JP6385198B2 - 回路付サスペンション基板の製造方法 - Google Patents
回路付サスペンション基板の製造方法 Download PDFInfo
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- JP6385198B2 JP6385198B2 JP2014168395A JP2014168395A JP6385198B2 JP 6385198 B2 JP6385198 B2 JP 6385198B2 JP 2014168395 A JP2014168395 A JP 2014168395A JP 2014168395 A JP2014168395 A JP 2014168395A JP 6385198 B2 JP6385198 B2 JP 6385198B2
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- metal
- wiring
- suspension board
- opening
- insulating layer
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/05—Insulated conductive substrates, e.g. insulated metal substrate
- H05K1/056—Insulated conductive substrates, e.g. insulated metal substrate the metal substrate being covered by an organic insulating layer
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/421—Blind plated via connections
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/4806—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
- G11B5/486—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives with provision for mounting or arranging electrical conducting means or circuits on or along the arm assembly
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0073—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
- H05K3/0082—Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the exposure method of radiation-sensitive masks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/027—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed by irradiation, e.g. by photons, alpha or beta particles
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/44—Manufacturing insulated metal core circuits or other insulated electrically conductive core circuits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
- G11B5/4806—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed specially adapted for disk drive assemblies, e.g. assembly prior to operation, hard or flexible disk drives
- G11B5/484—Integrated arm assemblies, e.g. formed by material deposition or by etching from single piece of metal or by lamination of materials forming a single arm/suspension/head unit
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/095—Conductive through-holes or vias
- H05K2201/09509—Blind vias, i.e. vias having one side closed
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/09—Shape and layout
- H05K2201/09209—Shape and layout details of conductors
- H05K2201/09654—Shape and layout details of conductors covering at least two types of conductors provided for in H05K2201/09218 - H05K2201/095
- H05K2201/0969—Apertured conductors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0323—Working metal substrate or core, e.g. by etching, deforming
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/09—Treatments involving charged particles
- H05K2203/095—Plasma, e.g. for treating a substrate to improve adhesion with a conductor or for cleaning holes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
- H05K3/061—Etching masks
- H05K3/064—Photoresists
Description
図1の実施形態では、図4B〜図4Dに示すように、感光性硬化性ベース皮膜3aを形成し、次いで、感光性硬化性ベース皮膜3aを露光および現像することにより、開口部13が形成された硬化性絶縁層3bを形成しているが、例えば、図示しないが、感光性硬化性絶縁組成物の溶液をスクリーン印刷することにより、開口部13が形成された硬化性絶縁層3bを形成することもできる。
ステンレスからなる厚み18μmの金属支持層を用意した(図4A参照)。次いで、ポリイミド前駆体からなる感光性硬化性絶縁組成物のワニスを金属支持層の上に塗布し、160℃で5分間乾燥させて、感光性硬化性ベース皮膜(厚み10μm)を形成した(図4B参照)。
マイクロ波プラズマ処理の条件を表1に示す条件に変更した以外は、実施例1と同様にして、回路付サスペンション基板を得た。
マイクロ波プラズマ処理を実施しなかった以外は、実施例1と同様にして、回路付サスペンション基板を得た。
マイクロ波プラズマ処理の代わりに、RFプラズマ発生装置(ヒラノ光音社製、周波数13.56MHz)を用いて表1に示す条件で、RFプラズマ処理を実施した以外は、実施例1と同様にして回路付サスペンション基板を得た。
各実施例および各比較例の回路付サスペンション基板(カバー絶縁層が形成された後の回路付サスペンション基板)の金属導通部に、デジタルマルチメーター(2000型、KEITHLAY社製)を接続し、金属導通部と金属露出面との電気抵抗値を測定した。その結果を表1に示す。
2 金属支持層
3 ベース絶縁層
3b 硬化性絶縁層
12 金属導通部
13 開口部
Claims (5)
- 金属支持層を用意する工程、
感光性硬化性絶縁組成物を用いて、硬化性絶縁層を、前記金属支持層の上に、開口部が形成されるように形成する工程、
前記硬化性絶縁層を硬化して、絶縁層を形成する工程、
前記開口部から露出する前記金属支持層に、マイクロ波プラズマ処理を実施する工程、および、
金属導通部を、前記開口部から露出する前記金属支持層の上に形成する工程
を備えることを特徴とする、回路付サスペンション基板の製造方法。 - 硬化性絶縁層を、前記金属支持層の上に、開口部が形成されるように形成する工程が、前記感光性硬化性絶縁組成物を含有する溶液を前記金属支持層の上に塗布し、現像する工程であることを特徴とする、請求項1に記載の回路付サスペンション基板の製造方法。
- 前記マイクロ波プラズマ処理に用いられるガスが、不活性ガスを含有することを特徴とする、請求項1または2に記載の回路付サスペンション基板の製造方法。
- 前記金属導通部が、差動信号配線を電気的に接続していることを特徴とする、請求項1〜3のいずれか一項に記載の回路付サスペンション基板の製造方法。
- 前記開口部および前記金属導通部が、それぞれ複数形成され、
前記複数の金属導通部が、前記金属支持層を介して、互いに電気的に接続されていることを特徴とする、請求項4に記載の回路付サスペンション基板の製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014168395A JP6385198B2 (ja) | 2014-08-21 | 2014-08-21 | 回路付サスペンション基板の製造方法 |
US14/753,433 US10225930B2 (en) | 2014-08-21 | 2015-06-29 | Method of producing suspension board with circuit |
CN201510450294.2A CN105376960B (zh) | 2014-08-21 | 2015-07-28 | 带电路的悬挂基板的制造方法 |
Applications Claiming Priority (1)
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JP2014168395A JP6385198B2 (ja) | 2014-08-21 | 2014-08-21 | 回路付サスペンション基板の製造方法 |
Publications (2)
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JP2016045971A JP2016045971A (ja) | 2016-04-04 |
JP6385198B2 true JP6385198B2 (ja) | 2018-09-05 |
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US (1) | US10225930B2 (ja) |
JP (1) | JP6385198B2 (ja) |
CN (1) | CN105376960B (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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US10438804B2 (en) | 2014-11-12 | 2019-10-08 | Ontos Equipment Systems | Simultaneous hydrophilization of photoresist and metal surface preparation: methods, systems, and products |
CN107710889B (zh) * | 2015-05-06 | 2021-06-29 | 哈钦森技术股份有限公司 | 用于硬盘驱动器的挠曲部的等离子体处理 |
JP6802688B2 (ja) * | 2016-11-02 | 2020-12-16 | 日東電工株式会社 | 配線回路基板 |
JP7138596B2 (ja) * | 2019-05-21 | 2022-09-16 | 三菱電機株式会社 | 半導体装置 |
US11877404B2 (en) * | 2020-02-13 | 2024-01-16 | Averatek Corporation | Catalyzed metal foil and uses thereof |
US20210259112A1 (en) * | 2020-02-13 | 2021-08-19 | Averatek Corporation | Catalyzed metal foil and uses thereof |
JP2022030666A (ja) * | 2020-08-07 | 2022-02-18 | 日東電工株式会社 | 配線回路基板の製造方法、および配線回路基板 |
JP7289602B2 (ja) * | 2020-11-13 | 2023-06-12 | 日東電工株式会社 | 配線回路基板、および配線回路基板の製造方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03191074A (ja) * | 1989-12-20 | 1991-08-21 | Canon Inc | マイクロ波プラズマ処理装置 |
JPH03191073A (ja) * | 1989-12-21 | 1991-08-21 | Canon Inc | マイクロ波プラズマ処理装置 |
US5865365A (en) * | 1991-02-19 | 1999-02-02 | Hitachi, Ltd. | Method of fabricating an electronic circuit device |
TW408300B (en) | 1997-03-19 | 2000-10-11 | Sony Corp | Magnetic head device |
JPH10269721A (ja) * | 1997-03-19 | 1998-10-09 | Sony Corp | 磁気ヘッド装置 |
JP4471243B2 (ja) | 1999-08-27 | 2010-06-02 | 東京エレクトロン株式会社 | エッチング方法およびプラズマ処理方法 |
JP2000090420A (ja) * | 1999-10-14 | 2000-03-31 | Hitachi Ltd | 磁気抵抗効果型ヘッド及び磁気ディスク装置 |
JP4595276B2 (ja) * | 2000-12-25 | 2010-12-08 | 東洋製罐株式会社 | マイクロ波プラズマ処理方法及び装置 |
WO2005114658A2 (en) * | 2004-05-14 | 2005-12-01 | Hutchinson Technology Incorporated | Method for making noble metal conductive leads for suspension assemblies |
JP2008047655A (ja) * | 2006-08-11 | 2008-02-28 | Mitsui Mining & Smelting Co Ltd | 配線基板およびその製造方法 |
US8082656B1 (en) * | 2007-09-04 | 2011-12-27 | Hutchinson Technology Incorporated | Method for manufacturing a disk drive head suspension |
JP2012114217A (ja) | 2010-11-24 | 2012-06-14 | Nitto Denko Corp | 配線回路基板の製造方法 |
JP2013084320A (ja) * | 2011-10-06 | 2013-05-09 | Dainippon Printing Co Ltd | サスペンション用基板、サスペンション、ヘッド付サスペンション、およびハードディスクドライブ |
JP5851804B2 (ja) * | 2011-11-09 | 2016-02-03 | 東京エレクトロン株式会社 | 前処理方法、グラフェンの形成方法及びグラフェン製造装置 |
WO2014064779A1 (ja) * | 2012-10-24 | 2014-05-01 | 株式会社Jcu | プラズマ処理装置及び方法 |
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2014
- 2014-08-21 JP JP2014168395A patent/JP6385198B2/ja active Active
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2015
- 2015-06-29 US US14/753,433 patent/US10225930B2/en active Active
- 2015-07-28 CN CN201510450294.2A patent/CN105376960B/zh active Active
Also Published As
Publication number | Publication date |
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JP2016045971A (ja) | 2016-04-04 |
US10225930B2 (en) | 2019-03-05 |
CN105376960B (zh) | 2019-09-17 |
US20160057867A1 (en) | 2016-02-25 |
CN105376960A (zh) | 2016-03-02 |
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