KR101864770B1 - 위치 측정 장치 및 이러한 위치 측정 장치를 포함하는 시스템 - Google Patents

위치 측정 장치 및 이러한 위치 측정 장치를 포함하는 시스템 Download PDF

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KR101864770B1
KR101864770B1 KR1020130025270A KR20130025270A KR101864770B1 KR 101864770 B1 KR101864770 B1 KR 101864770B1 KR 1020130025270 A KR1020130025270 A KR 1020130025270A KR 20130025270 A KR20130025270 A KR 20130025270A KR 101864770 B1 KR101864770 B1 KR 101864770B1
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South Korea
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measurement
measuring device
position measuring
along
region
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KR20130108121A (ko
Inventor
볼프강 독터. 홀자프펠
외르크 독터. 드레셔
마르쿠스 독터. 마이스너
랄프 독터. 요르거
베른하르트 독터. 무쉬
토마스 칼버러
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덕터 요한네스 하이덴하인 게엠베하
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
    • G01D2205/90—Two-dimensional encoders, i.e. having one or two codes extending in two directions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
KR1020130025270A 2012-03-22 2013-03-08 위치 측정 장치 및 이러한 위치 측정 장치를 포함하는 시스템 Active KR101864770B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012204572A DE102012204572A1 (de) 2012-03-22 2012-03-22 Positionsmesseinrichtung und Anordnung mit einer derartigen Positionsmesseinrichtung
DE102012204572.4 2012-03-22

Publications (2)

Publication Number Publication Date
KR20130108121A KR20130108121A (ko) 2013-10-02
KR101864770B1 true KR101864770B1 (ko) 2018-06-05

Family

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KR1020130025270A Active KR101864770B1 (ko) 2012-03-22 2013-03-08 위치 측정 장치 및 이러한 위치 측정 장치를 포함하는 시스템

Country Status (6)

Country Link
US (1) US9389065B2 (https=)
EP (1) EP2642254B1 (https=)
JP (1) JP6278605B2 (https=)
KR (1) KR101864770B1 (https=)
CN (1) CN103322910B (https=)
DE (1) DE102012204572A1 (https=)

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US9389315B2 (en) 2012-12-19 2016-07-12 Basf Se Detector comprising a transversal optical sensor for detecting a transversal position of a light beam from an object and a longitudinal optical sensor sensing a beam cross-section of the light beam in a sensor region
EP3008485A1 (en) 2013-06-13 2016-04-20 Basf Se Detector for optically detecting at least one object
EP3008421A1 (en) 2013-06-13 2016-04-20 Basf Se Detector for optically detecting an orientation of at least one object
WO2015024870A1 (en) 2013-08-19 2015-02-26 Basf Se Detector for determining a position of at least one object
EP3036503B1 (en) 2013-08-19 2019-08-07 Basf Se Optical detector
CN106662636B (zh) 2014-07-08 2020-12-25 巴斯夫欧洲公司 用于确定至少一个对象的位置的检测器
WO2016051323A1 (en) * 2014-09-29 2016-04-07 Basf Se Detector for optically determining a position of at least one object
US11125880B2 (en) 2014-12-09 2021-09-21 Basf Se Optical detector
JP6841769B2 (ja) 2015-01-30 2021-03-10 トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 少なくとも１個の物体を光学的に検出する検出器
EP3325917B1 (en) 2015-07-17 2020-02-26 trinamiX GmbH Detector for optically detecting at least one object
KR102539263B1 (ko) 2015-09-14 2023-06-05 트리나미엑스 게엠베하 적어도 하나의 물체의 적어도 하나의 이미지를 기록하는 카메라
JP2019523562A (ja) 2016-07-29 2019-08-22 トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 光学的検出のための光センサおよび検出器
EP3532864B1 (en) 2016-10-25 2024-08-28 trinamiX GmbH Detector for an optical detection of at least one object
CN109923372B (zh) 2016-10-25 2021-12-21 特里纳米克斯股份有限公司 采用集成滤波器的红外光学检测器
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CN110770555A (zh) 2017-04-20 2020-02-07 特里纳米克斯股份有限公司 光学检测器
EP3645965B1 (en) 2017-06-26 2022-04-27 trinamiX GmbH Detector for determining a position of at least one object
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CN111721210B (zh) * 2020-06-19 2021-11-12 深圳市汉森软件有限公司 变换逻辑光栅分辨率后的初始化方法、装置、设备及介质

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JP2009068112A (ja) 2008-10-24 2009-04-02 Canon Anelva Corp マグネトロンスパッタリング装置

Also Published As

Publication number Publication date
KR20130108121A (ko) 2013-10-02
US9389065B2 (en) 2016-07-12
US20130235390A1 (en) 2013-09-12
EP2642254A2 (de) 2013-09-25
EP2642254B1 (de) 2015-11-25
DE102012204572A1 (de) 2013-09-26
JP6278605B2 (ja) 2018-02-14
CN103322910B (zh) 2017-10-27
CN103322910A (zh) 2013-09-25
EP2642254A3 (de) 2015-04-15
JP2013195432A (ja) 2013-09-30

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