JP6151354B2 - ウエハスタックの組立 - Google Patents
ウエハスタックの組立 Download PDFInfo
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- JP6151354B2 JP6151354B2 JP2015512608A JP2015512608A JP6151354B2 JP 6151354 B2 JP6151354 B2 JP 6151354B2 JP 2015512608 A JP2015512608 A JP 2015512608A JP 2015512608 A JP2015512608 A JP 2015512608A JP 6151354 B2 JP6151354 B2 JP 6151354B2
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Description
本開示は、たとえば光電子モジュールの作製に使用されるウエハスタックの製造および組立に関する。
カメラおよび集積カメラの光学系のような光学装置は、よく電子機器に、特に携帯電話およびパソコンのような電子機器に組込まれる。そのような光学装置用の能動光学部品、受動光学部品および電子部品をウエハスケールで製造することは、より魅力的になっている。1つの理由は、そのような光学装置のコストを継続的に削減する傾向があるからである。
UV硬化性材料および熱硬化性材料を用いて、ウエハを互いに接合することによって、ウエハスタックを形成する技術は、記載されている。1つまたは複数の実現例の詳細は、添付図面および以下の説明に記載されている。
他の局面、特徴および利点は、明細書および図面ならびに特許請求の範囲から明らかになる。
図1は、図2に示されるウエハスタック10を形成するためのウエハを示す概略断面図である。堆積されたウエハは、その後、個別のマイクロ光学構造に分割することができる。たとえば、図2の縦方向の破線により示されたように、ウエハスタック10は、形成された後、図3に一例として示された複数のモジュール12にダイシングされることができる。以下では、例示されたモジュール12をさらに詳述する。しかしながら、本開示に記載されたウエハスタックを形成する技術は、他の種類のモジュール用のウエハスタックを形成するために使用することもできる。
Claims (7)
- ウエハスタックを形成する方法であって、
第1ウエハと第2ウエハとを備えるサブスタックを提供するステップを含み、前記第1ウエハと前記第2ウエハとは各々、上面と下面とを有し、前記サブスタックは、前記第1ウエハの前記上面と前記第2ウエハの前記下面との間の界面に設けられた第1熱硬化性接着剤を含み、
前記第2ウエハの開口にUV硬化性接着剤を分注するステップを含み、
続いて、前記第2ウエハの前記上面に第3ウエハを移動させるステップを含み、前記第3ウエハは、上面と下面とを有し、前記第2ウエハの前記上面と前記第3ウエハの前記下面との間の界面には、第2熱硬化性接着剤が設けられており、前記第3ウエハに設けられたUV透過性窓は、前記UV硬化性接着剤を含む前記第2ウエハの前記開口と実質的に整列され、
続いて、前記第3ウエハを不連続の位置で前記サブスタックに接合するように、前記第3ウエハの前記上面の方向から紫外線(UV)照射を提供することによって、前記第2ウエハに設置された前記開口に設けられかつ前記第3ウエハの一部と接触している前記UV硬化性接着剤を硬化させるステップを含み、前記UV照射は、前記第3ウエハに設けられた前記UV透過性窓を通って、前記UV硬化性接着剤に到達し、
続いて、前記第3ウエハおよび前記サブスタックを加熱することによって、前記第1および第2熱硬化性接着剤を硬化させるステップを含む、方法。 - 前記第2ウエハの前記開口は、前記第2ウエハの周縁の近傍に設置される、請求項1に記載の方法。
- 前記第2ウエハの前記開口の各々は、前記第2ウエハの前記上面からその下面に延在する貫通孔であり、
前記UV硬化性接着剤は、前記開口を実質的に充填している、請求項2に記載の方法。 - 前記第2ウエハの前記上面に前記第3ウエハを移動させるステップと、前記UV照射を提供することによって、前記UV硬化性接着剤を硬化させるステップとは、マスクアライナにおいて行われる、請求項1に記載の方法。
- 前記UV照射を提供することによって、前記UV硬化性接着剤を硬化させるステップの後に、前記サブスタックに接合された前記第3ウエハを前記マスクアライナから取出すステップと、前記サブスタックに接合された前記第3ウエハを加熱することによって、前記マスクアライナ以外の場所で前記第1および第2熱硬化性接着剤を硬化させるステップとをさらに含む、請求項4に記載の方法。
- 方法は、前記ウエハスタックを個別のモジュールに分割するステップをさらに含み、各モジュールは、前記第1ウエハと前記第2ウエハと前記第3ウエハとの一部分を含む、請求項1に記載の方法。
- 前記ウエハは、前記UV照射に対して実質的に透過性のない材料から作られている、請求項1に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261648178P | 2012-05-17 | 2012-05-17 | |
US61/648,178 | 2012-05-17 | ||
PCT/SG2013/000194 WO2013172786A1 (en) | 2012-05-17 | 2013-05-15 | Assembly of wafer stacks |
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Application Number | Title | Priority Date | Filing Date |
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JP2017102586A Division JP6437590B2 (ja) | 2012-05-17 | 2017-05-24 | ウエハスタックの組立 |
Publications (3)
Publication Number | Publication Date |
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JP2015519751A JP2015519751A (ja) | 2015-07-09 |
JP2015519751A5 JP2015519751A5 (ja) | 2016-04-28 |
JP6151354B2 true JP6151354B2 (ja) | 2017-06-21 |
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JP2015512608A Active JP6151354B2 (ja) | 2012-05-17 | 2013-05-15 | ウエハスタックの組立 |
JP2017102586A Active JP6437590B2 (ja) | 2012-05-17 | 2017-05-24 | ウエハスタックの組立 |
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JP6437590B2 (ja) | 2018-12-12 |
TW201405764A (zh) | 2014-02-01 |
EP2850654A1 (en) | 2015-03-25 |
CN104335340B (zh) | 2017-11-03 |
EP2850654B1 (en) | 2016-10-26 |
US9997506B2 (en) | 2018-06-12 |
WO2013172786A1 (en) | 2013-11-21 |
KR102208832B1 (ko) | 2021-01-29 |
TWI640080B (zh) | 2018-11-01 |
CN107845650B (zh) | 2021-10-26 |
US20180261585A1 (en) | 2018-09-13 |
JP2015519751A (ja) | 2015-07-09 |
JP2017199912A (ja) | 2017-11-02 |
KR20200049894A (ko) | 2020-05-08 |
KR102107575B1 (ko) | 2020-05-08 |
CN104335340A (zh) | 2015-02-04 |
CN107845650A (zh) | 2018-03-27 |
US10903197B2 (en) | 2021-01-26 |
US20170309605A1 (en) | 2017-10-26 |
US20150115413A1 (en) | 2015-04-30 |
SG10201701879RA (en) | 2017-04-27 |
US9716081B2 (en) | 2017-07-25 |
EP2850654A4 (en) | 2015-11-04 |
SG11201407221TA (en) | 2014-12-30 |
KR20150013780A (ko) | 2015-02-05 |
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