ES2629952T3 - Procedimiento para controlar el tamaño de nanoporos de estado sólido - Google Patents
Procedimiento para controlar el tamaño de nanoporos de estado sólido Download PDFInfo
- Publication number
- ES2629952T3 ES2629952T3 ES13787360.0T ES13787360T ES2629952T3 ES 2629952 T3 ES2629952 T3 ES 2629952T3 ES 13787360 T ES13787360 T ES 13787360T ES 2629952 T3 ES2629952 T3 ES 2629952T3
- Authority
- ES
- Spain
- Prior art keywords
- nanopore
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- value
- electric potential
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- Prior art date
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/02—Etching
- C25F3/14—Etching locally
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D65/00—Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
- B01D65/02—Membrane cleaning or sterilisation ; Membrane regeneration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/009—After-treatment of organic or inorganic membranes with wave-energy, particle-radiation or plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00087—Holes
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0095—Semiconductive materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/483—Physical analysis of biological material
- G01N33/487—Physical analysis of biological material of liquid biological material
- G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
- G01N33/48721—Investigating individual macromolecules, e.g. by translocation through nanopores
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2321/00—Details relating to membrane cleaning, regeneration, sterilization or to the prevention of fouling
- B01D2321/22—Electrical effects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2323/00—Details relating to membrane preparation
- B01D2323/42—Details of membrane preparation apparatus
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/02—Details relating to pores or porosity of the membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/02—Details relating to pores or porosity of the membranes
- B01D2325/0282—Dynamic pores-stimuli responsive membranes, e.g. thermoresponsive or pH-responsive
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0353—Holes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Pathology (AREA)
- Immunology (AREA)
- General Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Manufacturing & Machinery (AREA)
- Biomedical Technology (AREA)
- Electrochemistry (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Plasma & Fusion (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Nanotechnology (AREA)
- Biophysics (AREA)
- Hematology (AREA)
- Molecular Biology (AREA)
- Urology & Nephrology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Inorganic Chemistry (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Steroid Compounds (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261643651P | 2012-05-07 | 2012-05-07 | |
| US201261643651P | 2012-05-07 | ||
| US201361781081P | 2013-03-14 | 2013-03-14 | |
| US201361781081P | 2013-03-14 | ||
| PCT/IB2013/000884 WO2013167952A1 (en) | 2012-05-07 | 2013-05-07 | Method for controlling the size of solid-state nanopores |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES2629952T3 true ES2629952T3 (es) | 2017-08-16 |
Family
ID=49550214
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES13787360.0T Active ES2629952T3 (es) | 2012-05-07 | 2013-05-07 | Procedimiento para controlar el tamaño de nanoporos de estado sólido |
| ES13787530.8T Active ES2630064T3 (es) | 2012-05-07 | 2013-05-07 | Fabricación de nanoporos utilizando campos eléctricos potentes |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES13787530.8T Active ES2630064T3 (es) | 2012-05-07 | 2013-05-07 | Fabricación de nanoporos utilizando campos eléctricos potentes |
Country Status (12)
| Country | Link |
|---|---|
| US (2) | US9777389B2 (enExample) |
| EP (2) | EP2847367B1 (enExample) |
| JP (3) | JP6298450B2 (enExample) |
| KR (2) | KR102065754B1 (enExample) |
| CN (2) | CN104662209B (enExample) |
| AU (2) | AU2013257756B2 (enExample) |
| BR (2) | BR112014027829B1 (enExample) |
| CA (2) | CA2872600C (enExample) |
| ES (2) | ES2629952T3 (enExample) |
| MX (2) | MX353370B (enExample) |
| SG (3) | SG10201606334XA (enExample) |
| WO (2) | WO2013167955A1 (enExample) |
Families Citing this family (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2906781C (en) * | 2013-03-15 | 2021-06-08 | President And Fellows Of Havard College | Fabrication of nanopores in atomically-thin membranes by ultra-short electrical pulsing |
| US10724147B2 (en) * | 2013-12-25 | 2020-07-28 | Hitachi, Ltd. | Hole forming method, measuring apparatus and chip set |
| JP6209122B2 (ja) * | 2014-04-02 | 2017-10-04 | 株式会社日立ハイテクノロジーズ | 孔形成方法及び測定装置 |
| DE102014111984B3 (de) * | 2014-08-21 | 2016-01-21 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Fluidische Gigaohm-Dichtung für Transmembranproteinmessungen |
| CA3005143A1 (en) | 2014-12-01 | 2016-06-16 | Cornell University | Nanopore-containing substrates with aligned nanoscale electronic elements and methods of making and using same |
| SG11201704688WA (en) * | 2014-12-19 | 2017-07-28 | Univ Ottawa | Integrating nanopore sensors within microfluidic channel arrays using controlled breakdown |
| JP7071825B2 (ja) * | 2015-02-24 | 2022-05-19 | ジ ユニバーシティ オブ オタワ | 制御破壊時におけるレーザー照明による膜でのナノポア作製の局所化 |
| CN104694649A (zh) * | 2015-03-10 | 2015-06-10 | 北京大学 | 一种核酸分子低穿孔速度的纳米孔测序方法及其专用的纳米孔器件 |
| WO2016142925A1 (en) | 2015-03-12 | 2016-09-15 | Ecole Polytechnique Federale De Lausanne (Epfl) | Nanopore forming method and uses thereof |
| EP3067693A1 (en) | 2015-03-12 | 2016-09-14 | Ecole Polytechnique Federale de Lausanne (EPFL) | Nanopore forming method and uses thereof |
| AU2016243036B2 (en) | 2015-04-03 | 2022-02-17 | Abbott Laboratories | Devices and methods for sample analysis |
| WO2016161400A1 (en) | 2015-04-03 | 2016-10-06 | Abbott Laboratories | Devices and methods for sample analysis |
| GB201508669D0 (en) * | 2015-05-20 | 2015-07-01 | Oxford Nanopore Tech Ltd | Methods and apparatus for forming apertures in a solid state membrane using dielectric breakdown |
| WO2017004463A1 (en) | 2015-07-01 | 2017-01-05 | Abbott Laboratories | Devices and methods for sample analysis |
| US11016053B2 (en) | 2016-10-05 | 2021-05-25 | Abbott Laboratories | Devices and methods for sample analysis |
| EP3526603B1 (en) * | 2016-10-12 | 2022-07-20 | F. Hoffmann-La Roche AG | Nanopore voltage methods |
| CN109890497B (zh) * | 2016-12-09 | 2021-03-02 | 株式会社日立高新技术 | 纳米孔隙形成方法、纳米孔隙形成装置以及生物分子测量装置 |
| GB2573433B (en) * | 2017-01-10 | 2022-05-25 | Hitachi High Tech Corp | Current measurement device and current measurement method using nanopore |
| EP3369474A1 (en) * | 2017-03-01 | 2018-09-05 | Helmholtz-Zentrum Geesthacht Zentrum für Material- und Küstenforschung GmbH | Isoporous block copolymer membranes in flat sheet geometry |
| NO342507B1 (en) * | 2017-03-29 | 2018-06-04 | Condalign As | A method for forming av body comprising at least one through-going passage |
| WO2018201038A1 (en) | 2017-04-28 | 2018-11-01 | The University Of Ottawa | Controlling translocating molecules through a nanopore |
| WO2018209441A1 (en) * | 2017-05-17 | 2018-11-22 | The Royal Institution For The Advancement Of Learning / Mcgill University | Method and apparatus for making a nanopore in a membrane using an electric field applied via a conductive tip |
| US10618805B2 (en) | 2017-09-22 | 2020-04-14 | Applied Materials, Inc. | Method to reduce pore diameter using atomic layer deposition and etching |
| US10752496B2 (en) | 2017-09-22 | 2020-08-25 | Applied Materials, Inc. | Pore formation in a substrate |
| US10830756B2 (en) | 2017-09-22 | 2020-11-10 | Applied Materials, Inc. | Method to create a free-standing membrane for biological applications |
| JP6975609B2 (ja) * | 2017-10-19 | 2021-12-01 | 株式会社日立製作所 | 親水性保持基材、計測装置、デバイスおよび親水性保持方法 |
| JP6959121B2 (ja) | 2017-12-05 | 2021-11-02 | 株式会社日立ハイテク | 孔形成方法及び孔形成装置 |
| WO2019109253A1 (zh) * | 2017-12-05 | 2019-06-13 | 清华大学 | 调控固态纳米孔系统中固态纳米孔有效尺寸的方法 |
| CN108279312B (zh) * | 2018-03-08 | 2021-06-01 | 冯建东 | 一种基于纳米孔的蛋白质组学分析装置及血清检测方法及应用 |
| US11454624B2 (en) | 2018-09-28 | 2022-09-27 | Ofer Wilner | Nanopore technologies |
| CN113260449B (zh) * | 2018-12-11 | 2023-09-29 | 豪夫迈·罗氏有限公司 | 用于膜中自限性蛋白质孔插入的系统和方法 |
| JP7174614B2 (ja) * | 2018-12-12 | 2022-11-17 | 株式会社日立製作所 | ナノポア形成方法及び分析方法 |
| US11981557B2 (en) | 2020-04-17 | 2024-05-14 | Southern Methodist University | Ohmic nanopore fabrication and real-time cleaning |
| WO2021260587A1 (en) * | 2020-06-23 | 2021-12-30 | The University Of Ottawa | Improved techniques for nanopore enlargement and formation |
| US12429449B2 (en) * | 2020-07-31 | 2025-09-30 | Hitachi High-Tech Corporation | Biomolecule analysis method, biomolecule analyzing reagent, and biomolecule analysis device |
| JP7440375B2 (ja) * | 2020-08-19 | 2024-02-28 | 株式会社日立製作所 | 孔形成方法及び孔形成装置 |
| JP7543174B2 (ja) * | 2021-03-03 | 2024-09-02 | 株式会社日立製作所 | ポア形成方法、およびポア形成装置 |
| CN116536745B (zh) * | 2022-05-20 | 2025-02-07 | 武汉铢寸科技有限公司 | 在膜中制造纳米孔的方法、装置及叠加电场的生成装置 |
| WO2024238505A1 (en) * | 2023-05-12 | 2024-11-21 | Massachusetts Institute Of Technology | Systems and methods for cascaded compression of the size distribution of zero-dimensional nanostructures |
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| JPH02173278A (ja) * | 1988-12-26 | 1990-07-04 | Hitachi Ltd | 微細加工方法及びその装置 |
| JPH09316692A (ja) * | 1996-05-30 | 1997-12-09 | Fine Ceramics Center | 微細孔を有するアルミナ膜及びその製造法 |
| JP3902883B2 (ja) * | 1998-03-27 | 2007-04-11 | キヤノン株式会社 | ナノ構造体及びその製造方法 |
| US7258838B2 (en) * | 1999-06-22 | 2007-08-21 | President And Fellows Of Harvard College | Solid state molecular probe device |
| DE10044565B4 (de) * | 2000-09-08 | 2005-06-30 | Gesellschaft für Schwerionenforschung mbH | Elektrolytische Zelle, deren Verwendung und Verfahren zum Ätzen einer in der Zelle eingespannten Membran sowie Verfahren zum Schalten einer geätzten, in der Zelle eingespannten Membran von Durchgang auf Sperrung und umgekehrt |
| JP2003001462A (ja) | 2000-09-13 | 2003-01-08 | Hamamatsu Photonics Kk | レーザ加工装置 |
| US6592742B2 (en) * | 2001-07-13 | 2003-07-15 | Applied Materials Inc. | Electrochemically assisted chemical polish |
| US6706203B2 (en) * | 2001-10-30 | 2004-03-16 | Agilent Technologies, Inc. | Adjustable nanopore, nanotome, and nanotweezer |
| JP2006523144A (ja) * | 2003-02-03 | 2006-10-12 | プレジデント アンド フェロウズ オブ ハーバード カレッジ | 制御された導電性構造体のギャップの製造法 |
| EP2474281B1 (en) * | 2003-12-24 | 2019-03-27 | The Regents of The University of California | Tissue ablation with irreversible electroporation |
| EP1721657A1 (en) * | 2005-05-13 | 2006-11-15 | SONY DEUTSCHLAND GmbH | A method of fabricating a polymeric membrane having at least one pore |
| JP4925670B2 (ja) * | 2006-01-16 | 2012-05-09 | 埼玉県 | チタン系金属製品の製造方法 |
| US7849581B2 (en) | 2006-05-05 | 2010-12-14 | University Of Utah Research Foundation | Nanopore electrode, nanopore membrane, methods of preparation and surface modification, and use thereof |
| US7777505B2 (en) * | 2006-05-05 | 2010-08-17 | University Of Utah Research Foundation | Nanopore platforms for ion channel recordings and single molecule detection and analysis |
| DE102006035072B4 (de) | 2006-07-28 | 2009-03-12 | Westfälische Wilhelms-Universität Münster | Vorrichtung und Verfahren zum Erfassen von Partikeln mit Pipette und Nanopore |
| AU2008236694B2 (en) * | 2007-04-04 | 2014-01-23 | The Regents Of The University Of California | Compositions, devices, systems, and methods for using a nanopore |
| FR2927169B1 (fr) * | 2008-02-05 | 2013-01-11 | Commissariat Energie Atomique | Procede de fonctionnalisation de la surface d'un pore |
| US20100122907A1 (en) | 2008-05-06 | 2010-05-20 | Government of the United States of America, | Single molecule mass or size spectrometry in solution using a solitary nanopore |
| ATE535800T1 (de) * | 2009-04-03 | 2011-12-15 | Nxp Bv | Sensorvorrichtung und verfahren zu dessen herstellung |
| EP3196645B1 (en) | 2009-09-18 | 2019-06-19 | President and Fellows of Harvard College | Bare single-layer graphene membrane having a nanopore enabling high-sensitivity molecular detection and analysis |
| EP2504082A4 (en) * | 2009-11-25 | 2016-11-09 | Univ Sydney | MEMBRANE AND MEMBRANE SEPARATION SYSTEM |
| DE102010025968B4 (de) * | 2010-07-02 | 2016-06-02 | Schott Ag | Erzeugung von Mikrolöchern |
| US9422154B2 (en) * | 2010-11-02 | 2016-08-23 | International Business Machines Corporation | Feedback control of dimensions in nanopore and nanofluidic devices |
| KR20120133653A (ko) * | 2011-05-31 | 2012-12-11 | 삼성전자주식회사 | 나노 센서, 이의 제조 방법 및 이를 사용하여 표적 분자를 검출하는 방법 |
| CA2906781C (en) | 2013-03-15 | 2021-06-08 | President And Fellows Of Havard College | Fabrication of nanopores in atomically-thin membranes by ultra-short electrical pulsing |
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