CN104656176B - 光学滤波器装置、光学模块以及电子设备 - Google Patents

光学滤波器装置、光学模块以及电子设备 Download PDF

Info

Publication number
CN104656176B
CN104656176B CN201410659191.2A CN201410659191A CN104656176B CN 104656176 B CN104656176 B CN 104656176B CN 201410659191 A CN201410659191 A CN 201410659191A CN 104656176 B CN104656176 B CN 104656176B
Authority
CN
China
Prior art keywords
light
wave band
optical
filter
variable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201410659191.2A
Other languages
English (en)
Chinese (zh)
Other versions
CN104656176A (zh
Inventor
松下友纪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN104656176A publication Critical patent/CN104656176A/zh
Application granted granted Critical
Publication of CN104656176B publication Critical patent/CN104656176B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/28Interference filters
    • G02B5/284Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/26Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/46Measurement of colour; Colour measuring devices, e.g. colorimeters
    • G01J3/50Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
    • G01J3/51Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors using colour filters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/22Absorbing filters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/26Reflecting filters
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/28Interference filters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J2003/1213Filters in general, e.g. dichroic, band
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J2003/1226Interference filters
    • G01J2003/1234Continuously variable IF [CVIF]; Wedge type

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Filters (AREA)
CN201410659191.2A 2013-11-19 2014-11-18 光学滤波器装置、光学模块以及电子设备 Expired - Fee Related CN104656176B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013238591A JP6390090B2 (ja) 2013-11-19 2013-11-19 光学フィルターデバイス、光学モジュール、及び電子機器
JP2013-238591 2013-11-19

Publications (2)

Publication Number Publication Date
CN104656176A CN104656176A (zh) 2015-05-27
CN104656176B true CN104656176B (zh) 2019-04-19

Family

ID=52002670

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410659191.2A Expired - Fee Related CN104656176B (zh) 2013-11-19 2014-11-18 光学滤波器装置、光学模块以及电子设备

Country Status (4)

Country Link
US (1) US9939629B2 (enExample)
EP (1) EP2873954B1 (enExample)
JP (1) JP6390090B2 (enExample)
CN (1) CN104656176B (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5988690B2 (ja) * 2012-05-18 2016-09-07 浜松ホトニクス株式会社 分光センサ
JP5875936B2 (ja) 2012-05-18 2016-03-02 浜松ホトニクス株式会社 分光センサ
JP5987573B2 (ja) * 2012-09-12 2016-09-07 セイコーエプソン株式会社 光学モジュール、電子機器、及び駆動方法
JP6260076B2 (ja) * 2012-09-19 2018-01-17 セイコーエプソン株式会社 分光装置
US10024717B2 (en) * 2015-11-24 2018-07-17 Trutag Technologies, Inc. Tag reading using targeted spatial spectral detection
US9923007B2 (en) 2015-12-29 2018-03-20 Viavi Solutions Inc. Metal mirror based multispectral filter array
US9960199B2 (en) 2015-12-29 2018-05-01 Viavi Solutions Inc. Dielectric mirror based multispectral filter array
WO2018061679A1 (ja) * 2016-09-29 2018-04-05 富士フイルム株式会社 光変調素子および光検出素子
US10955336B2 (en) * 2017-08-26 2021-03-23 Innovative Micro Technology Gas sensor comprising a rotatable Fabry-Perot multilayer etalon
DE102019106977B4 (de) * 2019-03-19 2024-04-04 Argo-Hytos Group Ag Anordnung mit einer Filtereinrichtung und einem Trägerelement und Verfahren zur Erkennung eines Filterelements
JP2020184226A (ja) 2019-05-08 2020-11-12 株式会社ジャパンディスプレイ 検出装置
WO2021097634A1 (zh) 2019-11-19 2021-05-27 深圳市海谱纳米光学科技有限公司 可调法玻腔自校准方法和具有自校准功能的光谱采集装置
JP2021189113A (ja) * 2020-06-03 2021-12-13 セイコーエプソン株式会社 決定方法
JP2022053088A (ja) * 2020-09-24 2022-04-05 セイコーエプソン株式会社 光学フィルター、分光モジュールおよび分光測定方法
JP7517139B2 (ja) * 2020-12-24 2024-07-17 セイコーエプソン株式会社 波長可変光学フィルター

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2708389A (en) * 1951-01-09 1955-05-17 Frederick W Kavanagh Spectral wedge interference filter combined with purifying filters
EP0543578A1 (en) * 1991-11-16 1993-05-26 RENISHAW plc Spectroscopic apparatus and methods
CN1914492A (zh) * 2003-12-18 2007-02-14 阿瓦戈科技传感器Ip股份有限公司 利用混合滤光片的波长相关成像和探测方法及系统
EP2574971A1 (en) * 2011-09-27 2013-04-03 Seiko Epson Corporation Optical filter device, optical module, and electronic apparatus

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4553816A (en) * 1980-12-15 1985-11-19 Honeywell Inc. Tunable Fabry-Perot filter
JPS6066201A (ja) * 1983-09-21 1985-04-16 Toshiba Corp 固体撮像素子装置
JPH0194312A (ja) 1987-10-06 1989-04-13 Sharp Corp 可変干渉装置
JP2989739B2 (ja) * 1994-04-12 1999-12-13 ホーヤ株式会社 近赤外線吸収ガラス、このガラスを用いた固体撮像素子保護用フィルター及びこのフィルターを用いた固体撮像素子
FI108581B (fi) * 1996-10-03 2002-02-15 Valtion Teknillinen Sähköisesti säädettävä optinen suodin
JP3844886B2 (ja) * 1998-07-28 2006-11-15 富士通株式会社 光フィルタの製造方法
US7046320B2 (en) * 2002-03-14 2006-05-16 Nitto Denko Corporation Optical element and surface light source device using the same, as well as liquid crystal display
JP2004177658A (ja) * 2002-11-27 2004-06-24 Sun Tec Kk 誘電体多層膜バンドパスフィルタ
WO2005046248A1 (ja) * 2003-11-11 2005-05-19 Olympus Corporation マルチスペクトル画像撮影装置
JP5564759B2 (ja) 2008-04-02 2014-08-06 セイコーエプソン株式会社 光学フィルタ装置
JP4995231B2 (ja) 2008-05-30 2012-08-08 キヤノン株式会社 光学フィルタ
JP5287362B2 (ja) 2009-03-04 2013-09-11 株式会社大真空 光学フィルタおよび撮像システム
JP2011117884A (ja) 2009-12-07 2011-06-16 Hioki Ee Corp 分光測定器
JP5796275B2 (ja) * 2010-06-02 2015-10-21 セイコーエプソン株式会社 分光測定器
JP5879893B2 (ja) * 2011-10-06 2016-03-08 セイコーエプソン株式会社 光学フィルターデバイス、光学モジュールおよび電子機器
JP2013113900A (ja) * 2011-11-25 2013-06-10 Seiko Epson Corp 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器
US9207516B1 (en) * 2013-08-29 2015-12-08 Mozhi Yu Hybrid tunable filter capable of outputting a single spectral peak

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2708389A (en) * 1951-01-09 1955-05-17 Frederick W Kavanagh Spectral wedge interference filter combined with purifying filters
EP0543578A1 (en) * 1991-11-16 1993-05-26 RENISHAW plc Spectroscopic apparatus and methods
CN1914492A (zh) * 2003-12-18 2007-02-14 阿瓦戈科技传感器Ip股份有限公司 利用混合滤光片的波长相关成像和探测方法及系统
EP2574971A1 (en) * 2011-09-27 2013-04-03 Seiko Epson Corporation Optical filter device, optical module, and electronic apparatus
CN103116208A (zh) * 2011-09-27 2013-05-22 精工爱普生株式会社 滤光器装置、光模块及电子设备

Also Published As

Publication number Publication date
US9939629B2 (en) 2018-04-10
US20150138640A1 (en) 2015-05-21
EP2873954A2 (en) 2015-05-20
EP2873954B1 (en) 2019-03-27
JP6390090B2 (ja) 2018-09-19
CN104656176A (zh) 2015-05-27
EP2873954A3 (en) 2015-06-03
JP2015099239A (ja) 2015-05-28

Similar Documents

Publication Publication Date Title
CN104656176B (zh) 光学滤波器装置、光学模块以及电子设备
CN104062700B (zh) 干涉滤波器、光学滤波器装置、光学模块及电子设备
CN103424865B (zh) 光模块、电子设备、食物分析装置以及分光照相机
US9297997B2 (en) Optical module, electronic apparatus, and spectroscopic camera
CN103676136B (zh) 分光装置、波长可变干涉滤波器、光学模块及电子设备
US20210263298A1 (en) Optical Module, Electronic Device, And Driving Method
CN104516040B (zh) 干涉滤波器、光学滤波器装置、光模块以及电子设备
US20140022643A1 (en) Variable wavelength interference filter, optical filter device, optical module, electronic apparatus, and method of manufacturing variable wavelength interference filter
US20150153564A1 (en) Wavelength variable interference filter, optical module, and electronic device
CN103376544B (zh) 波长可变干涉滤波器、光滤波器装置、光模块及电子设备
CN104049293A (zh) 光学滤波器装置、光学模块以及电子设备
CN103116208A (zh) 滤光器装置、光模块及电子设备
CN103217732A (zh) 干涉滤波器、光学模块以及电子设备
CN104516100B (zh) 致动器的驱动系统、光学模块以及电子设备
CN103969727A (zh) 光学模块以及电子设备
US20150116831A1 (en) Optical element, optical device, and electronic device
CN103885109B (zh) 波长可变干涉滤波器、及其制造方法、光模块及电子设备
US8970957B2 (en) Tunable interference filter, optical module, and electronic device
JP6566061B2 (ja) 波長可変干渉フィルターの駆動方法
JP2013072931A (ja) 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20190419

CF01 Termination of patent right due to non-payment of annual fee