JP6353901B2 - 磁性材料 - Google Patents
磁性材料 Download PDFInfo
- Publication number
- JP6353901B2 JP6353901B2 JP2016527366A JP2016527366A JP6353901B2 JP 6353901 B2 JP6353901 B2 JP 6353901B2 JP 2016527366 A JP2016527366 A JP 2016527366A JP 2016527366 A JP2016527366 A JP 2016527366A JP 6353901 B2 JP6353901 B2 JP 6353901B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic material
- magnetic
- film
- sputtering
- target
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F1/00—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
- H01F1/01—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
- H01F1/03—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
- H01F1/032—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials
- H01F1/04—Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of hard-magnetic materials metals or alloys
- H01F1/047—Alloys characterised by their composition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
Description
本開示は、米国科学財団によって授与された認可番号:CMMI−1229049の政府支援でなされた。米国政府は、本開示に対して一定の権利を有する。
本発明のある実施形態における磁性材料は、次のように作製される。まず、原料として、ターゲット材料を用意する。当該ターゲット材料としては、所望の組成を有するMn−X合金ターゲット材料を使用する。各元素のスパッタ率は異なり、それゆえに、ターゲット材料の組成は好ましく調整されるため、スパッタリングで作製された膜の組成は、ターゲット材料の組成から逸脱してもよい。あるいは、MnとXの単一元素ターゲットが用意され適切な速度でスパッタリングが行われてもよい。あるいは、合金ターゲットおよび単一元素ターゲットが組み合わされて使用され適切な速度でスパッタリングが行われてもよい。酸素は磁性材料の保磁力を悪化させるため、できるだけ酸素は除去することが好ましい。ターゲット材料中の酸素含有量は、できるだけ低下させることが好ましい。
これより、本発明は、その範囲を限定しない実施例および比較例を介して、より詳細に説明される。
Claims (4)
- 100nm以下の厚さを有し、0℃以上かつ200℃以下の温度範囲で、107erg/cc以上の一軸磁気異方性定数と15kOe以上の保磁力とを示し、400emu/cc以上の室温飽和磁化を示す二元のMn−Bi磁性材料。
- 前記磁性材料は、アモルファス基板上に形成される請求項1に記載の磁性材料。
- 前記磁性材料は、アルゴン雰囲気でスパッタリング法により形成される請求項1または2に記載の磁性材料。
- 最大エネルギー積は、6MGOe以上である請求項1に記載の磁性材料。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201361898509P | 2013-11-01 | 2013-11-01 | |
US61/898,509 | 2013-11-01 | ||
PCT/US2014/011943 WO2015065507A1 (en) | 2013-11-01 | 2014-01-16 | Magnetic material |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016536789A JP2016536789A (ja) | 2016-11-24 |
JP6353901B2 true JP6353901B2 (ja) | 2018-07-04 |
Family
ID=53004894
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016527366A Expired - Fee Related JP6353901B2 (ja) | 2013-11-01 | 2014-01-16 | 磁性材料 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9842678B2 (ja) |
JP (1) | JP6353901B2 (ja) |
WO (1) | WO2015065507A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10031064B2 (en) | 2010-10-25 | 2018-07-24 | Accuri Cytometers, Inc. | Systems and user interface for collecting a data set in a flow cytometer |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20170117074A1 (en) * | 2015-10-26 | 2017-04-27 | The Board Of Trustees Of The University Of Alabama | Mn-X-BASED MAGNETIC MATERIAL |
US11585013B2 (en) | 2017-10-25 | 2023-02-21 | The Board Of Trustees Of The University Of Alabama | Fe—Co—Al alloy magnetic thin film |
EP3570301A1 (en) * | 2018-05-15 | 2019-11-20 | Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. | Rare earth metal-free hard magnets |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57201004A (en) * | 1981-06-03 | 1982-12-09 | Tdk Corp | Magnetic recording medium |
EP0125536A3 (en) | 1983-05-11 | 1986-06-25 | MOVID Information Technology, Inc. | Thermo-magnetic recording materials supporting small stable domains |
JPS6066349A (ja) * | 1983-09-22 | 1985-04-16 | Agency Of Ind Science & Technol | 光熱磁気記録媒体およびその製造方法 |
EP0184034B1 (en) * | 1984-11-12 | 1991-01-16 | Sumitomo Special Metals Co., Ltd. | Perpendicular magnetic recording medium and method of producing same |
US5750044A (en) * | 1994-07-12 | 1998-05-12 | Tdk Corporation | Magnet and bonded magnet |
JPH1167511A (ja) | 1997-08-11 | 1999-03-09 | Hitachi Maxell Ltd | 磁気材料 |
JPH11135311A (ja) | 1997-10-27 | 1999-05-21 | Matsushita Electric Ind Co Ltd | 希土類−鉄−窒素系磁性材料とその製造方法、およびこれを用いたボンド磁石 |
JP4453479B2 (ja) | 2004-08-06 | 2010-04-21 | Tdk株式会社 | 交換結合型軟磁性材料 |
FR2934412B1 (fr) | 2008-07-22 | 2014-02-07 | Commissariat Energie Atomique | Materiau magnetique a base de semi-conducteur |
GB2486167A (en) * | 2010-12-01 | 2012-06-13 | Trinity College Dublin | Magnetic recording medium with manganese-gallium alloy recording layer |
JP2013135542A (ja) * | 2011-12-27 | 2013-07-08 | Hitachi Ltd | 焼結磁石モータ |
US20130236720A1 (en) | 2012-03-07 | 2013-09-12 | Northeastern University | Rare-earth-free or noble metal-free large magnetic coercivity nanostructured films |
JP5499264B2 (ja) * | 2012-03-21 | 2014-05-21 | 株式会社東芝 | 磁気抵抗素子および磁気メモリ |
US20170117074A1 (en) * | 2015-10-26 | 2017-04-27 | The Board Of Trustees Of The University Of Alabama | Mn-X-BASED MAGNETIC MATERIAL |
-
2014
- 2014-01-16 WO PCT/US2014/011943 patent/WO2015065507A1/en active Application Filing
- 2014-01-16 US US15/033,435 patent/US9842678B2/en active Active
- 2014-01-16 JP JP2016527366A patent/JP6353901B2/ja not_active Expired - Fee Related
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10031064B2 (en) | 2010-10-25 | 2018-07-24 | Accuri Cytometers, Inc. | Systems and user interface for collecting a data set in a flow cytometer |
US10481074B2 (en) | 2010-10-25 | 2019-11-19 | Becton, Dickinson And Company | Systems and user interface for collecting a data set in a flow cytometer |
US11125674B2 (en) | 2010-10-25 | 2021-09-21 | Becton, Dickinson And Company | Systems and user interface for collecting a data set in a flow cytometer |
Also Published As
Publication number | Publication date |
---|---|
US9842678B2 (en) | 2017-12-12 |
US20160276073A1 (en) | 2016-09-22 |
WO2015065507A1 (en) | 2015-05-07 |
JP2016536789A (ja) | 2016-11-24 |
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