JP6301578B2 - エッチング装置及び方法 - Google Patents
エッチング装置及び方法 Download PDFInfo
- Publication number
- JP6301578B2 JP6301578B2 JP2012250063A JP2012250063A JP6301578B2 JP 6301578 B2 JP6301578 B2 JP 6301578B2 JP 2012250063 A JP2012250063 A JP 2012250063A JP 2012250063 A JP2012250063 A JP 2012250063A JP 6301578 B2 JP6301578 B2 JP 6301578B2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- substrate
- camera
- scattered
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005530 etching Methods 0.000 title claims description 55
- 238000000034 method Methods 0.000 title claims description 41
- 239000000758 substrate Substances 0.000 claims description 23
- 238000001514 detection method Methods 0.000 claims description 14
- 230000001154 acute effect Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 8
- 238000003708 edge detection Methods 0.000 claims description 6
- 238000012545 processing Methods 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 4
- 238000005305 interferometry Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 101000605054 Mus musculus Epididymal-specific lipocalin-8 Proteins 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/3065—Plasma etching; Reactive-ion etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB1119598.9A GB201119598D0 (en) | 2011-11-14 | 2011-11-14 | Etching apparatus and methods |
| GB1119598.9 | 2011-11-14 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017203582A Division JP2018014538A (ja) | 2011-11-14 | 2017-10-20 | エッチング装置及び方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013106050A JP2013106050A (ja) | 2013-05-30 |
| JP2013106050A5 JP2013106050A5 (enExample) | 2016-01-07 |
| JP6301578B2 true JP6301578B2 (ja) | 2018-03-28 |
Family
ID=45444084
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012250063A Active JP6301578B2 (ja) | 2011-11-14 | 2012-11-14 | エッチング装置及び方法 |
| JP2017203582A Pending JP2018014538A (ja) | 2011-11-14 | 2017-10-20 | エッチング装置及び方法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017203582A Pending JP2018014538A (ja) | 2011-11-14 | 2017-10-20 | エッチング装置及び方法 |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP2592646B1 (enExample) |
| JP (2) | JP6301578B2 (enExample) |
| KR (3) | KR101986845B1 (enExample) |
| CN (1) | CN103107113B (enExample) |
| GB (1) | GB201119598D0 (enExample) |
| TW (1) | TWI575551B (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104134618B (zh) * | 2014-06-12 | 2017-12-08 | 京东方科技集团股份有限公司 | 一种关键图形的尺寸检测装置及尺寸检测方法 |
| JP6896771B2 (ja) * | 2016-06-13 | 2021-06-30 | エーエスエムエル ネザーランズ ビー．ブイ． | 基板上のターゲット構造の位置を決定するための方法及び装置、並びに、基板の位置を決定するための方法及び装置 |
| CN109148316A (zh) * | 2018-09-07 | 2019-01-04 | 北京智芯微电子科技有限公司 | 用于精确判定等离子体刻蚀机刻蚀芯片终点的监测方法 |
| GB201916079D0 (en) | 2019-11-05 | 2019-12-18 | Spts Technologies Ltd | Apparatus and method |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6028233A (ja) * | 1983-07-27 | 1985-02-13 | Hitachi Ltd | エツチングのモニタ装置 |
| JPS60124823A (ja) * | 1983-12-09 | 1985-07-03 | Hitachi Ltd | エツチング・モニタ方法 |
| JPS62171127A (ja) * | 1986-01-24 | 1987-07-28 | Hitachi Ltd | エツチングの終点検出方法 |
| JP3044728B2 (ja) * | 1989-12-26 | 2000-05-22 | ソニー株式会社 | 埋め込みプラグの製造方法 |
| US6271047B1 (en) * | 1998-05-21 | 2001-08-07 | Nikon Corporation | Layer-thickness detection methods and apparatus for wafers and the like, and polishing apparatus comprising same |
| JP4567828B2 (ja) * | 1999-09-14 | 2010-10-20 | 東京エレクトロン株式会社 | 終点検出方法 |
| JP2001319922A (ja) * | 2000-05-10 | 2001-11-16 | Nec Corp | 異常放電検出装置および検出方法 |
| JP2001332534A (ja) * | 2000-05-25 | 2001-11-30 | Matsushita Electric Ind Co Ltd | プラズマ処理方法及びプラズマ処理装置 |
| JP2003004644A (ja) * | 2001-06-19 | 2003-01-08 | Toshiba Corp | 表面評価方法、表面処理方法およびその装置 |
| JP4500510B2 (ja) * | 2003-06-05 | 2010-07-14 | 東京エレクトロン株式会社 | エッチング量検出方法，エッチング方法，およびエッチング装置 |
| US20050042777A1 (en) * | 2003-08-20 | 2005-02-24 | The Boc Group Inc. | Control of etch and deposition processes |
| JP4278497B2 (ja) * | 2003-11-26 | 2009-06-17 | 富士通マイクロエレクトロニクス株式会社 | 半導体装置の製造方法 |
| JP4181561B2 (ja) * | 2005-05-12 | 2008-11-19 | 松下電器産業株式会社 | 半導体加工方法および加工装置 |
| US8492178B2 (en) * | 2007-02-23 | 2013-07-23 | Rudolph Technologies, Inc. | Method of monitoring fabrication processing including edge bead removal processing |
| CN101459049A (zh) * | 2007-12-11 | 2009-06-17 | 中芯国际集成电路制造(上海)有限公司 | 一种用于探测刻蚀终点的装置及方法 |
| JP2010010242A (ja) * | 2008-06-25 | 2010-01-14 | Dainippon Screen Mfg Co Ltd | 基板処理方法および基板処理装置 |
-
2011
- 2011-11-14 GB GBGB1119598.9A patent/GB201119598D0/en not_active Ceased
-
2012
- 2012-11-13 EP EP12192364.3A patent/EP2592646B1/en active Active
- 2012-11-13 TW TW101142192A patent/TWI575551B/zh active
- 2012-11-14 CN CN201210459115.8A patent/CN103107113B/zh active Active
- 2012-11-14 KR KR1020120128864A patent/KR101986845B1/ko active Active
- 2012-11-14 JP JP2012250063A patent/JP6301578B2/ja active Active
-
2017
- 2017-10-20 JP JP2017203582A patent/JP2018014538A/ja active Pending
-
2019
- 2019-04-19 KR KR1020190046075A patent/KR20190044046A/ko not_active Ceased
- 2019-12-27 KR KR1020190176393A patent/KR102287783B1/ko active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN103107113B (zh) | 2017-03-01 |
| KR102287783B1 (ko) | 2021-08-06 |
| JP2013106050A (ja) | 2013-05-30 |
| CN103107113A (zh) | 2013-05-15 |
| KR20130054187A (ko) | 2013-05-24 |
| JP2018014538A (ja) | 2018-01-25 |
| KR101986845B1 (ko) | 2019-06-07 |
| TW201331977A (zh) | 2013-08-01 |
| EP2592646A2 (en) | 2013-05-15 |
| EP2592646B1 (en) | 2020-09-23 |
| GB201119598D0 (en) | 2011-12-28 |
| TWI575551B (zh) | 2017-03-21 |
| EP2592646A3 (en) | 2017-05-24 |
| KR20190044046A (ko) | 2019-04-29 |
| KR20200001587A (ko) | 2020-01-06 |
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