの開口122は、UV硬化性接着膠、エポキシまたは他の接着剤(図16)のようなUV硬化性接着材料124により実質的に充填される。基板ウエハPWは、その後、光学ウエハOWと整列され、図17に示すように、基板用ウエハPWは、スペーサウエハSWの上面に配置される。この例において、基板ウエハPWは、UV透過性材料で部分的または完全に充填されているUV透過性窓130を含む。次に、図18に示すように、基板ウエハPWの窓130を通って、UV照射(たとえば、UV照明)を直射することによって、接着材料124を硬化させ、ウエハを互いに局部的に接着する。局部UV硬化に続いて、ウエハスタック10は、熱硬化性接着材料102,104を同時に硬化させるように、マスクアライナからオーブンに搬送される。オーブンから取出された後、ウエハスタック10は、別個のモジュール12に分割(たとえば、ダイスカット)されることができる。
Claims (5)
- ウエハスタックであって、
上面と下面とを有する第1ウエハと、
上面と下面とを有する第2ウエハと、
前記第1ウエハの前記上面と前記第2ウエハの前記下面との間の界面に設けられた第1熱硬化性接着剤と、
上面と下面とを有する第3ウエハと、
前記第2ウエハの前記上面と前記第3ウエハの前記下面との間の界面に設けられた第2熱硬化性接着剤と、
前記第2ウエハに設けられかつ前記第2および第3ウエハの部分と接触しているUV硬化性接着剤とを含み、前記UV硬化性接着剤は、前記第2ウエハの周縁の近傍の不連続の位置に設けられている、ウエハスタック。 - 前記第3ウエハは、UV透過性窓を含み、
前記UV透過性窓の各々は、前記UV硬化性接着剤を含む前記第2ウエハ内の前記位置とそれぞれ実質的に整列されている、請求項1に記載のウエハスタック。 - 前記UV硬化性接着剤は、前記UV硬化性接着剤を含む前記第2ウエハ内の前記位置とそれぞれ実質的に整列されている前記第3ウエハ内に設けられた位置にも設けられている、請求項1に記載のウエハスタック。
- 前記第2ウエハの前記周縁の近傍の不連続の位置の各々は、隣接する位置からほぼ等間隔で離れている、請求項1に記載のウエハスタック。
- 前記第1、第2および第3ウエハは、UV照射に対して実質的に透過性のない材料から作られている、請求項1に記載のウエハスタック。
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