KR102065745B1 - 고체상 나노포어의 크기를 조절하는 방법 - Google Patents
고체상 나노포어의 크기를 조절하는 방법 Download PDFInfo
- Publication number
- KR102065745B1 KR102065745B1 KR1020147033950A KR20147033950A KR102065745B1 KR 102065745 B1 KR102065745 B1 KR 102065745B1 KR 1020147033950 A KR1020147033950 A KR 1020147033950A KR 20147033950 A KR20147033950 A KR 20147033950A KR 102065745 B1 KR102065745 B1 KR 102065745B1
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- South Korea
- Prior art keywords
- nanopores
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/02—Etching
- C25F3/14—Etching locally
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D65/00—Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
- B01D65/02—Membrane cleaning or sterilisation ; Membrane regeneration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0081—After-treatment of organic or inorganic membranes
- B01D67/009—After-treatment of organic or inorganic membranes with wave-energy, particle-radiation or plasma
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
- B81C1/00087—Holes
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0095—Semiconductive materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/483—Physical analysis of biological material
- G01N33/487—Physical analysis of biological material of liquid biological material
- G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
- G01N33/48721—Investigating individual macromolecules, e.g. by translocation through nanopores
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2321/00—Details relating to membrane cleaning, regeneration, sterilization or to the prevention of fouling
- B01D2321/22—Electrical effects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2323/00—Details relating to membrane preparation
- B01D2323/42—Details of membrane preparation apparatus
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/02—Details relating to pores or porosity of the membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/02—Details relating to pores or porosity of the membranes
- B01D2325/0282—Dynamic pores-stimuli responsive membranes, e.g. thermoresponsive or pH-responsive
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0353—Holes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Pathology (AREA)
- General Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Biomedical Technology (AREA)
- Manufacturing & Machinery (AREA)
- Electrochemistry (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Inorganic Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Hematology (AREA)
- Molecular Biology (AREA)
- Urology & Nephrology (AREA)
- Plasma & Fusion (AREA)
- Nanotechnology (AREA)
- Biophysics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
- Steroid Compounds (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261643651P | 2012-05-07 | 2012-05-07 | |
| US61/643,651 | 2012-05-07 | ||
| US201361781081P | 2013-03-14 | 2013-03-14 | |
| US61/781,081 | 2013-03-14 | ||
| PCT/IB2013/000884 WO2013167952A1 (en) | 2012-05-07 | 2013-05-07 | Method for controlling the size of solid-state nanopores |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20150037748A KR20150037748A (ko) | 2015-04-08 |
| KR102065745B1 true KR102065745B1 (ko) | 2020-01-14 |
Family
ID=49550214
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020147033950A Active KR102065745B1 (ko) | 2012-05-07 | 2013-05-07 | 고체상 나노포어의 크기를 조절하는 방법 |
| KR1020147033949A Active KR102065754B1 (ko) | 2012-05-07 | 2013-05-07 | 높은 전기장을 이용한 나노포어의 형성 방법 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020147033949A Active KR102065754B1 (ko) | 2012-05-07 | 2013-05-07 | 높은 전기장을 이용한 나노포어의 형성 방법 |
Country Status (12)
| Country | Link |
|---|---|
| US (2) | US9777389B2 (enExample) |
| EP (2) | EP2846901B1 (enExample) |
| JP (3) | JP6298450B2 (enExample) |
| KR (2) | KR102065745B1 (enExample) |
| CN (2) | CN104411386B (enExample) |
| AU (2) | AU2013257756B2 (enExample) |
| BR (2) | BR112014027829B1 (enExample) |
| CA (2) | CA2872600C (enExample) |
| ES (2) | ES2629952T3 (enExample) |
| MX (2) | MX353370B (enExample) |
| SG (3) | SG11201407249XA (enExample) |
| WO (2) | WO2013167952A1 (enExample) |
Families Citing this family (40)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU2014228529B8 (en) * | 2013-03-15 | 2018-06-14 | President And Fellows Of Harvard College | Fabrication of nanopores in atomically-thin membranes by ultra-short electrical pulsing |
| WO2015097765A1 (ja) | 2013-12-25 | 2015-07-02 | 株式会社日立製作所 | 穴形成方法、測定装置及びチップセット |
| JP6209122B2 (ja) * | 2014-04-02 | 2017-10-04 | 株式会社日立ハイテクノロジーズ | 孔形成方法及び測定装置 |
| DE102014111984B3 (de) * | 2014-08-21 | 2016-01-21 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Fluidische Gigaohm-Dichtung für Transmembranproteinmessungen |
| US11009498B2 (en) | 2014-12-01 | 2021-05-18 | Cornell University | Nanopore-containing substrates with aligned nanoscale electronic elements and methods of making and using same |
| CA2970627C (en) | 2014-12-19 | 2022-08-09 | The University Of Ottawa | Integrating nanopore sensors within microfluidic channel arrays using controlled breakdown |
| SG11201706587TA (en) * | 2015-02-24 | 2017-09-28 | Univ Ottawa | Localizing nanopore fabrication on a membrane by laser illumination during controlled breakdown |
| CN104694649A (zh) * | 2015-03-10 | 2015-06-10 | 北京大学 | 一种核酸分子低穿孔速度的纳米孔测序方法及其专用的纳米孔器件 |
| EP3067693A1 (en) | 2015-03-12 | 2016-09-14 | Ecole Polytechnique Federale de Lausanne (EPFL) | Nanopore forming method and uses thereof |
| EP3268736B1 (en) | 2015-03-12 | 2021-08-18 | Ecole Polytechnique Fédérale de Lausanne (EPFL) | Nanopore forming method and uses thereof |
| RU2712610C2 (ru) | 2015-04-03 | 2020-01-29 | Эбботт Лэборетриз | Устройства и способы для анализа образца |
| CN107690582B (zh) | 2015-04-03 | 2023-10-20 | 雅培制药有限公司 | 用于样品分析的装置和方法 |
| GB201508669D0 (en) * | 2015-05-20 | 2015-07-01 | Oxford Nanopore Tech Ltd | Methods and apparatus for forming apertures in a solid state membrane using dielectric breakdown |
| WO2017004463A1 (en) | 2015-07-01 | 2017-01-05 | Abbott Laboratories | Devices and methods for sample analysis |
| CN109863391B (zh) | 2016-10-05 | 2021-11-05 | 雅培实验室 | 用于样品分析的装置和方法 |
| US12319960B2 (en) | 2016-10-12 | 2025-06-03 | Roche Sequencing Solutions, Inc. | Nanopore voltage methods |
| GB2570849B (en) * | 2016-12-09 | 2022-03-16 | Hitachi High Tech Corp | Nanopore-forming method, nanopore-forming device and biomolecule measurement device |
| GB2573433B (en) * | 2017-01-10 | 2022-05-25 | Hitachi High Tech Corp | Current measurement device and current measurement method using nanopore |
| EP3369474A1 (en) * | 2017-03-01 | 2018-09-05 | Helmholtz-Zentrum Geesthacht Zentrum für Material- und Küstenforschung GmbH | Isoporous block copolymer membranes in flat sheet geometry |
| NO20170513A1 (en) * | 2017-03-29 | 2018-06-04 | Condalign As | A method for forming av body comprising at least one through-going passage |
| WO2018201038A1 (en) | 2017-04-28 | 2018-11-01 | The University Of Ottawa | Controlling translocating molecules through a nanopore |
| US11224842B2 (en) | 2017-05-17 | 2022-01-18 | The Royal Institution For The Advancement Of Learning / Mcgill University | Method and apparatus for making a nanopore in a membrane using an electric field applied via a conductive tip |
| US10752496B2 (en) | 2017-09-22 | 2020-08-25 | Applied Materials, Inc. | Pore formation in a substrate |
| US10830756B2 (en) | 2017-09-22 | 2020-11-10 | Applied Materials, Inc. | Method to create a free-standing membrane for biological applications |
| US10618805B2 (en) | 2017-09-22 | 2020-04-14 | Applied Materials, Inc. | Method to reduce pore diameter using atomic layer deposition and etching |
| JP6975609B2 (ja) * | 2017-10-19 | 2021-12-01 | 株式会社日立製作所 | 親水性保持基材、計測装置、デバイスおよび親水性保持方法 |
| JP6959121B2 (ja) * | 2017-12-05 | 2021-11-02 | 株式会社日立ハイテク | 孔形成方法及び孔形成装置 |
| WO2019109253A1 (zh) * | 2017-12-05 | 2019-06-13 | 清华大学 | 调控固态纳米孔系统中固态纳米孔有效尺寸的方法 |
| CN108279312B (zh) * | 2018-03-08 | 2021-06-01 | 冯建东 | 一种基于纳米孔的蛋白质组学分析装置及血清检测方法及应用 |
| US11454624B2 (en) | 2018-09-28 | 2022-09-27 | Ofer Wilner | Nanopore technologies |
| CN113260449B (zh) * | 2018-12-11 | 2023-09-29 | 豪夫迈·罗氏有限公司 | 用于膜中自限性蛋白质孔插入的系统和方法 |
| JP7174614B2 (ja) * | 2018-12-12 | 2022-11-17 | 株式会社日立製作所 | ナノポア形成方法及び分析方法 |
| US11981557B2 (en) | 2020-04-17 | 2024-05-14 | Southern Methodist University | Ohmic nanopore fabrication and real-time cleaning |
| WO2021260587A1 (en) * | 2020-06-23 | 2021-12-30 | The University Of Ottawa | Improved techniques for nanopore enlargement and formation |
| US12429449B2 (en) * | 2020-07-31 | 2025-09-30 | Hitachi High-Tech Corporation | Biomolecule analysis method, biomolecule analyzing reagent, and biomolecule analysis device |
| JP7440375B2 (ja) * | 2020-08-19 | 2024-02-28 | 株式会社日立製作所 | 孔形成方法及び孔形成装置 |
| JP7543174B2 (ja) * | 2021-03-03 | 2024-09-02 | 株式会社日立製作所 | ポア形成方法、およびポア形成装置 |
| CN116536745B (zh) * | 2022-05-20 | 2025-02-07 | 武汉铢寸科技有限公司 | 在膜中制造纳米孔的方法、装置及叠加电场的生成装置 |
| WO2024238505A1 (en) * | 2023-05-12 | 2024-11-21 | Massachusetts Institute Of Technology | Systems and methods for cascaded compression of the size distribution of zero-dimensional nanostructures |
| WO2025111147A1 (en) | 2023-11-21 | 2025-05-30 | Abbott Laboratories | Two-dimensional matrix droplet array |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050072689A1 (en) | 2000-09-08 | 2005-04-07 | Reimar Spohr | Method for etching at least one ion track to a pore in a membrane and electrolyte cell for preparing the membrane |
| JP2008545518A (ja) | 2005-05-13 | 2008-12-18 | ソニー ドイチュラント ゲゼルシャフト ミット ベシュレンクテル ハフツング | 少なくとも1の細孔を有するポリマー膜の製造方法 |
| US20120103821A1 (en) * | 2010-11-02 | 2012-05-03 | International Business Machines Corporation | Feedback control of dimensions in nanopore and nanofluidic devices |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02173278A (ja) * | 1988-12-26 | 1990-07-04 | Hitachi Ltd | 微細加工方法及びその装置 |
| JPH09316692A (ja) * | 1996-05-30 | 1997-12-09 | Fine Ceramics Center | 微細孔を有するアルミナ膜及びその製造法 |
| JP3902883B2 (ja) * | 1998-03-27 | 2007-04-11 | キヤノン株式会社 | ナノ構造体及びその製造方法 |
| US7258838B2 (en) * | 1999-06-22 | 2007-08-21 | President And Fellows Of Harvard College | Solid state molecular probe device |
| JP2003001462A (ja) | 2000-09-13 | 2003-01-08 | Hamamatsu Photonics Kk | レーザ加工装置 |
| US6592742B2 (en) * | 2001-07-13 | 2003-07-15 | Applied Materials Inc. | Electrochemically assisted chemical polish |
| US6706203B2 (en) * | 2001-10-30 | 2004-03-16 | Agilent Technologies, Inc. | Adjustable nanopore, nanotome, and nanotweezer |
| EP1592641B1 (en) * | 2003-02-03 | 2018-03-07 | President and Fellows of Harvard College | Controlled fabrication of gaps in electrically conducting structures |
| AU2004311842C1 (en) * | 2003-12-24 | 2011-01-06 | The Regents Of The University Of California | Tissue ablation with irreversible electroporation |
| JP4925670B2 (ja) * | 2006-01-16 | 2012-05-09 | 埼玉県 | チタン系金属製品の製造方法 |
| US7777505B2 (en) | 2006-05-05 | 2010-08-17 | University Of Utah Research Foundation | Nanopore platforms for ion channel recordings and single molecule detection and analysis |
| US7849581B2 (en) | 2006-05-05 | 2010-12-14 | University Of Utah Research Foundation | Nanopore electrode, nanopore membrane, methods of preparation and surface modification, and use thereof |
| DE102006035072B4 (de) | 2006-07-28 | 2009-03-12 | Westfälische Wilhelms-Universität Münster | Vorrichtung und Verfahren zum Erfassen von Partikeln mit Pipette und Nanopore |
| KR101521990B1 (ko) * | 2007-04-04 | 2015-05-20 | 더 리젠츠 오브 더 유니버시티 오브 캘리포니아 | 나노포어 사용을 위한 조성물, 장치, 시스템 및 방법 |
| FR2927169B1 (fr) * | 2008-02-05 | 2013-01-11 | Commissariat Energie Atomique | Procede de fonctionnalisation de la surface d'un pore |
| US20100122907A1 (en) | 2008-05-06 | 2010-05-20 | Government of the United States of America, | Single molecule mass or size spectrometry in solution using a solitary nanopore |
| ATE535800T1 (de) * | 2009-04-03 | 2011-12-15 | Nxp Bv | Sensorvorrichtung und verfahren zu dessen herstellung |
| EP3196645B1 (en) | 2009-09-18 | 2019-06-19 | President and Fellows of Harvard College | Bare single-layer graphene membrane having a nanopore enabling high-sensitivity molecular detection and analysis |
| EP2504082A4 (en) | 2009-11-25 | 2016-11-09 | Univ Sydney | MEMBRANE AND MEMBRANE SEPARATION SYSTEM |
| DE102010025968B4 (de) * | 2010-07-02 | 2016-06-02 | Schott Ag | Erzeugung von Mikrolöchern |
| KR20120133653A (ko) * | 2011-05-31 | 2012-12-11 | 삼성전자주식회사 | 나노 센서, 이의 제조 방법 및 이를 사용하여 표적 분자를 검출하는 방법 |
| AU2014228529B8 (en) | 2013-03-15 | 2018-06-14 | President And Fellows Of Harvard College | Fabrication of nanopores in atomically-thin membranes by ultra-short electrical pulsing |
-
2013
- 2013-05-07 WO PCT/IB2013/000884 patent/WO2013167952A1/en not_active Ceased
- 2013-05-07 AU AU2013257756A patent/AU2013257756B2/en not_active Ceased
- 2013-05-07 EP EP13787360.0A patent/EP2846901B1/en active Active
- 2013-05-07 CA CA2872600A patent/CA2872600C/en active Active
- 2013-05-07 KR KR1020147033950A patent/KR102065745B1/ko active Active
- 2013-05-07 SG SG11201407249XA patent/SG11201407249XA/en unknown
- 2013-05-07 AU AU2013257759A patent/AU2013257759B2/en not_active Ceased
- 2013-05-07 CN CN201380036310.2A patent/CN104411386B/zh active Active
- 2013-05-07 WO PCT/IB2013/000891 patent/WO2013167955A1/en not_active Ceased
- 2013-05-07 CN CN201380036177.0A patent/CN104662209B/zh active Active
- 2013-05-07 US US14/399,071 patent/US9777389B2/en active Active
- 2013-05-07 ES ES13787360.0T patent/ES2629952T3/es active Active
- 2013-05-07 KR KR1020147033949A patent/KR102065754B1/ko active Active
- 2013-05-07 BR BR112014027829-6A patent/BR112014027829B1/pt not_active IP Right Cessation
- 2013-05-07 BR BR112014027873A patent/BR112014027873B8/pt not_active IP Right Cessation
- 2013-05-07 JP JP2015510884A patent/JP6298450B2/ja active Active
- 2013-05-07 SG SG11201407252UA patent/SG11201407252UA/en unknown
- 2013-05-07 ES ES13787530.8T patent/ES2630064T3/es active Active
- 2013-05-07 MX MX2014013410A patent/MX353370B/es active IP Right Grant
- 2013-05-07 US US14/399,091 patent/US9777390B2/en active Active
- 2013-05-07 MX MX2014013412A patent/MX357200B/es active IP Right Grant
- 2013-05-07 JP JP2015510885A patent/JP6420236B2/ja active Active
- 2013-05-07 SG SG10201606334XA patent/SG10201606334XA/en unknown
- 2013-05-07 CA CA2872602A patent/CA2872602C/en active Active
- 2013-05-07 EP EP13787530.8A patent/EP2847367B1/en active Active
-
2018
- 2018-06-06 JP JP2018108930A patent/JP2018187626A/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050072689A1 (en) | 2000-09-08 | 2005-04-07 | Reimar Spohr | Method for etching at least one ion track to a pore in a membrane and electrolyte cell for preparing the membrane |
| JP2008545518A (ja) | 2005-05-13 | 2008-12-18 | ソニー ドイチュラント ゲゼルシャフト ミット ベシュレンクテル ハフツング | 少なくとも1の細孔を有するポリマー膜の製造方法 |
| US20120103821A1 (en) * | 2010-11-02 | 2012-05-03 | International Business Machines Corporation | Feedback control of dimensions in nanopore and nanofluidic devices |
Also Published As
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| Publication | Publication Date | Title |
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