JP6278605B2 - 位置測定装置とこのような位置測定装置を備えた構造体 - Google Patents

位置測定装置とこのような位置測定装置を備えた構造体 Download PDF

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Publication number
JP6278605B2
JP6278605B2 JP2013056864A JP2013056864A JP6278605B2 JP 6278605 B2 JP6278605 B2 JP 6278605B2 JP 2013056864 A JP2013056864 A JP 2013056864A JP 2013056864 A JP2013056864 A JP 2013056864A JP 6278605 B2 JP6278605 B2 JP 6278605B2
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Prior art keywords
measurement
measuring device
position measuring
reflector
along
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JP2013056864A
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Japanese (ja)
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JP2013195432A (ja
JP2013195432A5 (https=
Inventor
ヴォルフガング・ホルツアプフェル
イェルク・ドレシャー
マルクス・マイスナー
ラルフ・イェルガー
ベルンハルト・ムシュ
トーマス・ケルベラー
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Dr Johannes Heidenhain GmbH
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Dr Johannes Heidenhain GmbH
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
    • G01D2205/90—Two-dimensional encoders, i.e. having one or two codes extending in two directions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP2013056864A 2012-03-22 2013-03-19 位置測定装置とこのような位置測定装置を備えた構造体 Active JP6278605B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012204572A DE102012204572A1 (de) 2012-03-22 2012-03-22 Positionsmesseinrichtung und Anordnung mit einer derartigen Positionsmesseinrichtung
DE102012204572.4 2012-03-22

Publications (3)

Publication Number Publication Date
JP2013195432A JP2013195432A (ja) 2013-09-30
JP2013195432A5 JP2013195432A5 (https=) 2016-01-07
JP6278605B2 true JP6278605B2 (ja) 2018-02-14

Family

ID=47827024

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JP2013056864A Active JP6278605B2 (ja) 2012-03-22 2013-03-19 位置測定装置とこのような位置測定装置を備えた構造体

Country Status (6)

Country Link
US (1) US9389065B2 (https=)
EP (1) EP2642254B1 (https=)
JP (1) JP6278605B2 (https=)
KR (1) KR101864770B1 (https=)
CN (1) CN103322910B (https=)
DE (1) DE102012204572A1 (https=)

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AU2014280332B2 (en) 2013-06-13 2017-09-07 Basf Se Detector for optically detecting at least one object
US10353049B2 (en) 2013-06-13 2019-07-16 Basf Se Detector for optically detecting an orientation of at least one object
JP6483127B2 (ja) 2013-08-19 2019-03-13 ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ 少なくとも１つの対象物の位置を求めるための検出器
AU2014310703B2 (en) 2013-08-19 2018-09-27 Basf Se Optical detector
WO2016005893A1 (en) 2014-07-08 2016-01-14 Basf Se Detector for determining a position of at least one object
KR102452393B1 (ko) * 2014-09-29 2022-10-11 바스프 에스이 적어도 하나의 물체의 포지션을 광학적으로 결정하기 위한 방법 및 검출기 및 이를 이용한 휴먼 머신 인터페이스, 엔터테인먼트 장치, 추적 시스템, 스캐닝 시스템, 입체 시스템 및 카메라
US11125880B2 (en) 2014-12-09 2021-09-21 Basf Se Optical detector
EP3251152B1 (en) 2015-01-30 2023-08-16 Trinamix GmbH Detector for an optical detection of at least one object
WO2017012986A1 (en) 2015-07-17 2017-01-26 Trinamix Gmbh Detector for optically detecting at least one object
JP6755316B2 (ja) 2015-09-14 2020-09-16 トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 少なくとも１つの物体の少なくとも１つの画像を記録するカメラ
KR102492134B1 (ko) 2016-07-29 2023-01-27 트리나미엑스 게엠베하 광학 센서 및 광학적 검출용 검출기
US11428787B2 (en) 2016-10-25 2022-08-30 Trinamix Gmbh Detector for an optical detection of at least one object
JP2019532517A (ja) 2016-10-25 2019-11-07 トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 光学的に検出するための光検出器
US11860292B2 (en) 2016-11-17 2024-01-02 Trinamix Gmbh Detector and methods for authenticating at least one object
EP3542179B1 (en) 2016-11-17 2021-03-24 trinamiX GmbH Detector for optically detecting at least one object
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JP7237024B2 (ja) 2017-06-26 2023-03-10 トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 少なくとも１つの物体の位置を決定するための検出器
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CN111721210B (zh) * 2020-06-19 2021-11-12 深圳市汉森软件有限公司 变换逻辑光栅分辨率后的初始化方法、装置、设备及介质

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Also Published As

Publication number Publication date
CN103322910A (zh) 2013-09-25
JP2013195432A (ja) 2013-09-30
DE102012204572A1 (de) 2013-09-26
US9389065B2 (en) 2016-07-12
EP2642254B1 (de) 2015-11-25
EP2642254A2 (de) 2013-09-25
CN103322910B (zh) 2017-10-27
KR20130108121A (ko) 2013-10-02
EP2642254A3 (de) 2015-04-15
US20130235390A1 (en) 2013-09-12
KR101864770B1 (ko) 2018-06-05

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