KR102065754B1 - 높은 전기장을 이용한 나노포어의 형성 방법 - Google Patents

높은 전기장을 이용한 나노포어의 형성 방법 Download PDF

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KR102065754B1
KR102065754B1 KR1020147033949A KR20147033949A KR102065754B1 KR 102065754 B1 KR102065754 B1 KR 102065754B1 KR 1020147033949 A KR1020147033949 A KR 1020147033949A KR 20147033949 A KR20147033949 A KR 20147033949A KR 102065754 B1 KR102065754 B1 KR 102065754B1
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KR20150040799A (ko
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윙 헤이 쿽
윙 헤이 ?
빈센트 타바드-코사
카일 알렉산더 자켈 브릭스
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유니버시티 오브 오타와
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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C25F3/14—Etching locally
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D65/00—Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/02—Membrane cleaning or sterilisation ; Membrane regeneration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081—After-treatment of organic or inorganic membranes
    • B01D67/009—After-treatment of organic or inorganic membranes with wave-energy, particle-radiation or plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00087—Holes
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0095—Semiconductive materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G01N33/487—Physical analysis of biological material of liquid biological material
    • G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
    • G01N33/48721—Investigating individual macromolecules, e.g. by translocation through nanopores
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2321/00—Details relating to membrane cleaning, regeneration, sterilization or to the prevention of fouling
    • B01D2321/22—Electrical effects
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2323/00—Details relating to membrane preparation
    • B01D2323/42—Details of membrane preparation apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/02—Details relating to pores or porosity of the membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/02—Details relating to pores or porosity of the membranes
    • B01D2325/0282—Dynamic pores-stimuli responsive membranes, e.g. thermoresponsive or pH-responsive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0353—Holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Biomedical Technology (AREA)
  • Electrochemistry (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Nanotechnology (AREA)
  • Biophysics (AREA)
  • Hematology (AREA)
  • Molecular Biology (AREA)
  • Urology & Nephrology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Inorganic Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Steroid Compounds (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
KR1020147033949A 2012-05-07 2013-05-07 높은 전기장을 이용한 나노포어의 형성 방법 Active KR102065754B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261643651P 2012-05-07 2012-05-07
US61/643,651 2012-05-07
US201361781081P 2013-03-14 2013-03-14
US61/781,081 2013-03-14
PCT/IB2013/000891 WO2013167955A1 (en) 2012-05-07 2013-05-07 Fabrication of nanopores using high electric fields

Publications (2)

Publication Number Publication Date
KR20150040799A KR20150040799A (ko) 2015-04-15
KR102065754B1 true KR102065754B1 (ko) 2020-02-11

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KR1020147033950A Active KR102065745B1 (ko) 2012-05-07 2013-05-07 고체상 나노포어의 크기를 조절하는 방법

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US (2) US9777389B2 (enExample)
EP (2) EP2847367B1 (enExample)
JP (3) JP6298450B2 (enExample)
KR (2) KR102065754B1 (enExample)
CN (2) CN104662209B (enExample)
AU (2) AU2013257756B2 (enExample)
BR (2) BR112014027829B1 (enExample)
CA (2) CA2872600C (enExample)
ES (2) ES2629952T3 (enExample)
MX (2) MX353370B (enExample)
SG (3) SG10201606334XA (enExample)
WO (2) WO2013167955A1 (enExample)

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CA3005143A1 (en) 2014-12-01 2016-06-16 Cornell University Nanopore-containing substrates with aligned nanoscale electronic elements and methods of making and using same
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JP6975609B2 (ja) * 2017-10-19 2021-12-01 株式会社日立製作所 親水性保持基材、計測装置、デバイスおよび親水性保持方法
JP6959121B2 (ja) 2017-12-05 2021-11-02 株式会社日立ハイテク 孔形成方法及び孔形成装置
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CN108279312B (zh) * 2018-03-08 2021-06-01 冯建东 一种基于纳米孔的蛋白质组学分析装置及血清检测方法及应用
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MX353370B (es) 2018-01-09
BR112014027873B1 (pt) 2021-05-25
EP2847367B1 (en) 2017-03-29
EP2846901A4 (en) 2016-01-13
EP2847367A1 (en) 2015-03-18
JP6298450B2 (ja) 2018-03-20
KR20150040799A (ko) 2015-04-15
AU2013257756A1 (en) 2014-11-27
ES2629952T3 (es) 2017-08-16
CN104411386A (zh) 2015-03-11
SG11201407252UA (en) 2014-12-30
MX2014013412A (es) 2016-04-07
CN104662209A (zh) 2015-05-27
AU2013257756B2 (en) 2017-05-04
JP2015517401A (ja) 2015-06-22
MX2014013410A (es) 2015-12-08
BR112014027829A2 (pt) 2017-06-27
MX357200B (es) 2018-06-29
WO2013167955A1 (en) 2013-11-14
ES2630064T3 (es) 2017-08-17
EP2846901A1 (en) 2015-03-18
KR20150037748A (ko) 2015-04-08
SG11201407249XA (en) 2014-12-30
US9777390B2 (en) 2017-10-03
CA2872600C (en) 2021-11-23
JP2018187626A (ja) 2018-11-29
US9777389B2 (en) 2017-10-03
KR102065745B1 (ko) 2020-01-14
AU2013257759B2 (en) 2017-07-13
JP2015525114A (ja) 2015-09-03
US20150109008A1 (en) 2015-04-23
WO2013167952A1 (en) 2013-11-14
JP6420236B2 (ja) 2018-11-07
CA2872602C (en) 2020-08-25
AU2013257759A1 (en) 2014-11-27
US20150108008A1 (en) 2015-04-23
BR112014027873A2 (pt) 2017-06-27
SG10201606334XA (en) 2016-09-29
CN104662209B (zh) 2017-03-15
EP2847367A4 (en) 2016-01-13
CA2872600A1 (en) 2013-11-14
BR112014027829B1 (pt) 2021-03-23
EP2846901B1 (en) 2017-03-29
BR112014027873B8 (pt) 2021-11-03
CA2872602A1 (en) 2013-11-14
CN104411386B (zh) 2016-10-12

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