KR102223354B1 - 유량 제어 밸브 및 이것을 사용한 유량 제어 장치 - Google Patents

유량 제어 밸브 및 이것을 사용한 유량 제어 장치 Download PDF

Info

Publication number
KR102223354B1
KR102223354B1 KR1020140111547A KR20140111547A KR102223354B1 KR 102223354 B1 KR102223354 B1 KR 102223354B1 KR 1020140111547 A KR1020140111547 A KR 1020140111547A KR 20140111547 A KR20140111547 A KR 20140111547A KR 102223354 B1 KR102223354 B1 KR 102223354B1
Authority
KR
South Korea
Prior art keywords
control valve
chamber
differential pressure
flow rate
movable part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020140111547A
Other languages
English (en)
Korean (ko)
Other versions
KR20150042699A (ko
Inventor
키미히토 사사오
Original Assignee
아드반스 덴키 고교 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 아드반스 덴키 고교 가부시키가이샤 filed Critical 아드반스 덴키 고교 가부시키가이샤
Publication of KR20150042699A publication Critical patent/KR20150042699A/ko
Application granted granted Critical
Publication of KR102223354B1 publication Critical patent/KR102223354B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/01—Control of flow without auxiliary power
    • G05D7/0106—Control of flow without auxiliary power the sensing element being a flexible member, e.g. bellows, diaphragm, capsule
    • G05D7/012—Control of flow without auxiliary power the sensing element being a flexible member, e.g. bellows, diaphragm, capsule the sensing element being deformable and acting as a valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7781—With separate connected fluid reactor surface
    • Y10T137/7784—Responsive to change in rate of fluid flow
    • Y10T137/7787—Expansible chamber subject to differential pressures
    • Y10T137/7791—Pressures across flow line valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87917—Flow path with serial valves and/or closures
    • Y10T137/87981—Common actuator

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Safety Valves (AREA)
  • Fluid-Driven Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
KR1020140111547A 2013-10-11 2014-08-26 유량 제어 밸브 및 이것을 사용한 유량 제어 장치 Expired - Fee Related KR102223354B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013213919A JP6254815B2 (ja) 2013-10-11 2013-10-11 流量制御弁及びこれを用いた流量制御装置
JPJP-P-2013-213919 2013-10-11

Publications (2)

Publication Number Publication Date
KR20150042699A KR20150042699A (ko) 2015-04-21
KR102223354B1 true KR102223354B1 (ko) 2021-03-05

Family

ID=52808626

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140111547A Expired - Fee Related KR102223354B1 (ko) 2013-10-11 2014-08-26 유량 제어 밸브 및 이것을 사용한 유량 제어 장치

Country Status (4)

Country Link
US (1) US9323251B2 (enExample)
JP (1) JP6254815B2 (enExample)
KR (1) KR102223354B1 (enExample)
TW (1) TWI644048B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101686565B1 (ko) * 2015-05-13 2016-12-28 세메스 주식회사 액 공급 유닛 및 이를 포함하는 기판 처리 장치
US10704425B2 (en) 2016-07-14 2020-07-07 General Electric Company Assembly for a gas turbine engine
KR102446114B1 (ko) * 2016-11-03 2022-09-22 아드반스 덴키 고교 가부시키가이샤 배압 제어 밸브
US11073846B2 (en) 2018-01-30 2021-07-27 Illinois Tool Works Inc. Mass flow controller with absolute and differential pressure transducer
TWI689678B (zh) * 2019-03-07 2020-04-01 台灣氣立股份有限公司 真空電控比例閥
DE202019103892U1 (de) * 2019-07-15 2020-10-16 Neoperl Gmbh Mengenreglereinheit und korrespondierende Verwendung
CN114196942B (zh) * 2021-11-29 2023-10-13 北京北方华创微电子装备有限公司 半导体工艺腔室

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3999528A (en) 1974-08-27 1976-12-28 Robert Bosch G.M.B.H. Diaphragm valve
JP2000074240A (ja) 1998-08-31 2000-03-14 Smc Corp サックバックバルブ
JP2007102754A (ja) 2005-09-09 2007-04-19 Advance Denki Kogyo Kk 流量制御装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5329966A (en) * 1993-03-08 1994-07-19 Vici Metronics Incorporated Gas flow controller
JP3276936B2 (ja) * 1998-12-25 2002-04-22 アドバンス電気工業株式会社 流量コントロールバルブ
JP4022438B2 (ja) * 2001-12-20 2007-12-19 アドバンス電気工業株式会社 定流量弁及び定流量混合方法
JP2006010037A (ja) * 2004-06-29 2006-01-12 Smc Corp サックバックバルブ
US20070204913A1 (en) * 2006-03-01 2007-09-06 Asahi Organic Chemicals Industry Co., Ltd. Fluid mixing system
US20070204914A1 (en) * 2006-03-01 2007-09-06 Asahi Organic Chemicals Industry Co., Ltd. Fluid mixing system

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3999528A (en) 1974-08-27 1976-12-28 Robert Bosch G.M.B.H. Diaphragm valve
JP2000074240A (ja) 1998-08-31 2000-03-14 Smc Corp サックバックバルブ
JP2007102754A (ja) 2005-09-09 2007-04-19 Advance Denki Kogyo Kk 流量制御装置

Also Published As

Publication number Publication date
US9323251B2 (en) 2016-04-26
TWI644048B (zh) 2018-12-11
JP2015076055A (ja) 2015-04-20
KR20150042699A (ko) 2015-04-21
TW201520457A (zh) 2015-06-01
US20150101686A1 (en) 2015-04-16
JP6254815B2 (ja) 2017-12-27

Similar Documents

Publication Publication Date Title
JP6254815B2 (ja) 流量制御弁及びこれを用いた流量制御装置
KR20150069510A (ko) 유량 제어 밸브 및 이것을 사용한 유량 제어 장치
US20110044125A1 (en) Fluid mixing system
US11112014B2 (en) Two-way valve for flow rate control and temperature control device using the same
JP3168588U (ja) 流体供給量調節装置
JP4406292B2 (ja) 流体通路のウォータハンマーレス開放方法及びこれを用いたウォータハンマーレス開放装置
US20090283155A1 (en) Fluid control system
US20150323081A1 (en) Shut-off valve
US20110030815A1 (en) Fluid mixing system
CN111022737A (zh) 流量控制方法以及比例控制阀
CN112359423A (zh) 压力控制装置及半导体加工设备
JP6254863B2 (ja) 流量制御弁及びこれを用いた流量制御装置
US20070204912A1 (en) Fluid mixing system
JP6276620B2 (ja) 流量制御弁及びこれを用いた流量制御装置
CN110500429B (zh) 流量控制阀及反应腔室压力控制装置
JP2015172813A (ja) 流量制御弁及びこれを用いた流量制御装置
JP6195759B2 (ja) 定流量弁
JP6166618B2 (ja) 定流量弁
JP2007058336A (ja) 流体制御装置
JP2017141896A (ja) バルブ及びこれを用いたマニホールドバルブ
JP2022073596A (ja) 定流量弁
JP4854350B2 (ja) 流体混合装置
JP2022137853A (ja) 電動弁及び流体制御装置
JP2007175689A (ja) 流体混合装置

Legal Events

Date Code Title Description
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

D12-X000 Request for substantive examination rejected

St.27 status event code: A-1-2-D10-D12-exm-X000

PE0801 Dismissal of amendment

St.27 status event code: A-2-2-P10-P12-nap-PE0801

D13-X000 Search requested

St.27 status event code: A-1-2-D10-D13-srh-X000

D14-X000 Search report completed

St.27 status event code: A-1-2-D10-D14-srh-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20250227

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

H13 Ip right lapsed

Free format text: ST27 STATUS EVENT CODE: N-4-6-H10-H13-OTH-PC1903 (AS PROVIDED BY THE NATIONAL OFFICE); TERMINATION CATEGORY : DEFAULT_OF_REGISTRATION_FEE

Effective date: 20250227

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20250227

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000