CA2872600C - Method for controlling the size of solid-state nanopores - Google Patents

Method for controlling the size of solid-state nanopores Download PDF

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Publication number
CA2872600C
CA2872600C CA2872600A CA2872600A CA2872600C CA 2872600 C CA2872600 C CA 2872600C CA 2872600 A CA2872600 A CA 2872600A CA 2872600 A CA2872600 A CA 2872600A CA 2872600 C CA2872600 C CA 2872600C
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Prior art keywords
nanopore
electric potential
value
size
current
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English (en)
French (fr)
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CA2872600A1 (en
Inventor
Michel Godin
Eric BEAMISH
Vincent TABARD-COSSA
Wing Hei KWOK
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University of Ottawa
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University of Ottawa
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00Electrolytic etching or polishing
    • C25F3/02Etching
    • C25F3/14Etching locally
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D65/00Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/02Membrane cleaning or sterilisation ; Membrane regeneration
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D67/00Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081After-treatment of organic or inorganic membranes
    • B01D67/009After-treatment of organic or inorganic membranes with wave-energy, particle-radiation or plasma
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00087Holes
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0095Semiconductive materials
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483Physical analysis of biological material
    • G01N33/487Physical analysis of biological material of liquid biological material
    • G01N33/48707Physical analysis of biological material of liquid biological material by electrical means
    • G01N33/48721Investigating individual macromolecules, e.g. by translocation through nanopores
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2321/00Details relating to membrane cleaning, regeneration, sterilization or to the prevention of fouling
    • B01D2321/22Electrical effects
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2323/00Details relating to membrane preparation
    • B01D2323/42Details of membrane preparation apparatus
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2325/00Details relating to properties of membranes
    • B01D2325/02Details relating to pores or porosity of the membranes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2325/00Details relating to properties of membranes
    • B01D2325/02Details relating to pores or porosity of the membranes
    • B01D2325/0282Dynamic pores-stimuli responsive membranes, e.g. thermoresponsive or pH-responsive
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00Basic microelectromechanical structures
    • B81B2203/03Static structures
    • B81B2203/0353Holes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Biomedical Technology (AREA)
  • Electrochemistry (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Nanotechnology (AREA)
  • Biophysics (AREA)
  • Hematology (AREA)
  • Molecular Biology (AREA)
  • Urology & Nephrology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Inorganic Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Steroid Compounds (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
CA2872600A 2012-05-07 2013-05-07 Method for controlling the size of solid-state nanopores Active CA2872600C (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261643651P 2012-05-07 2012-05-07
US61/643,651 2012-05-07
US201361781081P 2013-03-14 2013-03-14
US61/781,081 2013-03-14
PCT/IB2013/000884 WO2013167952A1 (en) 2012-05-07 2013-05-07 Method for controlling the size of solid-state nanopores

Publications (2)

Publication Number Publication Date
CA2872600A1 CA2872600A1 (en) 2013-11-14
CA2872600C true CA2872600C (en) 2021-11-23

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Family Applications (2)

Application Number Title Priority Date Filing Date
CA2872600A Active CA2872600C (en) 2012-05-07 2013-05-07 Method for controlling the size of solid-state nanopores
CA2872602A Active CA2872602C (en) 2012-05-07 2013-05-07 Fabrication of nanopores using high electric fields

Family Applications After (1)

Application Number Title Priority Date Filing Date
CA2872602A Active CA2872602C (en) 2012-05-07 2013-05-07 Fabrication of nanopores using high electric fields

Country Status (12)

Country Link
US (2) US9777389B2 (enExample)
EP (2) EP2847367B1 (enExample)
JP (3) JP6298450B2 (enExample)
KR (2) KR102065754B1 (enExample)
CN (2) CN104662209B (enExample)
AU (2) AU2013257756B2 (enExample)
BR (2) BR112014027829B1 (enExample)
CA (2) CA2872600C (enExample)
ES (2) ES2629952T3 (enExample)
MX (2) MX353370B (enExample)
SG (3) SG10201606334XA (enExample)
WO (2) WO2013167955A1 (enExample)

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SG11201704688WA (en) * 2014-12-19 2017-07-28 Univ Ottawa Integrating nanopore sensors within microfluidic channel arrays using controlled breakdown
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Publication number Publication date
MX353370B (es) 2018-01-09
BR112014027873B1 (pt) 2021-05-25
EP2847367B1 (en) 2017-03-29
EP2846901A4 (en) 2016-01-13
EP2847367A1 (en) 2015-03-18
JP6298450B2 (ja) 2018-03-20
KR20150040799A (ko) 2015-04-15
AU2013257756A1 (en) 2014-11-27
ES2629952T3 (es) 2017-08-16
CN104411386A (zh) 2015-03-11
SG11201407252UA (en) 2014-12-30
MX2014013412A (es) 2016-04-07
CN104662209A (zh) 2015-05-27
AU2013257756B2 (en) 2017-05-04
JP2015517401A (ja) 2015-06-22
MX2014013410A (es) 2015-12-08
BR112014027829A2 (pt) 2017-06-27
MX357200B (es) 2018-06-29
WO2013167955A1 (en) 2013-11-14
ES2630064T3 (es) 2017-08-17
EP2846901A1 (en) 2015-03-18
KR20150037748A (ko) 2015-04-08
SG11201407249XA (en) 2014-12-30
US9777390B2 (en) 2017-10-03
JP2018187626A (ja) 2018-11-29
US9777389B2 (en) 2017-10-03
KR102065745B1 (ko) 2020-01-14
AU2013257759B2 (en) 2017-07-13
JP2015525114A (ja) 2015-09-03
US20150109008A1 (en) 2015-04-23
WO2013167952A1 (en) 2013-11-14
JP6420236B2 (ja) 2018-11-07
CA2872602C (en) 2020-08-25
AU2013257759A1 (en) 2014-11-27
US20150108008A1 (en) 2015-04-23
BR112014027873A2 (pt) 2017-06-27
SG10201606334XA (en) 2016-09-29
CN104662209B (zh) 2017-03-15
KR102065754B1 (ko) 2020-02-11
EP2847367A4 (en) 2016-01-13
CA2872600A1 (en) 2013-11-14
BR112014027829B1 (pt) 2021-03-23
EP2846901B1 (en) 2017-03-29
BR112014027873B8 (pt) 2021-11-03
CA2872602A1 (en) 2013-11-14
CN104411386B (zh) 2016-10-12

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