JP6422866B2 - Mocvd反応炉の面状ヒータ用加熱エレメント - Google Patents
Mocvd反応炉の面状ヒータ用加熱エレメント Download PDFInfo
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- JP6422866B2 JP6422866B2 JP2015525776A JP2015525776A JP6422866B2 JP 6422866 B2 JP6422866 B2 JP 6422866B2 JP 2015525776 A JP2015525776 A JP 2015525776A JP 2015525776 A JP2015525776 A JP 2015525776A JP 6422866 B2 JP6422866 B2 JP 6422866B2
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- 238000010438 heat treatment Methods 0.000 title claims description 165
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 title 1
- 238000000576 coating method Methods 0.000 claims description 82
- 239000011248 coating agent Substances 0.000 claims description 77
- 238000000034 method Methods 0.000 claims description 43
- 238000005245 sintering Methods 0.000 claims description 33
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 25
- 229910052721 tungsten Inorganic materials 0.000 claims description 25
- 239000010937 tungsten Substances 0.000 claims description 25
- 238000004519 manufacturing process Methods 0.000 claims description 22
- 239000011148 porous material Substances 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 21
- 239000000725 suspension Substances 0.000 claims description 16
- 235000012431 wafers Nutrition 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 239000002245 particle Substances 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- 239000012300 argon atmosphere Substances 0.000 claims description 2
- 239000012298 atmosphere Substances 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 description 6
- 238000005520 cutting process Methods 0.000 description 5
- 230000005855 radiation Effects 0.000 description 3
- 239000000956 alloy Substances 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000003698 laser cutting Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 239000003870 refractory metal Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- SXQXMCWCWVCFPC-UHFFFAOYSA-N aluminum;potassium;dioxido(oxo)silane Chemical compound [Al+3].[K+].[O-][Si]([O-])=O.[O-][Si]([O-])=O SXQXMCWCWVCFPC-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
- B22F5/006—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product of flat products, e.g. sheets
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F7/00—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression
- B22F7/002—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of porous nature
- B22F7/004—Manufacture of composite layers, workpieces, or articles, comprising metallic powder, by sintering the powder, with or without compacting wherein at least one part is obtained by sintering or compression of porous nature comprising at least one non-porous part
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/0262—Reduction or decomposition of gaseous compounds, e.g. CVD
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
- H05B3/143—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds applied to semiconductors, e.g. wafers heating
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Composite Materials (AREA)
- Ceramic Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Resistance Heating (AREA)
- Chemical Vapour Deposition (AREA)
Description
事実上単一面内で延伸し、少なくとも90重量%のタングステンを含んだ材料からなる加熱体を生成する工程と、
この加熱体の表面に、タングステンが少なくとも90重量%である材料の粒子を含んだ懸濁液を少なくとも部分的に塗布する工程と、
この加熱体表面の懸濁液を焼結して多孔焼結被膜とする工程と、を含む。
20 加熱体
22a 一方の面
22b 他方の面
30 多孔焼結被膜
32 開口気孔
40 平板
Claims (17)
- 多孔焼結被膜(30)で少なくとも部分的に直接覆われた加熱体(20)を有し、前記加熱体(20)及び前記多孔焼結被膜(30)がそれぞれ少なくとも90重量%のタングステンを含んでおり、
前記多孔焼結被膜(30)が少なくとも部分的に前記加熱体(20)と冶金的に結合しており、
前記多孔焼結被膜(30)が外表面に開口気孔(32)を有し、該開口気孔(32)が、前記多孔焼結被膜(30)により覆われている前記加熱体(20)の表面積の10%以上に及ぶ投影面積を有し、前記加熱体(20)がほぼ平坦な形態である、加熱エレメント。 - 前記加熱体(20)が互いに反対側を向く2つの面をもち、該面が両方とも、少なくとも部分的に前記多孔焼結被膜(30)で覆われている、請求項1に記載の加熱エレメント。
- 前記開口気孔(32)が、前記多孔焼結被膜(30)により覆われている前記加熱体(20)の表面積の20%以上に及ぶ投影面積を有する、請求項1又は2に記載の加熱エレメント。
- 前記開口気孔(32)が、前記多孔焼結被膜(30)により覆われている前記加熱体(20)の表面積の30%以上に及ぶ投影面積を有する、請求項1又は2に記載の加熱エレメント。
- 前記開口気孔(32)が、前記多孔焼結被膜(30)により覆われている前記加熱体(20)の表面積の70%以下に及ぶ投影面積を有する、請求項1〜4のいずれか1項に記載の加熱エレメント。
- 前記開口気孔(32)が、前記多孔焼結被膜(30)により覆われている前記加熱体(20)の表面積の60%以下に及ぶ投影面積を有する、請求項1〜5のいずれか1項に記載の加熱エレメント。
- 前記多孔焼結被膜(30)が工業的純タングステンから形成されている、請求項1〜6のいずれか1項に記載の加熱エレメント。
- 前記加熱体(20)が、単一平面内で少なくとも部分的に湾曲している、請求項1〜7のいずれか1項に記載の加熱エレメント。
- 前記多孔焼結被膜(30)の放射率が0.5以上である、請求項1〜8のいずれか1項に記載の加熱エレメント。
- チャンバと、1以上のウェハを載置するサセプタと、請求項1〜9のいずれか1項に記載の加熱エレメントと、を備えた反応炉。
- 加熱エレメント(10)の製造方法であって、
実質的に単一平面内で延伸し、少なくとも90重量%のタングステンを含む材料から形成される加熱体(20)を生成する工程と、
前記加熱体(20)の表面に、タングステンが少なくとも90重量%である材料の粒子を含んだ懸濁液を少なくとも部分的に塗布する工程と、
当該加熱体(20)表面の懸濁液を焼結して、外表面に開口気孔を有する多孔焼結被膜(30)とする焼結工程と、
を含む製造方法。 - 前記懸濁液を、前記焼結工程の前に乾燥させる、請求項11に記載の製造方法。
- 前記懸濁液を、前記焼結工程中に乾燥させる、請求項11に記載の製造方法。
- 前記焼結工程は、1800℃より下の温度で実施する、請求項11〜13の何れか1項に記載の製造方法。
- 前記焼結工程は、1400℃〜1500℃の温度で実施する、請求項11〜14のいずれか1項に記載の製造方法。
- 前記焼結工程は、空気中の酸素を排除した中で実施する、請求項11〜15のいずれか1項に記載の製造方法。
- 前記焼結工程は、水素雰囲気又はアルゴン雰囲気中で実施する、請求項11〜16のいずれか1項に記載の製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/568,915 | 2012-08-07 | ||
US13/568,915 US20140041589A1 (en) | 2012-08-07 | 2012-08-07 | Heating element for a planar heater of a mocvd reactor |
PCT/EP2013/002337 WO2014023414A1 (en) | 2012-08-07 | 2013-08-05 | Heating element for a planar heater of a mocvd reactor |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015527742A JP2015527742A (ja) | 2015-09-17 |
JP6422866B2 true JP6422866B2 (ja) | 2018-11-14 |
Family
ID=49035508
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015525776A Active JP6422866B2 (ja) | 2012-08-07 | 2013-08-05 | Mocvd反応炉の面状ヒータ用加熱エレメント |
Country Status (7)
Country | Link |
---|---|
US (1) | US20140041589A1 (ja) |
EP (2) | EP2882884B1 (ja) |
JP (1) | JP6422866B2 (ja) |
KR (1) | KR102042878B1 (ja) |
SG (1) | SG11201500815YA (ja) |
TW (1) | TWI605475B (ja) |
WO (1) | WO2014023414A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US9992917B2 (en) | 2014-03-10 | 2018-06-05 | Vulcan GMS | 3-D printing method for producing tungsten-based shielding parts |
AT15991U1 (de) * | 2017-05-12 | 2018-10-15 | Plansee Se | Hochtemperaturkomponente |
DE102018105220A1 (de) * | 2018-03-07 | 2019-09-12 | Hauni Maschinenbau Gmbh | Verfahren zur Fertigung eines elektrisch betreibbaren Heizkörpers für einen Inhalator |
AT17391U1 (de) | 2020-07-31 | 2022-03-15 | Plansee Se | Hochtemperaturkomponente |
EP4186881A1 (en) | 2021-11-24 | 2023-05-31 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Producing tantalum carbide layer on technical ceramics using a spray coating and high-temperature sintering process based on aqueous solutions |
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2012
- 2012-08-07 US US13/568,915 patent/US20140041589A1/en not_active Abandoned
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2013
- 2013-06-14 TW TW102121081A patent/TWI605475B/zh active
- 2013-08-05 JP JP2015525776A patent/JP6422866B2/ja active Active
- 2013-08-05 SG SG11201500815YA patent/SG11201500815YA/en unknown
- 2013-08-05 WO PCT/EP2013/002337 patent/WO2014023414A1/en active Application Filing
- 2013-08-05 KR KR1020157003036A patent/KR102042878B1/ko active IP Right Grant
- 2013-08-05 EP EP13753087.9A patent/EP2882884B1/en active Active
- 2013-08-05 EP EP16001871.9A patent/EP3130689A1/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
JP2015527742A (ja) | 2015-09-17 |
CN104662197A (zh) | 2015-05-27 |
EP2882884B1 (en) | 2016-11-30 |
TWI605475B (zh) | 2017-11-11 |
EP3130689A1 (en) | 2017-02-15 |
US20140041589A1 (en) | 2014-02-13 |
WO2014023414A1 (en) | 2014-02-13 |
KR20150040907A (ko) | 2015-04-15 |
EP2882884A1 (en) | 2015-06-17 |
TW201413747A (zh) | 2014-04-01 |
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