TWI644048B - 流量控制閥及使用該控制閥之流量控制裝置 - Google Patents
流量控制閥及使用該控制閥之流量控制裝置 Download PDFInfo
- Publication number
- TWI644048B TWI644048B TW103126578A TW103126578A TWI644048B TW I644048 B TWI644048 B TW I644048B TW 103126578 A TW103126578 A TW 103126578A TW 103126578 A TW103126578 A TW 103126578A TW I644048 B TWI644048 B TW I644048B
- Authority
- TW
- Taiwan
- Prior art keywords
- control valve
- flow rate
- chamber
- throttle
- diaphragm
- Prior art date
Links
- 239000012530 fluid Substances 0.000 claims abstract description 159
- 230000005540 biological transmission Effects 0.000 claims abstract description 38
- 230000033001 locomotion Effects 0.000 claims description 22
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- 230000008859 change Effects 0.000 abstract description 19
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- 238000000034 method Methods 0.000 description 13
- 238000004140 cleaning Methods 0.000 description 12
- 239000007789 gas Substances 0.000 description 11
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 10
- 238000011282 treatment Methods 0.000 description 10
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 9
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- 230000003749 cleanliness Effects 0.000 description 8
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 230000001276 controlling effect Effects 0.000 description 7
- 238000007789 sealing Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
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- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
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- 229920005989 resin Polymers 0.000 description 4
- VHUUQVKOLVNVRT-UHFFFAOYSA-N Ammonium hydroxide Chemical compound [NH4+].[OH-] VHUUQVKOLVNVRT-UHFFFAOYSA-N 0.000 description 3
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- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
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- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 2
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- 238000005406 washing Methods 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
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- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
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- 229910001220 stainless steel Inorganic materials 0.000 description 1
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Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/01—Control of flow without auxiliary power
- G05D7/0106—Control of flow without auxiliary power the sensing element being a flexible member, e.g. bellows, diaphragm, capsule
- G05D7/012—Control of flow without auxiliary power the sensing element being a flexible member, e.g. bellows, diaphragm, capsule the sensing element being deformable and acting as a valve
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7781—With separate connected fluid reactor surface
- Y10T137/7784—Responsive to change in rate of fluid flow
- Y10T137/7787—Expansible chamber subject to differential pressures
- Y10T137/7791—Pressures across flow line valve
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87917—Flow path with serial valves and/or closures
- Y10T137/87981—Common actuator
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Flow Control (AREA)
- Safety Valves (AREA)
- Fluid-Driven Valves (AREA)
- Electrically Driven Valve-Operating Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013213919A JP6254815B2 (ja) | 2013-10-11 | 2013-10-11 | 流量制御弁及びこれを用いた流量制御装置 |
| JP2013-213919 | 2013-10-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201520457A TW201520457A (zh) | 2015-06-01 |
| TWI644048B true TWI644048B (zh) | 2018-12-11 |
Family
ID=52808626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW103126578A TWI644048B (zh) | 2013-10-11 | 2014-08-04 | 流量控制閥及使用該控制閥之流量控制裝置 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9323251B2 (enExample) |
| JP (1) | JP6254815B2 (enExample) |
| KR (1) | KR102223354B1 (enExample) |
| TW (1) | TWI644048B (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI689678B (zh) * | 2019-03-07 | 2020-04-01 | 台灣氣立股份有限公司 | 真空電控比例閥 |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101686565B1 (ko) * | 2015-05-13 | 2016-12-28 | 세메스 주식회사 | 액 공급 유닛 및 이를 포함하는 기판 처리 장치 |
| US10704425B2 (en) | 2016-07-14 | 2020-07-07 | General Electric Company | Assembly for a gas turbine engine |
| KR102446114B1 (ko) * | 2016-11-03 | 2022-09-22 | 아드반스 덴키 고교 가부시키가이샤 | 배압 제어 밸브 |
| US11073846B2 (en) | 2018-01-30 | 2021-07-27 | Illinois Tool Works Inc. | Mass flow controller with absolute and differential pressure transducer |
| DE202019103892U1 (de) * | 2019-07-15 | 2020-10-16 | Neoperl Gmbh | Mengenreglereinheit und korrespondierende Verwendung |
| CN114196942B (zh) * | 2021-11-29 | 2023-10-13 | 北京北方华创微电子装备有限公司 | 半导体工艺腔室 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3999528A (en) * | 1974-08-27 | 1976-12-28 | Robert Bosch G.M.B.H. | Diaphragm valve |
| US5329966A (en) * | 1993-03-08 | 1994-07-19 | Vici Metronics Incorporated | Gas flow controller |
| TW200301339A (en) * | 2001-12-20 | 2003-07-01 | Advance Denki Kougyog Kabushik | Constant flow valve and constant flow mixing method |
| JP2007102754A (ja) * | 2005-09-09 | 2007-04-19 | Advance Denki Kogyo Kk | 流量制御装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3997535B2 (ja) | 1998-08-31 | 2007-10-24 | Ｓｍｃ株式会社 | サックバックバルブ |
| JP3276936B2 (ja) * | 1998-12-25 | 2002-04-22 | アドバンス電気工業株式会社 | 流量コントロールバルブ |
| JP2006010037A (ja) * | 2004-06-29 | 2006-01-12 | Smc Corp | サックバックバルブ |
| US20070204913A1 (en) * | 2006-03-01 | 2007-09-06 | Asahi Organic Chemicals Industry Co., Ltd. | Fluid mixing system |
| US20070204914A1 (en) * | 2006-03-01 | 2007-09-06 | Asahi Organic Chemicals Industry Co., Ltd. | Fluid mixing system |
-
2013
- 2013-10-11 JP JP2013213919A patent/JP6254815B2/ja not_active Expired - Fee Related
-
2014
- 2014-08-04 TW TW103126578A patent/TWI644048B/zh not_active IP Right Cessation
- 2014-08-13 US US14/458,490 patent/US9323251B2/en not_active Expired - Fee Related
- 2014-08-26 KR KR1020140111547A patent/KR102223354B1/ko not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3999528A (en) * | 1974-08-27 | 1976-12-28 | Robert Bosch G.M.B.H. | Diaphragm valve |
| US5329966A (en) * | 1993-03-08 | 1994-07-19 | Vici Metronics Incorporated | Gas flow controller |
| TW200301339A (en) * | 2001-12-20 | 2003-07-01 | Advance Denki Kougyog Kabushik | Constant flow valve and constant flow mixing method |
| JP2007102754A (ja) * | 2005-09-09 | 2007-04-19 | Advance Denki Kogyo Kk | 流量制御装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI689678B (zh) * | 2019-03-07 | 2020-04-01 | 台灣氣立股份有限公司 | 真空電控比例閥 |
Also Published As
| Publication number | Publication date |
|---|---|
| US9323251B2 (en) | 2016-04-26 |
| JP2015076055A (ja) | 2015-04-20 |
| KR20150042699A (ko) | 2015-04-21 |
| TW201520457A (zh) | 2015-06-01 |
| KR102223354B1 (ko) | 2021-03-05 |
| US20150101686A1 (en) | 2015-04-16 |
| JP6254815B2 (ja) | 2017-12-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |