JP6337444B2 - 振動片、角速度センサー、電子機器及び移動体 - Google Patents

振動片、角速度センサー、電子機器及び移動体 Download PDF

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Publication number
JP6337444B2
JP6337444B2 JP2013226033A JP2013226033A JP6337444B2 JP 6337444 B2 JP6337444 B2 JP 6337444B2 JP 2013226033 A JP2013226033 A JP 2013226033A JP 2013226033 A JP2013226033 A JP 2013226033A JP 6337444 B2 JP6337444 B2 JP 6337444B2
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electrode
main surface
main
surface electrode
electrodes
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English (en)
Japanese (ja)
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JP2015087257A (ja
JP2015087257A5 (enrdf_load_stackoverflow
Inventor
敦司 松尾
敦司 松尾
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2013226033A priority Critical patent/JP6337444B2/ja
Priority to US14/526,942 priority patent/US9488477B2/en
Priority to CN201410601623.4A priority patent/CN104596490B/zh
Publication of JP2015087257A publication Critical patent/JP2015087257A/ja
Publication of JP2015087257A5 publication Critical patent/JP2015087257A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5628—Manufacturing; Trimming; Mounting; Housings
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Acoustics & Sound (AREA)
  • Manufacturing & Machinery (AREA)
  • Gyroscopes (AREA)
JP2013226033A 2013-10-30 2013-10-30 振動片、角速度センサー、電子機器及び移動体 Active JP6337444B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013226033A JP6337444B2 (ja) 2013-10-30 2013-10-30 振動片、角速度センサー、電子機器及び移動体
US14/526,942 US9488477B2 (en) 2013-10-30 2014-10-29 Vibrating reed, angular velocity sensor, electronic device, moving object, and method for manufacturing vibrating reed
CN201410601623.4A CN104596490B (zh) 2013-10-30 2014-10-30 振动片及其制造方法、角速度传感器、电子设备及移动体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013226033A JP6337444B2 (ja) 2013-10-30 2013-10-30 振動片、角速度センサー、電子機器及び移動体

Publications (3)

Publication Number Publication Date
JP2015087257A JP2015087257A (ja) 2015-05-07
JP2015087257A5 JP2015087257A5 (enrdf_load_stackoverflow) 2016-12-08
JP6337444B2 true JP6337444B2 (ja) 2018-06-06

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JP2013226033A Active JP6337444B2 (ja) 2013-10-30 2013-10-30 振動片、角速度センサー、電子機器及び移動体

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Country Link
US (1) US9488477B2 (enrdf_load_stackoverflow)
JP (1) JP6337444B2 (enrdf_load_stackoverflow)
CN (1) CN104596490B (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6337443B2 (ja) * 2013-10-30 2018-06-06 セイコーエプソン株式会社 振動片、角速度センサー、電子機器及び移動体
JP2017156314A (ja) * 2016-03-04 2017-09-07 セイコーエプソン株式会社 駆動回路、角速度検出装置、電子機器及び移動体
CN112188937A (zh) * 2018-06-20 2021-01-05 沙特阿拉伯石油公司 用于流体性质测量的音叉的电容消除方法

Family Cites Families (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0743262B2 (ja) * 1985-06-21 1995-05-15 東京航空計器株式会社 振動ジャイロ
JP2000249556A (ja) * 1999-02-26 2000-09-14 Matsushita Electric Ind Co Ltd 三角柱三脚音叉振動子および角速度センサ
JP3736257B2 (ja) 2000-02-07 2006-01-18 セイコーエプソン株式会社 振動子及び角速度検出装置
JP3767303B2 (ja) * 2000-02-22 2006-04-19 セイコーエプソン株式会社 角速度検出装置
JP3477618B2 (ja) * 2000-10-31 2003-12-10 有限会社ピエデック技術研究所 屈曲水晶振動子
JP3646258B2 (ja) * 2001-10-31 2005-05-11 有限会社ピエデック技術研究所 水晶ユニットとその製造方法
US6791243B2 (en) * 2002-03-06 2004-09-14 Piedek Technical Laboratory Quartz crystal unit and its manufacturing method
CN100338435C (zh) * 2002-06-10 2007-09-19 松下电器产业株式会社 角速度传感器
JP3729181B2 (ja) * 2003-03-14 2005-12-21 セイコーエプソン株式会社 測定方法及び測定信号出力回路並びに測定装置
JP4379119B2 (ja) * 2003-06-30 2009-12-09 有限会社ピエデック技術研究所 水晶振動子
JP4058018B2 (ja) * 2003-12-16 2008-03-05 松下電器産業株式会社 圧電素子及びその製造方法、並びにその圧電素子を備えたインクジェットヘッド、インクジェット式記録装置及び角速度センサ
JP2005217903A (ja) * 2004-01-30 2005-08-11 Seiko Epson Corp 音叉型振動片及び電子機器
JP4478495B2 (ja) * 2004-03-31 2010-06-09 ソニー株式会社 振動型ジャイロセンサ素子及びその製造方法
ATE392602T1 (de) * 2004-12-20 2008-05-15 Eta Sa Mft Horlogere Suisse Messwertgeber zur drehgeschwindigkeitsmessung
JP4777806B2 (ja) * 2006-03-24 2011-09-21 京セラキンセキ株式会社 水晶振動子及び角速度センサ
CN101173957B (zh) * 2006-10-30 2011-12-21 索尼株式会社 角速度传感器及电子机器
JP2008157748A (ja) * 2006-12-22 2008-07-10 Fujitsu Media Device Kk 角速度センサ
JP2008180511A (ja) * 2007-01-23 2008-08-07 Fujitsu Media Device Kk 角速度センサ
JP5128262B2 (ja) * 2007-12-17 2013-01-23 セイコーインスツル株式会社 圧電振動片、圧電振動子、発振器、電子機器及び電波時計並びに圧電振動片の製造方法
JP2010154513A (ja) * 2008-11-25 2010-07-08 Citizen Holdings Co Ltd 水晶振動子の製造方法
JP5786303B2 (ja) * 2009-12-10 2015-09-30 セイコーエプソン株式会社 振動片、振動子、物理量センサー、及び電子機器
JP5485714B2 (ja) * 2010-01-07 2014-05-07 セイコーインスツル株式会社 パッケージの製造方法
JP2012129680A (ja) * 2010-12-14 2012-07-05 Seiko Epson Corp 電子機器
JP2011220997A (ja) * 2010-03-26 2011-11-04 Seiko Epson Corp 物理量検出素子、物理量検出装置、および電子機器
JP5617534B2 (ja) 2010-10-29 2014-11-05 Tdk株式会社 圧電振動型ヨーレートセンサ
JP5652155B2 (ja) 2010-11-24 2015-01-14 セイコーエプソン株式会社 振動片、センサーユニット、電子機器、振動片の製造方法、および、センサーユニットの製造方法
JP5724672B2 (ja) * 2011-06-24 2015-05-27 セイコーエプソン株式会社 屈曲振動片、その製造方法、及び電子機器
JP2013030850A (ja) * 2011-07-26 2013-02-07 Seiko Epson Corp 振動デバイスおよび電子機器
JP5838749B2 (ja) * 2011-11-16 2016-01-06 セイコーエプソン株式会社 振動子、振動デバイスおよび電子機器
JP6007541B2 (ja) * 2012-03-28 2016-10-12 セイコーエプソン株式会社 振動片およびその製造方法並びにジャイロセンサーおよび電子機器および移動体
JP6337443B2 (ja) * 2013-10-30 2018-06-06 セイコーエプソン株式会社 振動片、角速度センサー、電子機器及び移動体

Also Published As

Publication number Publication date
JP2015087257A (ja) 2015-05-07
CN104596490A (zh) 2015-05-06
US9488477B2 (en) 2016-11-08
US20150114116A1 (en) 2015-04-30
CN104596490B (zh) 2019-01-01

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