JP6318550B2 - 振動片、角速度センサー、電子機器および移動体 - Google Patents
振動片、角速度センサー、電子機器および移動体 Download PDFInfo
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- JP6318550B2 JP6318550B2 JP2013226087A JP2013226087A JP6318550B2 JP 6318550 B2 JP6318550 B2 JP 6318550B2 JP 2013226087 A JP2013226087 A JP 2013226087A JP 2013226087 A JP2013226087 A JP 2013226087A JP 6318550 B2 JP6318550 B2 JP 6318550B2
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- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013226087A JP6318550B2 (ja) | 2013-10-31 | 2013-10-31 | 振動片、角速度センサー、電子機器および移動体 |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013226087A JP6318550B2 (ja) | 2013-10-31 | 2013-10-31 | 振動片、角速度センサー、電子機器および移動体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015087263A JP2015087263A (ja) | 2015-05-07 |
| JP2015087263A5 JP2015087263A5 (enrdf_load_stackoverflow) | 2016-12-15 |
| JP6318550B2 true JP6318550B2 (ja) | 2018-05-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013226087A Active JP6318550B2 (ja) | 2013-10-31 | 2013-10-31 | 振動片、角速度センサー、電子機器および移動体 |
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| Country | Link |
|---|---|
| JP (1) | JP6318550B2 (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9654082B2 (en) | 2015-04-28 | 2017-05-16 | Seiko Epson Corporation | Vibrator, oscillator, electronic device for controlling internal resonance between inherent vibration modes |
| JP2017200015A (ja) | 2016-04-26 | 2017-11-02 | セイコーエプソン株式会社 | 振動子、発振器、電子機器および移動体 |
| CN109477719A (zh) * | 2016-07-26 | 2019-03-15 | 京瓷株式会社 | 角速度传感器、传感器元件以及多轴角速度传感器 |
| DE112017003796T5 (de) * | 2016-07-26 | 2019-06-27 | Kyocera Corporation | Winkelgeschwindigkeitssensor, sensorelement und multi-achsen-winkelgeschwindigkeitssensor |
| CN106767747B (zh) * | 2016-12-28 | 2019-09-27 | 清华大学 | 一种基于参量激励的数字式速率积分陀螺控制方法和平台 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013030850A (ja) * | 2011-07-26 | 2013-02-07 | Seiko Epson Corp | 振動デバイスおよび電子機器 |
| JP2013096882A (ja) * | 2011-11-02 | 2013-05-20 | Seiko Epson Corp | 物理量検出素子、物理量検出装置、および電子機器 |
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- 2013-10-31 JP JP2013226087A patent/JP6318550B2/ja active Active
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| Publication number | Publication date |
|---|---|
| JP2015087263A (ja) | 2015-05-07 |
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