JP6336801B2 - 基板乾燥装置 - Google Patents

基板乾燥装置 Download PDF

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Publication number
JP6336801B2
JP6336801B2 JP2014070942A JP2014070942A JP6336801B2 JP 6336801 B2 JP6336801 B2 JP 6336801B2 JP 2014070942 A JP2014070942 A JP 2014070942A JP 2014070942 A JP2014070942 A JP 2014070942A JP 6336801 B2 JP6336801 B2 JP 6336801B2
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substrate
gas
air
air knife
drying apparatus
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Japanese (ja)
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JP2015192141A5 (enExample
JP2015192141A (ja
Inventor
健司 坂下
健司 坂下
磯　明典
明典 磯
西部　幸伸
幸伸 西部
竜平 高原
竜平 高原
崇広 濱田
崇広 濱田
手島　理恵
理恵 手島
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Shibaura Mechatronics Corp
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Shibaura Mechatronics Corp
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Priority to JP2014070942A priority Critical patent/JP6336801B2/ja
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Publication of JP2015192141A5 publication Critical patent/JP2015192141A5/ja
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  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Drying Of Solid Materials (AREA)
JP2014070942A 2014-03-31 2014-03-31 基板乾燥装置 Active JP6336801B2 (ja)

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JP2014070942A JP6336801B2 (ja) 2014-03-31 2014-03-31 基板乾燥装置

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JP2014070942A JP6336801B2 (ja) 2014-03-31 2014-03-31 基板乾燥装置

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP2015072055A Division JP2015198254A (ja) 2015-03-31 2015-03-31 基板処理装置
JP2018031759A Division JP6580177B2 (ja) 2018-02-26 2018-02-26 基板乾燥装置

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JP2015192141A JP2015192141A (ja) 2015-11-02
JP2015192141A5 JP2015192141A5 (enExample) 2017-03-09
JP6336801B2 true JP6336801B2 (ja) 2018-06-06

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108499955A (zh) * 2018-04-27 2018-09-07 江山海维科技有限公司 一种基于喷淋清洗技术的中草药用清洗装置
CN109396080A (zh) * 2018-12-24 2019-03-01 东莞市启力致尚技术研发有限公司 一种家具板材干燥除尘装置
CN111141129A (zh) * 2019-12-28 2020-05-12 天长市正牧铝业科技有限公司 一种棒球杆快速烘干装置
CN112222079A (zh) * 2020-09-24 2021-01-15 合肥维信诺科技有限公司 一种清洗干燥系统及清洗干燥方法
CN112742798A (zh) * 2020-12-30 2021-05-04 泰州市博泰电子有限公司 一种线路板清洁装置

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105605909B (zh) * 2016-01-15 2018-01-30 武汉华星光电技术有限公司 基板清洗方法
JP2019027620A (ja) * 2017-07-26 2019-02-21 春日電機株式会社 除水または除塵機
CN108339769A (zh) * 2018-01-16 2018-07-31 滁州佳宏光电有限公司 一种导光板除尘设备及其使用方法
CN108655046A (zh) * 2018-06-25 2018-10-16 东莞市赛诺办公设备科技有限公司 一种充电辊铁轴自动洗轴机
CN110976388A (zh) * 2019-12-27 2020-04-10 天津彗途环保科技有限公司 一种具有双层清洗结构的高压清洗机
CN111151484A (zh) * 2020-01-19 2020-05-15 富士智能机电（珠海）有限公司 一种磨刷式自动清洗装置
JP7356368B2 (ja) * 2020-02-10 2023-10-04 株式会社荏原製作所 基板乾燥装置
CN111250461A (zh) * 2020-03-20 2020-06-09 浙江宏耀玻璃有限公司 一种玻璃表面涂层的清洗烘干装置
CN112139107B (zh) * 2020-07-30 2023-10-31 福涞堡造纸技术(上海)有限公司 一种丝网清洗干燥装置
CN112207077A (zh) * 2020-09-22 2021-01-12 江西城桥复合材料有限公司 一种铜板的干燥清洁装置
CN112354931A (zh) * 2020-10-16 2021-02-12 江苏东科复合材料有限公司 一种碳纤维汽车引擎盖加工用水洗及烘干装置
CN112207070A (zh) * 2020-11-03 2021-01-12 韩静 一种建筑工程领域的建筑板材快速清污装置
WO2022116028A1 (zh) * 2020-12-02 2022-06-09 李海霞 一种特种玻璃生产用的烘干装置
CN117855120B (zh) * 2024-01-12 2024-06-21 芯朋半导体科技(如东)有限公司 一种用于半导体清洗台的防静电型输送组件

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3851370B2 (ja) * 1996-03-01 2006-11-29 大日本スクリーン製造株式会社 基板の液切り装置
JP3918401B2 (ja) * 1999-05-31 2007-05-23 株式会社日立ハイテクノロジーズ 基板乾燥装置及び乾燥方法、並びに基板の製造方法
JP3765568B2 (ja) * 2002-04-12 2006-04-12 株式会社都ローラー工業 基板の水分除去方法と水分除去装置
JP2005147621A (ja) * 2003-11-19 2005-06-09 Tokyo Kakoki Kk 基板材の乾燥装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108499955A (zh) * 2018-04-27 2018-09-07 江山海维科技有限公司 一种基于喷淋清洗技术的中草药用清洗装置
CN109396080A (zh) * 2018-12-24 2019-03-01 东莞市启力致尚技术研发有限公司 一种家具板材干燥除尘装置
CN109396080B (zh) * 2018-12-24 2021-07-13 上海特雷通智能家居有限公司 一种家具板材干燥除尘装置
CN111141129A (zh) * 2019-12-28 2020-05-12 天长市正牧铝业科技有限公司 一种棒球杆快速烘干装置
CN112222079A (zh) * 2020-09-24 2021-01-15 合肥维信诺科技有限公司 一种清洗干燥系统及清洗干燥方法
CN112222079B (zh) * 2020-09-24 2022-04-12 合肥维信诺科技有限公司 一种清洗干燥系统及清洗干燥方法
CN112742798A (zh) * 2020-12-30 2021-05-04 泰州市博泰电子有限公司 一种线路板清洁装置

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