JP6390090B2 - 光学フィルターデバイス、光学モジュール、及び電子機器 - Google Patents

光学フィルターデバイス、光学モジュール、及び電子機器 Download PDF

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Publication number
JP6390090B2
JP6390090B2 JP2013238591A JP2013238591A JP6390090B2 JP 6390090 B2 JP6390090 B2 JP 6390090B2 JP 2013238591 A JP2013238591 A JP 2013238591A JP 2013238591 A JP2013238591 A JP 2013238591A JP 6390090 B2 JP6390090 B2 JP 6390090B2
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Japan
Prior art keywords
wavelength
light
filter device
optical filter
band
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Expired - Fee Related
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JP2013238591A
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English (en)
Japanese (ja)
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JP2015099239A5 (enExample
JP2015099239A (ja
Inventor
友紀 松下
友紀 松下
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Seiko Epson Corp
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Seiko Epson Corp
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Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2013238591A priority Critical patent/JP6390090B2/ja
Priority to EP14193430.7A priority patent/EP2873954B1/en
Priority to US14/546,415 priority patent/US9939629B2/en
Priority to CN201410659191.2A priority patent/CN104656176B/zh
Publication of JP2015099239A publication Critical patent/JP2015099239A/ja
Publication of JP2015099239A5 publication Critical patent/JP2015099239A5/ja
Application granted granted Critical
Publication of JP6390090B2 publication Critical patent/JP6390090B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/51—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/22—Absorbing filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/26—Reflecting filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1213—Filters in general, e.g. dichroic, band
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J2003/1226—Interference filters
    • G01J2003/1234—Continuously variable IF [CVIF]; Wedge type

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Filters (AREA)
JP2013238591A 2013-11-19 2013-11-19 光学フィルターデバイス、光学モジュール、及び電子機器 Expired - Fee Related JP6390090B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013238591A JP6390090B2 (ja) 2013-11-19 2013-11-19 光学フィルターデバイス、光学モジュール、及び電子機器
EP14193430.7A EP2873954B1 (en) 2013-11-19 2014-11-17 Optical filter device, optical module, and electronic apparatus
US14/546,415 US9939629B2 (en) 2013-11-19 2014-11-18 Optical filter device, optical module, and electronic apparatus
CN201410659191.2A CN104656176B (zh) 2013-11-19 2014-11-18 光学滤波器装置、光学模块以及电子设备

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013238591A JP6390090B2 (ja) 2013-11-19 2013-11-19 光学フィルターデバイス、光学モジュール、及び電子機器

Publications (3)

Publication Number Publication Date
JP2015099239A JP2015099239A (ja) 2015-05-28
JP2015099239A5 JP2015099239A5 (enExample) 2016-12-22
JP6390090B2 true JP6390090B2 (ja) 2018-09-19

Family

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Family Applications (1)

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JP2013238591A Expired - Fee Related JP6390090B2 (ja) 2013-11-19 2013-11-19 光学フィルターデバイス、光学モジュール、及び電子機器

Country Status (4)

Country Link
US (1) US9939629B2 (enExample)
EP (1) EP2873954B1 (enExample)
JP (1) JP6390090B2 (enExample)
CN (1) CN104656176B (enExample)

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JP5988690B2 (ja) * 2012-05-18 2016-09-07 浜松ホトニクス株式会社 分光センサ
JP5875936B2 (ja) 2012-05-18 2016-03-02 浜松ホトニクス株式会社 分光センサ
JP5987573B2 (ja) * 2012-09-12 2016-09-07 セイコーエプソン株式会社 光学モジュール、電子機器、及び駆動方法
JP6260076B2 (ja) * 2012-09-19 2018-01-17 セイコーエプソン株式会社 分光装置
US10024717B2 (en) * 2015-11-24 2018-07-17 Trutag Technologies, Inc. Tag reading using targeted spatial spectral detection
US9923007B2 (en) 2015-12-29 2018-03-20 Viavi Solutions Inc. Metal mirror based multispectral filter array
US9960199B2 (en) 2015-12-29 2018-05-01 Viavi Solutions Inc. Dielectric mirror based multispectral filter array
WO2018061679A1 (ja) * 2016-09-29 2018-04-05 富士フイルム株式会社 光変調素子および光検出素子
US10955336B2 (en) * 2017-08-26 2021-03-23 Innovative Micro Technology Gas sensor comprising a rotatable Fabry-Perot multilayer etalon
DE102019106977B4 (de) * 2019-03-19 2024-04-04 Argo-Hytos Group Ag Anordnung mit einer Filtereinrichtung und einem Trägerelement und Verfahren zur Erkennung eines Filterelements
JP2020184226A (ja) 2019-05-08 2020-11-12 株式会社ジャパンディスプレイ 検出装置
WO2021097634A1 (zh) 2019-11-19 2021-05-27 深圳市海谱纳米光学科技有限公司 可调法玻腔自校准方法和具有自校准功能的光谱采集装置
JP2021189113A (ja) * 2020-06-03 2021-12-13 セイコーエプソン株式会社 決定方法
JP2022053088A (ja) * 2020-09-24 2022-04-05 セイコーエプソン株式会社 光学フィルター、分光モジュールおよび分光測定方法
JP7517139B2 (ja) * 2020-12-24 2024-07-17 セイコーエプソン株式会社 波長可変光学フィルター

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US2708389A (en) * 1951-01-09 1955-05-17 Frederick W Kavanagh Spectral wedge interference filter combined with purifying filters
US4553816A (en) * 1980-12-15 1985-11-19 Honeywell Inc. Tunable Fabry-Perot filter
JPS6066201A (ja) * 1983-09-21 1985-04-16 Toshiba Corp 固体撮像素子装置
JPH0194312A (ja) 1987-10-06 1989-04-13 Sharp Corp 可変干渉装置
EP0740133B1 (en) * 1991-11-16 1997-09-10 RENISHAW plc Sample illumination for spectroscopic apparatus and method
JP2989739B2 (ja) * 1994-04-12 1999-12-13 ホーヤ株式会社 近赤外線吸収ガラス、このガラスを用いた固体撮像素子保護用フィルター及びこのフィルターを用いた固体撮像素子
FI108581B (fi) * 1996-10-03 2002-02-15 Valtion Teknillinen Sähköisesti säädettävä optinen suodin
JP3844886B2 (ja) * 1998-07-28 2006-11-15 富士通株式会社 光フィルタの製造方法
US7046320B2 (en) * 2002-03-14 2006-05-16 Nitto Denko Corporation Optical element and surface light source device using the same, as well as liquid crystal display
JP2004177658A (ja) * 2002-11-27 2004-06-24 Sun Tec Kk 誘電体多層膜バンドパスフィルタ
WO2005046248A1 (ja) * 2003-11-11 2005-05-19 Olympus Corporation マルチスペクトル画像撮影装置
US7217913B2 (en) * 2003-12-18 2007-05-15 Micron Technology, Inc. Method and system for wavelength-dependent imaging and detection using a hybrid filter
JP5564759B2 (ja) 2008-04-02 2014-08-06 セイコーエプソン株式会社 光学フィルタ装置
JP4995231B2 (ja) 2008-05-30 2012-08-08 キヤノン株式会社 光学フィルタ
JP5287362B2 (ja) 2009-03-04 2013-09-11 株式会社大真空 光学フィルタおよび撮像システム
JP2011117884A (ja) 2009-12-07 2011-06-16 Hioki Ee Corp 分光測定器
JP5796275B2 (ja) * 2010-06-02 2015-10-21 セイコーエプソン株式会社 分光測定器
JP6119090B2 (ja) * 2011-09-27 2017-04-26 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュール、及び電子機器
JP5879893B2 (ja) * 2011-10-06 2016-03-08 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュールおよび電子機器
JP2013113900A (ja) * 2011-11-25 2013-06-10 Seiko Epson Corp 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器
US9207516B1 (en) * 2013-08-29 2015-12-08 Mozhi Yu Hybrid tunable filter capable of outputting a single spectral peak

Also Published As

Publication number Publication date
US9939629B2 (en) 2018-04-10
US20150138640A1 (en) 2015-05-21
EP2873954A2 (en) 2015-05-20
EP2873954B1 (en) 2019-03-27
CN104656176A (zh) 2015-05-27
EP2873954A3 (en) 2015-06-03
CN104656176B (zh) 2019-04-19
JP2015099239A (ja) 2015-05-28

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