JP2013195432A5 - - Google Patents

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Publication number
JP2013195432A5
JP2013195432A5 JP2013056864A JP2013056864A JP2013195432A5 JP 2013195432 A5 JP2013195432 A5 JP 2013195432A5 JP 2013056864 A JP2013056864 A JP 2013056864A JP 2013056864 A JP2013056864 A JP 2013056864A JP 2013195432 A5 JP2013195432 A5 JP 2013195432A5
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JP
Japan
Prior art keywords
track
region
measuring device
position measuring
extending
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JP2013056864A
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English (en)
Japanese (ja)
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JP6278605B2 (ja
JP2013195432A (ja
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Priority claimed from DE102012204572A external-priority patent/DE102012204572A1/de
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Publication of JP2013195432A publication Critical patent/JP2013195432A/ja
Publication of JP2013195432A5 publication Critical patent/JP2013195432A5/ja
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Publication of JP6278605B2 publication Critical patent/JP6278605B2/ja
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JP2013056864A 2012-03-22 2013-03-19 位置測定装置とこのような位置測定装置を備えた構造体 Active JP6278605B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012204572A DE102012204572A1 (de) 2012-03-22 2012-03-22 Positionsmesseinrichtung und Anordnung mit einer derartigen Positionsmesseinrichtung
DE102012204572.4 2012-03-22

Publications (3)

Publication Number Publication Date
JP2013195432A JP2013195432A (ja) 2013-09-30
JP2013195432A5 true JP2013195432A5 (https=) 2016-01-07
JP6278605B2 JP6278605B2 (ja) 2018-02-14

Family

ID=47827024

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013056864A Active JP6278605B2 (ja) 2012-03-22 2013-03-19 位置測定装置とこのような位置測定装置を備えた構造体

Country Status (6)

Country Link
US (1) US9389065B2 (https=)
EP (1) EP2642254B1 (https=)
JP (1) JP6278605B2 (https=)
KR (1) KR101864770B1 (https=)
CN (1) CN103322910B (https=)
DE (1) DE102012204572A1 (https=)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9389315B2 (en) 2012-12-19 2016-07-12 Basf Se Detector comprising a transversal optical sensor for detecting a transversal position of a light beam from an object and a longitudinal optical sensor sensing a beam cross-section of the light beam in a sensor region
EP3008485A1 (en) 2013-06-13 2016-04-20 Basf Se Detector for optically detecting at least one object
EP3008421A1 (en) 2013-06-13 2016-04-20 Basf Se Detector for optically detecting an orientation of at least one object
WO2015024870A1 (en) 2013-08-19 2015-02-26 Basf Se Detector for determining a position of at least one object
EP3036503B1 (en) 2013-08-19 2019-08-07 Basf Se Optical detector
CN106662636B (zh) 2014-07-08 2020-12-25 巴斯夫欧洲公司 用于确定至少一个对象的位置的检测器
WO2016051323A1 (en) * 2014-09-29 2016-04-07 Basf Se Detector for optically determining a position of at least one object
US11125880B2 (en) 2014-12-09 2021-09-21 Basf Se Optical detector
JP6841769B2 (ja) 2015-01-30 2021-03-10 トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 少なくとも１個の物体を光学的に検出する検出器
EP3325917B1 (en) 2015-07-17 2020-02-26 trinamiX GmbH Detector for optically detecting at least one object
KR102539263B1 (ko) 2015-09-14 2023-06-05 트리나미엑스 게엠베하 적어도 하나의 물체의 적어도 하나의 이미지를 기록하는 카메라
JP2019523562A (ja) 2016-07-29 2019-08-22 トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 光学的検出のための光センサおよび検出器
EP3532864B1 (en) 2016-10-25 2024-08-28 trinamiX GmbH Detector for an optical detection of at least one object
CN109923372B (zh) 2016-10-25 2021-12-21 特里纳米克斯股份有限公司 采用集成滤波器的红外光学检测器
US11860292B2 (en) 2016-11-17 2024-01-02 Trinamix Gmbh Detector and methods for authenticating at least one object
CN109964144B (zh) 2016-11-17 2023-07-18 特里纳米克斯股份有限公司 用于光学探测至少一个对象的检测器
CN110770555A (zh) 2017-04-20 2020-02-07 特里纳米克斯股份有限公司 光学检测器
EP3645965B1 (en) 2017-06-26 2022-04-27 trinamiX GmbH Detector for determining a position of at least one object
JP7141313B2 (ja) * 2018-11-06 2022-09-22 Dmg森精機株式会社 変位検出装置
CN111721210B (zh) * 2020-06-19 2021-11-12 深圳市汉森软件有限公司 变换逻辑光栅分辨率后的初始化方法、装置、设备及介质

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JPH08247790A (ja) * 1995-03-10 1996-09-27 Sefuto Kenkyusho:Kk 位置検出装置
DE19633337A1 (de) * 1996-08-07 1998-02-12 Harry Prof Dr Ing Trumpold Positionsmeßsystem
JP4576014B2 (ja) * 1999-12-21 2010-11-04 オリンパス株式会社 光学式エンコーダー
EP1319170B1 (de) * 2000-09-14 2005-03-09 Dr. Johannes Heidenhain GmbH Positionsmesseinrichtung
US7102729B2 (en) * 2004-02-03 2006-09-05 Asml Netherlands B.V. Lithographic apparatus, measurement system, and device manufacturing method
DE102005029917A1 (de) * 2005-06-28 2007-01-04 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US7821626B2 (en) * 2005-09-21 2010-10-26 Panasonic Corporation Angle measuring device and method
JP4932284B2 (ja) * 2006-03-03 2012-05-16 株式会社ミツトヨ 光電式エンコーダ
JP4601006B2 (ja) * 2006-09-29 2010-12-22 本田技研工業株式会社 エアクリーナ装置
JP2008108906A (ja) * 2006-10-25 2008-05-08 Canon Inc 位置決め装置
DE102007035345A1 (de) 2006-11-20 2008-05-21 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US7858922B2 (en) * 2006-11-20 2010-12-28 Dr. Johannes Heidenhain Gmbh Position-measuring device
DE102008008873A1 (de) * 2007-05-16 2008-11-20 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US8174671B2 (en) * 2007-06-21 2012-05-08 Asml Netherlands B.V. Lithographic projection apparatus and method for controlling a support structure
US7804579B2 (en) * 2007-06-21 2010-09-28 Asml Netherlands B.V. Control system, lithographic projection apparatus, method of controlling a support structure, and a computer program product
WO2009098891A1 (ja) * 2008-02-08 2009-08-13 Nikon Corporation 位置計測システム及び位置計測方法、移動体装置、移動体駆動方法、露光装置及び露光方法、パターン形成装置、並びにデバイス製造方法
KR20100041024A (ko) * 2008-10-13 2010-04-22 한국표준과학연구원 2차원 회절 격자를 이용한 6 자유도 측정 장치
JP4283878B2 (ja) * 2008-10-24 2009-06-24 キヤノンアネルバ株式会社 マグネトロンスパッタリング装置
JP2010205867A (ja) * 2009-03-03 2010-09-16 Canon Inc 位置検出装置及び露光装置
KR101078781B1 (ko) * 2010-02-01 2011-11-01 주식회사 고영테크놀러지 3차원 형상 검사방법
EP2553401B1 (en) * 2010-03-30 2015-09-02 Zygo Corporation Interferometric encoder systems
JP5656467B2 (ja) * 2010-06-17 2015-01-21 Dmg森精機株式会社 位置検出装置
JP5754971B2 (ja) * 2011-02-14 2015-07-29 キヤノン株式会社 形状測定装置及び形状測定方法
DE102012201393A1 (de) 2012-02-01 2013-08-01 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung und Anordnung mit mehreren Positionsmesseinrichtungen

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