CN104662209B - 使用高电场制造纳米孔 - Google Patents

使用高电场制造纳米孔 Download PDF

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Publication number
CN104662209B
CN104662209B CN201380036177.0A CN201380036177A CN104662209B CN 104662209 B CN104662209 B CN 104662209B CN 201380036177 A CN201380036177 A CN 201380036177A CN 104662209 B CN104662209 B CN 104662209B
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membrane
potential
fluid
reservoirs
current
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Chinese (zh)
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CN104662209A (zh
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W·H·郭
V·塔巴德-科萨
K·A·Z·布里格斯
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University of Ottawa
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University of Ottawa
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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C25F3/14—Etching locally
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D65/00—Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/02—Membrane cleaning or sterilisation ; Membrane regeneration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0081—After-treatment of organic or inorganic membranes
    • B01D67/009—After-treatment of organic or inorganic membranes with wave-energy, particle-radiation or plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00087—Holes
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0095—Semiconductive materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G01N33/487—Physical analysis of biological material of liquid biological material
    • G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
    • G01N33/48721—Investigating individual macromolecules, e.g. by translocation through nanopores
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2321/00—Details relating to membrane cleaning, regeneration, sterilization or to the prevention of fouling
    • B01D2321/22—Electrical effects
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2323/00—Details relating to membrane preparation
    • B01D2323/42—Details of membrane preparation apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/02—Details relating to pores or porosity of the membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/02—Details relating to pores or porosity of the membranes
    • B01D2325/0282—Dynamic pores-stimuli responsive membranes, e.g. thermoresponsive or pH-responsive
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0353—Holes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Biomedical Technology (AREA)
  • Electrochemistry (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Nanotechnology (AREA)
  • Biophysics (AREA)
  • Hematology (AREA)
  • Molecular Biology (AREA)
  • Urology & Nephrology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Inorganic Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Steroid Compounds (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
CN201380036177.0A 2012-05-07 2013-05-07 使用高电场制造纳米孔 Active CN104662209B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261643651P 2012-05-07 2012-05-07
US61/643,651 2012-05-07
US201361781081P 2013-03-14 2013-03-14
US61/781,081 2013-03-14
PCT/IB2013/000891 WO2013167955A1 (en) 2012-05-07 2013-05-07 Fabrication of nanopores using high electric fields

Publications (2)

Publication Number Publication Date
CN104662209A CN104662209A (zh) 2015-05-27
CN104662209B true CN104662209B (zh) 2017-03-15

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CN201380036177.0A Active CN104662209B (zh) 2012-05-07 2013-05-07 使用高电场制造纳米孔
CN201380036310.2A Active CN104411386B (zh) 2012-05-07 2013-05-07 用于控制固态纳米孔的大小的方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201380036310.2A Active CN104411386B (zh) 2012-05-07 2013-05-07 用于控制固态纳米孔的大小的方法

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US (2) US9777389B2 (enExample)
EP (2) EP2847367B1 (enExample)
JP (3) JP6298450B2 (enExample)
KR (2) KR102065754B1 (enExample)
CN (2) CN104662209B (enExample)
AU (2) AU2013257756B2 (enExample)
BR (2) BR112014027829B1 (enExample)
CA (2) CA2872600C (enExample)
ES (2) ES2629952T3 (enExample)
MX (2) MX353370B (enExample)
SG (3) SG10201606334XA (enExample)
WO (2) WO2013167955A1 (enExample)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2906781C (en) * 2013-03-15 2021-06-08 President And Fellows Of Havard College Fabrication of nanopores in atomically-thin membranes by ultra-short electrical pulsing
US10724147B2 (en) * 2013-12-25 2020-07-28 Hitachi, Ltd. Hole forming method, measuring apparatus and chip set
JP6209122B2 (ja) * 2014-04-02 2017-10-04 株式会社日立ハイテクノロジーズ 孔形成方法及び測定装置
DE102014111984B3 (de) * 2014-08-21 2016-01-21 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Fluidische Gigaohm-Dichtung für Transmembranproteinmessungen
CA3005143A1 (en) 2014-12-01 2016-06-16 Cornell University Nanopore-containing substrates with aligned nanoscale electronic elements and methods of making and using same
SG11201704688WA (en) * 2014-12-19 2017-07-28 Univ Ottawa Integrating nanopore sensors within microfluidic channel arrays using controlled breakdown
JP7071825B2 (ja) * 2015-02-24 2022-05-19 ジ ユニバーシティ オブ オタワ 制御破壊時におけるレーザー照明による膜でのナノポア作製の局所化
CN104694649A (zh) * 2015-03-10 2015-06-10 北京大学 一种核酸分子低穿孔速度的纳米孔测序方法及其专用的纳米孔器件
WO2016142925A1 (en) 2015-03-12 2016-09-15 Ecole Polytechnique Federale De Lausanne (Epfl) Nanopore forming method and uses thereof
EP3067693A1 (en) 2015-03-12 2016-09-14 Ecole Polytechnique Federale de Lausanne (EPFL) Nanopore forming method and uses thereof
AU2016243036B2 (en) 2015-04-03 2022-02-17 Abbott Laboratories Devices and methods for sample analysis
WO2016161400A1 (en) 2015-04-03 2016-10-06 Abbott Laboratories Devices and methods for sample analysis
GB201508669D0 (en) * 2015-05-20 2015-07-01 Oxford Nanopore Tech Ltd Methods and apparatus for forming apertures in a solid state membrane using dielectric breakdown
WO2017004463A1 (en) 2015-07-01 2017-01-05 Abbott Laboratories Devices and methods for sample analysis
US11016053B2 (en) 2016-10-05 2021-05-25 Abbott Laboratories Devices and methods for sample analysis
EP3526603B1 (en) * 2016-10-12 2022-07-20 F. Hoffmann-La Roche AG Nanopore voltage methods
CN109890497B (zh) * 2016-12-09 2021-03-02 株式会社日立高新技术 纳米孔隙形成方法、纳米孔隙形成装置以及生物分子测量装置
GB2573433B (en) * 2017-01-10 2022-05-25 Hitachi High Tech Corp Current measurement device and current measurement method using nanopore
EP3369474A1 (en) * 2017-03-01 2018-09-05 Helmholtz-Zentrum Geesthacht Zentrum für Material- und Küstenforschung GmbH Isoporous block copolymer membranes in flat sheet geometry
NO342507B1 (en) * 2017-03-29 2018-06-04 Condalign As A method for forming av body comprising at least one through-going passage
WO2018201038A1 (en) 2017-04-28 2018-11-01 The University Of Ottawa Controlling translocating molecules through a nanopore
WO2018209441A1 (en) * 2017-05-17 2018-11-22 The Royal Institution For The Advancement Of Learning / Mcgill University Method and apparatus for making a nanopore in a membrane using an electric field applied via a conductive tip
US10618805B2 (en) 2017-09-22 2020-04-14 Applied Materials, Inc. Method to reduce pore diameter using atomic layer deposition and etching
US10752496B2 (en) 2017-09-22 2020-08-25 Applied Materials, Inc. Pore formation in a substrate
US10830756B2 (en) 2017-09-22 2020-11-10 Applied Materials, Inc. Method to create a free-standing membrane for biological applications
JP6975609B2 (ja) * 2017-10-19 2021-12-01 株式会社日立製作所 親水性保持基材、計測装置、デバイスおよび親水性保持方法
JP6959121B2 (ja) 2017-12-05 2021-11-02 株式会社日立ハイテク 孔形成方法及び孔形成装置
WO2019109253A1 (zh) * 2017-12-05 2019-06-13 清华大学 调控固态纳米孔系统中固态纳米孔有效尺寸的方法
CN108279312B (zh) * 2018-03-08 2021-06-01 冯建东 一种基于纳米孔的蛋白质组学分析装置及血清检测方法及应用
US11454624B2 (en) 2018-09-28 2022-09-27 Ofer Wilner Nanopore technologies
CN113260449B (zh) * 2018-12-11 2023-09-29 豪夫迈·罗氏有限公司 用于膜中自限性蛋白质孔插入的系统和方法
JP7174614B2 (ja) * 2018-12-12 2022-11-17 株式会社日立製作所 ナノポア形成方法及び分析方法
US11981557B2 (en) 2020-04-17 2024-05-14 Southern Methodist University Ohmic nanopore fabrication and real-time cleaning
WO2021260587A1 (en) * 2020-06-23 2021-12-30 The University Of Ottawa Improved techniques for nanopore enlargement and formation
US12429449B2 (en) * 2020-07-31 2025-09-30 Hitachi High-Tech Corporation Biomolecule analysis method, biomolecule analyzing reagent, and biomolecule analysis device
JP7440375B2 (ja) * 2020-08-19 2024-02-28 株式会社日立製作所 孔形成方法及び孔形成装置
JP7543174B2 (ja) * 2021-03-03 2024-09-02 株式会社日立製作所 ポア形成方法、およびポア形成装置
CN116536745B (zh) * 2022-05-20 2025-02-07 武汉铢寸科技有限公司 在膜中制造纳米孔的方法、装置及叠加电场的生成装置
WO2024238505A1 (en) * 2023-05-12 2024-11-21 Massachusetts Institute Of Technology Systems and methods for cascaded compression of the size distribution of zero-dimensional nanostructures
WO2025111147A1 (en) 2023-11-21 2025-05-30 Abbott Laboratories Two-dimensional matrix droplet array

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070172386A1 (en) * 1999-06-22 2007-07-26 Jiali Li Ion beam sculpting of multiple distinct materials
WO2008060324A2 (en) * 2006-05-05 2008-05-22 University Of Utah Research Foundation Nanopore electrode, nanopore membrane, methods of preparation and surface modification, and use thereof
US20100122907A1 (en) * 2008-05-06 2010-05-20 Government of the United States of America, Single molecule mass or size spectrometry in solution using a solitary nanopore

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02173278A (ja) * 1988-12-26 1990-07-04 Hitachi Ltd 微細加工方法及びその装置
JPH09316692A (ja) * 1996-05-30 1997-12-09 Fine Ceramics Center 微細孔を有するアルミナ膜及びその製造法
JP3902883B2 (ja) * 1998-03-27 2007-04-11 キヤノン株式会社 ナノ構造体及びその製造方法
DE10044565B4 (de) * 2000-09-08 2005-06-30 Gesellschaft für Schwerionenforschung mbH Elektrolytische Zelle, deren Verwendung und Verfahren zum Ätzen einer in der Zelle eingespannten Membran sowie Verfahren zum Schalten einer geätzten, in der Zelle eingespannten Membran von Durchgang auf Sperrung und umgekehrt
JP2003001462A (ja) 2000-09-13 2003-01-08 Hamamatsu Photonics Kk レーザ加工装置
US6592742B2 (en) * 2001-07-13 2003-07-15 Applied Materials Inc. Electrochemically assisted chemical polish
US6706203B2 (en) * 2001-10-30 2004-03-16 Agilent Technologies, Inc. Adjustable nanopore, nanotome, and nanotweezer
JP2006523144A (ja) * 2003-02-03 2006-10-12 プレジデント アンド フェロウズ オブ ハーバード カレッジ 制御された導電性構造体のギャップの製造法
EP2474281B1 (en) * 2003-12-24 2019-03-27 The Regents of The University of California Tissue ablation with irreversible electroporation
EP1721657A1 (en) * 2005-05-13 2006-11-15 SONY DEUTSCHLAND GmbH A method of fabricating a polymeric membrane having at least one pore
JP4925670B2 (ja) * 2006-01-16 2012-05-09 埼玉県 チタン系金属製品の製造方法
US7777505B2 (en) * 2006-05-05 2010-08-17 University Of Utah Research Foundation Nanopore platforms for ion channel recordings and single molecule detection and analysis
DE102006035072B4 (de) 2006-07-28 2009-03-12 Westfälische Wilhelms-Universität Münster Vorrichtung und Verfahren zum Erfassen von Partikeln mit Pipette und Nanopore
AU2008236694B2 (en) * 2007-04-04 2014-01-23 The Regents Of The University Of California Compositions, devices, systems, and methods for using a nanopore
FR2927169B1 (fr) * 2008-02-05 2013-01-11 Commissariat Energie Atomique Procede de fonctionnalisation de la surface d'un pore
ATE535800T1 (de) * 2009-04-03 2011-12-15 Nxp Bv Sensorvorrichtung und verfahren zu dessen herstellung
EP3196645B1 (en) 2009-09-18 2019-06-19 President and Fellows of Harvard College Bare single-layer graphene membrane having a nanopore enabling high-sensitivity molecular detection and analysis
EP2504082A4 (en) * 2009-11-25 2016-11-09 Univ Sydney MEMBRANE AND MEMBRANE SEPARATION SYSTEM
DE102010025968B4 (de) * 2010-07-02 2016-06-02 Schott Ag Erzeugung von Mikrolöchern
US9422154B2 (en) * 2010-11-02 2016-08-23 International Business Machines Corporation Feedback control of dimensions in nanopore and nanofluidic devices
KR20120133653A (ko) * 2011-05-31 2012-12-11 삼성전자주식회사 나노 센서, 이의 제조 방법 및 이를 사용하여 표적 분자를 검출하는 방법
CA2906781C (en) 2013-03-15 2021-06-08 President And Fellows Of Havard College Fabrication of nanopores in atomically-thin membranes by ultra-short electrical pulsing

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070172386A1 (en) * 1999-06-22 2007-07-26 Jiali Li Ion beam sculpting of multiple distinct materials
WO2008060324A2 (en) * 2006-05-05 2008-05-22 University Of Utah Research Foundation Nanopore electrode, nanopore membrane, methods of preparation and surface modification, and use thereof
US20100122907A1 (en) * 2008-05-06 2010-05-20 Government of the United States of America, Single molecule mass or size spectrometry in solution using a solitary nanopore

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MX353370B (es) 2018-01-09
BR112014027873B1 (pt) 2021-05-25
EP2847367B1 (en) 2017-03-29
EP2846901A4 (en) 2016-01-13
EP2847367A1 (en) 2015-03-18
JP6298450B2 (ja) 2018-03-20
KR20150040799A (ko) 2015-04-15
AU2013257756A1 (en) 2014-11-27
ES2629952T3 (es) 2017-08-16
CN104411386A (zh) 2015-03-11
SG11201407252UA (en) 2014-12-30
MX2014013412A (es) 2016-04-07
CN104662209A (zh) 2015-05-27
AU2013257756B2 (en) 2017-05-04
JP2015517401A (ja) 2015-06-22
MX2014013410A (es) 2015-12-08
BR112014027829A2 (pt) 2017-06-27
MX357200B (es) 2018-06-29
WO2013167955A1 (en) 2013-11-14
ES2630064T3 (es) 2017-08-17
EP2846901A1 (en) 2015-03-18
KR20150037748A (ko) 2015-04-08
SG11201407249XA (en) 2014-12-30
US9777390B2 (en) 2017-10-03
CA2872600C (en) 2021-11-23
JP2018187626A (ja) 2018-11-29
US9777389B2 (en) 2017-10-03
KR102065745B1 (ko) 2020-01-14
AU2013257759B2 (en) 2017-07-13
JP2015525114A (ja) 2015-09-03
US20150109008A1 (en) 2015-04-23
WO2013167952A1 (en) 2013-11-14
JP6420236B2 (ja) 2018-11-07
CA2872602C (en) 2020-08-25
AU2013257759A1 (en) 2014-11-27
US20150108008A1 (en) 2015-04-23
BR112014027873A2 (pt) 2017-06-27
SG10201606334XA (en) 2016-09-29
KR102065754B1 (ko) 2020-02-11
EP2847367A4 (en) 2016-01-13
CA2872600A1 (en) 2013-11-14
BR112014027829B1 (pt) 2021-03-23
EP2846901B1 (en) 2017-03-29
BR112014027873B8 (pt) 2021-11-03
CA2872602A1 (en) 2013-11-14
CN104411386B (zh) 2016-10-12

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