TWI689678B - 真空電控比例閥 - Google Patents

真空電控比例閥 Download PDF

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TWI689678B
TWI689678B TW108107535A TW108107535A TWI689678B TW I689678 B TWI689678 B TW I689678B TW 108107535 A TW108107535 A TW 108107535A TW 108107535 A TW108107535 A TW 108107535A TW I689678 B TWI689678 B TW I689678B
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vacuum
valve
channel
pressure
main
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TW108107535A
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TW202033905A (zh
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游平政
鄭志聖
陳郁澧
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台灣氣立股份有限公司
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Priority to TW108107535A priority Critical patent/TWI689678B/zh
Priority to US16/387,543 priority patent/US10704701B1/en
Priority to JP2019001415U priority patent/JP3222008U/ja
Priority to DE102019110427.0A priority patent/DE102019110427B4/de
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K17/00Safety valves; Equalising valves, e.g. pressure relief valves
    • F16K17/02Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
    • F16K17/04Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side spring-loaded
    • F16K17/048Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side spring-loaded combined with other safety valves, or with pressure control devices
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32Details
    • F16K1/34Cutting-off parts, e.g. valve members, seats
    • F16K1/44Details of seats or valve members of double-seat valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32Details
    • F16K1/52Means for additional adjustment of the rate of flow
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32Details
    • F16K1/54Arrangements for modifying the way in which the rate of flow varies during the actuation of the valve
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/02Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
    • F16K11/04Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only lift valves
    • F16K11/044Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only lift valves with movable valve members positioned between valve seats
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K15/00Check valves
    • F16K15/18Check valves with actuating mechanism; Combined check valves and actuated valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K15/00Check valves
    • F16K15/18Check valves with actuating mechanism; Combined check valves and actuated valves
    • F16K15/182Check valves with actuating mechanism; Combined check valves and actuated valves with actuating mechanism
    • F16K15/1826Check valves which can be actuated by a pilot valve
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00Construction of housing; Use of materials therefor
    • F16K27/02Construction of housing; Use of materials therefor of lift valves
    • F16K27/0209Check valves or pivoted valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00Construction of housing; Use of materials therefor
    • F16K27/02Construction of housing; Use of materials therefor of lift valves
    • F16K27/0263Construction of housing; Use of materials therefor of lift valves multiple way valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00Construction of housing; Use of materials therefor
    • F16K27/02Construction of housing; Use of materials therefor of lift valves
    • F16K27/029Electromagnetically actuated valves
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/02Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F16K31/046Actuating devices; Operating means; Releasing devices electric; magnetic using a motor with electric means, e.g. electric switches, to control the motor or to control a clutch between the valve and the motor
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/12Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/126Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00Control of fluid pressure
    • G05D16/024Controlling the inlet pressure, e.g. back-pressure regulator
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00Control of fluid pressure
    • G05D16/20Control of fluid pressure characterised by the use of electric means
    • G05D16/2093Control of fluid pressure characterised by the use of electric means with combination of electric and non-electric auxiliary power
    • G05D16/2095Control of fluid pressure characterised by the use of electric means with combination of electric and non-electric auxiliary power using membranes within the main valve
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00Circuits for servomotor systems
    • F15B2211/50Pressure control
    • F15B2211/505Pressure control characterised by the type of pressure control means
    • F15B2211/50509Pressure control characterised by the type of pressure control means the pressure control means controlling a pressure upstream of the pressure control means
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00Circuits for servomotor systems
    • F15B2211/50Pressure control
    • F15B2211/565Control of a downstream pressure
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00Control of fluid pressure
    • G05D16/20Control of fluid pressure characterised by the use of electric means
    • G05D16/2006Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00Control of fluid pressure
    • G05D16/20Control of fluid pressure characterised by the use of electric means
    • G05D16/2093Control of fluid pressure characterised by the use of electric means with combination of electric and non-electric auxiliary power
    • G05D16/2097Control of fluid pressure characterised by the use of electric means with combination of electric and non-electric auxiliary power using pistons within the main valve

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Electromagnetism (AREA)
  • Control Of Fluid Pressure (AREA)
  • Fluid-Driven Valves (AREA)
  • Magnetically Actuated Valves (AREA)

Abstract

一種真空電控比例閥,係由一閥座結合導引座所構成,該導引座上方連結有真空壓電磁閥、大氣壓電磁閥、及感測器,該導引座與閥座之間夾設有一主膜片而形成一真空壓力腔,該主膜片中央嵌設有配設一真空閥門組的一先導排氣直桿,且該閥座與該導引座之間設有供一次側壓力與二次側壓力流通的一主通道,該主通道另還設有引導通道及回授通道,而該真空壓力腔上方另配設有以該真空壓電磁閥與大氣壓電磁閥控制開關的一調整通道,而另有供大氣壓流通的一先導大氣通道設於該閥座內通連至該主膜片下方空間,而該先導排氣直桿位於該閥座上方設有第一真空破壞閥門,且該真空閥門組上方與該先導排氣直桿另設有第二真空破壞閥門,當一次側壓力通過該主通道產生二次側壓力至穩壓狀態後,透過大氣壓電磁閥配合調整通道輸入大氣壓力,能帶動第一真空破壞閥門與第二真空破壞閥門,分段進行真空壓力的強度調整及縮短其反應時間,且能讓真空氣壓管路能直進直出方式測試,達成具有節能及精密調整之目的。

Description

真空電控比例閥
本創作係關於一種真空電控比例閥,透過內部所設的先導排氣直桿與真空閥門組,進一步配合先導大氣通道導入大氣壓力,使先導排氣直桿得以兩階段配合調整真空強度,使其能達到具有節能及精密調整之目的。
以往,自動化設備領域所廣泛使用的真空電控比例閥,請參考如第11圖,通常具備有吸附物件的習用設定孔(91)、連接真空泵用的習用真空孔(92)、以及用來調整真空壓力的習用大氣孔(93),通常係由真空泵運作時,透過真空電控比例閥內部通路吸取習用設定孔(91)的壓力與流體流向習用真空孔(92)形成真空,如圖中的箭頭標示;而真空電控比例閥於測試過程時,作業人員須要經過長時間的累積經驗與反覆測試,才能製造出一個良好的真空電控比例閥,但真空電控比例閥結構內的迴路也相對複雜,讓測試用的真空氣壓管路與設備需以90度轉角方式進行連結,對於測試作業人員而言,無法透過以直進直出的組裝方式連接真空氣壓管路與設備進行測試時,將會耗費較多的時間與精力;目前習用的真空電控比例閥內部的迴路,若需針對內部氣壓迴路進行修改,則需要花費許多時間與金錢進行改良,雖能改變外部真空氣壓管路連接的方式,但還有各種零件的配合也需要逐一進行測試,其中若需要維持原 有真空調控的精細水準,勢必需重新設計相關真空調控的零件;是故,仍有許多可供改善之處。
本創作係為一種真空電控比例閥,其主要技術性目的,係利用先導排氣直桿於閥座內所設的第一真空破壞閥門、以及配合真空閥門組所設的第二真空破壞閥門,得以藉此減少真空電控比例閥內部結構的複雜迴路,且能透過第一真空破壞閥門與第二真空破壞閥門的啟閉,進而精密調整真空壓力之強度及縮短其反應時間。
本創作真空電控比例閥,其係由:一閥座之上方配設主膜片,利用結合導引座使該主膜片夾設其中形成一真空壓力腔,而主膜片上方設有一彈性元件,且主膜片中央嵌設有一先導排氣直桿,該先導排氣直桿還配設有一真空閥門組,該導引座上方更設有真空壓電磁閥、大氣壓電磁閥、及感測器,且另有調整通道通連至真空壓力腔上方,並以真空壓電磁閥與大氣壓電磁閥進行控制,而一先導大氣通道,設於閥座內通連至主膜片下方空間供大氣壓力流通用,另有一主通道設於閥座與導引座之間,此主通道能供一次側壓力與二次側壓力流通用,且主通道內另設有受真空壓電閥控制的一引導通道、以及連結該感測器的一回授通道;該先導排氣直桿位於閥座上方設有第一真空閥門,且真空閥門組上方與先導排氣直桿另設有第二真空閥門,當一次側壓力透過引導通道配合該真空壓電磁閥運作,經調整通道至真空壓力腔內產生一真空壓力,使主膜片向上連動先導排氣直桿,進而帶動真空閥門組位於下方的主閥門開啟,使一次側 壓力通過主閥門形成二次側壓力,用以達成真空吸附目的,直至主膜片向下位移回復至水平位置,連動先導排氣直桿使主閥門關閉後呈穩壓狀態;而大氣壓電磁閥開啟經調整通道導入外部大氣壓力,可施壓於主膜片向下位移,使該第一真空破壞閥門呈開啟狀態,能讓大氣壓力部分通過,用以降低真空吸附的強度,而當大氣壓電磁閥導入大氣壓力持續輸入時,將使第二真空破壞閥門開啟,使大氣壓力通過更多,能縮短降低真空吸附的反應時間,使其能達到節能及精密調整之目的。
(10):閥座
(101):引導通道
(102):回授通道
(11):主膜片
(111):彈性元件
(12):真空壓力腔
(121):調整通道
(122):先導大氣通道
(123):大氣通道
(20):先導排氣直桿
(201):第一真空破壞閥門
(202):第二真空破壞閥門
(203):主閥門
(204):限位凸掣
(21):真空閥門組
(22):凸型件
(23):彈簧
(30):導引座
(31):真空壓電磁閥
(32):大氣壓電磁閥
(321):大氣口
(33):感測器
(40):主通道
(P):控制迴路
(PR):電源
(PI):入力訊號
(PS):壓力表示
(PO):出力訊號
(PP):大氣壓力
(PT):真空壓力
(P1):一次側壓力
(P2):二次側壓力
(A):大氣孔
(O):設定孔
(V):真空孔
(91):習用設定孔
(92):習用真空孔
(93):習用大氣孔
[第1圖]係為本創作的立體圖。
[第2圖]係為本創作的另一視角的立體圖。
[第3圖]係為本創作之迴路示意圖。
[第4圖]係為本創作於準備狀態的結構示意圖。
[第5圖]係為本創作於工作狀態的結構示意圖。
[第6圖]係為本創作於穩壓狀態的結構示意圖。
[第7圖]係為本創作於第一段破真空狀態的結構示意圖。
[第8圖]係為本創作於第7圖的局部放大示意圖。
[第9圖]係為本創作於第二段破真空狀態的結構示意圖。
[第10圖]係為本創作於第9圖的局部放大示意圖。
[第11圖]係為習用結構的示意圖。
通常根據本創作,該最佳之可行之實施例,並配合圖式第1~4圖詳細說明後,俾增加對本創作之瞭解;本創作係一種真空電控比例閥,結構包含有:一閥座(10),上方結合有一導引座(30),該導引座(30)與閥座(10)間夾設有一主膜片(11)形成一真空壓力腔(12),該主膜片(11)上方設有一彈性元件(111),該彈性元件(111)係為一種彈簧,且主膜片(11)中央還嵌設有一先導排氣直桿(20),此先導排氣直桿(20)更配設有一真空閥門組(21),該真空閥門組(21)係由:兩凸型件(22)以凸面相對配合一彈簧(23)而組成,該凸型件(22)內部為貫通設計,能供該先導排氣直桿(20)配設其中,且先導排氣直桿(20)於側緣上下兩處各設有一限位凸掣(204),能藉以限制先導排氣直桿(20)於上下位移的行程;該導引座(30)上方更連結有一真空壓電磁閥(31)、一大氣壓電磁閥(32)、以及一感測器(33),且另有一調整通道(121)通連至該真空壓力腔(12)的上方,並透過真空壓電磁閥(31)與大氣壓電磁閥(32)進行開關的控制;一先導大氣通道(122),設於閥座(10)內通連至主膜片(11)下方空間,藉以供一大氣壓力(PP)流通;而一主通道(40),設於閥座(10)與導引座(30)之間,該主通道(40)能供一次側壓力(P1)與二次側壓力(P2)流通用,且主通道(40)內另設有受真空壓電磁閥(31)控制的一引導通道(101)、以及連結該感測器(33)的一回授通道(102);該先導排氣直桿(20)位於該閥座(10)上方設有一第一真空破壞閥門(201),且真空閥門組(21)上方與該先導排氣直桿(20)另設有一第二真空破壞閥(202),當一次側壓力(P1)透過引導通道(101)配合真空壓電磁閥(31)運作,經調整 通道(121)至真空壓力腔(12)內產生一真空壓力(PT),使主膜片(11)向上且連動先導排氣直桿(20),進而帶動真空閥門組(21)位於下方的一主閥門(203)開啟,使一次側壓力(P1)通過主閥門(203)形成二次側壓力(P2),用以達到真空吸附目的,直至該主膜片(11)向下位移回復至水平位置,且連動先導排氣直桿(20)使主閥門(203)關閉後呈穩壓狀態;而大氣壓電磁閥(32)開啟經調整通道(121)施壓於主膜片(11)向下位移時,該大氣壓力(PP)經先導大氣通道(122)至位於第一真空破壞閥門(201)呈開啟,能讓大氣壓力(PP)部分通過,用以降低真空吸附的強度,而當大氣壓力(PP)持續輸入時,將使第二真空破壞閥門(202)開啟,使大氣壓力(PP)通過更多,能縮短降低真空吸附的反應時間。
請參閱圖式第1~2圖,能見閥座(10)所設置的連結端,其分別用以吸附物件的一設定孔(O)、連接真空泵的一真空孔(V)、及調整大氣壓的一大氣孔(A),透過內部結構的設計,讓測試用的管線連結後,改由設定孔(O)直進至真空孔(V)直出,不需要以習用結構轉90度的特別方式進行測試,讓繁瑣重複測試工作的不便處能獲得改善;請參閱圖式第3~4圖,可見真空壓電磁閥(31)、大氣壓電磁閥(32)、以及感測器(33),其主要透過一控制迴路(P)經電源(PR)驅動後,設定好入力訊號(PI)、以及出力訊號(PO)後,透過控制迴路(P)的顯示相關壓力表示(PS),藉以驅動真空壓電磁閥(31)與大氣壓電磁閥(32),而感測器(33)主要係用以偵測二次側壓力(P2)的壓力,當超過或低於二次側壓力(P2)設定值時,用以將資訊反饋至控制迴路(P)進行真空壓電磁閥(31)和大氣壓電磁閥(32)之間的判別,並透過 控制迴路(P)驅動後續相關控制動作,此部分操控唯一般常用手段,故不再加以贅述;而圖式第4圖,係為本創作準備狀態,能見真空壓電磁閥(31)與大氣壓電磁閥(32)皆為未啟動狀態,而主通道(40)內的主閥門(203)呈關閉,而先導大氣通道(122)則有部分大氣壓力(PP)流通至主膜片(11)下方,但主膜片(11)受到上方彈性元件(111)的彈性預壓,使主膜片(11)保持為水平以下,可使大氣壓力(PP)經由第一真空破壞閥門(201)流通至二次側壓力(P2),此時二次側壓力(P2)等於大氣壓力(PP),此處描述水平係以主膜片(11)兩端為基準,再以主膜片(11)中央與兩端基準進行對比後的描述。
請參閱圖式第5圖所示,係為工作狀態,首先可見真空壓電磁閥(31)為開啟,透過調整通道(121)產生真空壓力(PT),使主膜片(11)向上位移至水平以上,該彈性元件(111)被主膜片(11)擠壓,而原本由先導大氣通道(122)流入的大氣壓力(PP),得以進入主膜片(11)下方的位置,藉以維持主膜片(11)目前水平以上的位置,而一次側壓力(P1)則經由引導通道(101)流至真空壓電磁閥(31)內,當前述主膜片(11)上方的真空壓力腔(12)產生真空壓力(PT)時,該主膜片(11)向上位移時,會帶動先導排氣直桿(20)、以及真空閥門組(21)位於下方的主閥門(203)開啟,一次側壓力(P1)通過主閥門(203),使其形成二次側壓力(P2),藉以達到真空吸附之目的。
請參閱圖式第6圖所示,係為穩壓狀態,當真空吸附目的達成後,感測器(33)會傳送相關資訊至控制迴路(P),進而關閉真空壓電磁閥(31),而位於真空壓力腔(12)和調整通道(121)內的真空壓力(PT)則保持穩定真空壓力,此時的彈性元件(111)也會和從先導大氣通道(122)進入的大氣壓力(PP)相互施壓於主膜 片(11),使主膜片(11)回復至水平,而相關的主閥門(203)也會因為該先導排氣直桿(20)位移帶動真空閥門組(21)而呈關閉,藉以維持整體的內部真空。
請參閱圖式第7~8圖所示,係為第一段破真空狀態,首先可見大氣壓電磁閥(32)開啟,從一大氣口(321)導入外部大氣壓力(PP)經調整通道(121)進入真空壓力腔(12)內,讓原本保持水平的主膜片(11)向下位移,逐漸的讓第一真空破壞閥門(201)開啟,讓先導大氣通道(122)內的大氣壓力(PP)得以順沿先導排氣直桿(20)向下通過第一真空破壞閥門(201),藉以進行內部真空的細微調整。
請參閱圖式第9~10圖所示,係為第二段破真空狀態,接續前述第一段破真空狀態,大氣壓電磁閥(32)開啟後,持續性從大氣口(321)導入大氣壓力(PP),使主膜片(11)持續向下位移時,該先導排氣直桿(20)的限位凸掣(204)將會推動第二真空破壞閥門(202)開啟,此時位於第二真空破壞閥門(202)下方的大氣通道(123)將會提供更多的大氣壓力(PP)進入,使內部真空的調整幅度得更為迅速,當主膜片(11)向下至該真空壓力腔(12)底部時,會將該先導大氣通道(122)進入的大氣壓力(PP)流量降至最小,同時也使大氣通道(123)進入的大氣壓力(PP)流量升到最大。
綜上所述,本創作真空電控比例閥,透過設計的先導大氣通道(122)和先導排氣直桿(20)加以配合,使外部空氣藉由第一真空破壞閥門(201)與第二真空破壞閥門(202),得以流入二次側壓力(P2),配合真空進行強度調整,讓調整的反應速度都能獲得改善,且更能簡化習用複雜通氣迴路所帶來的測試不便的問題。
(10):閥座
(101):引導通道
(102):回授通道
(11):主膜片
(111):彈性元件
(12):真空壓力腔
(121):調整通道
(122):先導大氣通道
(123):大氣通道
(20):先導排氣直桿
(201):第一真空破壞閥門
(202):第二真空破壞閥門
(203):主閥門
(204):限位凸掣
(21):真空閥門組
(22):凸型件
(23):彈簧
(30):導引座
(31):真空壓電磁閥
(32):大氣壓電磁閥
(321):大氣口
(33):感測器
(40):主通道
(P):控制迴路
(PR):電源
(PI):入力訊號
(PS):壓力表示
(PO):出力訊號
(P1):一次側壓力

Claims (3)

  1. 一種真空電控比例閥,其包含:一閥座(10),其上方結合一導引座(30),該導引座(30)與該閥座(10)之間夾設一主膜片(11)形成一真空壓力腔(12),該主膜片(11)上方設有一彈性元件(111),而該主膜片(11)中央嵌設有一先導排氣直桿(20),該先導排氣直桿(20)更配設有一真空閥門組(21),該導引座(30)上方更連結有一真空壓電磁閥(31)、一大氣壓電磁閥(32)、以及一感測器(33),且另有一調整通道(121)通連至該真空壓力腔(12)的上方,並以該真空壓電磁閥(31)與該大氣壓電磁閥(32)進行控制;一先導大氣通道(122),設於該閥座(10)內通連至該主膜片(11)下方空間,藉以供一大氣壓力(PP)流通;一主通道(40),設於該閥座(10)與該導引座(30)之間,該主通道(40)能供一次側壓力(P1)與二次側壓力(P2)流通用,且該主通道(40)內另設有受該真空壓電磁閥(31)控制的一引導通道(101)、以及連結該感測器(33)的一回授通道(102);其特徵在於:該先導排氣直桿(20)位於該閥座(10)上方設有一第一真空破壞閥門(201),且該真空閥門組(21)上方與該先導排氣直桿(20)另設有一第二真空破壞閥門(202),當該一次側壓力(P1)透過該引導通道(101)配合該真空壓電磁閥(31)運作,經該調整通道(121)至該真空壓力腔(12)內產生一真空壓力(PT),使該主膜片(11)向上連動該先導排氣直桿(20),進而帶動該真空閥門組(21)位於下方的一主閥門(203)開啟,使該一次側壓力(P1)通過該主閥門(203)形成該二次側壓力(P2),用以達成真空吸附目的,直至該主膜片(11)回復至水平位置,帶動該先導排氣直桿(20)使該主閥門(203)關閉後呈穩壓狀態;而該大氣壓電磁閥(32)開啟經該調整通道(121)施壓於該主膜片(11)向下位移時,該大氣壓力(PP)經該先導大氣通道(122) 至位於該第一真空破壞閥門(201)呈開啟狀態,能讓該大氣壓力(PP)部分通過,用以降低真空吸附的強度,而當該大氣壓力(PP)持續輸入時,將使該第二真空破壞閥門(202)開啟,使該大氣壓力(PP)通過更多,此時內部真空的調整幅度得更為迅速,能縮短降低真空吸附的反應時間。
  2. 依據申請專利範圍第1項所述之真空電控比例閥,其中該彈性元件(111)係為彈簧。
  3. 依據申請專利範圍第1項所述之真空電控比例閥,其中該真空閥門組(21)係由:兩凸型件(22)以凸面相對配合一彈簧(23)而組成,該凸型件(22)內部為貫通設計,能供該先導排氣直桿(20)配設其中,且該先導排氣直桿(20)於側緣上下兩處各設有一限位凸掣(204),能藉以限制該先導排氣直桿(20)於上下位移的行程。
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