CN103322910B - 位置测量设备和具有这种位置测量设备的装置 - Google Patents

位置测量设备和具有这种位置测量设备的装置 Download PDF

Info

Publication number
CN103322910B
CN103322910B CN201310093649.8A CN201310093649A CN103322910B CN 103322910 B CN103322910 B CN 103322910B CN 201310093649 A CN201310093649 A CN 201310093649A CN 103322910 B CN103322910 B CN 103322910B
Authority
CN
China
Prior art keywords
measuring
measuring device
along
reflector
gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201310093649.8A
Other languages
English (en)
Chinese (zh)
Other versions
CN103322910A (zh
Inventor
W.霍尔萨普费尔
J.德雷歇尔
M.梅斯纳
R.约尔格
B.穆施
T.克尔贝雷尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
John Nei Si Heidenhain Doctor Co Ltd
Original Assignee
John Nei Si Heidenhain Doctor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by John Nei Si Heidenhain Doctor Co Ltd filed Critical John Nei Si Heidenhain Doctor Co Ltd
Publication of CN103322910A publication Critical patent/CN103322910A/zh
Application granted granted Critical
Publication of CN103322910B publication Critical patent/CN103322910B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
    • G01D2205/90—Two-dimensional encoders, i.e. having one or two codes extending in two directions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
CN201310093649.8A 2012-03-22 2013-03-22 位置测量设备和具有这种位置测量设备的装置 Active CN103322910B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012204572A DE102012204572A1 (de) 2012-03-22 2012-03-22 Positionsmesseinrichtung und Anordnung mit einer derartigen Positionsmesseinrichtung
DE102012204572.4 2012-03-22

Publications (2)

Publication Number Publication Date
CN103322910A CN103322910A (zh) 2013-09-25
CN103322910B true CN103322910B (zh) 2017-10-27

Family

ID=47827024

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310093649.8A Active CN103322910B (zh) 2012-03-22 2013-03-22 位置测量设备和具有这种位置测量设备的装置

Country Status (6)

Country Link
US (1) US9389065B2 (https=)
EP (1) EP2642254B1 (https=)
JP (1) JP6278605B2 (https=)
KR (1) KR101864770B1 (https=)
CN (1) CN103322910B (https=)
DE (1) DE102012204572A1 (https=)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9389315B2 (en) 2012-12-19 2016-07-12 Basf Se Detector comprising a transversal optical sensor for detecting a transversal position of a light beam from an object and a longitudinal optical sensor sensing a beam cross-section of the light beam in a sensor region
AU2014280332B2 (en) 2013-06-13 2017-09-07 Basf Se Detector for optically detecting at least one object
US10353049B2 (en) 2013-06-13 2019-07-16 Basf Se Detector for optically detecting an orientation of at least one object
JP6483127B2 (ja) 2013-08-19 2019-03-13 ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ 少なくとも１つの対象物の位置を求めるための検出器
AU2014310703B2 (en) 2013-08-19 2018-09-27 Basf Se Optical detector
WO2016005893A1 (en) 2014-07-08 2016-01-14 Basf Se Detector for determining a position of at least one object
KR102452393B1 (ko) * 2014-09-29 2022-10-11 바스프 에스이 적어도 하나의 물체의 포지션을 광학적으로 결정하기 위한 방법 및 검출기 및 이를 이용한 휴먼 머신 인터페이스, 엔터테인먼트 장치, 추적 시스템, 스캐닝 시스템, 입체 시스템 및 카메라
US11125880B2 (en) 2014-12-09 2021-09-21 Basf Se Optical detector
EP3251152B1 (en) 2015-01-30 2023-08-16 Trinamix GmbH Detector for an optical detection of at least one object
WO2017012986A1 (en) 2015-07-17 2017-01-26 Trinamix Gmbh Detector for optically detecting at least one object
JP6755316B2 (ja) 2015-09-14 2020-09-16 トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 少なくとも１つの物体の少なくとも１つの画像を記録するカメラ
KR102492134B1 (ko) 2016-07-29 2023-01-27 트리나미엑스 게엠베하 광학 센서 및 광학적 검출용 검출기
US11428787B2 (en) 2016-10-25 2022-08-30 Trinamix Gmbh Detector for an optical detection of at least one object
JP2019532517A (ja) 2016-10-25 2019-11-07 トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 光学的に検出するための光検出器
US11860292B2 (en) 2016-11-17 2024-01-02 Trinamix Gmbh Detector and methods for authenticating at least one object
EP3542179B1 (en) 2016-11-17 2021-03-24 trinamiX GmbH Detector for optically detecting at least one object
JP7204667B2 (ja) 2017-04-20 2023-01-16 トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 光検出器
JP7237024B2 (ja) 2017-06-26 2023-03-10 トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 少なくとも１つの物体の位置を決定するための検出器
JP7141313B2 (ja) * 2018-11-06 2022-09-22 Dmg森精機株式会社 変位検出装置
CN111721210B (zh) * 2020-06-19 2021-11-12 深圳市汉森软件有限公司 变换逻辑光栅分辨率后的初始化方法、装置、设备及介质

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19633337A1 (de) * 1996-08-07 1998-02-12 Harry Prof Dr Ing Trumpold Positionsmeßsystem
DE102005029917A1 (de) * 2005-06-28 2007-01-04 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
CN101189488A (zh) * 2005-09-21 2008-05-28 松下电器产业株式会社 角度测定装置及方法
CN101308013A (zh) * 2007-05-16 2008-11-19 约翰尼斯海登海恩博士股份有限公司 位置测量装置
CN101364049A (zh) * 2007-06-21 2009-02-11 Asml荷兰有限公司 控制系统、光刻投影设备、控制方法和计算机程序产品
CN101796614A (zh) * 2008-02-08 2010-08-04 株式会社尼康 位置测量系统及位置测量方法、移动体装置、移动体驱动方法、曝光装置及曝光方法、图案形成装置、以及组件制造方法
US7858922B2 (en) * 2006-11-20 2010-12-28 Dr. Johannes Heidenhain Gmbh Position-measuring device
CN102364307A (zh) * 2010-06-17 2012-02-29 株式会社森精机制作所 位置检测装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08247790A (ja) * 1995-03-10 1996-09-27 Sefuto Kenkyusho:Kk 位置検出装置
JP4576014B2 (ja) * 1999-12-21 2010-11-04 オリンパス株式会社 光学式エンコーダー
CN1248058C (zh) * 2000-09-14 2006-03-29 约翰尼斯海登海恩博士股份有限公司 位置测量装置
US7102729B2 (en) * 2004-02-03 2006-09-05 Asml Netherlands B.V. Lithographic apparatus, measurement system, and device manufacturing method
JP4932284B2 (ja) * 2006-03-03 2012-05-16 株式会社ミツトヨ 光電式エンコーダ
JP4601006B2 (ja) 2006-09-29 2010-12-22 本田技研工業株式会社 エアクリーナ装置
JP2008108906A (ja) * 2006-10-25 2008-05-08 Canon Inc 位置決め装置
DE102007035345A1 (de) * 2006-11-20 2008-05-21 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US8174671B2 (en) * 2007-06-21 2012-05-08 Asml Netherlands B.V. Lithographic projection apparatus and method for controlling a support structure
KR20100041024A (ko) * 2008-10-13 2010-04-22 한국표준과학연구원 2차원 회절 격자를 이용한 6 자유도 측정 장치
JP4283878B2 (ja) 2008-10-24 2009-06-24 キヤノンアネルバ株式会社 マグネトロンスパッタリング装置
JP2010205867A (ja) * 2009-03-03 2010-09-16 Canon Inc 位置検出装置及び露光装置
KR101078781B1 (ko) * 2010-02-01 2011-11-01 주식회사 고영테크놀러지 3차원 형상 검사방법
JP5814339B2 (ja) * 2010-03-30 2015-11-17 ザイゴ コーポレーションＺｙｇｏ Ｃｏｒｐｏｒａｔｉｏｎ 干渉計エンコーダ・システム
JP5754971B2 (ja) * 2011-02-14 2015-07-29 キヤノン株式会社 形状測定装置及び形状測定方法
DE102012201393A1 (de) 2012-02-01 2013-08-01 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung mit mehreren Positionsmesseinrichtungen

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19633337A1 (de) * 1996-08-07 1998-02-12 Harry Prof Dr Ing Trumpold Positionsmeßsystem
DE102005029917A1 (de) * 2005-06-28 2007-01-04 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
CN101189488A (zh) * 2005-09-21 2008-05-28 松下电器产业株式会社 角度测定装置及方法
US7858922B2 (en) * 2006-11-20 2010-12-28 Dr. Johannes Heidenhain Gmbh Position-measuring device
CN101308013A (zh) * 2007-05-16 2008-11-19 约翰尼斯海登海恩博士股份有限公司 位置测量装置
CN101364049A (zh) * 2007-06-21 2009-02-11 Asml荷兰有限公司 控制系统、光刻投影设备、控制方法和计算机程序产品
CN101796614A (zh) * 2008-02-08 2010-08-04 株式会社尼康 位置测量系统及位置测量方法、移动体装置、移动体驱动方法、曝光装置及曝光方法、图案形成装置、以及组件制造方法
CN102364307A (zh) * 2010-06-17 2012-02-29 株式会社森精机制作所 位置检测装置

Also Published As

Publication number Publication date
CN103322910A (zh) 2013-09-25
JP2013195432A (ja) 2013-09-30
DE102012204572A1 (de) 2013-09-26
JP6278605B2 (ja) 2018-02-14
US9389065B2 (en) 2016-07-12
EP2642254B1 (de) 2015-11-25
EP2642254A2 (de) 2013-09-25
KR20130108121A (ko) 2013-10-02
EP2642254A3 (de) 2015-04-15
US20130235390A1 (en) 2013-09-12
KR101864770B1 (ko) 2018-06-05

Similar Documents

Publication Publication Date Title
CN103322910B (zh) 位置测量设备和具有这种位置测量设备的装置
TWI784265B (zh) 位移測量裝置、位移測量方法及光刻設備
Gao et al. Precision measurement of two-axis positions and tilt motions using a surface encoder
US20180202796A1 (en) Measuring device and method for measuring at least one length measurand
JP6485992B2 (ja) 複数の位置測定装置を備えた装置
JP2010281635A (ja) 力覚センサ
JP6329456B2 (ja) 光学式位置測定装置
CN103309177A (zh) 一种光刻机工件台系统
CN103884270B (zh) 圆光栅安装时产生二维微小角度的测量装置及方法
Gao et al. A dual-mode surface encoder for position measurement
CN101701803B (zh) 双正交衍射光栅计量系统及其构成的共基面扫描工作台
CN107017179B (zh) 具有位置测量装置的x-y工作台
US9291481B2 (en) Optical position-measuring device
JP2017133892A (ja) 回転角度検出装置および回転角度検出方法
CN103246172B (zh) 具有位置测量装置的多个扫描单元的装置
JP2007522668A (ja) 製造物の位置決めシステム
CN108180844A (zh) 一种基于双频激光干涉原理的多自由度精确位移监测系统
JP5606039B2 (ja) ステージ装置及び波面収差測定装置
JP2022135679A5 (https=)
JP7361166B2 (ja) 多軸レーザ干渉測長器、及び、変位検出方法
CN113280731B (zh) 光学位置测量装置
CN110388875B (zh) 能提高测量范围的微纳米三维接触式测量探头及控制方法
JP2014098619A (ja) リニアエンコーダ及びワークの加工方法
JP5868058B2 (ja) 位置計測装置、光学部品の製造方法、および型の製造方法
EP2754992A1 (en) Optical profilometer

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
CB02 Change of applicant information

Address after: German Te Rauen Rohit

Applicant after: John Nei Si Heidenhain doctor company limited

Address before: German Te Rauen Rohit

Applicant before: Dr. Johannes Heidenhain GmbH

CB02 Change of applicant information
COR Change of bibliographic data

Free format text: CORRECT: APPLICANT; FROM: DR. JOHANNES HEIDENHAIN GMBH TO: HEIDENHAIN GMBH. DOCTOR JOHANNES

C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant