JP6254815B2 - 流量制御弁及びこれを用いた流量制御装置 - Google Patents

流量制御弁及びこれを用いた流量制御装置 Download PDF

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Publication number
JP6254815B2
JP6254815B2 JP2013213919A JP2013213919A JP6254815B2 JP 6254815 B2 JP6254815 B2 JP 6254815B2 JP 2013213919 A JP2013213919 A JP 2013213919A JP 2013213919 A JP2013213919 A JP 2013213919A JP 6254815 B2 JP6254815 B2 JP 6254815B2
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JP
Japan
Prior art keywords
control valve
chamber
flow rate
throttle
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2013213919A
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English (en)
Japanese (ja)
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JP2015076055A (ja
JP2015076055A5 (enExample
Inventor
笹尾　起美仁
起美仁 笹尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advance Denki Kogyo KK
Original Assignee
Advance Denki Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advance Denki Kogyo KK filed Critical Advance Denki Kogyo KK
Priority to JP2013213919A priority Critical patent/JP6254815B2/ja
Priority to TW103126578A priority patent/TWI644048B/zh
Priority to US14/458,490 priority patent/US9323251B2/en
Priority to KR1020140111547A priority patent/KR102223354B1/ko
Publication of JP2015076055A publication Critical patent/JP2015076055A/ja
Publication of JP2015076055A5 publication Critical patent/JP2015076055A5/ja
Application granted granted Critical
Publication of JP6254815B2 publication Critical patent/JP6254815B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/01—Control of flow without auxiliary power
    • G05D7/0106—Control of flow without auxiliary power the sensing element being a flexible member, e.g. bellows, diaphragm, capsule
    • G05D7/012—Control of flow without auxiliary power the sensing element being a flexible member, e.g. bellows, diaphragm, capsule the sensing element being deformable and acting as a valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7781—With separate connected fluid reactor surface
    • Y10T137/7784—Responsive to change in rate of fluid flow
    • Y10T137/7787—Expansible chamber subject to differential pressures
    • Y10T137/7791—Pressures across flow line valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87917—Flow path with serial valves and/or closures
    • Y10T137/87981—Common actuator

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Safety Valves (AREA)
  • Fluid-Driven Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
JP2013213919A 2013-10-11 2013-10-11 流量制御弁及びこれを用いた流量制御装置 Expired - Fee Related JP6254815B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013213919A JP6254815B2 (ja) 2013-10-11 2013-10-11 流量制御弁及びこれを用いた流量制御装置
TW103126578A TWI644048B (zh) 2013-10-11 2014-08-04 流量控制閥及使用該控制閥之流量控制裝置
US14/458,490 US9323251B2 (en) 2013-10-11 2014-08-13 Flow control valve and flow control system using same
KR1020140111547A KR102223354B1 (ko) 2013-10-11 2014-08-26 유량 제어 밸브 및 이것을 사용한 유량 제어 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013213919A JP6254815B2 (ja) 2013-10-11 2013-10-11 流量制御弁及びこれを用いた流量制御装置

Publications (3)

Publication Number Publication Date
JP2015076055A JP2015076055A (ja) 2015-04-20
JP2015076055A5 JP2015076055A5 (enExample) 2016-11-10
JP6254815B2 true JP6254815B2 (ja) 2017-12-27

Family

ID=52808626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013213919A Expired - Fee Related JP6254815B2 (ja) 2013-10-11 2013-10-11 流量制御弁及びこれを用いた流量制御装置

Country Status (4)

Country Link
US (1) US9323251B2 (enExample)
JP (1) JP6254815B2 (enExample)
KR (1) KR102223354B1 (enExample)
TW (1) TWI644048B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101686565B1 (ko) * 2015-05-13 2016-12-28 세메스 주식회사 액 공급 유닛 및 이를 포함하는 기판 처리 장치
US10704425B2 (en) 2016-07-14 2020-07-07 General Electric Company Assembly for a gas turbine engine
KR102446114B1 (ko) * 2016-11-03 2022-09-22 아드반스 덴키 고교 가부시키가이샤 배압 제어 밸브
US11073846B2 (en) 2018-01-30 2021-07-27 Illinois Tool Works Inc. Mass flow controller with absolute and differential pressure transducer
TWI689678B (zh) * 2019-03-07 2020-04-01 台灣氣立股份有限公司 真空電控比例閥
DE202019103892U1 (de) * 2019-07-15 2020-10-16 Neoperl Gmbh Mengenreglereinheit und korrespondierende Verwendung
CN114196942B (zh) * 2021-11-29 2023-10-13 北京北方华创微电子装备有限公司 半导体工艺腔室

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2441048C3 (de) * 1974-08-27 1978-06-29 Robert Bosch Gmbh, 7000 Stuttgart Membranventil
US5329966A (en) * 1993-03-08 1994-07-19 Vici Metronics Incorporated Gas flow controller
JP3997535B2 (ja) 1998-08-31 2007-10-24 Ｓｍｃ株式会社 サックバックバルブ
JP3276936B2 (ja) * 1998-12-25 2002-04-22 アドバンス電気工業株式会社 流量コントロールバルブ
JP4022438B2 (ja) * 2001-12-20 2007-12-19 アドバンス電気工業株式会社 定流量弁及び定流量混合方法
JP2006010037A (ja) * 2004-06-29 2006-01-12 Smc Corp サックバックバルブ
JP2007102754A (ja) 2005-09-09 2007-04-19 Advance Denki Kogyo Kk 流量制御装置
US20070204913A1 (en) * 2006-03-01 2007-09-06 Asahi Organic Chemicals Industry Co., Ltd. Fluid mixing system
US20070204914A1 (en) * 2006-03-01 2007-09-06 Asahi Organic Chemicals Industry Co., Ltd. Fluid mixing system

Also Published As

Publication number Publication date
US9323251B2 (en) 2016-04-26
TWI644048B (zh) 2018-12-11
JP2015076055A (ja) 2015-04-20
KR20150042699A (ko) 2015-04-21
TW201520457A (zh) 2015-06-01
KR102223354B1 (ko) 2021-03-05
US20150101686A1 (en) 2015-04-16

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