JP6420236B2 - 高電界を用いたナノポアの作製 - Google Patents

高電界を用いたナノポアの作製 Download PDF

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Publication number
JP6420236B2
JP6420236B2 JP2015510885A JP2015510885A JP6420236B2 JP 6420236 B2 JP6420236 B2 JP 6420236B2 JP 2015510885 A JP2015510885 A JP 2015510885A JP 2015510885 A JP2015510885 A JP 2015510885A JP 6420236 B2 JP6420236 B2 JP 6420236B2
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membrane
potential
reservoirs
film
electric field
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JP2015525114A (ja
JP2015525114A5 (enExample
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ヘイ クォック ウィング
ヘイ クォック ウィング
タバード−コッサ ヴィンセント
タバード−コッサ ヴィンセント
アレキサンダー ザーケル ブリッグス カイル
アレキサンダー ザーケル ブリッグス カイル
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ジ ユニバーシティ オブ オタワ
ジ ユニバーシティ オブ オタワ
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00Electrolytic etching or polishing
    • C25F3/02Etching
    • C25F3/14Etching locally
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D65/00Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/02Membrane cleaning or sterilisation ; Membrane regeneration
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D67/00Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081After-treatment of organic or inorganic membranes
    • B01D67/009After-treatment of organic or inorganic membranes with wave-energy, particle-radiation or plasma
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00087Holes
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0095Semiconductive materials
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483Physical analysis of biological material
    • G01N33/487Physical analysis of biological material of liquid biological material
    • G01N33/48707Physical analysis of biological material of liquid biological material by electrical means
    • G01N33/48721Investigating individual macromolecules, e.g. by translocation through nanopores
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2321/00Details relating to membrane cleaning, regeneration, sterilization or to the prevention of fouling
    • B01D2321/22Electrical effects
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2323/00Details relating to membrane preparation
    • B01D2323/42Details of membrane preparation apparatus
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2325/00Details relating to properties of membranes
    • B01D2325/02Details relating to pores or porosity of the membranes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2325/00Details relating to properties of membranes
    • B01D2325/02Details relating to pores or porosity of the membranes
    • B01D2325/0282Dynamic pores-stimuli responsive membranes, e.g. thermoresponsive or pH-responsive
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00Basic microelectromechanical structures
    • B81B2203/03Static structures
    • B81B2203/0353Holes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Biomedical Technology (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrochemistry (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Hematology (AREA)
  • Molecular Biology (AREA)
  • Urology & Nephrology (AREA)
  • Plasma & Fusion (AREA)
  • Nanotechnology (AREA)
  • Biophysics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Steroid Compounds (AREA)
JP2015510885A 2012-05-07 2013-05-07 高電界を用いたナノポアの作製 Active JP6420236B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261643651P 2012-05-07 2012-05-07
US61/643,651 2012-05-07
US201361781081P 2013-03-14 2013-03-14
US61/781,081 2013-03-14
PCT/IB2013/000891 WO2013167955A1 (en) 2012-05-07 2013-05-07 Fabrication of nanopores using high electric fields

Related Child Applications (1)

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JP2018108930A Division JP2018187626A (ja) 2012-05-07 2018-06-06 高電界を用いたナノポアの作製

Publications (3)

Publication Number Publication Date
JP2015525114A JP2015525114A (ja) 2015-09-03
JP2015525114A5 JP2015525114A5 (enExample) 2017-12-28
JP6420236B2 true JP6420236B2 (ja) 2018-11-07

Family

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Family Applications (3)

Application Number Title Priority Date Filing Date
JP2015510884A Active JP6298450B2 (ja) 2012-05-07 2013-05-07 固体ナノポアの大きさを制御するための方法
JP2015510885A Active JP6420236B2 (ja) 2012-05-07 2013-05-07 高電界を用いたナノポアの作製
JP2018108930A Pending JP2018187626A (ja) 2012-05-07 2018-06-06 高電界を用いたナノポアの作製

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JP2018108930A Pending JP2018187626A (ja) 2012-05-07 2018-06-06 高電界を用いたナノポアの作製

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US (2) US9777389B2 (enExample)
EP (2) EP2846901B1 (enExample)
JP (3) JP6298450B2 (enExample)
KR (2) KR102065745B1 (enExample)
CN (2) CN104411386B (enExample)
AU (2) AU2013257756B2 (enExample)
BR (2) BR112014027829B1 (enExample)
CA (2) CA2872600C (enExample)
ES (2) ES2629952T3 (enExample)
MX (2) MX353370B (enExample)
SG (3) SG11201407249XA (enExample)
WO (2) WO2013167952A1 (enExample)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2014228529B8 (en) * 2013-03-15 2018-06-14 President And Fellows Of Harvard College Fabrication of nanopores in atomically-thin membranes by ultra-short electrical pulsing
WO2015097765A1 (ja) 2013-12-25 2015-07-02 株式会社日立製作所 穴形成方法、測定装置及びチップセット
JP6209122B2 (ja) * 2014-04-02 2017-10-04 株式会社日立ハイテクノロジーズ 孔形成方法及び測定装置
DE102014111984B3 (de) * 2014-08-21 2016-01-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Fluidische Gigaohm-Dichtung für Transmembranproteinmessungen
US11009498B2 (en) 2014-12-01 2021-05-18 Cornell University Nanopore-containing substrates with aligned nanoscale electronic elements and methods of making and using same
CA2970627C (en) 2014-12-19 2022-08-09 The University Of Ottawa Integrating nanopore sensors within microfluidic channel arrays using controlled breakdown
SG11201706587TA (en) * 2015-02-24 2017-09-28 Univ Ottawa Localizing nanopore fabrication on a membrane by laser illumination during controlled breakdown
CN104694649A (zh) * 2015-03-10 2015-06-10 北京大学 一种核酸分子低穿孔速度的纳米孔测序方法及其专用的纳米孔器件
EP3067693A1 (en) 2015-03-12 2016-09-14 Ecole Polytechnique Federale de Lausanne (EPFL) Nanopore forming method and uses thereof
EP3268736B1 (en) 2015-03-12 2021-08-18 Ecole Polytechnique Fédérale de Lausanne (EPFL) Nanopore forming method and uses thereof
RU2712610C2 (ru) 2015-04-03 2020-01-29 Эбботт Лэборетриз Устройства и способы для анализа образца
CN107690582B (zh) 2015-04-03 2023-10-20 雅培制药有限公司 用于样品分析的装置和方法
GB201508669D0 (en) * 2015-05-20 2015-07-01 Oxford Nanopore Tech Ltd Methods and apparatus for forming apertures in a solid state membrane using dielectric breakdown
WO2017004463A1 (en) 2015-07-01 2017-01-05 Abbott Laboratories Devices and methods for sample analysis
CN109863391B (zh) 2016-10-05 2021-11-05 雅培实验室 用于样品分析的装置和方法
US12319960B2 (en) 2016-10-12 2025-06-03 Roche Sequencing Solutions, Inc. Nanopore voltage methods
GB2570849B (en) * 2016-12-09 2022-03-16 Hitachi High Tech Corp Nanopore-forming method, nanopore-forming device and biomolecule measurement device
GB2573433B (en) * 2017-01-10 2022-05-25 Hitachi High Tech Corp Current measurement device and current measurement method using nanopore
EP3369474A1 (en) * 2017-03-01 2018-09-05 Helmholtz-Zentrum Geesthacht Zentrum für Material- und Küstenforschung GmbH Isoporous block copolymer membranes in flat sheet geometry
NO20170513A1 (en) * 2017-03-29 2018-06-04 Condalign As A method for forming av body comprising at least one through-going passage
WO2018201038A1 (en) 2017-04-28 2018-11-01 The University Of Ottawa Controlling translocating molecules through a nanopore
US11224842B2 (en) 2017-05-17 2022-01-18 The Royal Institution For The Advancement Of Learning / Mcgill University Method and apparatus for making a nanopore in a membrane using an electric field applied via a conductive tip
US10752496B2 (en) 2017-09-22 2020-08-25 Applied Materials, Inc. Pore formation in a substrate
US10830756B2 (en) 2017-09-22 2020-11-10 Applied Materials, Inc. Method to create a free-standing membrane for biological applications
US10618805B2 (en) 2017-09-22 2020-04-14 Applied Materials, Inc. Method to reduce pore diameter using atomic layer deposition and etching
JP6975609B2 (ja) * 2017-10-19 2021-12-01 株式会社日立製作所 親水性保持基材、計測装置、デバイスおよび親水性保持方法
JP6959121B2 (ja) * 2017-12-05 2021-11-02 株式会社日立ハイテク 孔形成方法及び孔形成装置
WO2019109253A1 (zh) * 2017-12-05 2019-06-13 清华大学 调控固态纳米孔系统中固态纳米孔有效尺寸的方法
CN108279312B (zh) * 2018-03-08 2021-06-01 冯建东 一种基于纳米孔的蛋白质组学分析装置及血清检测方法及应用
US11454624B2 (en) 2018-09-28 2022-09-27 Ofer Wilner Nanopore technologies
CN113260449B (zh) * 2018-12-11 2023-09-29 豪夫迈·罗氏有限公司 用于膜中自限性蛋白质孔插入的系统和方法
JP7174614B2 (ja) * 2018-12-12 2022-11-17 株式会社日立製作所 ナノポア形成方法及び分析方法
US11981557B2 (en) 2020-04-17 2024-05-14 Southern Methodist University Ohmic nanopore fabrication and real-time cleaning
WO2021260587A1 (en) * 2020-06-23 2021-12-30 The University Of Ottawa Improved techniques for nanopore enlargement and formation
US12429449B2 (en) * 2020-07-31 2025-09-30 Hitachi High-Tech Corporation Biomolecule analysis method, biomolecule analyzing reagent, and biomolecule analysis device
JP7440375B2 (ja) * 2020-08-19 2024-02-28 株式会社日立製作所 孔形成方法及び孔形成装置
JP7543174B2 (ja) * 2021-03-03 2024-09-02 株式会社日立製作所 ポア形成方法、およびポア形成装置
CN116536745B (zh) * 2022-05-20 2025-02-07 武汉铢寸科技有限公司 在膜中制造纳米孔的方法、装置及叠加电场的生成装置
WO2024238505A1 (en) * 2023-05-12 2024-11-21 Massachusetts Institute Of Technology Systems and methods for cascaded compression of the size distribution of zero-dimensional nanostructures
WO2025111147A1 (en) 2023-11-21 2025-05-30 Abbott Laboratories Two-dimensional matrix droplet array

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02173278A (ja) * 1988-12-26 1990-07-04 Hitachi Ltd 微細加工方法及びその装置
JPH09316692A (ja) * 1996-05-30 1997-12-09 Fine Ceramics Center 微細孔を有するアルミナ膜及びその製造法
JP3902883B2 (ja) * 1998-03-27 2007-04-11 キヤノン株式会社 ナノ構造体及びその製造方法
US7258838B2 (en) * 1999-06-22 2007-08-21 President And Fellows Of Harvard College Solid state molecular probe device
DE10044565B4 (de) 2000-09-08 2005-06-30 Gesellschaft für Schwerionenforschung mbH Elektrolytische Zelle, deren Verwendung und Verfahren zum Ätzen einer in der Zelle eingespannten Membran sowie Verfahren zum Schalten einer geätzten, in der Zelle eingespannten Membran von Durchgang auf Sperrung und umgekehrt
JP2003001462A (ja) 2000-09-13 2003-01-08 Hamamatsu Photonics Kk レーザ加工装置
US6592742B2 (en) * 2001-07-13 2003-07-15 Applied Materials Inc. Electrochemically assisted chemical polish
US6706203B2 (en) * 2001-10-30 2004-03-16 Agilent Technologies, Inc. Adjustable nanopore, nanotome, and nanotweezer
EP1592641B1 (en) * 2003-02-03 2018-03-07 President and Fellows of Harvard College Controlled fabrication of gaps in electrically conducting structures
AU2004311842C1 (en) * 2003-12-24 2011-01-06 The Regents Of The University Of California Tissue ablation with irreversible electroporation
EP1721657A1 (en) * 2005-05-13 2006-11-15 SONY DEUTSCHLAND GmbH A method of fabricating a polymeric membrane having at least one pore
JP4925670B2 (ja) * 2006-01-16 2012-05-09 埼玉県 チタン系金属製品の製造方法
US7777505B2 (en) 2006-05-05 2010-08-17 University Of Utah Research Foundation Nanopore platforms for ion channel recordings and single molecule detection and analysis
US7849581B2 (en) 2006-05-05 2010-12-14 University Of Utah Research Foundation Nanopore electrode, nanopore membrane, methods of preparation and surface modification, and use thereof
DE102006035072B4 (de) 2006-07-28 2009-03-12 Westfälische Wilhelms-Universität Münster Vorrichtung und Verfahren zum Erfassen von Partikeln mit Pipette und Nanopore
KR101521990B1 (ko) * 2007-04-04 2015-05-20 더 리젠츠 오브 더 유니버시티 오브 캘리포니아 나노포어 사용을 위한 조성물, 장치, 시스템 및 방법
FR2927169B1 (fr) * 2008-02-05 2013-01-11 Commissariat Energie Atomique Procede de fonctionnalisation de la surface d'un pore
US20100122907A1 (en) 2008-05-06 2010-05-20 Government of the United States of America, Single molecule mass or size spectrometry in solution using a solitary nanopore
ATE535800T1 (de) * 2009-04-03 2011-12-15 Nxp Bv Sensorvorrichtung und verfahren zu dessen herstellung
EP3196645B1 (en) 2009-09-18 2019-06-19 President and Fellows of Harvard College Bare single-layer graphene membrane having a nanopore enabling high-sensitivity molecular detection and analysis
EP2504082A4 (en) 2009-11-25 2016-11-09 Univ Sydney MEMBRANE AND MEMBRANE SEPARATION SYSTEM
DE102010025968B4 (de) * 2010-07-02 2016-06-02 Schott Ag Erzeugung von Mikrolöchern
US9422154B2 (en) * 2010-11-02 2016-08-23 International Business Machines Corporation Feedback control of dimensions in nanopore and nanofluidic devices
KR20120133653A (ko) * 2011-05-31 2012-12-11 삼성전자주식회사 나노 센서, 이의 제조 방법 및 이를 사용하여 표적 분자를 검출하는 방법
AU2014228529B8 (en) 2013-03-15 2018-06-14 President And Fellows Of Harvard College Fabrication of nanopores in atomically-thin membranes by ultra-short electrical pulsing

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Publication number Publication date
EP2846901A4 (en) 2016-01-13
KR102065745B1 (ko) 2020-01-14
EP2847367A1 (en) 2015-03-18
BR112014027829B1 (pt) 2021-03-23
US20150108008A1 (en) 2015-04-23
BR112014027873B8 (pt) 2021-11-03
SG10201606334XA (en) 2016-09-29
JP6298450B2 (ja) 2018-03-20
JP2015525114A (ja) 2015-09-03
US20150109008A1 (en) 2015-04-23
WO2013167955A1 (en) 2013-11-14
AU2013257759B2 (en) 2017-07-13
EP2846901A1 (en) 2015-03-18
US9777390B2 (en) 2017-10-03
SG11201407249XA (en) 2014-12-30
CN104662209A (zh) 2015-05-27
KR102065754B1 (ko) 2020-02-11
CA2872600A1 (en) 2013-11-14
BR112014027873A2 (pt) 2017-06-27
ES2630064T3 (es) 2017-08-17
JP2015517401A (ja) 2015-06-22
CA2872600C (en) 2021-11-23
ES2629952T3 (es) 2017-08-16
AU2013257756B2 (en) 2017-05-04
CA2872602A1 (en) 2013-11-14
MX357200B (es) 2018-06-29
JP2018187626A (ja) 2018-11-29
CN104662209B (zh) 2017-03-15
KR20150040799A (ko) 2015-04-15
WO2013167952A1 (en) 2013-11-14
US9777389B2 (en) 2017-10-03
MX353370B (es) 2018-01-09
BR112014027829A2 (pt) 2017-06-27
AU2013257756A1 (en) 2014-11-27
CN104411386A (zh) 2015-03-11
EP2846901B1 (en) 2017-03-29
BR112014027873B1 (pt) 2021-05-25
CA2872602C (en) 2020-08-25
CN104411386B (zh) 2016-10-12
EP2847367B1 (en) 2017-03-29
SG11201407252UA (en) 2014-12-30
EP2847367A4 (en) 2016-01-13
AU2013257759A1 (en) 2014-11-27
MX2014013410A (es) 2015-12-08
KR20150037748A (ko) 2015-04-08
MX2014013412A (es) 2016-04-07

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