JP6400776B2 - X線発生装置 - Google Patents
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- JP6400776B2 JP6400776B2 JP2017087883A JP2017087883A JP6400776B2 JP 6400776 B2 JP6400776 B2 JP 6400776B2 JP 2017087883 A JP2017087883 A JP 2017087883A JP 2017087883 A JP2017087883 A JP 2017087883A JP 6400776 B2 JP6400776 B2 JP 6400776B2
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/14—Arrangements for focusing or reflecting ray or beam
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
- G01N23/046—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/161—Applications in the field of nuclear medicine, e.g. in vivo counting
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- H—ELECTRICITY
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- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/30—Cold cathodes, e.g. field-emissive cathode
- H01J1/304—Field-emissive cathodes
- H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
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- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
- H01J29/467—Control electrodes for flat display tubes, e.g. of the type covered by group H01J31/123
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- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
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- H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
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- H01J3/02—Electron guns
- H01J3/027—Construction of the gun or parts thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
- H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
- H01J31/123—Flat display tubes
- H01J31/125—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
- H01J31/127—Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
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- H01J35/00—X-ray tubes
- H01J35/02—Details
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/045—Electrodes for controlling the current of the cathode ray, e.g. control grids
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
- H01J35/064—Details of the emitter, e.g. material or structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
- H01J35/065—Field emission, photo emission or secondary emission cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/112—Non-rotating anodes
- H01J35/116—Transmissive anodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
- H01J35/147—Spot size control
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/14—Arrangements for concentrating, focusing, or directing the cathode ray
- H01J35/153—Spot position control
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/16—Vessels; Containers; Shields associated therewith
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/20—Sources of radiation
- G01N2223/204—Sources of radiation source created from radiated target
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/40—Imaging
- G01N2223/419—Imaging computed tomograph
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/06—Cathode assembly
- H01J2235/068—Multi-cathode assembly
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- Radiology & Medical Imaging (AREA)
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- Biomedical Technology (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Cold Cathode And The Manufacture (AREA)
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Description
Claims (15)
- X線放出構造体と電子放出構造体とが互いに対向し、前記X線放出構造体と前記電子放出構造体との間に真空内部間隙が存在するように配置された少なくとも1つのスペーサで隔てられた、前記X線放出構造体と前記電子放出構造体とを備えるX線発生装置であって、
前記X線放出構造体は、X線ターゲットである陽極を含み、
前記電子放出構造体は、少なくとも1つのアクティブゾーンを有し、各アクティブゾーンは、
(a)陰極と、
(b)アレイ状に配置された複数のエミッタティップを含む、ゲーテッドコーン型電子源と、
(c)前記ゲーテッドコーン型電子源と前記陰極との間に位置する抵抗層と、
(d)複数のゲートホールを含み、前記複数のゲートホールのうち少なくとも1つの位置は前記複数のエミッタティップのうち少なくとも1つの位置に対応しているゲート電極と、を有する複数のアクティブエリアを含み、
前記複数のエミッタティップは、前記X線放出構造体に向けて電子ビームを放出するように構成され、
前記アクティブゾーンは、少なくとも1つの集束構造で囲まれており、
前記複数のアクティブエリアは、正方形の格子パターンで前記アクティブゾーン内に配置され、
前記複数のアクティブエリアのうちの1つまたは複数のサブセットを、独立に駆動することが可能であり、
前記ゲート電極は、ゲート配線リードを介して電圧源に接続され、前記ゲート電極がすべての側において前記ゲート配線リードに接続されるように前記ゲート配線リードの割れ目に配置されており、
前記ゲート配線リードは、前記ゲート電極よりも厚い、
X線発生装置。 - 前記複数のアクティブエリアのうちの1つまたは複数の制御された駆動により、前記アクティブゾーンの全放出電流を調整することが可能である、請求項1に記載のX線発生装置。
- 前記複数のアクティブエリアの前記サブセットは、同心状の領域として編成され、これにより、前記同心状の領域のうち1つまたは複数の制御された駆動によって前記電子ビームの初期幅を調整することが可能である、請求項1に記載のX線発生装置。
- 前記ゲートホールの直径は、200ナノメートル未満である、請求項1乃至3のいずれか一項に記載のX線発生装置。
- 前記抵抗層は、SiCNを含む、請求項1乃至4のいずれか一項に記載のX線発生装置。
- 前記抵抗層は、前記陰極との界面に配置された第1のバリア副層を含む、請求項5に記載のX線発生装置。
- 前記抵抗層は、前記ゲーテッドコーン型電子源との界面に配置された第2のバリア副層を含む、請求項5又は6に記載のX線発生装置。
- 前記第1及び第2のバリア副層はそれぞれ、40%未満のシリコン原子パーセントを有するSiCNまたはSiCを含む、請求項7に記載のX線発生装置。
- 前記第1及び第2のバリア副層はそれぞれ、アモルファスカーボンを含む、請求項7に記載のX線発生装置。
- 前記複数のエミッタティップの各々の位置、対応する前記ゲートホール、前記陰極、および前記抵抗層は、前記電子放出構造体の平面に沿ってオーバラップしている、請求項1乃至9のいずれか一項に記載のX線発生装置。
- 前記内部間隙は、前記電子放出構造体と前記X線放出構造体との間に遮るもののない空間を提供する、請求項1乃至10のいずれか一項に記載のX線発生装置。
- 前記陽極は、モリブデン、ロジウム、タングステンからなる群からの1つまたは複数のものを含む、請求項1乃至11のいずれか一項に記載のX線発生装置。
- 前記電子放出構造体は、シリコン系の基板をさらに含む、請求項1乃至12のいずれか1つに記載のX線発生装置。
- 前記ゲート電極、前記陰極、前記抵抗層、前記ゲーテッドコーン型電子源からなる群から選択された少なくとも一項の部材は、前記基板と一体である、請求項13に記載のX線発生装置。
- X線放出構造体と電子放出構造体とが互いに対向し、前記X線放出構造体と前記電子放出構造体との間に真空内部間隙が存在するように配置された少なくとも1つのスペーサで隔てられた、前記X線放出構造体と前記電子放出構造体とを備えるX線発生装置であって、
前記X線放出構造体は、X線ターゲットである陽極を含み、
前記電子放出構造体は、少なくとも1つのアクティブゾーンを有し、各アクティブゾーンは、
(a)陰極と、
(b)アレイ状に配置された複数のエミッタティップを含む、ゲーテッドコーン型電子源と、
(c)前記ゲーテッドコーン型電子源と前記陰極との間に位置する抵抗層と、
(d)複数のゲートホールを含み、前記複数のゲートホールのうち少なくとも1つの位置は前記複数のエミッタティップのうち少なくとも1つの位置に対応しているゲート電極と、を有する少なくとも1つのアクティブエリアを含み、
前記複数のエミッタティップは、前記X線放出構造体に向けて電子ビームを放出するように構成され、
前記ゲート電極は、前記ゲート電極よりも厚いゲート配線リードを介して電圧源に接続され、前記ゲート電極がすべての側において前記ゲート配線リードに接続されるように前記ゲート配線リードの割れ目に配置されている、
X線発生装置。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261611990P | 2012-03-16 | 2012-03-16 | |
US61/611,990 | 2012-03-16 | ||
US201261747455P | 2012-12-31 | 2012-12-31 | |
US61/747,455 | 2012-12-31 |
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JP2014561576A Division JP2015515091A (ja) | 2012-03-16 | 2013-03-14 | 電子放出構造を有する装置 |
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Publication Number | Publication Date |
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JP2017147237A JP2017147237A (ja) | 2017-08-24 |
JP6400776B2 true JP6400776B2 (ja) | 2018-10-03 |
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Application Number | Title | Priority Date | Filing Date |
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JP2014561576A Pending JP2015515091A (ja) | 2012-03-16 | 2013-03-14 | 電子放出構造を有する装置 |
JP2017087883A Active JP6400776B2 (ja) | 2012-03-16 | 2017-04-27 | X線発生装置 |
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JP2014561576A Pending JP2015515091A (ja) | 2012-03-16 | 2013-03-14 | 電子放出構造を有する装置 |
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Country | Link |
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US (2) | US10242836B2 (ja) |
EP (1) | EP2826056B1 (ja) |
JP (2) | JP2015515091A (ja) |
KR (1) | KR102076380B1 (ja) |
CN (1) | CN104170050B (ja) |
IL (1) | IL234669B (ja) |
WO (1) | WO2013136299A1 (ja) |
Families Citing this family (13)
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KR102076380B1 (ko) * | 2012-03-16 | 2020-02-11 | 나녹스 이미징 피엘씨 | 전자 방출 구조체를 갖는 장치 |
CN104584179B (zh) * | 2012-08-16 | 2017-10-13 | 纳欧克斯影像有限公司 | 图像捕捉装置 |
KR102259859B1 (ko) | 2013-11-27 | 2021-06-03 | 나녹스 이미징 피엘씨 | 이온 내충격성을 가진 전자 방출 구조물 |
GB2531326B (en) * | 2014-10-16 | 2020-08-05 | Adaptix Ltd | An X-Ray emitter panel and a method of designing such an X-Ray emitter panel |
WO2016125289A1 (ja) * | 2015-02-05 | 2016-08-11 | 株式会社島津製作所 | X線発生装置 |
US10334712B2 (en) | 2015-11-11 | 2019-06-25 | Electronics And Telecommunications Research Institute | Radiography apparatus |
US11282668B2 (en) * | 2016-03-31 | 2022-03-22 | Nano-X Imaging Ltd. | X-ray tube and a controller thereof |
CN109411312B (zh) * | 2018-10-31 | 2020-07-28 | 中国工程物理研究院流体物理研究所 | 基于飞秒激光调制的超快电子枪及其验证方法 |
CN109507215B (zh) * | 2018-11-26 | 2022-05-17 | 国家纳米科学中心 | X射线成像装置及x射线成像方法 |
US10825634B2 (en) * | 2019-02-21 | 2020-11-03 | Varex Imaging Corporation | X-ray tube emitter |
WO2021011209A1 (en) * | 2019-07-15 | 2021-01-21 | Sigray, Inc. | X-ray source with rotating anode at atmospheric pressure |
US11417492B2 (en) | 2019-09-26 | 2022-08-16 | Kla Corporation | Light modulated electron source |
US11719652B2 (en) * | 2020-02-04 | 2023-08-08 | Kla Corporation | Semiconductor metrology and inspection based on an x-ray source with an electron emitter array |
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